Microelectronic Engineering

Article	Citations
Stress measurement based on magnetic Barkhausen noise for thin films	70
Optimizing dose parameters for enhanced maskless lithography in MoS2-based devices	58
Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration	55
Evolution of etch profile of <111> silicon in HNA solution	44
Editorial Board	39
A simulation study of grayscale ice lithography for spiral phase plates in near infrared wavelengths	36
Neural network for in-sensor time series recognition based on optoelectronic memristor	34
The effect of switching and cycle-to-cycle variations of RRAM on 4-bit encryption/decryption process	33
A 10 kHz bandwidth low-power active negative feedback front-end amplifier based on unipolar IZO TFT technology	32
Plasma surface treatment of GeSn layers and its subsequent impact on Ni / GeSn solid-state reaction	32
CMOS-compatible GaN-based high electron mobility transistors with gate-first technology	30
A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling	29
Selective functionalization of silicon nitride with a water-soluble etch-resistant polymer	28
A novel and reliable approach for controlling silicon membrane thickness with smooth surface	28
Humidity-dependent synaptic characteristics in gelatin-based organic transistors	28
Simulation and optimization of reactor airflow and magnetic field for enhanced thin film uniformity in physical vapor deposition	27
Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography	25
Stable electrospray signal on a microfabricated glass chip with three-dimensional open edge and tiered depth geometries	25
Experimental and theoretical insights into electronic properties of oxygen-doped MoTe2 field effect transistor	24
Spin coating in semiconductor lithography: Advances in modeling and future prospects	23
Local strain modification effects on global properties of AlGaN/GaN high electron mobility transistors	22
Static and dynamic interaction between polyvinyl acetal brushes and flat surfaces—Measuring near-surface brush volume ratio and nodule volume change for moving brushes	22
On the influence of Ni(Pt)Si thin film formation on agglomeration threshold temperature and its impact on 3D imaging technology integration	21
New concept of two-cascade energy compression systems based on drift step recovery diodes	20
Using water structuring by ions to address pattern loading in wet HF-based oxide recess etch	20

Influence of AlN spacer and GaN cap layer in GaN heterostructure for RF HEMT applications	20
Etch characteristics of cobalt thin films using high density plasma of CH3COCH3/Ar gas mixture	20
Performance enhancement of WS2 transistors via double annealing	19
Dependence of frequency-temperature stability on support tethers in dual-beam piezoresistive sensing MEMS resonators	19
Micro-Raman evaluation of 200 mm SiC material	19
Comprehensive physics-based RRAM compact model including the effect of variability and multi-level random telegraph noise	18
Reliability challenges in CMOS technology: A manufacturing process perspective	17
Neural networks based on in-sensor computing of optoelectronic memristor	17
Exploring statistical approaches for accessing the reliability of Y2O3-based memristive devices	17
Hierarchical CuO nanostructured materials for acetaldehyde sensor application	17
Fully CMOS-compatible passive TiO2-based memristor crossbars for in-memory computing	16
Optical, morphological and electrical studies of fully doctor bladed CsPbBr2Cl-based perovskite thin films	16
Epitaxial growth of AlGaN/GaN HEMTs on patterned Si substrate for high voltage power switching applications	16
A tensile test for freestanding low-k thin films using a lift-off technique	16
Editorial Board	16
Development of an emulator of the sustainable energy harvesting pad system on a bike lane for charging lithium batteries	16
Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness	15
Improvement in long-term stability of field effect transistor biosensor in aqueous environments using a combination of silane and reduced graphene oxide coating	15
Dose-dependent milling efficiencies of helium and nitrogen beams in PMMA	15
Strategies for avoiding delamination in system-in-packaging devices	15
Microscale white light emitters fabricated by two-photon polymerization lithography on functional resist	14
Chemical structure characteristics of flexible low-k SiCOH thin films etched by inductively coupled plasma-reactive ion etching process using FTIR and XPS spectra analysis	14
Evolution of 2D materials conducive to the wearable physical sensors for structural health assessment	14
A study of gate recess-width control of InP-based HEMTs by a Si3N4 passivation layer	14
A perovskite-based artificial photonic synapse with visible light modulation and ultralow current for neuromorphic computing	14
A triboelectric nanogenerator for mechanical energy harvesting and as self-powered pressure sensor	14
Electrical characterization of flexible hafnium oxide capacitors on deformable softening polymer substrate	14
Editorial Board	13
Advanced approach of bulk (111) 3C-SiC epitaxial growth	13
Thermal management of through-silicon vias and back-end-of-line layers in 3D ICs: A comprehensive review	13
Etching mechanism of high-aspect-ratio array structure	13
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors	13
A novel time-domain in-memory computing unit using STT-MRAM	13
Editorial Board	13
Effect of the oxygen dependent device parameters on the electrical properties of a-Si-Zn-Sn-O thin film transistors	13
Review of the pressure sensor based on graphene and its derivatives	13
A novel high-Q Lamé mode bulk acoustic resonator	13
Study of ion charging effect to improve reactive-ion-etching profile of PbSe grating structures	12
Preventing oxide precipitation in selective wet etching of Si3N4 for 3D-NAND structure fabrication: The role of bubbles	12
Synthesis and analysis of TiO2 nanotubes by electrochemical anodization and machine learning method for hydrogen sensors	12
Wide scan angle multibeam conformal antenna array with novel feeding for mm-wave 5G applications	12
Deep-level traps in as-grown and electron-irradiated homo-epitaxial n-GaN layers grown by MOVPE	12
Editorial Board	12
Editorial Board	12
Amorphous indium gallium zinc oxide thin film transistors (a-IGZO-TFTs): Exciting prospects and fabrication challenges	12
The current transport mechanism of Al/Beetroot/Cu used as an organic semiconductor Schottky diode is superior than natural dye-based thin film devices	12
Machine learning algorithm for the structural design of MEMS resonators	11
Editorial Board	11
Novel methods for locating and matching IC cells based on standard cell libraries	11
Study of nonlinear vibration of resonant gyroscope based on uncertainty analysis method	11

Optimization of read operation for low power consumption in 3D NAND flash memory	11
Influence of fluorine implantation on the physical and electrical characteristics of GaN-on-GaN vertical Schottky diode	11
A one-step pattern transferring process for freestanding diffractive spiral photon sieves in extreme ultraviolet	11
Large-scale growth of MoS2 hybrid layer by chemical vapor deposition with nanosheet promoter	11
Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error	11
Significant improvement in the performance of well-aligned ZnO nanowire arrays ultraviolet photodetector by Ga doping	10
A new characterization model of FinFET self-heating effect based on FinFET characteristic parameter	9
Al3Sc thin films for advanced interconnect applications	9
Cryo-CMOS design-technology co-optimization of low noise amplifier for silicon qubit readout	9
Chip-level thermal management in GaN HEMT: Critical review on recent patents and inventions	9
Hybrid integrated Si nanosheet GAA-FET and stacked SiGe/Si FinFET using selective channel release strategy	9
Thermal stability, work function and Fermi level analysis of 2D multi-layered hexagonal boron nitride films	9
Optimization of pattern quality in DMD scanning maskless lithography: A parametric study of the OS3L exposure algorithm	9
Effect of temperature on joint quality in wave soldering of Sn-9Zn-2.5Bi-1.5In lead-free solder alloy	9
Dropout neuronal unit with tunable probability based on NbOx stochastic memristor for efficient suppression of overfitting	9
Editorial Board	9
Microfluidic Fredkin gate: A novel control unit for integrated microfluidic systems	8
Facile fabrication of flexible and conductive AuNP/DWCNT fabric with enhanced Joule heating efficiency via spray coating route	8
A self-supported structure hybrid triboelectric/piezoelectric nanogenerator for bio-mechanical energy harvesting and pressure sensing	8
Capacitive immunosensor for COVID-19 diagnosis	8
A low-g omnidirectional MEMS inertial switch with load direction identification	8
Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films	8
A synoptic review of nanoscale vacuum channel transistor: Fabrication to electrical performance	8
Facile and direct 3D printing of smart glove for gesture monitoring	8
Editorial Board	8
An optimized Ni P seed layer coating method for through glass via (TGV)	8
Improved performance of near UV-blue n-ZnO/p-GaN heterostructure LED with an AlN electron blocking layer	8
Editorial Board	8
Editorial Board	8
Effect of the deposition method and substrate on an ultra-stable CoV2O6 hydrogen gas sensor, operating at room temperature	8
Effect of GaN cap layer on the performance of AlInN/GaN-based HEMTs	8
Improving performance of cathode NMC-811 by CeO2-coating for Li-ion battery	8
First steps towards interlocking modular microfluidic cooling substrates (i-MμCS) for future silicon tracking detectors in High Energy Physics (HEP)	8
Design of multi-scroll chaotic attractor based on a novel multi-segmented memristor and its application in medical image encryption	8
Editorial Board	7
Simulation study of zone-height limit by electron beam lithography for 30 nm Fresnel zone plates in X ray optics	7
An enhanced triboelectric nanogenerator with micro-grid patterned PDMS for self-powered sensing and music playback	7
Recent advances in micro- and bio- electromechanical system architectures for energy efficient chemiresistors	7
Design of Ag/PDMS electrodes with a pillar structure for stretchable electronics	7
Electrical characteristics of Si0.7Ge0.3/Si heterostructure-based n-type GAA MOSFETs	7
Impact of annealing on electric and elastic properties of 10-nm Hf0.5Zr0.5O2 films prepared on Si by sputtering	7
Impact of low-temperature and low-pressure mild oxidation after plasma solidification on electrical properties and reliability in ultra-thin SiON MOSFETs	7
Photoelectron spectroscopy study of GeSn epitaxial layers for photonic applications	7
Development of n-type epitaxial growth on 200 mm 4H-SiC wafers for the next generation of power devices	6
Tuning of interface quality of Al/CeO2/Si device by post-annealing of sol-gel grown high-k CeO2 layers	6
Battery anode design: From 1D nanostructure to 3D nanoarchitecture – Enabling next-generation energy storage technology	6
In-situ characterization of thermomechanical behavior of copper nano-interconnect for 3D integration	6
Stepping electron-beam lithography for Y-gate in high electron mobility transistors fabrication	6
Fabrication of high frequency SAW devices using tri-layer lift-off photolithography	6
Nanobeam electron diffraction strain mapping in monocrystalline silicon of modern trench power MOSFETs	6
Editorial Board	6
Overview of printable nanoparticles through inkjet process: Their application towards medical use	6
Fabrication of microchannel and diaphragm for a MEMS acoustic sensor using wet etching technique	6
Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography	6
Fabrication of serpentine and I structured graphene-CNT based highly sensitive and flexible strain sensors	6
Laser induced reverse transfer of bulk Cu with a fs-pulsed UV laser for microelectronics applications	6
Editorial Board	6
Design and optimization of variable gain LNA for IoT applications using meta-heuristics search algorithms	6
Detailed review on c-Si/a-Si:H heterojunction solar cells in perspective of experimental and simulation	6
Self-powered motion state monitoring system based on combined triboelectric nanogenerators for human physiological signal monitoring and energy collection	6
Wheelchair control system with hand movement using accelerometer sensor	5
Particle dispersion and mixing characteristics on the surface of a closed microchamber with magnetic artificial cilia	5
Effect of hydrogen plasma treatment on the electrical properties for SiC-based power MOSFETs	5
Importance of layer distribution in Ni and Au based ohmic contacts to p-type GaN	5
Improving the electrical performance of vertical thin-film transistor by engineering its back-channel interface	5
Editorial Board	5
Redefining microelectronics	5
Origin of charges in bulk Si:HfO2 FeFET probed by nanosecond polarization measurements	5
Sustainable solvent metal lift-off for compound semiconductor fabrication with improved manufacturability	5
Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp	5
Extreme silicon thinning for back side power delivery network: Si thinning stopping on scaled SiGe etch stop layer	5
Smart wearable triboelectric nanogenerator for self-powered bioelectronics and therapeutics	5
Microelectronic Engineering: Publisher's note	5
Micrometer-size crystalline monolayer MoS2 domains obtained by sulfurization of molybdenum oxide ultrathin films	5
High density nanofluidic channels by self-sealing for metallic nanoparticles detection	5
Temperature dependant high output voltage generation via mechanical transducer by using surface modified (O2, CO2, NO2) ZnO nanowires	5
Technology review of CNTs TSV in 3D IC and 2.5D packaging: Progress and challenges from an electrical viewpoint	5
Ta/Al/CuW low temperature ohmic contacts for GaN-on-Si HEMT	5
Developing a micro-thermography system for thermal characterization of LED packages	5
Microstructuring technology for large and cylindrical receivers for concentrated solar plants (CSP)	5

UV-curable polyimide/layered silicate films with improved barrier properties for the protection of semiconductor chips	4
Simulation-based investigation of junction-controlled narrow-band Si photodetector with vertical structure	4
Structural and electrical correlation in aluminum nitride thin films grown by plasma enhanced atomic layer deposition as interface insulating layers on silicon carbide (4H-SiC)	4
GaN radiofrequency components and power amplifiers for next-generation 5G communications	4
Phase field simulation of electrohydrodynamic jet droplets and printing microstructures on insulating substrates	4
Highly thermostable ultrathin planar Ag transparent heaters	4
Investigation of thermal stress effects during annealing of hafnia-made thin film using molecular dynamics simulations	4
Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties	4
4D printing: A detailed review of materials, techniques, and applications	4
A micromachined Joule-Thomson cryocooler for ice lithography	4
Fabrication of high aspect ratio atomic force microscope probes using focused ion beam milled etch mask	4
Graphene-based physical sensors for humidity, temperature and strain detections	4
Ni-based metallization of GeSn layers: A review and recent advances	4
Simulation and optimization of microlens hot-melting fabricating process based on finite element method	4
Bias-stress instabilities in low-temperature thin-film transistors made of Al2O3 and ZnO films deposited by PEALD	4
Burr- and etch-free direct machining of shape-controlled micro- and nanopatterns on polyimide films by continuous nanoinscribing for durable flexible devices	4
Editorial Board	4
Rapid fabrication of NiO/porous Si film for ultra-violate photodetector: The effect of laser energy	4
CSRR loaded high gained 28/38GHz printed MIMO patch antenna array for 5G millimeter wave wireless devices	4
Reactive ion etching of tantalum in silicon tetrachloride	4
Editorial Board	4
Fabrication of uniform, periodic arrays of exotic AlN nanoholes by combining dry etching and hot selective wet etching, accessing geometries unrealisable from wet etching of planar AlN	4
A novel second generation current conveyor (CCII)-based high frequency memristor model	4
Feasibility study of fabricating 20 nm resolution dielectric Fresnel zone plates with ultrahigh aspect ratio for EUV optics	4
Design of memristor hyperchaotic circuit with burst oscillation and infinite attractor coexistence and its application	4
The insight and evaluation of ultra-scaled sub-1 nm gate length transistors	4
Editorial Board	4
A reliability study of the PMMA/Al/UV5 bilayer process for ultra-short T shape gates	4
Shear loading of FCC/BCC Cu/Nb nanolaminates studied by in situ X-ray micro-diffraction	4
A novel microscale platform for leukemia tumor treating field therapy and electrochemical screening	4
Transition between resistive switching modes in asymmetric HfO2-based structures	3
Electron trapping in HfO2 layer deposited over a HF last treated silicon substrate	3
Developing TSV wet cleaning chemistry for quantum computing application	3
Mechanical reinforcement of UV-curable polymer nanocomposite for nanopatterned mold	3
Editorial Board	3
A ScAlN-based piezoelectric breathing mode dual-ring resonator with high temperature stability	3
Rotatory microgripper based on a linear electrostatic driving scheme	3
Vapor deposited thin organic–inorganic capping layers preventing copper line oxidation in polymer-based RDL technologies	3
Mask defect detection by combining wiener deconvolution and illumination optimization	3
Bevel contamination management in 3D integration by localized SiO2 deposition	3
Editorial Board	3
Image analysis algorithm for the verification of hexagonal symmetry in spherical nanostructures	3
Critical solder joint in insulated gate bipolar transistors (IGBT) power module for improved mechanical reliability	3
Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication	3
Fabrication of silicon nitride membrane nanoelectromechanical resonator	3
Variability and power enhancement of current controlled resistive switching devices	3
Surface plasmon resonance sensor based on MXene coated PCF for detecting the cancer cells with machine learning approach	3
Effects of change of oxygen vacancy on hysteresis voltage and stability under time-temperature dependence positive bias stress in amorphous SZTO transistors	3
The effect of Ag atoms diffusion into δ-phase CsPbI3-based memory device	3
Negative capacitance FET based dual-split control 6T-SRAM cell design for energy efficient and robust computing-in memory architectures	3
A novel room temperature SO2 gas sensor based on TiO2/rGO buried-gate FET	3
On the mechanical properties of ultrathin titanium nitride films under different gas ratios of PVD process	3
Investigation of trapping/de-trapping dynamics of surface states in AlGaN/GaN high-electron mobility transistors based on dual-gate structures	3
Photo-conductivity as a transmission phenomenon: Application to the study of β−Ga2O3 thin film	3
Polycrystalline formamidinium lead bromide (FAPbBr3) perovskite as a self-powered and fast visible-light photodetector	3
Facile fabrication of crescentic ZnO nanorod-based photo-catalytic micro-fluidic reactors	3
Mixed dimensional Transition Metal Dichalcogenides (TMDs) vdW Heterostructure based Photodetectors: A review	3
The electrical characteristic of an MIS structure with biocompatible minerals doped (Brushite+Monetite: PVC) interface layer	3
A methodology for mechanical stress and wafer warpage minimization during 3D NAND fabrication	3
Editorial Board	3