OOIR: Observatory of International Research

Papers

(The TQCC of IEEE Transactions on Semiconductor Manufacturing is 3. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2020-05-01 to 2024-05-01.)

Article	Citations
A Deep Convolutional Neural Network for Wafer Defect Identification on an Imbalanced Dataset in Semiconductor Manufacturing Processes	113
Deformable Convolutional Networks for Efficient Mixed-Type Wafer Defect Pattern Recognition	89
A Light-Weight Neural Network for Wafer Map Classification Based on Data Augmentation	56
Deep Learning-Based Domain Adaptation Method for Fault Diagnosis in Semiconductor Manufacturing	48
Active Learning of Convolutional Neural Network for Cost-Effective Wafer Map Pattern Classification	42
Self-Supervised Representation Learning for Wafer Bin Map Defect Pattern Classification	39
Semi-Supervised Multi-Label Learning for Classification of Wafer Bin Maps With Mixed-Type Defect Patterns	38
SMT2020—A Semiconductor Manufacturing Testbed	31
Memory-Augmented Convolutional Neural Networks With Triplet Loss for Imbalanced Wafer Defect Pattern Classification	31
Variational Deep Clustering of Wafer Map Patterns	29
Model-Free Adaptive Iterative Learning Control Method for the Czochralski Silicon Monocrystalline Batch Process	29
Machine Learning-Based Detection Method for Wafer Test Induced Defects	28
Data-Driven Framework for Tool Health Monitoring and Maintenance Strategy for Smart Manufacturing	27
Applying Data Augmentation and Mask R-CNN-Based Instance Segmentation Method for Mixed-Type Wafer Maps Defect Patterns Classification	24
Support Weighted Ensemble Model for Open Set Recognition of Wafer Map Defects	23
Advanced Quality Control (AQC) of Silicon Wafer Specifications for Yield Enhancement for Smart Manufacturing	23
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	20
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	20
CNNs Combined With a Conditional GAN for Mura Defect Classification in TFT-LCDs	20
Run-to-Run Control of Chemical Mechanical Polishing Process Based on Deep Reinforcement Learning	19
Temporal Convolution-Based Long-Short Term Memory Network With Attention Mechanism for Remaining Useful Life Prediction	19
Adversarial Defect Detection in Semiconductor Manufacturing Process	18
Optimal Feature Selection for Defect Classification in Semiconductor Wafers	17
Use of Plasma Information in Machine-Learning-Based Fault Detection and Classification for Advanced Equipment Control	16
Redefining Monitoring Rules for Intelligent Fault Detection and Classification via CNN Transfer Learning for Smart Manufacturing	16

Integration of 650 V GaN Power ICs on 200 mm Engineered Substrates	15
Qualitative and Quantitative Analysis of Multi-Pattern Wafer Bin Maps	15
Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing	15
Two-Stage Transfer Learning for Fault Prognosis of Ion Mill Etching Process	14
Mixed-Type Wafer Defect Recognition With Multi-Scale Information Fusion Transformer	13
An Improved Capsule Network (WaferCaps) for Wafer Bin Map Classification Based on DCGAN Data Upsampling	13
Development of a World Class Silicon Carbide Substrate Manufacturing Capability	12
Performance of Different Front-Opening Unified Pod (FOUP) Moisture Removal Techniques With Local Exhaust Ventilation System	12
Investigation of Dye-Sensitized Solar Cell With Photoanode Modified by TiO₂-ZnO Nanofibers	12
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	12
Extracting Voltage Dependence of BTI-induced Degradation Without Temporal Factors by Using BTI-Sensitive and BTI-Insensitive Ring Oscillators	11
Data-Driven Model Predictive Control of Cz Silicon Single Crystal Growth Process With V/G Value Soft Measurement Model	11
Application of ANN for Fault Detection in Overhead Transport Systems for Semiconductor Fab	11
Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma	11
Wafer Defect Pattern Labeling and Recognition Using Semi-Supervised Learning	11
Hidden Wafer Scratch Defects Projection for Diagnosis and Quality Enhancement	10
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	10
Development of Diaphragm and Microtunnel Structures for MEMS Piezoelectric Sensors	10
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	10
Sensitivity Enhancement of SiO₂Plasma Etching Endpoint Detection Using Modified Gaussian Mixture Model	10
Deep Learning-Based Positioning Error Fault Diagnosis of Wire Bonding Equipment and an Empirical Study for IC Packaging	9
Dynamic Clustering for Wafer Map Patterns Using Self-Supervised Learning on Convolutional Autoencoders	9
Locally Adaptive Statistical Background Modeling With Deep Learning-Based False Positive Rejection for Defect Detection in Semiconductor Units	9
Noncyclic Scheduling of Multi-Cluster Tools With Residency Constraints Based on Pareto Optimization	9
Flow Analysis and Relative Humidity (RH) Measurement in the Horizontal Plane of a Front Opening Unified Pod (FOUP)	9
Detection and Recognition of Mixed-Type Defect Patterns in Wafer Bin Maps via Tensor Voting	9
TestDNA: Novel Wafer Defect Signature for Diagnosis and Pattern Recognition	9
A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps	8
One Class Process Anomaly Detection Using Kernel Density Estimation Methods	8
Machine Learning Models for Edge Placement Error Based Etch Bias	8
A Sequential Search Method of Dispatching Rules for Scheduling of LCD Manufacturing Systems	8
Optimizing the Isotropic Etching Nature and Etch Profile of Si, Ge and Si_0.8Ge_0.2 by Controlling CF₄ Atmosphere With Ar and O₂ Additives in ICP	8
Atomic Layer Processes for Material Growth and Etching—A Review	8
Dependability Assessment of Transfer Length Method to Extract the Metal–Graphene Contact Resistance	8
Combination of Convolutional and Generative Adversarial Networks for Defect Image Demoiréing of Thin-Film Transistor Liquid-Crystal Display Image	8
Discovery of Resource-Oriented Transition Systems for Yield Enhancement in Semiconductor Manufacturing	8
Fuzzy Selection Model for Quality-Based IC Packaging Process Outsourcers	8
The Environmental Footprint of IC Production: Review, Analysis, and Lessons From Historical Trends	7
CMP Process Optimization Engineering by Machine Learning	7
Planned Maintenance Schedule Update Method for Predictive Maintenance of Semiconductor Plasma Etcher	7
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	7
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	7
Similarity Search on Wafer Bin Map Through Nonparametric and Hierarchical Clustering	7
An On-Chip Micromachined Test Structure to Study the Tribological Behavior of Deep-RIE MEMS Sidewall Surfaces	7
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	6
Wafer Reflectance Prediction for Complex Etching Process Based on K-Means Clustering and Neural Network	6
A Study on the Impact of Mid-Gap Defects on Vertical GaN Diodes	6
Measurement and Modeling of Ambient-Air-Induced Degradation in Organic Thin-Film Transistor	6
Optical Proximity Correction Using Bidirectional Recurrent Neural Network With Attention Mechanism	6
Edge Effects of an Eddy-Current Thickness Sensor During Chemical Mechanical Polishing	6

Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	6
Synthesis of Lithography Test Patterns Using Machine Learning Model	6
Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	6
A Simple Model of Capacity Contention During New Product Introductions	5
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	5
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	5
Performance-Based Active Wafer Clamp Design for Wafer Heating Effects in EUV Lithography	5
Prediction of Highly Imbalanced Semiconductor Chip-Level Defects in Module Tests Using Multimodal Fusion and Logit Adjustment	5
Layout Pattern Synthesis for Lithography Optimizations	5
Influence and Suppression of Harmful Effects Due to By-Product in CVD Reactor for 4H-SiC Epitaxy	5
An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study	5
Improvement of Multi-Lines Bridge Defect Classification by Hierarchical Architecture in Artificial Intelligence Automatic Defect Classification	5
Attention Mechanism-Based Root Cause Analysis for Semiconductor Yield Enhancement Considering the Order of Manufacturing Processes	5
Plasma Induced Damage Reduction of Ultra Low-k Dielectric by Using Source Pulsed Plasma Etching for Next BEOL Interconnect Manufacturing	5
Minimizing Convolutional Neural Network Training Data With Proper Data Augmentation for Inline Defect Classification	4
Decrease in Particles by Substituting Conductive Magnesium-Oxide Based Ceramics for Conventional Electrode Materials Used in Process Chamber of Plasma Etching	4
A One-Shot Learning Approach for Similarity Retrieval of Wafer Bin Maps With Unknown Failure Pattern	4
Feature Selection for Waiting Time Predictions in Semiconductor Wafer Fabs	4
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	4
An Advanced Finite Element Model for BiCMOS Process Oriented Ultra-Thin Wafer Deformation	4
CNN-Based Layout Segment Classification for Analysis of Layout-Induced Failures	4
Data-Driven and Mechanism-Based Hybrid Model for Semiconductor Silicon Monocrystalline Quality Prediction in the Czochralski Process	4
Customer Order Behavior Classification Via Convolutional Neural Networks in the Semiconductor Industry	4
Exploiting 2D Coordinates as Bayesian Priors for Deep Learning Defect Classification of SEM Images	4
Improved Color Defect Detection With Machine Learning for After Develop Inspections in Lithography	4
Optimization of Nafion Polymer Electrolyte Membrane Design and Microfabrication	4
A New Stage-Wise Control Release Policy for Semiconductor Wafer Fabrication Systems	4
Statistical Extraction of Normally and Lognormally Distributed Model Parameters for Power MOSFETs	4
Nano-Scale Depth Profiles of Electrical Properties of Phosphorus Doped Silicon for Ultra-Shallow Junction Evaluation	4
Abnormal Silicon-Germanium (SiGe) Epitaxial Growth in FinFETs	4
Improvement of Virtual Diagnostics Performance for Plasma Density in Semiconductor Etch Equipment Using Variational Auto-Encoder	4
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	4
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	3
Increasing the Utilization of Deep Neural Networks for SEM Measurements Through Multiple Task Formulation and Visualization	3
Advanced Low Pin Count Test Architecture for Efficient Multi-Site Testing	3
Improvement of ZnO/Si Heterojunctions With a Coaxial Circular Transmission Line Model Applicable to Both Ohmic and Schottky	3
Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Robot Waiting Time	3
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	3
Color Difference Detection of Polysilicon Wafers Using Optimized Support Vector Machine by Magnetic Bacteria Optimization Algorithm With Elitist Strategy	3
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	3
Investigation of the HfON Tunneling Layer of MONOS Device for Low-Voltage and High-Speed Operation Nonvolatile Memory Application	3
Test Structures for Developing Packaging for Implantable Sensors	3
Joint Dynamic Dispatching and Preventive Maintenance for Unrelated Parallel Machines With Equipment Health Considerations	3
Process Optimization and Modeling of the Silicon Growth in Trichlorosilane-Hydrogen Gas Mixture in a Planetary CVD Reactor	3
A Deep Learning Analysis Framework for Complex Wafer Bin Map Classification	3
Which Spare Parts Service Measure to Choose for a Front-End Wafer Fab?	3
A Self-Test Method of Structural Failures of Uncooled Infrared Focal Plane Array	3
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	3
Matheuristics for Qualification Management Decisions in Wafer Fabs	3
Improving Liquid Film Thickness Uniformity of Semiconductor Etching Equipment Using Flow Field Visualization and CFD Simulation	3
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	3
Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging	3
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	3
A Method to Determine the Electret Charge Potential of MEMS Vibrational Energy Harvester Using Pure-White Noise	3
EveSyncIAI: Event Synchronization Industrial Augmented Intelligence for Fault Diagnosis	3
Precise Pattern Alignment for Die-to-Database Inspection Based on the Generative Adversarial Network	3
Semiconductor Defect Pattern Classification by Self-Proliferation-and-Attention Neural Network	3
Modeling and Optimizing the Impact of Process and Equipment Parameters in Sputtering Deposition Systems Using a Gaussian Process Machine Learning Framework	3