OOIR: Observatory of International Research

Papers

(The TQCC of IEEE Transactions on Semiconductor Manufacturing is 3. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-11-01 to 2025-11-01.)

Article	Citations
Minimization of Particle Deposition on Wafers Caused by the Pressure Change in the Vacuum Chamber Through a Pressure Control Regulation Process	46
Guest Editorial Special Section on the 2022 SEMI Advanced Semiconductor Manufacturing Conference	41
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Semiconductor Device Modeling for Circuit and System Design"	40
Fast and High-Precision Temperature Control in Semiconductor Vertical Furnace via Iterative Experiments	36
IEEE Transactions on Semiconductor Manufacturing Publication Information	36
Call for Nominations for Editor-in-Chief: IEEE Electron Device Letters	35
Fabrication of Porous Cu–Sn Microbumps for Low-Temperature Cu–Cu Bonding	35
Investigations of Fast Vacuum Pump-Down Processes Between Parallel Isothermal Disks	32
Defect Reduction and Line Width Roughness Improvement by Using a Post Precoat Treatment in Waferless Chamber Conditioning	32
Adaptive Weight Tuning of EWMA Controller via Model-Free Deep Reinforcement Learning	26
Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment	25
Call for Papers for IEEE Transactions on Materials for Electron Devices	23
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	23
The Effect of Purge Flow Rate and Wafer Arrangement on Humidity Invasion Into a Loaded Front Opening Unified Pod (FOUP)	23
Level Set Simulation on Single Wafer Wet Processing Improvement	21
Advanced Process Control System for Trench Shape of Power Devices	20
Single-Mask Fabrication of Sharp SiO_x Nanocones	19
Editorial	19
Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots	18
The Mechanism of an Etching-Back to Reduce the Density of Cone Defect in STI During the Manufacturing	17
Nondestructive Detection of Buried and Latent Defects by Negative Mode E-Beam Inspection	17
Computational Study of Chemical Uniformity Impacts on Electrodeposition	15
A Comparative Study on Velocity Fields, Humidity and Oxygen Concentration in a Front Opening Unified Pod (FOUP) During Purge	14
TestDNA-E: Wafer Defect Signature for Pattern Recognition by Ensemble Learning	13
A Yield Prediction Method Based on Nonparametric Statistical and Comparison With a Networks Method	13

Semi-Supervised Learning for Simultaneous Location Detection and Classification of Mixed-Type Defect Patterns in Wafer Bin Maps	13
Improving RF Magnetron Sputter Parameters for a Piezoelectric AlN Thin Film Deposition	13
TCAD-Enabled Machine Learning—An Efficient Framework to Build Highly Accurate and Reliable Models for Semiconductor Technology Development and Fabrication	12
Synthesis of Critical Patterns for Lithography Optimizations Through Machine Learning	12
Blank Page	11
IEEE Transactions on Semiconductor Manufacturing Publication Information	11
Grain Morphology Effects on Void Formation and Electromigration-Induced Failure in Copper Interconnects	11
A Warpage Prediction Model for Trench Field-Plate Power MOSFET in 300mm-Diameter Process	10
Source Pad Design Tradeoffs for a Power TrenchFET	10
Blank Page	10
Integration Challenges on 300-mm High Resistivity Silicon Substrates	10
Automatic Classification of C-SAM Voids for Root Cause Identification of Bonding Yield Degradation	10
DPFEE-Net: Enhancing Wafer Defect Classification Through Dual-Path Neural Architecture	10
Wafer Bin Map Recognition With Autoencoder-Based Data Augmentation in Semiconductor Assembly Process	9
2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34	9
Physics-Informed Machine Learning-Based Edge Detection for SEM Images	9
2023 Index IEEE Transactions on Semiconductor Manufacturing Vol. 36	9
A Self-Powered Wireless Sensing Circuitry for On-Wafer In-Situ EUV Detection	9
In-Situ Plasma Monitoring Using Multiple Plasma Information in SiO₂ Etch Process	9
IEEE Transactions on Semiconductor Manufacturing Publication Information	9
Systematic Search for Stabilizing Dopants in ZrO₂ and HfO₂ Using First-Principles Calculations	8
Optimization and Application of TiO₂ Hollow Microsphere Modified Scattering Layer for the Photovoltaic Conversion Efficiency of Dye-Sensitized Solar Cell	8
Deep Learning Approach to Inverse Grain Pattern of Nanosized Metal Gate for Multichannel Gate-All-Around Silicon Nanosheet MOSFETs	8
Commonality Analysis for Detecting Failures Caused by Inspection Tools in Semiconductor Manufacturing Processes	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	8
Wafer Dicing Vibration Investigation on Novel Wafer Mounting Techniques	8
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process	8
Research Toward Wafer-Scale 3D Integration of InP Membrane Photonics With InP Electronics	8
IEEE EDS Robert Bosch Micro and Nano Electro Mechanical Systems Award: Call for Nominations	8
IEEE Transactions on Semiconductor Manufacturing Publication Information	8
Recognition and Classification of Mixed Defect Pattern Wafer Map Based on Multi-Path DCNN	8
Journal of Lightwave Technology Special Issue on: OFS-29	8
Front Cover	7
Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing	7
Deep Clustering and Regression Ensemble Network for Lot Cycle Time Prediction in Semiconductor Wafer Fabrication	7
Table of Contents	7
Editorial	7
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching	7
Advances in the Thermal Study of Polymers for Microelectronics Using the Thermally Induced Curvature Approach	7
New Quality Index to Improve Overlay Measurement Accuracy Based on Moiré Marks: Method for Quantifying Moiré Pattern Quality Using the Signal Shape Index	7
Evaluation of Thick Silicon Nitride Film Properties at 300 mm Scale for High-Q Photonic Devices	6
Defect Detection of Photovoltaic Panels to Suppress Endogenous Shift Phenomenon	6
Table of Contents	6
Data-Driven Production Planning Models for Wafer Fabs: An Exploratory Study	6
Characterizing Capacitor Top Plate Bias for More Accurate Electromagnetic Simulations	6
A Real-Time Monitoring Framework for Wafer Fabrication Processes With Run-to-Run Variations	6
Nitrogen-Doped Czochralski Silicon Wafers as Materials for Conventional and Scaled Insulated Gate Bipolar Transistors	6
RA-UNet: A New Deep Learning Segmentation Method for Semiconductor Wafer Defect Analysis on Fine-Grained Scanning Electron Microscope (SEM) Images	6
Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference	6
Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders	5

Call for Papers for a Special Issue of IEEE Transactions on Electron Devices on "Wide and Ultrawide Band Gap Semiconductor Devices for RF and Power Applications"	5
Semantic Context Information Modeling With Neural Networks in Customer Order Behavior Classification	5
Shear Force Classification Before Wire Bonding Based on Probe Mark 2-D Images Using Machine Learning Methods	5
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects	5
Macro and Micro-Scale Non-Contact Imaging of Electrically Active Extended Defects in 4H-SiC Merged PiN Schottky Diode Devices	5
A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line	5
BCICTS 2023 Call for Papers	5
Fabrication of On-Silicon Aperture Coupled Patch Antenna Through Micromachining and Cu-Cu Thermocompression Bonding	5
IEEE Transactions on Semiconductor Manufacturing Publication Information	5
Integrated Electrochemical Technology for Efficient Metal Recovery in Semiconductor Wastewater	5
Multiobjective Order Promising for Outsourcing Supply Network of IC Design Houses	5
Unsupervised Representation Learning and Explainable Clustering for Wafer Map Pattern Analysis	5
Current Status of Bulk β-Ga₂O₃ and β-(AlxGa₁-ₓ)₂O₃ Crystal Growth	5
Unrelated Parallel Machine Photolithography Scheduling Problem With Dual Resource Constraints	5
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition	5
Call for Nominations: 2024 EDS Early Career Award	5
Prevention of Moisture Invasion by Flow Isolation Device (FID) for Mask Automatic Storage System (Stocker Room) in a Semiconductor Fabrication Plant (Fab)	5
Editorial	5
Quantitative 3-D Flow Visualization of Conventional Purge Flow Within a Front Opening Unified Pod (FOUP)	5
Overlay Measurement Algorithm for Moiré Targets Using Frequency Analysis	5
Why Contour Averaging Works for SEM Metrology: Analysis and Validation	5
Guest Editorial Introduction to the Joint Special Issue on Semiconductor Design for Manufacturing (DFM)	4
Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab	4
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy	4
Improving Endpoint Detection Sensitivity in Plasma Etching With Small Openings	4
Efficient and Refined Deep Convolutional Features Network for the Crack Segmentation of Solar Cell Electroluminescence Images	4
Chemical Mechanical Polishing of Single-Crystalline Diamond Epitaxial Layers for Electronics Applications	4
TechRxiv: Share Your Preprint Research With the World!	4
Call for Papers for a Special Issue of IEEE Transactions on Electron Devices: Reliability of Advanced Nodes	4
Editorial	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Surface Reconstruction for Enhancing the Overlay Modeling Optimization Procedure in Photolithography Processes	4
Table of Contents	4
Guest Editorial Special Section on the 2025 International Conference on Compound Semiconductor Manufacturing Technology (CS-MANTECH)	4
Blank page	4
IEEE Transactions on Semiconductor Manufacturing Publication Information	4
Guest Editorial Special Section on Sustainability	4
Double Coating Process Using the Single Photoresist and the Thickness Prediction	4
Table of contents	4
Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples	4
IEEE Transactions on Semiconductor Manufacturing Information for Authors	4
Geometry-Based Curvilinear Mask Process Correction for Enhanced Pattern Fidelity, Contrast, and Manufacturability	4
Performance Evaluation of Supervised Learning Model Based on Functional Data Analysis and Summary Statistics	3
Effects of the Applied Power of Remote Plasma System With Green Alternative Chamber Cleaning Gas of Carbonyl Fluoride	3
A Diffusion-Model-Based Methodology for Virtual Silicon Data Generation	3
Production-Level Artificial Intelligence Applications in Semiconductor Supply Chains	3
Model-Based OPC With Adaptive PID Control Through Reinforcement Learning	3
Development of SiGe Indentation Process Control for Gate-All-Around FET Technology Enablement	3
Comparative Study of Nondestructive Mapping of Conformal-Coating Thickness on Microelectronics by Terahertz Time-of-Flight Tomography	3
Sustainable Technologies for Responsible Products and a More Sustainable Future	3
Front Cover	3
Editorial	3
Blank Page	3
Understanding and Improving Virtual Metrology Systems Using Bayesian Methods	3
Density-Based Spatial Clustering of Applications With Noise (DBSCAN) for Probe Card Production for Advanced Quality Control of Wafer Probing Test	3
Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production	3
IEEE Transactions on Semiconductor Manufacturing Information for Authors	3
Real-Time Change Detection for Automated Test Socket Inspection Using Advanced Computer Vision and Machine Learning	3
Editorial	3