Papers
(The H4-Index of Microelectronic Engineering is 23. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2022-01-01 to 2026-01-01.)
| The role of etching gas purity in C4F8/Ar plasma to optimize SiO2 etching process | 23 |