Journal of Vacuum Science & Technology A

Papers
(The H4-Index of Journal of Vacuum Science & Technology A is 22. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-04-01 to 2025-04-01.)
ArticleCitations
Atomic layer deposition of crystalline molybdenum trioxide and suboxide thin films using molybdenum(II) acetate dimer precursor85
Localized surface plasmon resonance of Ag nanoparticle thin films deposited by direct-current magnetron sputtering60
Role of a cyclopentadienyl ligand in Hf precursors using H2O or O3 as oxidant in atomic layer deposition38
Guide to XPS data analysis: Applying appropriate constraints to synthetic peaks in XPS peak fitting38
Development of single-chamber deposition equipment for organic/inorganic nanohybrid composite material38
High wet-etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane35
Impact of the DC intensity and electrode distance on pulsed-DC powder-pack boride layer growth kinetics34
Step barrier effects during early stages of the kinetic roughening of fcc(111) surfaces34
Perspective on improving the quality of surface and material data analysis in the scientific literature with a focus on x-ray photoelectron spectroscopy (XPS)33
In situ x-ray photoelectron spectroscopy analysis of electrochemical interfaces in battery: Recent advances and remaining challenges32
Enhancing mechanical properties and tribocorrosion resistance of TC4 alloys via plasma nitriding28
Corrosion behavior of the NiCrAlY and NiSiAlY alloys with salt mixtures of NaCl/Na2SO427
Using metal precursors to passivate oxides for area selective deposition26
Retarded solid state dewetting of thin bismuth films with oxide capping layer26
Effect of a-C:H:SiOx coating thickness on corrosion resistance and zeta potential level of Ti-6Al-4V25
Erratum: “Microscopic origins of radiative performance losses in thin-film solar cells at the example of (Ag,Cu)(In,Ga)Se2 devices” [J. Vac. Sci. Technol. A 42, 022803 (2024)]25
Area selective PECVD on metal oxide resist23
Implementation of an artificial spiking neuron with photoreceptor functionality using gas discharge tubes22
Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration22
Evaluation of nickel self-sputtering yields by molecular-dynamics simulation22
Novel secondary ion mass spectrometry identification system for organic materials using random forest22
Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition22
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