OOIR: Observatory of International Research

Papers

(The median citation count of IEEE Transactions on Semiconductor Manufacturing is 0. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-04-01 to 2025-04-01.)

Article	Citations
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	46
Call for Papers for a Special Issue of IEEE Transactions on Materials for Electron Devices: "Exploration of the Exciting World of Multifunctional Oxide-Based Electronic Devices: From Material to Syste	41
Fabrication of Porous Cu-Sn Microbumps for Low Temperature Cu-Cu Bonding	39
Table of Contents	33
IEEE Transactions on Semiconductor Manufacturing Information for Authors	31
BCICTS 2023 Call for Papers	28
Table of Contents	28
IEEE Transactions on Semiconductor Manufacturing Publication Information	27
Table of Contents	24
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	24
Blank Page	23
Simulation and Experimental Analysis of Contactless Chip Pickup Process Based on a Vortex Flow Gripper	22
Fully Automated Wafer-Level Edge Coupling Measurement System for Silicon Photonics Integrated Circuits	21
IEEE Transactions on Semiconductor Manufacturing Information for Authors	19
Call for Papers for RFIC 2023	19
IEEE Transactions on Semiconductor Manufacturing Publication Information	19
IEEE Transactions on Semiconductor Manufacturing Information for Authors	17
2021 EDS Education Award Call for Nominations	16
IEEE Transactions on Semiconductor Manufacturing publication information	16
Front Cover	16
IEEE Transactions on Semiconductor Manufacturing Publication Information	15
Edge Effects of an Eddy-Current Thickness Sensor During Chemical Mechanical Polishing	13
Self-Assured Deep Learning With Minimum Pre-Labeled Data for Wafer Pattern Classification	13
A Study on the Improvement of Safety and Efficiency of Clean Rooms in Semiconductor Factories Through Real Fire Experiments	12
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	12

Defect Reduction And Line Width Roughness Improvement By Using A Post Precoat Treatment In Waferless Chamber Conditioning	12
3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology	12
Improving the Reliability of Through Silicon Vias: Reducing Copper Protrusion by Artificial Defect Manipulation and Annealing	12
Significant Lifetime Improvement of Negative Bias Thermal Instability by Plasma Enhanced Atomic Layer Deposition SiN in Stress Memorization Technique	12
A Lightweight Chip-Scale Chemical Mechanical Polishing Model Based on Polynomial Network	12
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	11
Photoresist Spray Coating on Silicon Wafers With Acoustic Resonance Atomization	11
Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin	10
Reducing Datacenter Compute Carbon Footprint by Harnessing the Power of Specialization: Principles, Metrics, Challenges and Opportunities	10
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	9
Elimination of Si-C Defect on Wafer Surface in High-Temperature SPM Process Through Nitrogen Purge in 300-mm Single-Wafer Chamber	9
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	9
Boundless Engineering for Yield to Cope With the Complexity of High-Volume Manufacturing	9
Feature Extraction From Diffraction Images Using a Spatial Light Modulator in Scatterometry	9
Chamber and Recipe-Independent FDC Indicator in High-Mix Semiconductor Manufacturing	8
ℓ₁ Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment	8
A Novel Foundry Yield Model Using Critical Area Analysis	8
Parametric Optimization for Moisture Infiltration Prevention Into a FOUP (Front Opening Unified Pod)	8
Influence and Suppression of Harmful Effects Due to By-Product in CVD Reactor for 4H-SiC Epitaxy	8
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	8
Dynamic Down-Selection of Measurement Markers for Optimized Robust Control of Overlay Errors in Photolithography Processes	7
Double Coating Process Using the Single Photoresist and the Thickness Prediction	7
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	7
Preparation and Application of Sol-Gel Polishing Pad for Polishing CVD Single Crystal Diamond at High Speed	7
Study on Measurement Method of Microscopic ζ Potential	7
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	7
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	7
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	7
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	6
Bayesian Nonparametric Classification for Incomplete Data With a High Missing Rate: an Application to Semiconductor Manufacturing Data	6
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	6
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	6
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	6
Wafer Lot Assignment for Parallel-Producing Tools Based on Heuristic Clustering Algorithm	6
A Numerical Study on the Effects of Purge and Air Curtain Flow Rates on Humidity Invasion Into a Front Opening Unified Pod (FOUP)	6
Watermark Detection in CMOS Image Sensors Using Cosine-Convolutional Semantic Networks	6
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	6
Modular Fluid Delivery System Architectures Drive Configurability Options, Enhance Semiconductor Manufacturing Equipment Productivity, and Improve Process Performance	6
Observation and Suppression of Growth Pits Formed on 4H-SiC Epitaxial Films Grown Using Halide Chemical Vapor Deposition Process	5
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	5
A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection	5
Front Cover	5
IEEE Transactions on Semiconductor Manufacturing Information for Authors	5
IEEE Transactions on Semiconductor Manufacturing publication information	5
A Hybrid Method of Frequency and Spatial Domain Techniques for TFT-LCD Circuits Defect Detection	5
Supply Chain Planning for IC Design House Back-End Production Network With Turnkey Service	5
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	5
Front Cover	5
Table of Contents	5
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	5

Effect of SiO₂ Interfacial Layer Reduction on MFSFET With 5 nm-Thick Ferroelectric Nondoped HfO₂ by Deposition Rate Control	5
Leveraging Machine Learning for Capacity and Cost on a Complex Toolset: A Case Study	5
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	5
IEEE Transactions on Semiconductor Manufacturing Information for Authors	5
Table of contents	5
Fuzzy Selection Model for Quality-Based IC Packaging Process Outsourcers	4
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	4
Investigation of Variation in On-Si On-Wafer TRL Calibration in Sub-THz	4
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	4
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Solid-State Image Sensors"	4
Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework	4
The Effect of Si Surface Flattening Process on the MISFET With High-k HfN_x Multilayer Gate Dielectrics	4
An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation	4
Editorial	4
Call for Papers for IEEE Transactions on Materials for Electron Devices	4
Improving Liquid Film Thickness Uniformity of Semiconductor Etching Equipment Using Flow Field Visualization and CFD Simulation	4
CMP Process Optimization Engineering by Machine Learning	4
A Hierarchical Spatial-Test Attention Network for Explainable Multiple Wafer Bin Maps Classification	4
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	4
Table of Contents	4
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	4
Table of contents	4
Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes	4
IEEE Transactions on Semiconductor Manufacturing Publication Information	4
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	3
Effective Variational-Autoencoder-Based Generative Models for Highly Imbalanced Fault Detection Data in Semiconductor Manufacturing	3
Level Set Simulation on Single Wafer Wet Processing Improvement	3
Advanced Process Control System for Trench Shape of Power Devices	3
Automated Visual Inspection of Defects in Transparent Display Layers Using Light-Field 3-D Imaging	3
Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing	3
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	3
Editorial	3
Image-Based Defect Classification for TFT-LCD Array via Convolutional Neural Network	3
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	3
Thermal and Electrical Analysis of the Electrostatic Chuck for the Etch Equipment	3
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	3
Interface Characteristics, Erosion Behavior, and Thermal Shock Resistance of Al–Ta Alloy Coatings Produced by Arc Spraying	3
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	3
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	3
Editorial	3
Virtual Metrology Modeling for Wafer Edges via Graph Attention Networks	3
Investigation of the HfON Tunneling Layer of MONOS Device for Low-Voltage and High-Speed Operation Nonvolatile Memory Application	2
Computational Study of Chemical Uniformity Impacts on Electrodeposition	2
Guest Editorial Special Section on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing	2
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	2
Guest Editorial Special Section on Sustainability	2
Improving Doping Efficiency of Mist-CVD Epitaxy for Tin-Doped α-Ga₂O₃ Using Tin Chloride Pentahydrate	2
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "From Mega to nano: Beyond one Century of Vacuum Electronics"	2
Enhanced Silicon Crystallization on Dielectric Materials at Reduced Temperature	2
Fast and Accurate EUVL Thick-Mask Model Based on Multi Channel Attention Network	2
SWaCo: Safe Wafer Bin Map Classification With Self-Supervised Contrastive Learning	2
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	2
Optimization of Void Defects at TiN/Si:HfO₂ Interface for 3-D Ferroelectric Memory	2
Editorial	2
Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits	2
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	2
Call for Nominations for Editor-in-Chief: IEEE Transactions on Semiconductor Manufacturing	2
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	2
Throughput and Quality Optimized Down-Selection of Overlay Measurement Markers for Robust Control of the Maximum Overlay Error in a Pattern Layer in Photolithography Processes	2
Controlling Speckle Contrast Using Existing Lithographic Scanner Knobs to Explore the Impact on Line Width Roughness	2
Temporal Convolution-Based Long-Short Term Memory Network With Attention Mechanism for Remaining Useful Life Prediction	2
A Novel Multi-Modal Learning Approach for Cross-Process Defect Classification in TFT-LCD Array Manufacturing	2
Single-Mask Fabrication of Sharp SiO_x Nanocones	2
Machine Learning on Multiplexed Optical Metrology Pattern Shift Response Targets to Predict Electrical Properties	2
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	2
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	2
IEEE Transactions on Semiconductor Manufacturing Information for Authors	2
Table of Contents	2
Special Section Call for Papers: Bridging the Data Gap in Photovoltaics with Synthetic Data Generation	2
Atomic Layer Processes for Material Growth and Etching—A Review	1
A Real-Time Automatic Structural-Loss Detection and Stopping Rule of Semiconductor Single-Crystal-Silicon-Growth <100> and <111>	1
A Novel ML Augmented DRC Framework for Identification of Yield Detractor Patterns	1
Automatic Defect Classification Using Semi-Supervised Learning With Defect Localization	1
Improvement of Multi-Lines Bridge Defect Classification by Hierarchical Architecture in Artificial Intelligence Automatic Defect Classification	1
Blank Page	1
Call for Papers for a Special Issue of IEEE Journal of the Electron Devices Society on "Materials, Processing and Integration for Neuromorphic Devices and In-Memory Computing"	1
Call for Papers: Special Issue on Intelligent Sensor Systems for the IEEE Journal of Electron Devices	1
Calibration of Compact Resist Model Through CNN Training	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1

Study on the Transformation of Si Trench Profile With Low Pressure of SF₆/O₂ Containing Plasmas	1
Call for Papers: Latin American Electron Devices Conference (LAEDC 2023)	1
Redefining Monitoring Rules for Intelligent Fault Detection and Classification via CNN Transfer Learning for Smart Manufacturing	1
Drop-In Test Structure to Evaluate Residual Stress in Conformally Grown Films	1
An Investigation of Edge Bead Removal Width Variability, Effects and Process Control in Photolithographic Manufacturing	1
Exploiting 2D Coordinates as Bayesian Priors for Deep Learning Defect Classification of SEM Images	1
Virtual Metrology for Multistage Processes Using Variational Inference Gaussian Mixture Model and Extreme Learning Machine	1
Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process	1
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	1
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism	1
IEEE Transactions on Semiconductor Manufacturing Information for Authors	1
Test Structure for Measuring the Selectivity in XeF₂ and HF Vapour Etch Processes	1
Learning Priority Indices for Energy-Aware Scheduling of Jobs on Batch Processing Machines	1
Special Section Call for Papers: Bridging the Data Gap in Photovoltaics with Synthetic Data Generation	1
IEEE Transactions on Semiconductor Manufacturing Publication Information	1
An Emerging Local Annealing Method for Simultaneous Crystallization and Activation in Xtacking 3-D NAND Flash	1
Call for Papers: 5th IEEE International Flexible Electronics Technology Conference (IFETC) 2023	1
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	1
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	1
Source Pad Design Tradeoffs for a Power TrenchFET	1
Change Qualification Framework in Semiconductor Manufacturing	1
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	1
Editorial	1
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	1
Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder	1
Correlation Between Trench Angle and Wafer Warpage in Trench Field Plate Power MOSFETs and its Application to Quality Control	1
Regression Model for the Specific Contact Resistance of SiC Ohmic Contacts	1
Optimizing the Isotropic Etching Nature and Etch Profile of Si, Ge and Si_0.8Ge_0.2 by Controlling CF₄ Atmosphere With Ar and O₂ Additives in ICP	1
Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots	1
Front Cover	1
Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process	1
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	1
Call for Papers: Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	1
One Class Process Anomaly Detection Using Kernel Density Estimation Methods	1
Electrical Measurements to Detect Liquid Concentration	1
Optimal Feature Selection for Defect Classification in Semiconductor Wafers	1
Layout Feature Extraction Using CNN Classification in Root Cause Analysis of LSI Defects	0
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	0
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	0
Part-Level Fault Classification of Mass Flow Controller Drift in Plasma Deposition Equipment	0
RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	0
Achieving Sustainability in the Semiconductor Industry: The Impact of Simulation and AI	0
Special Issue on Semiconductor Design for Manufacturing (DFM)	0
SnS₂ and ZnO Nanocomposite Prepared by Dispersion Method for Photodetector Application	0
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	0
Call for Nominations: 2024 EDS Early Career Award	0
RoIA: Region of Interest Attention Network for Surface Defect Detection	0
Wafer Reflectance Prediction for Complex Etching Process Based on K-Means Clustering and Neural Network	0
Photovoltaic Measurement Under Different Illumination of the Dye-Sensitized Solar Cell With the Photoanode Modified by Fe₂O₃/g-C₃N₄/TiO₂ Heteroge	0
Call for Papers for Journal of Lightwave Technology: Special Issue on OFS-29	0
Imaging of Metal Ions and Nanoparticles on Structured Silicon Surface Using Laser Ablation-Inductively Coupled Plasma-Mass Spectrometer for Contamination Control in Semiconductor Manufacturing Process	0
Improvement of ZnO/Si Heterojunctions With a Coaxial Circular Transmission Line Model Applicable to Both Ohmic and Schottky	0
A Deep Learning Analysis Framework for Complex Wafer Bin Map Classification	0
A Fine-Grained, End-to-End Feature-Scale CMP Modeling Paradigm Based on Fully Convolutional Neural Networks	0
Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing	0
Investigation Into Low Frequency Response of Acoustic MEMS for Determination of Failure Modes	0
Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders	0
IEEE Transactions on Semiconductor Manufacturing Information for Authors	0
Curvilinear Standard Cell Design for Semiconductor Manufacturing	0
Comprehensive Study of the Impact of LWR on Device Performance in VLSI Technology	0
Equipment Condition Monitoring of Multiple Oxide-Nitride Stack Layer Deposition Process	0
Stress-related Local Layout Effects in FinFET Technology and Device Design Sensitivity	0
Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts	0
Rapid Resolution of Parametric Failures in the Process Development Period by Integrating Device Physics and Big Data	0
Wafer-to-Wafer Bonding Fabrication Process-Induced Wafer Warpage	0
IEEE Transactions on Semiconductor Manufacturing Publication Information	0
Analysis of Image Hashing in Wafer Map Failure Pattern Recognition	0
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	0
EveSyncIAI: Event Synchronization Industrial Augmented Intelligence for Fault Diagnosis	0
Editorial	0
Practical Q-Learning-Based Route-Guidance and Vehicle Assignment for OHT Systems in Semiconductor Fabs	0
Guest Editorial Special Section on the IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)	0
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	0
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	0
On the Fly Ellipsometry Imaging for Process Deviation Detection	0
Decrease in Particles by Substituting Conductive Magnesium-Oxide Based Ceramics for Conventional Electrode Materials Used in Process Chamber of Plasma Etching	0
A Data-Driven Approach for Improving Energy Efficiency in a Semiconductor Manufacturing Plant	0
2024 Index IEEE Transactions on Semiconductor Manufacturing Vol. 37	0
Stochastic Scheduling for Batch Processes With Downstream Queue Time Constraints	0
HotspotFusion: A Generative AI Approach to Predicting CMP Hotspot in Semiconductor Manufacturing	0
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	0
Virtual Metrology of Multiple Dielectric Layer Thickness for 3D-NAND Deposition Process	0
Comparison of Semiconductor Reverse Osmosis System Performance With Conventional and 3D Printed Feed Channels	0
Advanced Process Monitoring Through Fault Detection and Classification for the Process Development of Tantalum Nitride Thin-Film Resistors	0
BCICTS 2022 CALL FOR PAPERS	0
Manufacturing of g-C3N4-ZnS-Doped TiO2 Nanofibers by Electrospinning and Their Application to Dye-Sensitized Solar Cell as an Additional Layer in Photoanode	0
Sequential Residual Learning for Multistep Processes in Semiconductor Manufacturing	0
Data-Driven and Mechanism-Based Hybrid Model for Semiconductor Silicon Monocrystalline Quality Prediction in the Czochralski Process	0
Guest Editorial Special Section on the 2020 and 2021 SEMI Advanced Semiconductor Manufacturing Conferences	0
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	0
Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	0
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	0
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	0
Editorial	0
Optimizing Scanning Acoustic Tomography Image Segmentation With Segment Anything Model for Semiconductor Devices	0