OOIR: Observatory of International Research

Papers

(The median citation count of IEEE Transactions on Semiconductor Manufacturing is 0. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-08-01 to 2025-08-01.)

Article	Citations
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	51
IEEE Transactions on Semiconductor Manufacturing Publication Information	42
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	37
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	36
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	35
Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments	33
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	32
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters	31
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding	31
Defect Reduction And Line Width Roughness Improvement By Using A Post Precoat Treatment In Waferless Chamber Conditioning	31
Call for Papers for IEEE Transactions on Materials for Electron Devices	25
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	25
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	22
Computational Study of Chemical Uniformity Impacts on Electrodeposition	22
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	22
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	21
Level Set Simulation on Single Wafer Wet Processing Improvement	21
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	20
Advanced Process Control System for Trench Shape of Power Devices	19
Single-Mask Fabrication of Sharp SiO_x Nanocones	18
Editorial	17
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	16
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	16
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	15
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	15

Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	14
IEEE Transactions on Semiconductor Manufacturing Publication Information	13
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	13
Grain Morphology Effects on Void Formation and Electromigration-Induced Failure in Copper Interconnects	13
Test Structure for Measuring the Selectivity in XeF₂ and HF Vapour Etch Processes	12
Blank Page	12
In-Situ Plasma Monitoring Using Multiple Plasma Information in SiO2 Etch Process	12
Physics-Informed Machine Learning Based Edge Detection for SEM Images	12
Correlation Between Trench Angle and Wafer Warpage in Trench Field Plate Power MOSFETs and its Application to Quality Control	11
DPFEE-Net: Enhancing Wafer Defect Classification Through Dual-Path Neural Architecture	11
Automatic Classification of C-SAM Voids for Root Cause Identification of Bonding Yield Degradation	10
A Warpage Prediction Model for Trench Field-Plate Power MOSFET in 300mm-Diameter Process	10
Blank Page	10
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	10
Integration Challenges on 300mm High Resistivity Silicon Substrates	10
Source Pad Design Tradeoffs for a Power TrenchFET	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations	9
2023 Index IEEE Transactions on Semiconductor Manufacturing Vol. 36	9
2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34	9
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process	9
IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award: Call for Nominations	8
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	8
Wafer Dicing Vibration Investigation on Novel Wafer Mounting Techniques	8
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN	7
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	7
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics	7
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	7
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	7
Table of Contents	7
Journal of Lightwave Technology Special Issue on: OFS-29	7
Front Cover	7
Evaluation of Thick Silicon Nitride Film Properties at 300 mm Scale for High-Q Photonic Devices	7
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	7
RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	6
Table of Contents	6
Rapid Resolution of Parametric Failures in the Process Development Period by Integrating Device Physics and Big Data	6
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	6
Call for Nominations: 2024 EDS Early Career Award	6
Minimizing Convolutional Neural Network Training Data With Proper Data Augmentation for Inline Defect Classification	6
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	6
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	6
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	6
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	6
IEEE Transactions on Semiconductor Manufacturing Publication Information	6
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	6
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	6

Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	6
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	6
Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference	6
Semantic Context Information Modeling With Neural Networks in Customer Order Behavior Classification	6
New Process Integration of Sequential Phosphorus-Doped Silicon for Trench Field Plate Power MOSFETs	6
Editorial	6
IEEE Transactions on Semiconductor Manufacturing Information for Authors	5
Table of contents	5
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	5
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	5
Manufacturing of 3D Helical Microswimmer by AFM Micromanipulation for Microfluidic Applications	5
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	5
Unsupervised Representation Learning and Explainable Clustering for Wafer Map Pattern Analysis	5
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	5
Table of Contents	5
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	5
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	5
Double Coating Process Using the Single Photoresist and the Thickness Prediction	5
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	5
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	5
Improving Endpoint Detection Sensitivity in Plasma Etching with Small Openings	5
Editorial	5
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	5
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	5
BCICTS 2023 Call for Papers	5
A Novel Foundry Yield Model Using Critical Area Analysis	5
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	5
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	4
TechRxiv: Share Your Preprint Research With the World!	4
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	4
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on New simulation methodologies for next-generation TCAD tools	4
Guest Editorial Special Section on Sustainability	4
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	4
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	4
Blank page	4
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	4
Surface Reconstruction for Enhancing the Overlay Modeling Optimization Procedure in Photolithography Processes	4
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	4
Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability	4
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	4
Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics	4
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	4
Guest Editorial Introduction to the Joint Special Issue on Semiconductor Design for Manufacturing (DFM)	4
Sustainable Technologies for Responsible Products and a More Sustainable Future	3
Real-Time Change Detection for Automated Test Socket Inspection Using Advanced Computer Vision and Machine Learning	3
A Self-Test Method of Structural Failures of Uncooled Infrared Focal Plane Array	3
Front Cover	3
The Modeling of Post-Annealing and Etching Processes of ALD SiO2 Using Intermediate Variables Considering Digital Twin Model Reusability	3
Guest Editorial Special Section on the IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)	3
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	3
Enhancing Current Gain in Polysilicon Emitter Bipolar Transistors Through Emitter-Base Interface Engineering	3
Comprehensive Study of the Impact of LWR on Device Performance in VLSI Technology	3
Effects of the Applied Power of Remote Plasma System With Green Alternative Chamber Cleaning Gas of Carbonyl Fluoride	3
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	3
Blank Page	3
A Diffusion-Model-Based Methodology for Virtual Silicon Data Generation	3
Editorial	3
Analysis of Image Hashing in Wafer Map Failure Pattern Recognition	3
Mechanistic Analysis of the Effect of Gap on Convex Curves of Wafer in Double-Sided Polishing	3
Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders	3
Blank page	3
Model-Based OPC With Adaptive PID Control Through Reinforcement Learning	3
Comparative Study of Nondestructive Mapping of Conformal-Coating Thickness on Microelectronics by Terahertz Time-of-Flight Tomography	3
Editorial	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	3
Avalanche Capability Improvement by Optimizing p+ Contact Resistance for N-channel Trench Power MOSFETs	3
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	3
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	3
Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors	2
Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization	2
Vacancy-Type Defects in HfO2 Layers and Their Role in Amorphous-to-Crystalline Transition Studied by Monoenergetic Positron Beams	2
BCICTS 2022 CALL FOR PAPERS	2
Efficient Dual-Attention-Based Knowledge Distillation Network for Unsupervised Wafer Map Anomaly Detection	2
Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin	2
3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology	2
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	2
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	2

Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	2
IEEE Transactions on Semiconductor Manufacturing publication information	2
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	2
Simulations of Modified Shallow Water Equation and Reaction Kinetics of Poly Etching on Single Wafer Process	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Table of Contents	2
Table of Contents	2
Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	2
An Alternative PECVD Chamber Cleaning Gas of COF2 for Low-GWP Consideration	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Editorial	2
Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	2
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process	2
Chamber and Recipe-Independent FDC Indicator in High-Mix Semiconductor Manufacturing	2
Metal Contamination Behavior on Silicon Dioxide Surface Rinsed With Deionized Water Containing Ultra-Trace Metal during Single-Wafer Cleaning	2
Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits	1
Optimization of Void Defects at TiN/Si:HfO₂ Interface for 3-D Ferroelectric Memory	1
DeePattern: Layout Pattern Generation With Transforming Convolutional Auto-Encoder	1
Spatial and Channel-Wise Co-Attention-Based Twin Network System for Inspecting Integrated Circuit Substrate	1
Atomic Layer Processes for Material Growth and Etching—A Review	1
Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling	1
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	1
A Fine-Grained, End-to-End Feature-Scale CMP Modeling Paradigm Based on Fully Convolutional Neural Networks	1
A Real-Time Automatic Structural-Loss Detection and Stopping Rule of Semiconductor Single-Crystal-Silicon-Growth <100> and <111>	1
SnS₂ and ZnO Nanocomposite Prepared by Dispersion Method for Photodetector Application	1
Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing	1
Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing	1
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	1
Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask	1
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	1
Correlated Bayesian Co-Training for Virtual Metrology	1
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	1
A Hierarchical Spatial-Test Attention Network for Explainable Multiple Wafer Bin Maps Classification	1
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	1
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	1
Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation	1
IEEE Transactions on Semiconductor Manufacturing publication information	1
On Uses of Noise Analysis for the Uncertainty Quantification of Line Edge Roughness Estimation	1
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time	1
Improvement of Multi-Lines Bridge Defect Classification by Hierarchical Architecture in Artificial Intelligence Automatic Defect Classification	1
Fast and Precise Temperature Control for a Semiconductor Vertical Furnace via Heater-Cooler Integration	1
The Research on Screening Method to Reduce Chip Test Escapes by Using Multi-Correlation Analysis of Parameters	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index	1
A Case Study on Sputtered Chromium Sacrificial Layer for Ti₂O₃ Microstructure Fabrication	1
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber	1
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	1
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition	1
Modeling and Designing a GaN-Growth Reactor With Halogen-Free Vapor Phase Epitaxy: NH₃ Decomposition at the Catalytic Surface of Components to Replicate Parasitic Polycrystal Formation	1
E-Test Validation of Space Error Budget and Metrology	1
ML-Guided Curvilinear OPC: Fast, Accurate, and Manufacturable Curve Correction	1
Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C₄F₈/Ar/O₂ Plasma	1
Plasma Pretreatment System for the Reduction of By-Product Particles in Semiconductor Manufacturing	1
Front cover	1
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification	1
Practical Q-Learning-Based Route-Guidance and Vehicle Assignment for OHT Systems in Semiconductor Fabs	1
Front Cover	1
Optimizing Scanning Acoustic Tomography Image Segmentation With Segment Anything Model for Semiconductor Devices	1
Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots	1
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
Wireless Measurement of the Degradation Rates of Thin Film Bioresorbable Metals Using Reflected Impedance	1
Process Control in Semiconductor Manufacturing Based on Deep Distributional Soft Actor-Critic Reinforcement Learning	1
Blank Page	1
Process-Aware Digital Twins by Deep Learning for DUV Photolithography and Plasma Etch	1
Ar/N2 gas Flow Rate Dependence on the Ferroelectric HfNx Thin Film Formation by ECR-Plasma Sputtering	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations	0
Adversarial Defect Detection in Semiconductor Manufacturing Process	0
Blank Page	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "From Mega to nano: Beyond one Century of Vacuum Electronics"	0
A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on Ultrawide Band Gap Semiconductor Devices for RF, Power and Optoelectronic Applications	0
An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation	0
Optimization of RF Frequencies in Dual-Frequency Capacitively Coupled Plasma Apparatus Using Genetic Algorithm (GA) and Plasma Simulation	0
Identifying Good-Dice-in-Bad-Neighborhoods Using Artificial Neural Networks	0
Editorial	0
Table of Contents	0
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	0
A Lightweight Chip-Scale Chemical Mechanical Polishing Model Based on Polynomial Network	0
Reducing Datacenter Compute Carbon Footprint by Harnessing the Power of Specialization: Principles, Metrics, Challenges and Opportunities	0
Call for Papers for a Special Issue of IEEE Transactions on Materials for Electron Devices: "Exploration of the Exciting World of Multifunctional Oxide-Based Electronic Devices: From Material to Syste	0
Self-Assured Deep Learning With Minimum Pre-Labeled Data for Wafer Pattern Classification	0
A Dry Etch Approach To Reduce Roughness and Eliminate Visible Grind Marks in Silicon Wafers Post Back-Grind	0
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	0
Parametric Optimization for Moisture Infiltration Prevention Into a FOUP (Front Opening Unified Pod)	0
Study on Measurement Method of Microscopic ζ Potential	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	0
Bayesian Nonparametric Classification for Incomplete Data With a High Missing Rate: an Application to Semiconductor Manufacturing Data	0
Simulation and Experimental Analysis of Contactless Chip Pickup Process Based on a Vortex Flow Gripper	0
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	0