OOIR: Observatory of International Research

Papers

(The median citation count of IEEE Transactions on Semiconductor Manufacturing is 0. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-06-01 to 2025-06-01.)

Article	Citations
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	48
IEEE Transactions on Semiconductor Manufacturing Publication Information	41
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	36
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	34
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	33
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters	33
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding	30
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	30
Defect Reduction And Line Width Roughness Improvement By Using A Post Precoat Treatment In Waferless Chamber Conditioning	30
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	28
Call for Papers for IEEE Transactions on Materials for Electron Devices	25
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	22
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	22
Computational Study of Chemical Uniformity Impacts on Electrodeposition	21
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	21
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	19
Level Set Simulation on Single Wafer Wet Processing Improvement	19
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	19
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	18
Advanced Process Control System for Trench Shape of Power Devices	16
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	16
Single-Mask Fabrication of Sharp SiO_x Nanocones	15
Editorial	15
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	14
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	14

IEEE Transactions on Semiconductor Manufacturing Publication Information	13
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	13
DPFEE-Net: Enhancing Wafer Defect Classification Through Dual-Path Neural Architecture	12
Blank Page	12
Test Structure for Measuring the Selectivity in XeF₂ and HF Vapour Etch Processes	12
In-Situ Plasma Monitoring Using Multiple Plasma Information in SiO2 Etch Process	12
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	11
Blank Page	11
Correlation Between Trench Angle and Wafer Warpage in Trench Field Plate Power MOSFETs and its Application to Quality Control	11
Automatic Classification of C-SAM Voids for Root Cause Identification of Bonding Yield Degradation	10
Source Pad Design Tradeoffs for a Power TrenchFET	10
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
A Warpage Prediction Model for Trench Field-Plate Power MOSFET in 300mm-Diameter Process	9
2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34	9
Integration Challenges on 300mm High Resistivity Silicon Substrates	9
Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations	8
2023 Index IEEE Transactions on Semiconductor Manufacturing Vol. 36	8
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	8
Wafer Dicing Vibration Investigation on Novel Wafer Mounting Techniques	8
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process	8
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	7
IEEE Transactions on Semiconductor Manufacturing Publication Information	7
Table of Contents	7
Journal of Lightwave Technology Special Issue on: OFS-29	7
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics	7
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	7
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	7
IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award: Call for Nominations	7
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN	7
Front Cover	7
Rapid Resolution of Parametric Failures in the Process Development Period by Integrating Device Physics and Big Data	6
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	6
Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	6
RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	6
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	6
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	6
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	6
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	6
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	6
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	6
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	5
Call for Nominations: 2024 EDS Early Career Award	5
Table of Contents	5
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	5
IEEE Transactions on Semiconductor Manufacturing Publication Information	5
Double Coating Process Using the Single Photoresist and the Thickness Prediction	5
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	5
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	5
Semantic Context Information Modeling With Neural Networks in Customer Order Behavior Classification	5

Minimizing Convolutional Neural Network Training Data With Proper Data Augmentation for Inline Defect Classification	5
Editorial	5
Manufacturing of 3D Helical Microswimmer by AFM Micromanipulation for Microfluidic Applications	5
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	5
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	5
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	5
New Process Integration of Sequential Phosphorus-Doped Silicon for Trench Field Plate Power MOSFETs	5
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	5
Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference	5
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	5
BCICTS 2023 Call for Papers	5
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	5
Surface Reconstruction for Enhancing the Overlay Modeling Optimization Procedure in Photolithography Processes	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Table of contents	4
A Novel Foundry Yield Model Using Critical Area Analysis	4
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	4
Guest Editorial Special Section on Sustainability	4
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	4
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	4
TechRxiv: Share Your Preprint Research With the World!	4
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	4
Editorial	4
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	4
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Guest Editorial Introduction to the Joint Special Issue on Semiconductor Design for Manufacturing (DFM)	4
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	4
Table of Contents	4
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	4
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	4
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	4
Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability	3
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	3
Effects of the Applied Power of Remote Plasma System With Green Alternative Chamber Cleaning Gas of Carbonyl Fluoride	3
Blank page	3
Guest Editorial Special Section on the IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)	3
Editorial	3
Blank Page	3
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	3
Blank page	3
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	3
Real-Time Change Detection for Automated Test Socket Inspection Using Advanced Computer Vision and Machine Learning	3
Front Cover	3
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	3
Comprehensive Study of the Impact of LWR on Device Performance in VLSI Technology	3
Comparative Study of Nondestructive Mapping of Conformal-Coating Thickness on Microelectronics by Terahertz Time-of-Flight Tomography	3
Editorial	3
Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics	3
A Diffusion-Model-Based Methodology for Virtual Silicon Data Generation	3
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	3
Sustainable Technologies for Responsible Products and a More Sustainable Future	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	3
Model-Based OPC With Adaptive PID Control Through Reinforcement Learning	3
A Self-Test Method of Structural Failures of Uncooled Infrared Focal Plane Array	3
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on New simulation methodologies for next-generation TCAD tools	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing	2
Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders	2
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	2
An Alternative PECVD Chamber Cleaning Gas of COF2 for Low-GWP Consideration	2
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	2
Chamber and Recipe-Independent FDC Indicator in High-Mix Semiconductor Manufacturing	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	2
Simulations of Modified Shallow Water Equation and Reaction Kinetics of Poly Etching on Single Wafer Process	2
Vacancy-Type Defects in HfO2 Layers and Their Role in Amorphous-to-Crystalline Transition Studied by Monoenergetic Positron Beams	2
Enhancing Current Gain in Polysilicon Emitter Bipolar Transistors Through Emitter-Base Interface Engineering	2
Product Design Enhancement With Test Structures for Non-Contact Detection of Yield Detractors	2
Editorial	2
Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique	2
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	2
3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
BCICTS 2022 CALL FOR PAPERS	2
Wafer Scratch Pattern Reconstruction for High Diagnosis Accuracy and Yield Optimization	2
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	2
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	2
Analysis of Image Hashing in Wafer Map Failure Pattern Recognition	2

IEEE Transactions on Semiconductor Manufacturing publication information	2
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process	2
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	2
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	2
Table of Contents	2
Efficient Dual-Attention-Based Knowledge Distillation Network for Unsupervised Wafer Map Anomaly Detection	2
On Uses of Noise Analysis for the Uncertainty Quantification of Line Edge Roughness Estimation	1
Fast and Precise Temperature Control for a Semiconductor Vertical Furnace via Heater-Cooler Integration	1
Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin	1
Atomic Layer Processes for Material Growth and Etching—A Review	1
Improvement of Multi-Lines Bridge Defect Classification by Hierarchical Architecture in Artificial Intelligence Automatic Defect Classification	1
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	1
Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing	1
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	1
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation	1
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
Process Control in Semiconductor Manufacturing Based on Deep Distributional Soft Actor-Critic Reinforcement Learning	1
E-Test Validation of Space Error Budget and Metrology	1
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	1
Front cover	1
A Practical Approach for Managing End-of-Life Systems in Semiconductor Manufacturing Using Health Index	1
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time	1
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	1
A Real-Time Automatic Structural-Loss Detection and Stopping Rule of Semiconductor Single-Crystal-Silicon-Growth <100> and <111>	1
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	1
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	1
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	1
Optimizing Scanning Acoustic Tomography Image Segmentation With Segment Anything Model for Semiconductor Devices	1
Practical Q-Learning-Based Route-Guidance and Vehicle Assignment for OHT Systems in Semiconductor Fabs	1
Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits	1
Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask	1
Table of Contents	1
A Case Study on Sputtered Chromium Sacrificial Layer for Ti₂O₃ Microstructure Fabrication	1
The Research on Screening Method to Reduce Chip Test Escapes by Using Multi-Correlation Analysis of Parameters	1
ML-Guided Curvilinear OPC: Fast, Accurate, and Manufacturable Curve Correction	1
High Accuracy Simulation of Silicon Oxynitride Film Grown by Plasma Enhanced Chemical Vapor Deposition	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
Wireless Measurement of the Degradation Rates of Thin Film Bioresorbable Metals Using Reflected Impedance	1
A Fine-Grained, End-to-End Feature-Scale CMP Modeling Paradigm Based on Fully Convolutional Neural Networks	1
Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing	1
Front Cover	1
Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots	1
Blank Page	1
SnS₂ and ZnO Nanocomposite Prepared by Dispersion Method for Photodetector Application	1
Modeling and Designing a GaN-Growth Reactor With Halogen-Free Vapor Phase Epitaxy: NH₃ Decomposition at the Catalytic Surface of Components to Replicate Parasitic Polycrystal Formation	1
Correlated Bayesian Co-Training for Virtual Metrology	1
A Hierarchical Spatial-Test Attention Network for Explainable Multiple Wafer Bin Maps Classification	1
Application of Plasma Information-Based Virtual Metrology (PI-VM) for Etching in C₄F₈/Ar/O₂ Plasma	1
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification	1
Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling	1
Optimization of Void Defects at TiN/Si:HfO₂ Interface for 3-D Ferroelectric Memory	1
Eco-Friendly Dry-Cleaning and Diagnostics of Silicon Dioxide Deposition Chamber	1
IEEE Transactions on Semiconductor Manufacturing publication information	1
Advancing Condition-Based Maintenance in the Semiconductor Industry: Innovations, Challenges and Future Directions for Predictive Maintenance	1
Guest Editorial Special section on the 2022 International Symposium on Semiconductor Manufacturing	0
A Novel Automatic Probe-to-Pad Alignment Error Correction Approach	0
Guest Editorial Special section on the 2023 SEMI Advanced Semiconductor Manufacturing Conference	0
Reducing Datacenter Compute Carbon Footprint by Harnessing the Power of Specialization: Principles, Metrics, Challenges and Opportunities	0
Simulation and Experimental Analysis of Contactless Chip Pickup Process Based on a Vortex Flow Gripper	0
Self-Assured Deep Learning With Minimum Pre-Labeled Data for Wafer Pattern Classification	0
Optimization of RF Frequencies in Dual-Frequency Capacitively Coupled Plasma Apparatus Using Genetic Algorithm (GA) and Plasma Simulation	0
Editorial	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "From Mega to nano: Beyond one Century of Vacuum Electronics"	0
Study on Measurement Method of Microscopic ζ Potential	0
A Proactive Approach of Optimizing Real-Time Equipment Monitoring Settings for Enhancing End-of-Line Yield	0
A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)	0
Exploiting 2D Coordinates as Bayesian Priors for Deep Learning Defect Classification of SEM Images	0
Identifying Good-Dice-in-Bad-Neighborhoods Using Artificial Neural Networks	0
Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework	0
Controlling Speckle Contrast Using Existing Lithographic Scanner Knobs to Explore the Impact on Line Width Roughness	0
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	0
Call for Papers for a Special Issue of IEEE Transactions on Materials for Electron Devices: "Exploration of the Exciting World of Multifunctional Oxide-Based Electronic Devices: From Material to Syste	0
Table of Contents	0
Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations	0
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	0
Blank Page	0
A Dry Etch Approach To Reduce Roughness and Eliminate Visible Grind Marks in Silicon Wafers Post Back-Grind	0
A Comparative Study of Semiconductor Virtual Metrology Methods and Novel Algorithmic Framework for Dynamic Sampling	0
A Lightweight Chip-Scale Chemical Mechanical Polishing Model Based on Polynomial Network	0
One Class Process Anomaly Detection Using Kernel Density Estimation Methods	0
Table of Contents	0
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "From Mega to nano: Beyond one Century of Vacuum Electronics"	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on Ultrawide Band Gap Semiconductor Devices for RF, Power and Optoelectronic Applications	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	0
Blank Page	0
Call for Papers: Role of Solar Cells in Global Energy Transformation	0
Adversarial Defect Detection in Semiconductor Manufacturing Process	0
Novel Control Method and Applications for Negative Mode E-Beam Inspection	0
Bayesian Nonparametric Classification for Incomplete Data With a High Missing Rate: an Application to Semiconductor Manufacturing Data	0
Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders	0
Parametric Optimization for Moisture Infiltration Prevention Into a FOUP (Front Opening Unified Pod)	0