OOIR: Observatory of International Research

Papers

(The median citation count of IEEE Transactions on Semiconductor Manufacturing is 0. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-09-01 to 2025-09-01.)

Article	Citations
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	43
IEEE Transactions on Semiconductor Manufacturing Publication Information	39
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	38
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	34
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	33
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters	32
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	31
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding	31
Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments	27
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	23
Defect Reduction and Line Width Roughness Improvement by Using a Post Precoat Treatment in Waferless Chamber Conditioning	23
Call for Papers for IEEE Transactions on Materials for Electron Devices	22
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	22
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	22
Computational Study of Chemical Uniformity Impacts on Electrodeposition	20
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	19
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	18
Level Set Simulation on Single Wafer Wet Processing Improvement	16
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	16
Advanced Process Control System for Trench Shape of Power Devices	15
Single-Mask Fabrication of Sharp SiO_x Nanocones	14
Editorial	14
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	13
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	13
Grain Morphology Effects on Void Formation and Electromigration-Induced Failure in Copper Interconnects	13

Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	12
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	12
Synthesis of Critical Patterns for Lithography Optimizations through Machine Learning	12
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	10
IEEE Transactions on Semiconductor Manufacturing Publication Information	10
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	9
A Warpage Prediction Model for Trench Field-Plate Power MOSFET in 300mm-Diameter Process	9
Blank Page	9
DPFEE-Net: Enhancing Wafer Defect Classification Through Dual-Path Neural Architecture	9
Automatic Classification of C-SAM Voids for Root Cause Identification of Bonding Yield Degradation	9
Blank Page	9
Source Pad Design Tradeoffs for a Power TrenchFET	9
A Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	8
Integration Challenges on 300-mm High Resistivity Silicon Substrates	8
Physics-Informed Machine Learning-Based Edge Detection for SEM Images	8
In-Situ Plasma Monitoring Using Multiple Plasma Information in SiO₂ Etch Process	8
2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	7
Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations	7
IEEE Transactions on Semiconductor Manufacturing Publication Information	7
IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award: Call for Nominations	7
2023 Index IEEE Transactions on Semiconductor Manufacturing Vol. 36	7
Wafer Dicing Vibration Investigation on Novel Wafer Mounting Techniques	7
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	7
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process	7
Journal of Lightwave Technology Special Issue on: OFS-29	7
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	7
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN	6
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	6
Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	6
Characterizing Capacitor Top Plate Bias for More Accurate Electromagnetic Simulations	6
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	6
Evaluation of Thick Silicon Nitride Film Properties at 300 mm Scale for High-Q Photonic Devices	6
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	6
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	6
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	6
Table of Contents	6
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	6
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics	6
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	6
RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	6
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	6
Front Cover	6
Call for Nominations: 2024 EDS Early Career Award	5
Table of Contents	5
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	5
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	5
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	5
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	5

Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	5
Semantic Context Information Modeling With Neural Networks in Customer Order Behavior Classification	5
Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference	5
Editorial	5
BCICTS 2023 Call for Papers	5
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	5
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	5
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	5
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	5
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	5
Double Coating Process Using the Single Photoresist and the Thickness Prediction	5
IEEE Transactions on Semiconductor Manufacturing Publication Information	5
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	5
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	5
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Improving Endpoint Detection Sensitivity in Plasma Etching With Small Openings	4
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	4
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	4
Surface Reconstruction for Enhancing the Overlay Modeling Optimization Procedure in Photolithography Processes	4
TechRxiv: Share Your Preprint Research With the World!	4
Editorial	4
Current Status of Bulk β-Ga2O3 and β-(AlxGa1-x)2O3 Crystal Growth	4
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	4
Table of contents	4
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	4
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	4
Guest Editorial Special Section on Sustainability	4
Table of Contents	4
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	4
Unsupervised Representation Learning and Explainable Clustering for Wafer Map Pattern Analysis	4
Guest Editorial Introduction to the Joint Special Issue on Semiconductor Design for Manufacturing (DFM)	4
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	3
Comparative Study of Nondestructive Mapping of Conformal-Coating Thickness on Microelectronics by Terahertz Time-of-Flight Tomography	3
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	3
Editorial	3
Blank page	3
Sustainable Technologies for Responsible Products and a More Sustainable Future	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability	3
Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics	3
Blank Page	3
Real-Time Change Detection for Automated Test Socket Inspection Using Advanced Computer Vision and Machine Learning	3
Effects of the Applied Power of Remote Plasma System With Green Alternative Chamber Cleaning Gas of Carbonyl Fluoride	3
Editorial	3
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	3
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	3
A Diffusion-Model-Based Methodology for Virtual Silicon Data Generation	3
Model-Based OPC With Adaptive PID Control Through Reinforcement Learning	3
Front Cover	3
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	2
Simulations of Modified Shallow Water Equation and Reaction Kinetics of Poly Etching on Single Wafer Process	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Editorial	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Analysis of Image Hashing in Wafer Map Failure Pattern Recognition	2
Avalanche Capability Improvement by Optimizing p+ Contact Resistance for N-Channel Trench Power MOSFETs	2
Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders	2
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	2
BCICTS 2022 CALL FOR PAPERS	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
An Alternative PECVD Chamber Cleaning Gas of COF₂ for Low-GWP Consideration	2
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	2
Efficient Dual-Attention-Based Knowledge Distillation Network for Unsupervised Wafer Map Anomaly Detection	2
Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing	2
Mechanistic Analysis of the Effect of Gap on Convex Curves of Wafer in Double-Sided Polishing	2
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	2
Multi-Scale Adaptive Inspection Framework for Voids in MOSFETs	2
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	2
Table of Contents	2
Vacancy-Type Defects in HfO₂ Layers and Their Role in Amorphous-to-Crystalline Transition Studied by Monoenergetic Positron Beams	2
Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors	2
Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization	2
The Modeling of Post-Annealing and Etching Processes of ALD SiO₂ Using Intermediate Variables Considering Digital Twin Model Reusability	2
Enhancing Current Gain in Polysilicon Emitter Bipolar Transistors Through Emitter-Base Interface Engineering	2
Comprehensive Study of the Impact of LWR on Device Performance in VLSI Technology	2
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
Correlated Bayesian Co-Training for Virtual Metrology	1
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	1

A Case Study on Sputtered Chromium Sacrificial Layer for Ti₂O₃ Microstructure Fabrication	1
E-Test Validation of Space Error Budget and Metrology	1
TAFF-YOLO: An Enhanced YOLO Model With Transformer and Attention Feature Fusion for Chip Internal Defect Detection	1
Blank Page	1
Atomic Layer Processes for Material Growth and Etching—A Review	1
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	1
A Real-Time Automatic Structural-Loss Detection and Stopping Rule of Semiconductor Single-Crystal-Silicon-Growth <100> and <111>	1
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	1
A Hierarchical Spatial-Test Attention Network for Explainable Multiple Wafer Bin Maps Classification	1
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	1
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	1
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	1
On Uses of Noise Analysis for the Uncertainty Quantification of Line Edge Roughness Estimation	1
Table of Contents	1
ML-Guided Curvilinear OPC: Fast, Accurate, and Manufacturable Curve Correction	1
Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask	1
Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling	1
High Voltage Design Strategies for Gallium Oxide Power Devices	1
A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index	1
Ar/N₂ Gas Flow Rate Dependence on the Ferroelectric HfNₓ Thin Film Formation by ECR-Plasma Sputtering	1
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification	1
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	1
Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing	1
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	1
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process	1
3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology	1
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	1
Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin	1
Wireless Measurement of the Degradation Rates of Thin Film Bioresorbable Metals Using Reflected Impedance	1
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	1
Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber	1
Process Control in Semiconductor Manufacturing Based on Deep Distributional Soft Actor-Critic Reinforcement Learning	1
Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C₄F₈/Ar/O₂ Plasma	1
Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots	1
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	1
Optimization of Void Defects at TiN/Si:HfO₂ Interface for 3-D Ferroelectric Memory	1
Front Cover	1
Modeling and Designing a GaN-Growth Reactor With Halogen-Free Vapor Phase Epitaxy: NH₃ Decomposition at the Catalytic Surface of Components to Replicate Parasitic Polycrystal Formation	1
The Research on Screening Method to Reduce Chip Test Escapes by Using Multi-Correlation Analysis of Parameters	1
Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits	1
Metal Contamination Behavior on Silicon Dioxide Surface Rinsed With Deionized Water Containing Ultra-Trace Metal During Single-Wafer Cleaning	1
Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique	1
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
A Proactive Approach of Optimizing Real-Time Equipment Monitoring Settings for Enhancing End-of-Line Yield	0
A Data-Driven Approach for Improving Energy Efficiency in a Semiconductor Manufacturing Plant	0
Improvement of Plasma Etching Endpoint Detection With Data-Driven Wavelength Selection and Gaussian Mixture Model	0
On the Fly Ellipsometry Imaging for Process Deviation Detection	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide Band Gap Semiconductors for Automotive Applications"	0
Optimization of RF Frequencies in Dual-Frequency Capacitively Coupled Plasma Apparatus Using Genetic Algorithm (GA) and Plasma Simulation	0
Call for Papers: Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	0
Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations	0
Semiconductor Device Modeling for Circuit and System Design	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	0
A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on Ultrawide Band Gap Semiconductor Devices for RF, Power and Optoelectronic Applications	0
Self-Assured Deep Learning With Minimum Pre-Labeled Data for Wafer Pattern Classification	0
One Class Process Anomaly Detection Using Kernel Density Estimation Methods	0
Parametric Optimization for Moisture Infiltration Prevention Into a FOUP (Front Opening Unified Pod)	0
Novel Control Method and Applications for Negative Mode E-Beam Inspection	0
Identifying Good-Dice-in-Bad-Neighborhoods Using Artificial Neural Networks	0
IEEE Transactions on Semiconductor Manufacturing Publication Information	0
Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts	0
Cross-Chamber Data Transferability Evaluation for Fault Detection and Classification in Semiconductor Manufacturing	0
Guest Editorial Special section on the 2023 SEMI Advanced Semiconductor Manufacturing Conference	0
An Investigation of Edge Bead Removal Width Variability, Effects and Process Control in Photolithographic Manufacturing	0
Editorial	0
Thermal and Electrical Analysis of the Electrostatic Chuck for the Etch Equipment	0
A Novel Automatic Probe-to-Pad Alignment Error Correction Approach	0
Semiconductor Defect Pattern Classification by Self-Proliferation-and-Attention Neural Network	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "From Mega to nano: Beyond one Century of Vacuum Electronics"	0
A Lightweight Chip-Scale Chemical Mechanical Polishing Model Based on Polynomial Network	0
Call for Papers for a Special Issue of IEEE Transactions on Materials for Electron Devices: "Exploration of the Exciting World of Multifunctional Oxide-Based Electronic Devices: From Material to Syste	0
Blank Page	0
Table of Contents	0
Call for Papers for IVEC 2023	0
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	0
Optimal Feature Selection for Defect Classification in Semiconductor Wafers	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Characterization of Multimodal Spot Scanning Imaging System for Wafer Defect Inspection	0
Equipment Condition Monitoring of Multiple Oxide-Nitride Stack Layer Deposition Process	0
An Emerging Local Annealing Method for Simultaneous Crystallization and Activation in Xtacking 3-D NAND Flash	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Electrical Measurements to Detect Liquid Concentration	0
A Dry Etch Approach To Reduce Roughness and Eliminate Visible Grind Marks in Silicon Wafers Post Back-Grind	0
A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling	0
Curvilinear Standard Cell Design for Semiconductor Manufacturing	0
Comparison of Semiconductor Reverse Osmosis System Performance With Conventional and 3D Printed Feed Channels	0
Bayesian Nonparametric Classification for Incomplete Data With a High Missing Rate: an Application to Semiconductor Manufacturing Data	0
Simulation and Experimental Analysis of Contactless Chip Pickup Process Based on a Vortex Flow Gripper	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders	0
Blank Page	0
Impact of Annealing Temperature on MnO₂ Thin Films: Morphological, Structural, and Electrical Properties	0
Reducing Datacenter Compute Carbon Footprint by Harnessing the Power of Specialization: Principles, Metrics, Challenges and Opportunities	0