Microelectronic Engineering

Papers
(The TQCC of Microelectronic Engineering is 8. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-08-01 to 2025-08-01.)
ArticleCitations
Stress measurement based on magnetic Barkhausen noise for thin films70
Optimizing dose parameters for enhanced maskless lithography in MoS2-based devices58
Growth chemistry and electrical performance of ultrathin alumina formed by area selective vapor phase infiltration55
Evolution of etch profile of <111> silicon in HNA solution44
Editorial Board39
A simulation study of grayscale ice lithography for spiral phase plates in near infrared wavelengths36
Neural network for in-sensor time series recognition based on optoelectronic memristor34
The effect of switching and cycle-to-cycle variations of RRAM on 4-bit encryption/decryption process33
A 10 kHz bandwidth low-power active negative feedback front-end amplifier based on unipolar IZO TFT technology32
Plasma surface treatment of GeSn layers and its subsequent impact on Ni / GeSn solid-state reaction32
CMOS-compatible GaN-based high electron mobility transistors with gate-first technology30
A dual-mass fully decoupled MEMS gyroscope with optimized structural design for minimizing mechanical quadrature coupling29
Humidity-dependent synaptic characteristics in gelatin-based organic transistors28
Selective functionalization of silicon nitride with a water-soluble etch-resistant polymer28
A novel and reliable approach for controlling silicon membrane thickness with smooth surface28
Simulation and optimization of reactor airflow and magnetic field for enhanced thin film uniformity in physical vapor deposition27
Stable electrospray signal on a microfabricated glass chip with three-dimensional open edge and tiered depth geometries25
Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography25
Experimental and theoretical insights into electronic properties of oxygen-doped MoTe2 field effect transistor24
Spin coating in semiconductor lithography: Advances in modeling and future prospects23
Static and dynamic interaction between polyvinyl acetal brushes and flat surfaces—Measuring near-surface brush volume ratio and nodule volume change for moving brushes22
Local strain modification effects on global properties of AlGaN/GaN high electron mobility transistors22
On the influence of Ni(Pt)Si thin film formation on agglomeration threshold temperature and its impact on 3D imaging technology integration21
Influence of AlN spacer and GaN cap layer in GaN heterostructure for RF HEMT applications20
Etch characteristics of cobalt thin films using high density plasma of CH3COCH3/Ar gas mixture20
New concept of two-cascade energy compression systems based on drift step recovery diodes20
Using water structuring by ions to address pattern loading in wet HF-based oxide recess etch20
Micro-Raman evaluation of 200 mm SiC material19
Performance enhancement of WS2 transistors via double annealing19
Dependence of frequency-temperature stability on support tethers in dual-beam piezoresistive sensing MEMS resonators19
Comprehensive physics-based RRAM compact model including the effect of variability and multi-level random telegraph noise18
Hierarchical CuO nanostructured materials for acetaldehyde sensor application17
Reliability challenges in CMOS technology: A manufacturing process perspective17
Neural networks based on in-sensor computing of optoelectronic memristor17
Exploring statistical approaches for accessing the reliability of Y2O3-based memristive devices17
Fully CMOS-compatible passive TiO2-based memristor crossbars for in-memory computing16
Optical, morphological and electrical studies of fully doctor bladed CsPbBr2Cl-based perovskite thin films16
Epitaxial growth of AlGaN/GaN HEMTs on patterned Si substrate for high voltage power switching applications16
A tensile test for freestanding low-k thin films using a lift-off technique16
Editorial Board16
Development of an emulator of the sustainable energy harvesting pad system on a bike lane for charging lithium batteries16
Strategies for avoiding delamination in system-in-packaging devices15
Silicon microresonator arrays: A comprehensive study on fabrication techniques and pH-controlled stress-induced variations in cantilever stiffness15
Improvement in long-term stability of field effect transistor biosensor in aqueous environments using a combination of silane and reduced graphene oxide coating15
Dose-dependent milling efficiencies of helium and nitrogen beams in PMMA15
A triboelectric nanogenerator for mechanical energy harvesting and as self-powered pressure sensor14
Electrical characterization of flexible hafnium oxide capacitors on deformable softening polymer substrate14
Microscale white light emitters fabricated by two-photon polymerization lithography on functional resist14
Chemical structure characteristics of flexible low-k SiCOH thin films etched by inductively coupled plasma-reactive ion etching process using FTIR and XPS spectra analysis14
Evolution of 2D materials conducive to the wearable physical sensors for structural health assessment14
A study of gate recess-width control of InP-based HEMTs by a Si3N4 passivation layer14
A perovskite-based artificial photonic synapse with visible light modulation and ultralow current for neuromorphic computing14
Editorial Board13
Effect of the oxygen dependent device parameters on the electrical properties of a-Si-Zn-Sn-O thin film transistors13
Review of the pressure sensor based on graphene and its derivatives13
A novel high-Q Lamé mode bulk acoustic resonator13
Editorial Board13
Advanced approach of bulk (111) 3C-SiC epitaxial growth13
Thermal management of through-silicon vias and back-end-of-line layers in 3D ICs: A comprehensive review13
Etching mechanism of high-aspect-ratio array structure13
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors13
A novel time-domain in-memory computing unit using STT-MRAM13
The current transport mechanism of Al/Beetroot/Cu used as an organic semiconductor Schottky diode is superior than natural dye-based thin film devices12
Study of ion charging effect to improve reactive-ion-etching profile of PbSe grating structures12
Preventing oxide precipitation in selective wet etching of Si3N4 for 3D-NAND structure fabrication: The role of bubbles12
Synthesis and analysis of TiO2 nanotubes by electrochemical anodization and machine learning method for hydrogen sensors12
Wide scan angle multibeam conformal antenna array with novel feeding for mm-wave 5G applications12
Deep-level traps in as-grown and electron-irradiated homo-epitaxial n-GaN layers grown by MOVPE12
Editorial Board12
Editorial Board12
Amorphous indium gallium zinc oxide thin film transistors (a-IGZO-TFTs): Exciting prospects and fabrication challenges12
Large-scale growth of MoS2 hybrid layer by chemical vapor deposition with nanosheet promoter11
Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error11
Machine learning algorithm for the structural design of MEMS resonators11
Editorial Board11
Novel methods for locating and matching IC cells based on standard cell libraries11
Study of nonlinear vibration of resonant gyroscope based on uncertainty analysis method11
Optimization of read operation for low power consumption in 3D NAND flash memory11
Influence of fluorine implantation on the physical and electrical characteristics of GaN-on-GaN vertical Schottky diode11
A one-step pattern transferring process for freestanding diffractive spiral photon sieves in extreme ultraviolet11
Significant improvement in the performance of well-aligned ZnO nanowire arrays ultraviolet photodetector by Ga doping10
Effect of temperature on joint quality in wave soldering of Sn-9Zn-2.5Bi-1.5In lead-free solder alloy9
Dropout neuronal unit with tunable probability based on NbOx stochastic memristor for efficient suppression of overfitting9
Editorial Board9
Optimization of pattern quality in DMD scanning maskless lithography: A parametric study of the OS3L exposure algorithm9
Al3Sc thin films for advanced interconnect applications9
Cryo-CMOS design-technology co-optimization of low noise amplifier for silicon qubit readout9
A new characterization model of FinFET self-heating effect based on FinFET characteristic parameter9
Hybrid integrated Si nanosheet GAA-FET and stacked SiGe/Si FinFET using selective channel release strategy9
Thermal stability, work function and Fermi level analysis of 2D multi-layered hexagonal boron nitride films9
Chip-level thermal management in GaN HEMT: Critical review on recent patents and inventions9
A synoptic review of nanoscale vacuum channel transistor: Fabrication to electrical performance8
Facile and direct 3D printing of smart glove for gesture monitoring8
Editorial Board8
An optimized Ni P seed layer coating method for through glass via (TGV)8
Improved performance of near UV-blue n-ZnO/p-GaN heterostructure LED with an AlN electron blocking layer8
Editorial Board8
Editorial Board8
Effect of the deposition method and substrate on an ultra-stable CoV2O6 hydrogen gas sensor, operating at room temperature8
Effect of GaN cap layer on the performance of AlInN/GaN-based HEMTs8
Improving performance of cathode NMC-811 by CeO2-coating for Li-ion battery8
First steps towards interlocking modular microfluidic cooling substrates (i-MμCS) for future silicon tracking detectors in High Energy Physics (HEP)8
Design of multi-scroll chaotic attractor based on a novel multi-segmented memristor and its application in medical image encryption8
Microfluidic Fredkin gate: A novel control unit for integrated microfluidic systems8
Facile fabrication of flexible and conductive AuNP/DWCNT fabric with enhanced Joule heating efficiency via spray coating route8
A self-supported structure hybrid triboelectric/piezoelectric nanogenerator for bio-mechanical energy harvesting and pressure sensing8
Capacitive immunosensor for COVID-19 diagnosis8
A low-g omnidirectional MEMS inertial switch with load direction identification8
Effect of accelerated hydrothermal aging on the durability of Si-based dielectric thin films8
0.064522981643677