Japanese Journal of Applied Physics

Article	Citations
Compact empirical tight-binding models for the conduction band of 4H-SiC considering the floating nature of electronic states	114
Feature correlation method for image reconstruction evaluation in under-sampled scanning probe microscopy	96
Characterization of larger-single-Lorentzian noise deviated from 1/f characteristics detected by a power-spectral-density-integration method	82
Controlling the structure and composition of SnO2-based thin film with reactive sputtering to improve the sensitivity of semiconductor CO2 sensor	51
Superior device characteristics of needle-contact Ge Schottky barrier diodes for low-power applications	50
Analysis of multimode radiation from 0.4 THz backward wave oscillator	49
Thermochromism and thermal crystal structure evolution of YIn0.9Mn0.1O3	48
Pressure-controlled magnetic soft actuator with local stiffness modulation via tapered tube buckling	37
Thermal stability enhancement in perovskite solar cells using W-doped ZnO/single crystalline anatase TiO2 nanoparticle bilayer	36
Neural activity analysis of depressive disorder model mice using the Toyohashi probe	36
Comprehensive investigations on defects’ stability caused lateral charge loss in Ti-doped 3D NAND	34
Comparison of spin Hall angles measured by spin accumulation, spin–orbit torque, and spin Hall magnetoresistance	32
Extension of measurement range in optical correlation-domain reflectometry based on temporal gating scheme	32
Multilayered inverted polymer-based light emitting diodes fabricated by meniscus coating and transfer-printing technique	30
Effect of oxygen content in CuO x nanofilms on chloride ion detection for ion sensor applications	30
A high-efficiency and wide-load current range LDO with dynamic loop gain control technique	28
Buried annealed proton-exchanged waveguide in periodically-poled MgO:LiTaO3 fabricated by surface-activated bonding for high-power wavelength conversion	27
Influence of unique behaviors in an atomic switch operation on hardware-based deep learning	26
Piezoelectric MEMS-based physical reservoir computing system without time-delayed feedback	26
Formation of condensed CHF 3 layer on SiO 2 film at cryogenic temperatures for etching process app	26
Impact of substrate heating during Al deposition and post annealing on surface morphology, Al crystallinity, and Ge segregation in Al/Ge(111) structure	26
Comprehensive analysis of determining factors of the effective work function of TiAlC/TiN metal gates for advanced gate-all-around CMOS integration	26
Heterogeneously integrated IGZTO–CMOS neuromorphic CIM achieving 34.8 TOPS W −1 and 87.7 fJ write energy	25
Effect of opposite phase AC voltage application using dual power supplies on thrust and induced flow of plasma actuator	24
Blood flow visualization using a ConvLSTM-based deep learning clutter filter	24

Vicinal GaAs(111)B substrates suppress rotational domains in InSe van der Waals epitaxy	24
Characterization of perovskite films prepared with different PbI2 deposition rates	23
Evaluation of optical constants in oxide thin films using machine learning	23
Si-based mid-infrared photodetector with dynamic Schottky barrier height modulation applicable for synchronous detection	23
Magnetic and electric properties of spinel oxide CoV2O4 (001) films	22
The improvement of Schottky barrier diodes fabricated only by B ion implantation doping accomplished by refinement of the electrode structure	22
Bubble cavitation generation near blood vessel walls using amplitude-modulated wave irradiation	22
Comparative study of mechanical stress-induced flat-band voltage change in MOS capacitor and threshold voltage change in MOSFET fabricated on 4H-SiC (0001)	21
X-ray diffuse scattering and polar nanoregion of a relaxor ferroelectric under electric field	20
Two-dimensional analytical model for fully depleted SOI MOSFETs with vertical trapezoid doping including effects of the interface trapped charges	20
Reaction kinetics studies for phenol degradation under the impact of different gas bubbles and pH using gas–liquid discharge plasma	20
Theoretical consideration for challenges associated with cell scaling of charge trap memory: reduction in electron capture efficiency and increase in blocking dielectric leakage	20
Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography	20
Unipolar polarization switching and high-endurance memory operation of HZO/Si anti-ferroelectric FETs	20
Non-contact identification of moisture content of fabric based on analysis of broadband acoustic signals using multiple-frequency air ultrasonic transducer system	20
Breakdown voltage enhancement of p-GaN/AlGaN/GaN diode by controlling Mg acceptors for compensating residual Si donors	20
Study on statistical analysis of optical phase control by surface-stabilized ferroelectric liquid crystal devices	19
Characteristics, compositions, and effects of dust accumulated on PV panels in tropical agricultural area	19
Prototyping of microelectrode devices applied by transfer printing	19
Synthesis of urea with NH3 and CO2 mixtures by pulsed dielectric barrier discharge plasma	19
Atomic diffusion bonding of wafers with PDC-SiO2 underlayers using thin Y, Sc, and Zr films	18
Effect of film thickness on output power of a piezoelectric vibration energy harvester using hydrothermally synthesized (K,Na)NbO3 film	18
Fabrication of antiferromagnetic Cr2O3 epitaxial film on ferroelectric LiNbO3	18
Improved electrical characteristics of 4H-SiC (0001) MOS devices with atomic layer deposited SiO2 gate dielectric with H2O plasma	18
Corrigendum: “Realization of cathodoluminescence in 180 nm spectral range by suppressing thermal stress in mist chemical vapor deposition of rocksalt-structured MgZnO films” [ J	18
Dielectric and energy-storage properties of NaNbO3–NdFeO3 ceramics	18
Aerosol agglomeration by aerial ultrasonic sources containing a cylindrical vibrating plate with the same diameter as a circular tube	18
Enhancement of vortex pinning with substrate-induced pinning center in YBa 2 Cu 3 O	17
Pockels effect in CVD-grown monolayer MoS2	17
Flexible self-written optical waveguide and optical self-coupling with polymeric cladding	17
First-principles study on barrier height of silicon emission from interface into oxide during silicon thermal oxidation	17
Wafer-scale characterization for two-dimensional material layers	17
Suppression of effects of the synchronization error with adaptive down-conversion for underwater acoustic communication	16
A hybrid vibration energy harvester with integrated piezoelectric and electrostatic devices	16
Track width measurement in heat-assisted magnetic recording systems using the cross-track DC noise method	16
Tunable mid-infrared ultra-narrowband plasmonic absorber and sensor based on bulk Dirac semimetal metamaterials	16
Directivity of photoacoustically generated ultrasound from a thin tube embedded in the soft phantom	16
Transfer of linewidth and frequency stability from an iodine-stabilized Nd:YAG laser to a quantum memory control laser through an optical frequency comb	16
Deep ultraviolet light sources for post-COVID-19 sustainable society	16
Integration of silicon nanowire bridges in microtrenches with perpendicular bottom-up growth promoted by surface nanoholes	16
Magnetization reversal by multiple optical pulses for a photonic spiking neuron with the leaky integrate and fire model	16
Photoluminescence and scintillation properties of various organic–inorganic perovskite-type compounds with a diamine	16
Crystalline phase control of BiVO4 thin films using RF sputtering	16
Cu 2 ZnSnS 4 thin-film solar cells by a closed tube sulfurization under saturated sulfur vapor pre	16
Dissolution kinetics of polymer films in carboxylate ester developers studied by quartz crystal microbalance method	15
Optical properties of negatively charged germanium-vacancy centers in detonation nanodiamonds with an average single-digit nanometer particle size	15
A type of focused single-mode A0 Lamb wave EMAT for performance improvement	15
Formation of periodic nanostructures induced by circularly-polarized femtosecond laser	15
Polarity inversion of GaN from +c to −c polarity by metalorganic vapor phase epitaxy	15
3.2 GHz first shear horizontal-mode plate wave resonator on a 175°YX LiNbO3 thin plate showing 24.6% bandwidth	15

Investigation and modeling of vertical redistribution in charge-trap-based 3D NAND Flash memory	15
Study on the efficiency of a transducer for sonochemistry by calorimetry	15
First-principles study of highly-compressed Sb: a stubborn body-centered cubic structure	15
Fabrication of solar cells with CO 2 gas sensing capabilities based on a NiO/ZnO p-n junction for deve	15
Plantar pressure-measuring device powered by flexible all-solid-state battery	15
Polarity independent resistive switching in MoS 2 nanosheets and PEO-based nanocomposite films	14
Ultrathin MgO-spaced Ag nanocavities for emission enhancement via plasmonic resonance	14
Observation of strain relaxing in nanoscale WS 2 monolayers grown on SiO 2 /Si by organic solvent	14
Characterization of wide-gap semiconductors by photothermal deflection spectroscopy	14
Influence of donor impurities and crystal faces on doping-dependent fixed charges in SiC/SiO 2 structure	14
Analysis of cell characteristics using back oxide trap charge effect in various channel structures of 3D-NAND flash	14
Optical fiber-based acoustic intensity microphone for high-intensity airborne ultrasound measurement	14
Thick piezoelectric films by aerosol deposition at room temperature: corona poling and force sensing	14
Hot-wire-type micromachined chemiresistive gas sensors for battery-powered city gas alarms	14
SAW velocity reduction and spurious modes suppression on the layer structure	14
Ultra-low profile and high heat dissipation multi-layered SAW device employing sapphire substrate	14
Suitability evaluation of DC arc plasma treated WC–Co granulated powder for laser based additive manufacturing	14
The Receptron: a device for the implementation of information processing systems based on complex nanostructured systems	14
Diethyl carbonate (DEC) gas sensor based on CeO 2 loaded In 2 O 3	14
All-InP metasurface operating at telecom wavelengths	14
Tellurides as Zintl phases—to be or not to be?	13
The use of glasses in low-temperature wafer bonding processes	13
Reducing GaN crystal dislocations through lateral growth on uneven seed crystal surfaces using the Na-flux method	13
Significant improvement of injection efficiency in deep-UV LD structures by light Mg doping in p-core layer	13
Frequency-modulation AFM in sub-zero antifreeze liquid	13
Effect of mesa geometry on leakage current in Ge 1− x Sn	13
Multi-degrees-of-freedom swimmer using an ultrasonic longitudinal transducer	13
Impact of Coulomb scattering due to trapped electrons on Hall mobilities in 4H-SiC(11	13
Impact of interfacial layer structures on thermal boundary resistance in amorphous oxide heterointerfaces: a molecular dynamics study	13
Ray-based automatic tuning of a single quantum dot in a GaAs/AlGaAs quadruple dot array	13
Dispersion stability of tin(IV) oxide nanoparticles in polar solvents and water aided by ultrasonication	13
Extrinsic contribution to anomalous Hall effect in chiral antiferromagnetic (111)-oriented L1 2 -Mn 3	13
Dependence of process damage on GaN channel thickness in AlGaN/GaN high-electron-mobility transistors with back-barrier layers	13
Effects of dopant type and concentration on surface recombination velocity in hydrogen-terminated silicon	13
Analysis of cell characteristics depending on vertical channel profile and multiple dielectric WL space in 3D NAND flash memory	13
Evaluation of transducer for cryogenic actuators by equivalent circuit model	13
Optical and scintillation properties of Ti-doped α-Al2O3 single crystals	13
Synthesis and luminescence properties of Cr2O3-CaO-GeO2 glass and glass ceramics for broadband NIR-LEDs	13
Stable field writing in magnetic domain wall memory devices by suppression of thermal disturbances	13
Modelling the initial plasma dynamics in a laser triggered vacuum switch	13
Scanning glass microelectrode technique for investigating temperature-dependent electrical properties	13
High-operating-temperature short-wave infrared detector featuring Ge 0.93 Sn 0.07 thin film with s	13
Dielectric properties of 2 inch polycrystalline diamond wafer at frequencies ranging from 10 to 330 GHz	13
Visualization of defects in thin metal plates by a scanning airborne ultrasound source technique using guided waves of different frequencies	13
GaN high electron mobility transistors (HEMTs) with self-upward-polarized AlScN gate dielectrics toward enhancement-mode operation	12
First-principles study for self-limiting growth of GaN layers on AlN(0001) surface	12
Temperature-gradient investigation of phase transitions in ferroelectrics using cooling and heating stage	12
Application of high-speed atomic force microscopy in visualizing the dynamics of synthetic polymers	12
Level assessment of 87Rb in rubidium-filled MEMS vapor cells by X-ray imaging for atomic magnetometers	12
Fabrication of highly-oriented β-Ga2O3 thin film on ZnO/AlO x -buffered cyclo-olefin polymer substrate by excimer	12
Development of n-type Zn(O, S) buffer layer deposited by open-air CVD method for Cu(In, Ga)Se2 solar cells	12
Ultraviolet photodetectors based on Si-Zn-SnO thin film transistors with a stacked channel structure and a patterned NiO capping layer	12
Ultrasonic Electronics 2023 (USE2023)	12
Fabrication of ZnO-encapsulated porous alumina structure utilizing a two-step anodizing technique for memristor applications	12
Comparison of hydration structure formed on organic crystal surfaces measured by frequency modulation atomic force microscopy	12
Unveiling the analogies between the atomic switch and NMDA receptor-based signal transmission of biological synapse	12
Solution-processed near-infrared organic photodetector based on a liquid crystalline phthalocyanine derivative for vital signal monitoring	12
Demonstration of 90 000 superconductive bump connections for massive quantum computing	12
Bulk fin-type field-effect transistor-based capacitorless dynamic random-access memory with strong resistance to geometrical variations	12
Two-dimensional mapping method for evaluation of phase-locked loop signal in cryo-CMOS qubit control circuits	12
Displacement amplification mechanism in passive capacitive bolt axial force sensors to suppress manufacturing variations	12
Highly sensitive strain sensor based on PCF-based fiber-inline Mach–Zehnder interferometer	11
Temperature dependence of piezoelectric properties of the binary Pb(Mg1/3Nb2/3)O3-PbTiO3 single crystals prepared by continuous feeding Bridgeman method	11
The effect of atomic layer etching (ALE) processes on polyhydroxystyrene-based EUV chemical amplification resist	11
High sensitivity biosensing scheme based on a GHz phononic crystal waveguide	11
Estimation of the composition ratio of two contents filled in an elastic thin tube through laser-diode-based photoacoustic measurements	11
Structural and electrical properties of (Cr1−x ,V x )N thin films epitaxially grown on MgO(001) substrates	11
High electro-mechanical coupling coefficient SAW device with ScAlN on diamond	11
Characterization of band alignment at a metal–MoS2 interface by Kelvin probe force microscopy	11
Design and characterization of two-terminal thyristor dynamic random-access memory with a localized lightly-doped base insertion for improving data retention	11
Comparative study of the gas phase reaction of SiCl4, SiHCl3, SiH2Cl2, and SiH3Cl by thermodynamic analysis	11
Orientation angles of liquid crystals via ultrasound vibrations	11
Reliability of piezoelectric films for MEMS	11
Electrical frequency locking and sweeping of optical negative feedback lasers	11
Demonstration of superior UIS robustness of 3300 V scaled IGBT by non-proportional scaling methods	11
Combined toxicity of indirubins with cold physical plasma in skin cancer cells in vitro	11
Preparation of vertically oriented aromatic polyester thin films by thermal chemical vapor deposition	11
The impact of junction position and type on the performance of InGaAs solar cells for multijunction applications	11
Threshold voltage uniformity improvement by introducing charge injection tuning for low-temperature poly-Si thin film transistors with metal/oxide/nitride/oxide/silicon structure	11
Optimizing photochromic reactions of hydrophobic copper-doped zinc sulfide nanocrystals	11

Acetic acid detection in photovoltaic modules during ultraviolet irradiation and damp-heat combined tests	11
Fabrication of n-type and p-type WSe2 field-effect transistors and their low-voltage CMOS inverter operation	11
Systematic analysis of optical constants in IGZO thin films under controlled oxygen partial pressure and working pressure	11
Design of an ultra-sensitive and miniaturized diamond NV magnetometer based on a nanocavity structure	11
Wafer-scale and bi-layer MoS 2 films established through sequential mono-layer MoS 2 growth for de	11
Anisotropic elastic property estimation of powder-bed-fusion-printed metal for ultrasonic tools	11
Low dIC/dt noise and on-state voltage 4H-SiC IGBT with N-barrier layer	11
Surface properties of an InGaZnO4 layer with a monolayer formed using a phosphonic acid: wettability, work function, and thermal stability	11
Understanding the CO2 reduction reaction anolyte flooding problem in polymer electrolyte type reactor through the cation and water transport properties of ion exchange membranes	11
Thickness-dependent microstructure and metal-insulator transition in vanadium dioxide thin films grown by pulsed laser deposition	11
Spatial distribution of electrical properties in high-purity Mg 2 Si single crystals	11
Development of continuous monitoring of ambient carbon dioxide using near-infrared quartz-enhanced photoacoustic spectroscopy	10
Thermal neutron scintillation improvement in Ce:Li6Y(BO3)3 single crystals by thermal treatment	10
Temperature dependence of the aging effect of permittivity in Pb(Zn1/3Nb2/3)O3–PbTiO3 and BaTiO3 single crystals	10
Chemical mechanical polishing for indium bond pad damascene processing	10
Particle elastic modulus analysis of waterborne polyurethane nanoparticles by ultrasound scattering method	10
A study on the classification of threading dislocations in GaN substrate by spot size using X-ray topography high-resolution image	10
Surface oxide ion conduction of BaCe0.5Pr0.3Y0.2O3−δ thin film with complex mixed valence states	10
Study on Cu CMP method using the superconductive assisted machining	10
Redox-induced changes in nanostructures and electron densities of connected Pt–Fe catalysts for fuel cells revealed via in situ coherent X-ray diffraction	10
Hardening of (Ba 0.5 Na 0.5 ) 0.85 Ba	10
Applying stochastic simulation to study defect formation in EUV photoresists	10
An efficient polishing process for silicon carbide using ion implantation method	10
Dynamical properties of quantum correlations in SPDC mediated by electron-phonon systems	10
Thickness-extensional second order mode bulk wave resonator using face-bonded X-cut quartz thin plates	10
Fabrication of ceramic scintillators by laser sintering: the case of Lu3Al5O12:Pr	10
Improvement of CO 2 desorption rate from CO 2 loaded TEA solution at low temperature using sonicat	10
Development of hybrid bonding using area-selective passivation layer deposition technology on various substrates for heterogeneous integrated structure	10
Characteristics and deviation of low-temperature FD-SOI-MOSFETs using a sputtering SiO2 gate insulator	10
Abnormal photoluminescence properties of InAs/InAsSb in-plane ultrahigh-density quantum dots	10
Review and perspective of dry etching and deposition process modeling of Si and Si dielectric films for advanced CMOS device applications	10
Gate oxide technology relieving word-line break in 10 nm-class DRAMs	10
Recent progress and future of electron multi-beam mask writer	10
On the influence of microstructure on fluorite ferroelectric embedded memories	10
Polarity-dependent asymmetric switching of ferroelectric AlScN thin films	10
Numerical analysis of the phased array imaging with a stacked plate buffer	10
Numerical modeling of dynamics and frequency noise of InGaAsP/InP laser and its dependence on optical feedback and non-radiative recombination	10
Research activity on spatial light modulators at Hamamatsu	10
Aging-robust amplifier composed of p-type low voltage OTFT and organic semiconductor load	9
Experimental demonstration of spatial division multiplexing multiple-input/multiple-output underwater acoustic communication using a time-reversal method at the depth of the continental shelf: a consi	9
Manipulation of an active object using an intelligent microfluidic system	9
Structural differences in titanium surfaces under low-energy hydrogen ion irradiation: a molecular dynamics and topological data analysis approach	9
Evaluation of water transportation in anion exchange membranes used for electrochemical CO2 reduction	9
Advancements in single-crystal silicon with elevated-laser-liquid-phase-epitaxy (ELLPE) for monolithic 3D ICs	9
Microwave artificial neurons based on magnetic tunnel junction nano-oscillators for image recognition and denoising	9
Analysis and design of an oblong coil pair for an edge-coupled inductive link	9
High-power single-mode slow-light VCSEL array for compact LiDAR applications	9
Beam characterization of mid-infrared free electron laser to drive high-harmonic generation	9
Controlling fluorescence quenching efficiency by graphene oxide in supported lipid bilayers using SiO2 layer fabricated by atomic layer deposition	9
Calculation of GaInSb PNP lateral HBT for complementary bipolar logic technology	9
Infinite lateral growth of (001) single crystal strip in Ge film on SiO2 by micro-chevron laser scanning method	9
Impact of high-energy electron beam irradiation on piezoelectric properties of lead zirconate titanate	9
Mode-dependent dye absorption in phthalocyanine-doped acrylic optical fiber	9
Germanium nanostructures by helium plasma irradiation	9
High-frequency bulk acoustic wave resonators with thickness shear and extensional modes in LiNbO 3 thin plates with acoustic multilayers	9
Sensitization of polymethacrylate resist with adding acid-generating promoters upon exposure to EUV light	9
Cross-sectional investigation by dual bias modulation electrostatic force microscopy on Si/Si junction fabricated by surface-activated bonding	9
Application of an overlay for spurious suppression of multi-layered surface acoustic wave resonators with double busbar configuration	9
Effect of oxygen modification on the switching of ZnO TFT	9
Evaluation of turn-off dV/dt controllability and switching characteristics of 1.2 kV GaN polarisation superjunction heterostructure field-effect transistors	9
In segregation influence on properties of InAs quantum dots in dots-in-a-well	9
Transdermal administration of adenosine using microplasma and the examination of the effect of microplasma on stratum corneum using infrared spectroscopy	9
Accurate estimation of measurement position in Brillouin optical correlation-domain reflectometry based on Rayleigh noise spectral analysis	9
Fundamental evaluation of orientation and grain size of Cu film in Cu/TaWN/SiO2/Si system	9
Quantization methodology for edge Transformer Hetero-CiM with SRAM CiM in self-attention and MLC ReRAM CiM in linear and FC layers	9
Wafer reconstitution: embedded multi-die III-V and silicon co-integration platform	9
Synchrotron radiation Fourier-transform infrared absorption measurements on the single-crystal dinaphtho[2,3-b:2′,3′-f]thieno[3,2-b]thiophene	9
Improvement of S/N ratio in simultaneous photoacoustic and photoluminescence measurements by utilizing Helmholtz resonance	9
Growth of α-In2O3 films with different concentrations of In2O3 powder used as source precursor by mist chemical vapor deposition	9
Preparation of nanoparticles of heavy-fermion superconductor CeCoIn5 by pulsed laser ablation in liquid	9
Origin of performance degradation in vertical gate-all-around transistors using vertical InGaAs nanowires on SOI(111) substrates	9
Simulation of a ring oscillator operation during γ-ray irradiation using the TID response model of MOSFETs and its experimental verification	9
Observation of electronic spectra modulation in a CH3NH3PbBr3 crystal by utilizing transient absorption microscopy	9
High tolerant design of athermal Si wavelength filter using Mach–Zehnder interferometer	9
Ultrasonic measurement of thickness of carotid arterial wall using its natural longitudinal displacement	9
Study of preload mechanism for small piezoelectric transducers with hollow structure for cryogenic environments	9
Fabrication of needle-like crystals using zinc acetylacetonate under atmospheric pressure	9
Co-optimization of LoRA rank in iteratively error injected LoRA (Ei-LoRA) and inference accuracy for tiny & error-robust edge Vision Transformer Computation-in-Memory (ViT CiM)	9
Scintillation properties of (Ph4P)2ZnX4 (X = Cl, Br)	9
Design methodology of compact edge vision transformer CiM considering non-volatile memory bit precision and memory error tolerance	9
Carbon nanotube thin film pn junction diode with high-temperature tolerance using chemical dopants	9
Photovoltaic and mechanical properties of boron carbide films prepared by magnetron sputtering	9
Molecular doping principles in organic electronics: fundamentals and recent progress	8
Surface-activated direct bonding of diamond (100) and c-plane sapphire with high transparency for quantum applications	8
Low ohmic loss hybrid gap plasmonic waveguide with miniaturized metal-dielectric interface	8
Development of a Bayesian inference method for the analysis of X-ray reflectivity data	8
Multi-band propagation of spoof surface plasmon polaritons by its high-order modes	8
Optical emission spectroscopy diagnosis of low-pressure microwave discharge helium plasma based on collisional-radiative model	8
Pioneering preparation and analysis of a clean surface on a microcrystal, mined by a focused ion beam	8
Proposal of compact multimode interference optical modulator with high extinction ratio	8
High-temperature operation of Al2O3/Ga2O3 bi-layer gate stack GaN MOS-HEMT up to 450 °C with suppressed gate leakage	8
Characterization of deep-hole structure of semiconductor devices using transmission small-angle X-ray scattering	8
Optical modeling and active layer design of MASnI3 perovskite photovoltaics using finite-difference time-domain simulation: from the sun to indoor light	8
In situ infrared absorption spectroscopy of cryogenic-specific reddish coloration produced by cryoplasma irradiation on an ice surface	8
Influence of bias voltage on the Ar/CH2F2/O2 plasma etching of Si3N4 films	8