Microelectronic Engineering

Article	Citations
Stress measurement based on magnetic Barkhausen noise for thin films	66
A 10 kHz bandwidth low-power active negative feedback front-end amplifier based on unipolar IZO TFT technology	53
Optimizing dose parameters for enhanced maskless lithography in MoS2-based devices	47
Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration	40
Evolution of etch profile of <111> silicon in HNA solution	37
A novel process for adjusting the gate-drain spacing in InP-HEMTs with	34
Editorial Board	32
The effect of switching and cycle-to-cycle variations of RRAM on 4-bit encryption/decryption process	30
A simulation study of grayscale ice lithography for spiral phase plates in near infrared wavelengths	30
Neural network for in-sensor time series recognition based on optoelectronic memristor	29
CMOS-compatible GaN-based high electron mobility transistors with gate-first technology	28
Plasma surface treatment of GeSn layers and its subsequent impact on Ni / GeSn solid-state reaction	28
A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling	26
Humidity-dependent synaptic characteristics in gelatin-based organic transistors	26
Experimental and theoretical insights into electronic properties of oxygen-doped MoTe2 field effect transistor	24
Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography	24
Simulation and optimization of reactor airflow and magnetic field for enhanced thin film uniformity in physical vapor deposition	23
Impact of interfacial trap states on achieving bias stability in polymer field-effect transistors	23
A novel and reliable approach for controlling silicon membrane thickness with smooth surface	23
Selective functionalization of silicon nitride with a water-soluble etch-resistant polymer	22
Stable electrospray signal on a microfabricated glass chip with three-dimensional open edge and tiered depth geometries	21
Research on stress mutation of fiber optic gyroscope	20
Spin coating in semiconductor lithography: Advances in modeling and future prospects	20
Local strain modification effects on global properties of AlGaN/GaN high electron mobility transistors	19
Static and dynamic interaction between polyvinyl acetal brushes and flat surfaces—Measuring near-surface brush volume ratio and nodule volume change for moving brushes	19

On the influence of Ni(Pt)Si thin film formation on agglomeration threshold temperature and its impact on 3D imaging technology integration	19
Micro-Raman evaluation of 200 mm SiC material	18
Using water structuring by ions to address pattern loading in wet HF-based oxide recess etch	18
Influence of AlN spacer and GaN cap layer in GaN heterostructure for RF HEMT applications	17
New concept of two-cascade energy compression systems based on drift step recovery diodes	17
Comprehensive physics-based RRAM compact model including the effect of variability and multi-level random telegraph noise	17
Electrochemically functionalized single-walled carbon nanotubes for ultrasensitive detection of BTEX vapors	16
Performance enhancement of WS2 transistors via double annealing	16
Etch characteristics of cobalt thin films using high density plasma of CH3COCH3/Ar gas mixture	16
Exploring statistical approaches for accessing the reliability of Y2O3-based memristive devices	16
Dependence of frequency-temperature stability on support tethers in dual-beam piezoresistive sensing MEMS resonators	16
Hierarchical CuO nanostructured materials for acetaldehyde sensor application	16
Neural networks based on in-sensor computing of optoelectronic memristor	16
Fully CMOS-compatible passive TiO2-based memristor crossbars for in-memory computing	15
Optical, morphological and electrical studies of fully doctor bladed CsPbBr2Cl-based perovskite thin films	15
Reliability challenges in CMOS technology: A manufacturing process perspective	15
Dose-dependent milling efficiencies of helium and nitrogen beams in PMMA	14
Improvement in long-term stability of field effect transistor biosensor in aqueous environments using a combination of silane and reduced graphene oxide coating	14
A tensile test for freestanding low-k thin films using a lift-off technique	14
Epitaxial growth of AlGaN/GaN HEMTs on patterned Si substrate for high voltage power switching applications	14
Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness	14
A triboelectric nanogenerator for mechanical energy harvesting and as self-powered pressure sensor	14
Development of an emulator of the sustainable energy harvesting pad system on a bike lane for charging lithium batteries	14
Editorial Board	14
A study of gate recess-width control of InP-based HEMTs by a Si3N4 passivation layer	14
A perovskite-based artificial photonic synapse with visible light modulation and ultralow current for neuromorphic computing	13
Microscale white light emitters fabricated by two-photon polymerization lithography on functional resist	13
Strategies for avoiding delamination in system-in-packaging devices	13
Evolution of 2D materials conducive to the wearable physical sensors for structural health assessment	13
Chemical structure characteristics of flexible low-k SiCOH thin films etched by inductively coupled plasma-reactive ion etching process using FTIR and XPS spectra analysis	13
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors	12
Effect of the oxygen dependent device parameters on the electrical properties of a-Si-Zn-Sn-O thin film transistors	12
Advanced approach of bulk (111) 3C-SiC epitaxial growth	12
Etching mechanism of high-aspect-ratio array structure	12
Electrical characterization of flexible hafnium oxide capacitors on deformable softening polymer substrate	12
Thermal management of through-silicon vias and back-end-of-line layers in 3D ICs: A comprehensive review	12
Editorial Board	12
Editorial Board	12
Review of the pressure sensor based on graphene and its derivatives	11
Editorial Board	11
Preventing oxide precipitation in selective wet etching of Si3N4 for 3D-NAND structure fabrication: The role of bubbles	11
Amorphous indium gallium zinc oxide thin film transistors (a-IGZO-TFTs): Exciting prospects and fabrication challenges	11
A novel time-domain in-memory computing unit using STT-MRAM	11
Wide scan angle multibeam conformal antenna array with novel feeding for mm-wave 5G applications	11
Deep-level traps in as-grown and electron-irradiated homo-epitaxial n-GaN layers grown by MOVPE	11
Synthesis and analysis of TiO2 nanotubes by electrochemical anodization and machine learning method for hydrogen sensors	11
A novel high-Q Lamé mode bulk acoustic resonator	11
Study of ion charging effect to improve reactive-ion-etching profile of PbSe grating structures	11
The current transport mechanism of Al/Beetroot/Cu used as an organic semiconductor Schottky diode is superior than natural dye-based thin film devices	11
Editorial Board	10

Editorial Board	10
Influence of fluorine implantation on the physical and electrical characteristics of GaN-on-GaN vertical Schottky diode	10
Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error	10
A new characterization model of FinFET self-heating effect based on FinFET characteristic parameter	10
Large-scale growth of MoS2 hybrid layer by chemical vapor deposition with nanosheet promoter	10
Optimization of read operation for low power consumption in 3D NAND flash memory	9
Chip-level thermal management in GaN HEMT: Critical review on recent patents and inventions	9
Significant improvement in the performance of well-aligned ZnO nanowire arrays ultraviolet photodetector by Ga doping	9
Machine learning algorithm for the structural design of MEMS resonators	9
Optimization of pattern quality in DMD scanning maskless lithography: A parametric study of the OS3L exposure algorithm	9
Study of nonlinear vibration of resonant gyroscope based on uncertainty analysis method	9
A one-step pattern transferring process for freestanding diffractive spiral photon sieves in extreme ultraviolet	9
Novel methods for locating and matching IC cells based on standard cell libraries	8
Editorial Board	8
Dropout neuronal unit with tunable probability based on NbOx stochastic memristor for efficient suppression of overfitting	8
Microfluidic Fredkin gate: A novel control unit for integrated microfluidic systems	8
Effect of the deposition method and substrate on an ultra-stable CoV2O6 hydrogen gas sensor, operating at room temperature	8
Editorial Board	8
Effect of temperature on joint quality in wave soldering of Sn-9Zn-2.5Bi-1.5In lead-free solder alloy	8
Cryo-CMOS design-technology co-optimization of low noise amplifier for silicon qubit readout	8
Hybrid integrated Si nanosheet GAA-FET and stacked SiGe/Si FinFET using selective channel release strategy	8
A synoptic review of nanoscale vacuum channel transistor: Fabrication to electrical performance	8
Effect of GaN cap layer on the performance of AlInN/GaN-based HEMTs	8
Al3Sc thin films for advanced interconnect applications	8
Thermal stability, work function and Fermi level analysis of 2D multi-layered hexagonal boron nitride films	8
Facile and direct 3D printing of smart glove for gesture monitoring	8
Comparison of ratio of gate length to gate-drain distance influences on source access resistance of AlGaN/AlN/GaN HFETs at different temperatures	8
Improved performance of near UV-blue n-ZnO/p-GaN heterostructure LED with an AlN electron blocking layer	7
An optimized Ni P seed layer coating method for through glass via (TGV)	7
Design of multi-scroll chaotic attractor based on a novel multi-segmented memristor and its application in medical image encryption	7
Facile fabrication of flexible and conductive AuNP/DWCNT fabric with enhanced Joule heating efficiency via spray coating route	7
Editorial Board	7
Capacitive immunosensor for COVID-19 diagnosis	7
A low-g omnidirectional MEMS inertial switch with load direction identification	7
Portable UV nanoimprint lithography system using hydraulic pressure	7
Improving performance of cathode NMC-811 by CeO2-coating for Li-ion battery	7
Editorial Board	7
Estimation of channel temperature and thermal sensitivity for a 0.15 μm GaN HEMT	7
First steps towards interlocking modular microfluidic cooling substrates (i-MμCS) for future silicon tracking detectors in High Energy Physics (HEP)	7
Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films	7
A self-supported structure hybrid triboelectric/piezoelectric nanogenerator for bio-mechanical energy harvesting and pressure sensing	7
Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography	6
Design and optimization of variable gain LNA for IoT applications using meta-heuristics search algorithms	6
Electrical characteristics of Si0.7Ge0.3/Si heterostructure-based n-type GAA MOSFETs	6
Overview of printable nanoparticles through inkjet process: Their application towards medical use	6
In-situ characterization of thermomechanical behavior of copper nano-interconnect for 3D integration	6
Impact of annealing on electric and elastic properties of 10-nm Hf0.5Zr0.5O2 films prepared on Si by sputtering	6
Impact of low-temperature and low-pressure mild oxidation after plasma solidification on electrical properties and reliability in ultra-thin SiON MOSFETs	6
Editorial Board	6
An enhanced triboelectric nanogenerator with micro-grid patterned PDMS for self-powered sensing and music playback	6
Battery anode design: From 1D nanostructure to 3D nanoarchitecture – Enabling next-generation energy storage technology	6
Fabrication of integrated silicon PIN detector based on Al-Sn-Al bonding for ΔE-E telescope application	6
Recent advances in micro- and bio- electromechanical system architectures for energy efficient chemiresistors	6
Simulation study of zone-height limit by electron beam lithography for 30 nm Fresnel zone plates in X ray optics	6
Photoelectron spectroscopy study of GeSn epitaxial layers for photonic applications	6
Detailed review on c-Si/a-Si:H heterojunction solar cells in perspective of experimental and simulation	6
Design of Ag/PDMS electrodes with a pillar structure for stretchable electronics	6
Improving the electrical performance of vertical thin-film transistor by engineering its back-channel interface	5
Micrometer-size crystalline monolayer MoS2 domains obtained by sulfurization of molybdenum oxide ultrathin films	5
Effect of hydrogen plasma treatment on the electrical properties for SiC-based power MOSFETs	5
Particle dispersion and mixing characteristics on the surface of a closed microchamber with magnetic artificial cilia	5
Fabrication of serpentine and I structured graphene-CNT based highly sensitive and flexible strain sensors	5
Laser induced reverse transfer of bulk Cu with a fs-pulsed UV laser for microelectronics applications	5
Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique	5
Tuning of interface quality of Al/CeO2/Si device by post-annealing of sol-gel grown high-k CeO2 layers	5
Origin of charges in bulk Si:HfO2 FeFET probed by nanosecond polarization measurements	5
Importance of layer distribution in Ni and Au based ohmic contacts to p-type GaN	5
Ta/Al/CuW low temperature ohmic contacts for GaN-on-Si HEMT	5
Temperature dependant high output voltage generation via mechanical transducer by using surface modified (O2, CO2, NO2) ZnO nanowires	5
The influence of thermal loads on the physical properties of carbon nanotubes forests	5
Fabrication of high frequency SAW devices using tri-layer lift-off photolithography	5
Stepping electron-beam lithography for Y-gate in high electron mobility transistors fabrication	5
Editorial Board	5
High density nanofluidic channels by self-sealing for metallic nanoparticles detection	5
Technology review of CNTs TSV in 3D IC and 2.5D packaging: Progress and challenges from an electrical viewpoint	5
Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp	5
Sustainable solvent metal lift-off for compound semiconductor fabrication with improved manufacturability	5
Self-powered motion state monitoring system based on combined triboelectric nanogenerators for human physiological signal monitoring and energy collection	5
Nanobeam electron diffraction strain mapping in monocrystalline silicon of modern trench power MOSFETs	5
Development of n-type epitaxial growth on 200 mm 4H-SiC wafers for the next generation of power devices	5

Editorial Board	5
Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layer	4
Smart wearable triboelectric nanogenerator for self-powered bioelectronics and therapeutics	4
Ni-based metallization of GeSn layers: A review and recent advances	4
Structural and electrical correlation in aluminum nitride thin films grown by plasma enhanced atomic layer deposition as interface insulating layers on silicon carbide (4H-SiC)	4
Microstructuring technology for large and cylindrical receivers for concentrated solar plants (CSP)	4
Graphene-based physical sensors for humidity, temperature and strain detections	4
Feasibility study of fabricating 20 nm resolution dielectric Fresnel zone plates with ultrahigh aspect ratio for EUV optics	4
Editorial Board	4
UV-curable polyimide/layered silicate films with improved barrier properties for the protection of semiconductor chips	4
Developing a micro-thermography system for thermal characterization of LED packages	4
Absorbance-based detection of arsenic in a microfluidic system with push-and-pull pumping	4
Redefining microelectronics	4
Bias-stress instabilities in low-temperature thin-film transistors made of Al2O3 and ZnO films deposited by PEALD	4
Fabrication of uniform, periodic arrays of exotic AlN nanoholes by combining dry etching and hot selective wet etching, accessing geometries unrealisable from wet etching of planar AlN	4
GaN radiofrequency components and power amplifiers for next-generation 5G communications	4
Simulation-based investigation of junction-controlled narrow-band Si photodetector with vertical structure	4
Fabrication of high aspect ratio atomic force microscope probes using focused ion beam milled etch mask	4
Microelectronic Engineering: Publisher's note	4
Wheelchair control system with hand movement using accelerometer sensor	4
Editorial Board	4
Phase field simulation of electrohydrodynamic jet droplets and printing microstructures on insulating substrates	4
Simulation and optimization of microlens hot-melting fabricating process based on finite element method	4
A novel second generation current conveyor (CCII)-based high frequency memristor model	4
Reactive ion etching of tantalum in silicon tetrachloride	4
Design of memristor hyperchaotic circuit with burst oscillation and infinite attractor coexistence and its application	4
Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures	3
Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties	3
Editorial Board	3
Editorial Board	3
CSRR loaded high gained 28/38GHz printed MIMO patch antenna array for 5G millimeter wave wireless devices	3
Highly thermostable ultrathin planar Ag transparent heaters	3
The insight and evaluation of ultra-scaled sub-1 nm gate length transistors	3
Rapid fabrication of NiO/porous Si film for ultra-violate photodetector: The effect of laser energy	3
Developing TSV wet cleaning chemistry for quantum computing application	3
Mechanical reinforcement of UV-curable polymer nanocomposite for nanopatterned mold	3
Mobility improvement of LTPS thin film transistor using stacked capping layer	3
Transition between resistive switching modes in asymmetric HfO2-based structures	3
Investigation of trapping/de-trapping dynamics of surface states in AlGaN/GaN high-electron mobility transistors based on dual-gate structures	3
Editorial Board	3
Critical solder joint in insulated gate bipolar transistors (IGBT) power module for improved mechanical reliability	3
A reliability study of the PMMA/Al/UV5 bilayer process for ultra-short T shape gates	3
Effects of heavy ion irradiation on Cu/Al2O3/Pt CBRAM devices	3
A novel microscale platform for leukemia tumor treating field therapy and electrochemical screening	3
A micromachined Joule-Thomson cryocooler for ice lithography	3
Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication	3
Polycrystalline formamidinium lead bromide (FAPbBr3) perovskite as a self-powered and fast visible-light photodetector	3
A novel room temperature SO2 gas sensor based on TiO2/rGO buried-gate FET	3
A ScAlN-based piezoelectric breathing mode dual-ring resonator with high temperature stability	3
Electron trapping in HfO2 layer deposited over a HF last treated silicon substrate	3
Photo-conductivity as a transmission phenomenon: Application to the study of β−Ga2O3 thin film	3
Negative capacitance FET based dual-split control 6T-SRAM cell design for energy efficient and robust computing-in memory architectures	3
Shear loading of FCC/BCC Cu/Nb nanolaminates studied by in situ X-ray micro-diffraction	3
On the mechanical properties of ultrathin titanium nitride films under different gas ratios of PVD process	3
Pentacene organic thin-film transistor based on Archimedean interdigitated spiral pattern	3
4D printing: A detailed review of materials, techniques, and applications	3
Investigation of thermal stress effects during annealing of hafnia-made thin film using molecular dynamics simulations	3
Burr- and etch-free direct machining of shape-controlled micro- and nanopatterns on polyimide films by continuous nanoinscribing for durable flexible devices	3
Fabrication of silicon nitride membrane nanoelectromechanical resonator	3
Flexible fabrication of aligned multi-nanowire circuits for on-chip prototyping	3
Modeling and validation of ESR and frequency-stability of high-density nanostructured capacitors for embedded power converters	3
Editorial Board	3
InGaN/GaN QWs on tetrahedral structures grown on graphene/SiC	2
Vapor deposited thin organic–inorganic capping layers preventing copper line oxidation in polymer-based RDL technologies	2
Mask defect detection by combining wiener deconvolution and illumination optimization	2
Bevel contamination management in 3D integration by localized SiO2 deposition	2
Physical implementation of cobalt ferrite memristor in Chua's circuit for chaotic encryption	2
Graphene transfer implementations to micro and nano electronic	2
PMMA sacrificial layer based reliable debonding of ultra-thin chips after lapping	2
Nanocomposite filled slots that enhance radiation of flexible nonagon antenna	2
Editorial Board	2
Editorial Board	2
Study on the effect of residual ceria slurry on chemical mechanical planarization (CMP)	2
Surface plasmon resonance sensor based on MXene coated PCF for detecting the cancer cells with machine learning approach	2
Current transport in Ni Schottky barrier on GaN epilayer grown on free standing substrates	2
The electrical characteristic of an MIS structure with biocompatible minerals doped (Brushite+Monetite: PVC) interface layer	2
The effect of Ag atoms diffusion into δ-phase CsPbI3-based memory device	2
Effect of brush cleaning on defect generation in post copper CMP	2
Rotatory microgripper based on a linear electrostatic driving scheme	2
Editorial Board	2
Reduced graphene oxide functionalized Ag:ZnO nanocomposites for real time monitoring of NO2 gas	2
A simple figure of merit to identify the first layer to degrade and fail in dual layer SiOx/HfO2 gate dielectric stacks	2
Effect of potassium persulfate on chemical mechanical planarization of Cu/Ni microstructures for MEMS	2
Metallurgical reactions and high-temperature long-term reliability of the Sn-2.3Ag flip-chip solder bump	2
Benzophenone doped polydimethylsiloxane: Resist platform for MeV electron beam lithography assisted microlens array fabrication	2
Facile fabrication of crescentic ZnO nanorod-based photo-catalytic micro-fluidic reactors	2
Effects of change of oxygen vacancy on hysteresis voltage and stability under time-temperature dependence positive bias stress in amorphous SZTO transistors	2
Editorial Board	2
A methodology for mechanical stress and wafer warpage minimization during 3D NAND fabrication	2
Intradermal measurement of reactive oxygen species using open-tip porous microneedles	2
Low temperature solid-state diffusion bonding of fine pitch Cu/Sn micro-bumps assisted with formic acid vapor for 3D integration	2
Realization of ppb-level acetone detection using noble metals (Au, Pd, Pt) nanoparticles loaded GO FET sensors with simultaneous back-gate effect	2
Parameter analysis and electrochemical properties of 4,6-Dimethyl-2-mercaptopyrimidine for mitigating Cu prominence in through silicon vias filling	2
Thermal reflow of plasma-polymerized fluorocarbon for nanochannels and particle encapsulation	2
Effects of polyethyleneimine, applied potential and the initial gap on the localized electrochemical deposition of silver microcolumns	2