OOIR: Observatory of International Research

Papers

(The TQCC of IEEE Transactions on Semiconductor Manufacturing is 3. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-07-01 to 2025-07-01.)

Article	Citations
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	49
IEEE Transactions on Semiconductor Manufacturing Publication Information	42
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	36
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	35
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	35
Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments	33
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	32
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding	31
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters	31
Defect Reduction And Line Width Roughness Improvement By Using A Post Precoat Treatment In Waferless Chamber Conditioning	30
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	25
Call for Papers for IEEE Transactions on Materials for Electron Devices	23
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	22
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	22
Computational Study of Chemical Uniformity Impacts on Electrodeposition	21
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	21
Level Set Simulation on Single Wafer Wet Processing Improvement	19
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	19
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	18
Advanced Process Control System for Trench Shape of Power Devices	17
Single-Mask Fabrication of Sharp SiO_x Nanocones	17
Editorial	16
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	15
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	14
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	14

Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	14
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	13
IEEE Transactions on Semiconductor Manufacturing Publication Information	12
Test Structure for Measuring the Selectivity in XeF₂ and HF Vapour Etch Processes	12
Blank Page	12
In-Situ Plasma Monitoring Using Multiple Plasma Information in SiO2 Etch Process	12
Physics-Informed Machine Learning Based Edge Detection for SEM Images	12
Correlation Between Trench Angle and Wafer Warpage in Trench Field Plate Power MOSFETs and its Application to Quality Control	11
DPFEE-Net: Enhancing Wafer Defect Classification Through Dual-Path Neural Architecture	11
A Warpage Prediction Model for Trench Field-Plate Power MOSFET in 300mm-Diameter Process	10
Blank Page	10
Automatic Classification of C-SAM Voids for Root Cause Identification of Bonding Yield Degradation	10
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	10
Source Pad Design Tradeoffs for a Power TrenchFET	9
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process	9
Integration Challenges on 300mm High Resistivity Silicon Substrates	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	9
2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
2023 Index IEEE Transactions on Semiconductor Manufacturing Vol. 36	9
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	8
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	8
Wafer Dicing Vibration Investigation on Novel Wafer Mounting Techniques	8
IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award: Call for Nominations	8
Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations	8
Journal of Lightwave Technology Special Issue on: OFS-29	7
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	7
Front Cover	7
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN	7
Table of Contents	7
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	7
Rapid Resolution of Parametric Failures in the Process Development Period by Integrating Device Physics and Big Data	7
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	6
RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	6
Table of Contents	6
Semantic Context Information Modeling With Neural Networks in Customer Order Behavior Classification	6
Editorial	6
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	6
Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	6
Evaluation of Thick Silicon Nitride Film Properties at 300 mm Scale for High-Q Photonic Devices	6
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	6
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	6
Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference	6
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	6
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	6
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	6
Call for Nominations: 2024 EDS Early Career Award	6
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	6

A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	5
Adaptive Cautious Regularized Run-to-Run Controller for Lithography Process	5
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	5
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	5
A Novel Foundry Yield Model Using Critical Area Analysis	5
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	5
New Process Integration of Sequential Phosphorus-Doped Silicon for Trench Field Plate Power MOSFETs	5
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	5
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	5
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	5
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	5
Double Coating Process Using the Single Photoresist and the Thickness Prediction	5
Manufacturing of 3D Helical Microswimmer by AFM Micromanipulation for Microfluidic Applications	5
Minimizing Convolutional Neural Network Training Data With Proper Data Augmentation for Inline Defect Classification	5
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	5
Unsupervised Representation Learning and Explainable Clustering for Wafer Map Pattern Analysis	5
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	5
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	5
BCICTS 2023 Call for Papers	5
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	5
IEEE Transactions on Semiconductor Manufacturing Publication Information	5
Guest Editorial Special Section on Sustainability	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	4
Blank page	4
Quality-Oriented Statistical Process Control Utilizing Bayesian Modeling	4
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	4
Table of contents	4
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	4
Surface Reconstruction for Enhancing the Overlay Modeling Optimization Procedure in Photolithography Processes	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	4
Table of Contents	4
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	4
Guest Editorial Introduction to the Joint Special Issue on Semiconductor Design for Manufacturing (DFM)	4
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	4
TechRxiv: Share Your Preprint Research With the World!	4
Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics	4
Editorial	4
A Diffusion-Model-Based Methodology for Virtual Silicon Data Generation	3
Blank Page	3
Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability	3
Editorial	3
Blank page	3
Study on Mechanical Cleavage Mechanism of GaAs via Anisotropic Stress Field and Experiments	3
Effects of the Applied Power of Remote Plasma System With Green Alternative Chamber Cleaning Gas of Carbonyl Fluoride	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
A Self-Test Method of Structural Failures of Uncooled Infrared Focal Plane Array	3
Comparative Study of Nondestructive Mapping of Conformal-Coating Thickness on Microelectronics by Terahertz Time-of-Flight Tomography	3
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	3
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	3
Model-Based OPC With Adaptive PID Control Through Reinforcement Learning	3
Group-Exclusive Feature Group Lasso and Applications to Automatic Sensor Selection for Virtual Metrology in Semiconductor Manufacturing	3
The Modeling of Post-Annealing and Etching Processes of ALD SiO2 Using Intermediate Variables Considering Digital Twin Model Reusability	3
Editorial	3
Front Cover	3
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	3
Sustainable Technologies for Responsible Products and a More Sustainable Future	3
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on New simulation methodologies for next-generation TCAD tools	3
Real-Time Change Detection for Automated Test Socket Inspection Using Advanced Computer Vision and Machine Learning	3
Enhancing Current Gain in Polysilicon Emitter Bipolar Transistors Through Emitter-Base Interface Engineering	3
Fast Optical Proximity Correction Using Graph Convolutional Network With Autoencoders	3
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	3
Guest Editorial Special Section on the IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS)	3
Data Visualization of Anomaly Detection in Semiconductor Processing Tools	3