Journal of Vacuum Science & Technology A

Papers
(The H4-Index of Journal of Vacuum Science & Technology A is 22. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-06-01 to 2025-06-01.)
ArticleCitations
Implementation of an artificial spiking neuron with photoreceptor functionality using gas discharge tubes89
Correlating chemical and electronic states from quantitative photoemission electron microscopy of transition-metal dichalcogenide heterostructures71
Role of nanoscale surface defects on Sn adsorption and diffusion behavior on oxidized Nb(100)47
Study of synthesis strategies to improve the electrical properties of magnetron sputtered copper oxide thin films41
Use of in situ electrical conductance measurements to understand the chemical mechanisms and chamber wall effects during vapor phase infiltration doping of poly(aniline) with TiCl4 + H2O39
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition39
Size distribution of clusters and nucleation preference of trimers during SiC (0001) surface epitaxial growth under low coverage36
Conformal coating of macroscopic nanoparticle compacts with ZnO via atomic layer deposition35
Peak intensities in Auger electron spectroscopy for quantification: Relationship between differentiated spectral intensities and direct peak areas34
Nitrogen-incorporated tetrahedral amorphous carbon optically transparent thin film electrode27
Kinetic Monte Carlo study on the effect of growth conditions on the epitaxial growth of 3C–SiC (0001) vicinal surface27
Friction and wear behavior of C implanted copper via ion beam-assisted bombardment26
Tailoring structure, morphology, and tribo-mechanical properties of HiPIMS-deposited CrxNy coatings for enhanced performance in wear and corrosion protection26
Zirconia-titania-doped tantala optical coatings for low mechanical loss Bragg mirrors26
Erratum: “MoS2-assisted growth of highly-oriented AlN thin films by low-temperature van der Waals epitaxy” [J. Vac. Sci. Technol. A 42, 050401 (2024)]26
Erratum: “Microscopic origins of radiative performance losses in thin-film solar cells at the example of (Ag,Cu)(In,Ga)Se2 devices” [J. Vac. Sci. Technol. A 42, 022803 (2024)]25
High crystalline quality homoepitaxial Si-doped β-Ga2O3(010) layers with reduced structural anisotropy grown by hot-wall MOCVD25
Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration25
On the interplay between a novel iron and iron-carbide atomic layer deposition process, the carbon nanotube growth, and the metal–carbon nanotube coating properties on silica substrates24
Retarded solid state dewetting of thin bismuth films with oxide capping layer24
Using auxiliary electrochemical working electrodes as probe during contact glow discharge electrolysis: A proof of concept study22
Novel principal component analysis tool based on python for analysis of complex spectra of time-of-flight secondary ion mass spectrometry22
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