Journal of Micromechanics and Microengineering

Article	Citations
RF MEMS capacitive shunt switch for low loss applications	36
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	31
Magnetically maneuverable micromixer using acoustically excited bubbles	29
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	27
Acoustic lens–based actuators for precise and contactless microparticle manipulation	26
Fabrication of freestanding metallic microcomponents via microelectroforming using a composite photopolymer/Ag@Cu conductive mold	25
Passive communication for low power distributed sensors using MEMS optical cavities	24
ALD alumina (Al 2 O 3 )-enabled wafer-level anodic bonding of LTCC and SOI for MEMS integration	24
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	21
Thermo-optical Fresnel zone plates with polymer-coated patterned chromium for coma aberration correction	21
An SOI-based post-fabrication process for compliant MEMS devices	21
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	19
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	19
High density cleanroom-free microneedle arrays for pain-free drug delivery	18
Co 3 O 4 nanoparticle decorated ZnO nanorods for high-sensitivity acetone detection	17
A long-stroke planar linear actuator equipped with magnetic guide	17
Enabling water-based EVA adhesives for solvent-free aerosol jet printing in microfabrication	17
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	17
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	17
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	16
Deep silicon etching technology and applications: a review	16
Experimental study on acoustic-induced microbubbles fusion	16
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	16
Development of an original compact multigas detection system based on MEMS components	16
Microfluidic cells for the 1–102 MPa pressure range	15

Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	15
Controllable fabrication of microstructure arrays on electrospun fibers via mold-assisted self-assembly of beaded fibers	15
Sub-miniature rolling thrust micro-bearing	15
Development of microneedle based blood extraction device	15
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	15
Research on femtosecond laser direct writing-based thermally induced shrinkage process	15
Optical polymer aligner fabricated by 2pp for connecting angled fiber to an optical chip	15
Wideband high-selectivity hybrid filter based on BAW resonator and microstrip line	14
A self-tuning resonance-locking method for polymer MEMS microscanners	14
Advances in microfluidic technologies for efficient blood cell separation	14
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	14
Graphene resonant pressure sensor with ultrahigh responsivity-range product	14
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	13
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	13
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	13
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	13
Variational-based data-driven model identification of micro resonator systems	13
Three-dimensional AC electroosmotic micropump with high power density	13
Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates	13
Reflective x-ray masks for x-ray lithography	13
High throughput microfluidic drug screening system for corneal epithelial wound healing	13
Support-free fabrication of elastic silicone microstructures via direct ink writing for soft robotic applications	13
Numerical simulation of a nebulizer with multiple orifices	12
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	12
Acoustically driven MEMS mirror enhanced by a parallel Helmholtz resonator array	12
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	12
Ultra-high sensitive SAW pressure sensor based on anisotropic LiNbO 3 film	11
A review of research on RF MEMS for metaverse interactions	11
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	11
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	11
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	11
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	11
Study of super flexible mixed phase piezoresistive pressure sensor	11
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	11
A rapid method for fabricating and replicating microlens array structures	11
Direct current triboelectric nanogenerators: a review	11
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	10
Additive biofabrication of silicone scaffolds for tissue engineering: from mold casting to direct ink writing	10
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	10
Flexible flow sensors-enabled intelligent life	10
Semi-reflective visor-based compact head-worn light field display	10
Position-insensitive mass estimation in cantilever MEMS via Fejér-weighted mode averaging	10
Topology optimization of compact micromixers driven by localized velocity objectives	10
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	10
A single-step lithography process for reconfigurable SiN photonics with TiN heaters and Al interconnects	10
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	10
Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe	10
Dual-diaphragm structural design and validation for overload protection in MEMS piezoresistive absolute pressure sensors	10
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	9
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	9

A review of microvalves (2006–2025): state of the art, trends, and future directions	9
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	9
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	9
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8
Knudsen force based double beam MEMS vacuum pressure sensor	8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	8
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	8
Micro- and nanoscale patterning of fluorescent materials via coaxial electrohydrodynamic jet printing	8
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	8
Mixed particles separation based on a cylindrical microfluidic centrifuge	7
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	7
A flexible piezoelectric bending sensor with a neuron-inspired leaky-integrating front-end for continuous human-machine interaction	7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	7
Damping of 3D-printed polymer microbeam resonators	7
Efficient modeling and optimization of FSAW resonance structures: a review	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	7
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	7
Micromachining of nickel and nickel-based alloy surfaces using composite signal	7
Design, development, and testing of active valve piezo-hydraulic pump	7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	7
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	7
Low-cost and sensitive thermal microflow sensor with replaceable capillary tube for microfluidic application	6
Near-zero stiffness MEMS accelerometer utilizing electrothermal buckling in a closed loop configuration	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
Splashing of droplet under the vibration effect of flexible membrane	6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
Displacement-controlled coining of large arrays of gold stud bumps	6
Process windows for oxygen plasma activation of PDMS in confined microchannels	6
Studies on drug delivery from dissolving microneedle and its uptake in tissue	6
Numerical simulation and structural optimization of serpentine curved micromixer	6
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	6
Numerical simulation of wet etching for R angle of fine metal mask	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
Printable cobalt–nickel vanadate-based ozone gas sensors, operating at low temperatures	6
Review of scaling effects on physical properties and practicalities of cantilever sensors	6
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	6
Wet spinning manufacturing and mechanical-electrical properties investigation for thermoplastic polyurethane-carbon black flexible fibers	6
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	6
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	6
Nested 4-/8- spokes architecture for mode matching in (100) silicon disk resonator	6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	6
CMOS microsensor packaging for use in aqueous media	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Design and performance evaluation of a single piezoelectric stacked drive jet dispensing valve	6
Design, fabrication and test of electrothermal microgripper based on 304 stainless steel	6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	5
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	5
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	5
CMUT modeling—extension to soft boundaries and thick plates	5
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	5
Microfabricated electrochemical oxygen sensors with hydrogel electrolytes for in vivo applications	5
Explicit analytical solutions for tip skate and contact force in microcantilever electrical probes	5
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	5
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	5
A simple way to predict the flip–chip gap	5
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	5
Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications	5
Diamond ICP-DRIE etching technology with PECVD SiO 2 as mask	5
A high-quality dual-port surface acoustic wave intermediate frequency filter	5
Flow behaviors and transmission characteristics of Knudsen pump with blocked microchannels	5
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	5
Scalable fabrication of microtextured hydrophobic surfaces via two-step wet etching of aluminum templates for air-layer-induced friction and drag reduction	5
Active vibration reduction of tool holder in hole turning process using machine learning with the assistance of magnetic force	5
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
3D printing-based microfluidic devices in fabric	4
Investigation on drag reduction of micro-structured PDMS film with self-replenishing bubble using water electrolysis	4
Design optimization of an electrothermal MEMS microgripper with integrated sensing for enhanced gripping stroke performance	4
High-accuracy prediction of microcantilever sensor for fluid detection: simulation to deep learning	4
Forming mechanism of metallic microcomponents fabricated by microelectroforming using sandwich-structured silver-polydimethylsiloxane composite molds	4
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	4
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array	4

High-frequency and low-loss SAW devices based on LiTaO3/Sapphire hetero-structure	4
Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples	4
3D simulation estimation and experimental validation of droplet generation in CFD-based flow-focusing microfluidic chips	4
Noncontact MEMS thermal flow sensors integrated in glass microfluidic chemical chip	4
Combination of anti-miR19a-3p polyplex plus doxorubicin for breast cancer in 2D culture and apoptosis assay in 3D spheroids in a microwell device	4
On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications	4
Sub-10 nm metal nanogaps with high SERS performance via a novel conformal coating process	4
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection	4
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band	4
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer	4
Micromachined piezoelectric Lamb wave resonators: a review	4
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	4
Surface reaction between immobilized magnetic microbead-tagged antibodies and electroosmotic flow-driven antigens in a microfluidic device for a realistic higher Damkohler number – a numerical approac	4
Selective metallic reinforcement of silver nanowire junctions for improving the electrical conductivity of transparent electrodes	4
A novel micro-device for simultaneous separation-trapping and double-trapping of particles by using dielectrophoresis: numerical and experimental study	4
Micromixing strategies for efficient mixing processes: a comprehensive review	4
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	4
Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method	4
A novel integrated stir–ultrasonic–squeeze casting route for fabricating AA6061-based metal matrix hybrid nanocomposites with enhanced tribomechanical properties	4
Inverse design of MEMS micro-beam resonators using physics-guided machine learning framework	4
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy	4
Fused silica microchannel fabrication with smooth surface and high etching selectivity	4
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	4
Determining frequency-dependent moduli and residual stresses in parylene-C thin films using a microcantilever array	4
Modelling nanocarrier-mediated transdermal drug delivery to skin and its retention in tissue using dissolving microneedles	4
Transparent glass force plate with CrN strain gauges featuring a notch structure	4
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation	4
Accurate holographic cytometry using three-dimensional hydrodynamic focusing	4
MEMS—suspended gate field effect transistor (SGFET) accelerometer process integration with parylene flexure and plasma doping	3
A novel electromagnetic micropump with PDMS membrane supported by a stainless-steel microstructure	3
A two-stage lstm-based prediction methodology for lamb wave resonators	3
Microfluidics in cardiac microphysiological systems: a review	3
Two-photon printing of monolithic glass electrospray emitters with TPMS micro-architectures	3
Zinc film anodes for air microbatteries: fabrication, approaches, and utilization optimization	3
Corrigendum: Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex (2022 J. Micromech. Microe	3
An improved Bi-LSTM framework based on DWT-MTF-2DCNN for multi-condition temperature prediction in microchannel heat exchanger	3
An A 0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	3
A two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers arrays with improved cross-correlation method	3
Precision optimization of femtosecond laser micromachining for endovascular neural interfaces based on RSM and machine learning	3
Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment	3
Enhanced automatic sorting of liquid crystal droplets via a rotating radial light pattern in an optoelectronic tweezers system	3
Innovating in-situ characterization: a comprehensive measurement system for measuring the ZT and the contact resistance of vertical thermolegs exploiting the vertical transfer length method	3
A data-efficient machine-learning-based structure-process co-optimization framework for Pirani vacuum sensors with diverse applications	3
Flow-through microfluidic relative permittivity sensor using highly-doped silicon sidewall electrodes	3
High-reliability circular-contact RF MEMS switches in silicon hermetic package	3
Micro-gas sensor with a suspended micro-heater for ammonia gas detection	3
Surface acoustic wave bound state in the continuum for 1200 °C high temperature sensing	3
Rapid 3D micro-fabrication using freestanding hybrid mask-assisted electrospray	3
Applications of capacitive micromachined ultrasonic transducers combined with micro- and nanomaterials: a review	3
A nested cantilever piezoelectric MEMS speaker	3
Cooling high heat flux with flow boiling in 2D-structured radial microchannel heat sink	3
A novel microfluidic viscometer for measuring viscosity of ultrasmall volumes of Newtonian and non-Newtonian liquids	3
MEMS audio speakers *	3
Corrigendum: Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique (2024 J.	3
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder	3
Characterization of crystallized thick, highly doped PECVD a-Si:H layers for fabrication of surface micromachined MEMS inertial sensors	3
Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique	3
Interface-regulated metal-assisted chemical etching for stable fabrication of high-aspect-ratio silicon trenches	3
Study on the cause of pore defects processed by focused ion beam milling on high roughness surface	3
Study on the mechanism of glass-SiC-glass anodic bonding process	3
Improvement of nanoscale line-edge roughness by conformal deposition	3
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces	3
Modeling simulation and experimental study of electromagnetic microvibration energy capture systems	3
Adaptive frequency-stabilization of MEMS oscillators using mode coupling	3
Ultra-precision diamond grinding of vapour cells in silicon for quantum technology	3
Improved ultra-precision machining of free-curve V-groove arrays via C -axis rotating diamond cutting and look-ahead acceleration control	3
Evaluation of solvent releases from microfluidic devices made of cycloolefin polymer by temperature-desorption mass spectrometry	3
On-wafer compression test method with endogenous mechanical compensation mechanism for buckling behaviour and etching quality characterization	3
High-Q terahertz bandstop filter via cuboid frame structure	3
Development of a magnetoelectric microgenerator to harvest electrical energy based on electromagnetic effect	3
Characteristics of an antistatic semiconductor bridge based on micro/nano processing techniques	3
Optimisation of neural network hyperparameters for predictive modelling in laser micromachining of biopolymers	3
Design and optimization of electrode-integrated microfluidic chips for enhanced electrochemical impedance spectroscopy assessments	3
On the design of piezoelectric actuator for 1D MEMS scanning mirror applications	3
Fabrication of Cu/SiC composite microgears by microelectroforming using PDMS-Cu conductive molds	3
Experimental investigation of micro-machining of borosilicate glass using an ultrasonic assisted rotary electrochemical discharge machining (UA-RECDM) process	2
Considering microtexture geometry to improve micro-injection molding fidelity	2
Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator	2
A vision sensor for simultaneous imaging and distance sensing in real-time	2
Inline microfluidic thermal conductivity sensor using a suspended highly-doped silicon heater	2
Numerical simulation and performance optimization of underwater piezoelectric artificial lateral line sensor for flow velocity sensing	2
Sidewall transfer lithography: applications in nanofabrication and nanotechnology	2
DMD maskless digital lithography based on stepwise rotary stitching	2
Two-layered microwell-array device for preparation of single-neuron culture samples	2
Spurious modes and temperature stability in wideband SAW devices based on LiNbO 3 and quartz	2
Platinum/quartz based surface acoustic wave device for monotonic long-term wireless temperature sensing up to 450 °C	2
A low-cost fabrication method for PCL-GO microfibers	2
Microparticle trapping at the focal spot using a dual-focus annular CMUT array on a free surface	2
Two-photon polymerization-based fabrication of high aspect ratio pillars for quantifying pituitary pericytes contractility	2
Micromechanical valve-operated needle-on-a-chip microinjection module for microfluidic large-scale integration	2
Energy and cost efficient manufacturing of uniform periodic nanostructures enabled by an adaptable beam flattening device	2
A single-axis and three-electrode MEMS accelerometer with linear output and zero-stiffness	2
Performance comparison of x-ray absorption gratings fabricated by free deposition and centrifugal filling methods	2
RETRACTION: Conformable liquid metal printed epidermal electronics for smart physiological monitoring and simulation treatment (2018 J. Micromech. Microeng.	2
Innovative ultra-high-density microelectrode arrays based on CMOS and MEMS technology	2