Journal of Micromechanics and Microengineering

Article	Citations
A comprehensive review on non-active micro-pumps for microfluidic platforms	82
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	74
A long-stroke planar linear actuator equipped with magnetic guide	69
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	68
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	50
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	38
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	36
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	30
RF MEMS capacitive shunt switch for low loss applications	30
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	29
Passive communication for low power distributed sensors using MEMS optical cavities	26
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	24
Magnetically maneuverable micromixer using acoustically excited bubbles	23
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	22
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	20
Recent advances in power supply strategies for untethered neural implants	20
High density cleanroom-free microneedle arrays for pain-free drug delivery	19
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	19
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	18
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	17
An SOI-based post-fabrication process for compliant MEMS devices	17
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage	16
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	16
Graphene resonant pressure sensor with ultrahigh responsivity-range product	16
Micromachined threshold inertial switches: a review	16

Micromechanics for energy generation	16
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	16
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	15
Manufacturing and assembly of an all-glass OCT microendoscope	14
A preparation technology of micro-structure glass based on mixed micro and nano powders	14
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	14
Experimental study on acoustic-induced microbubbles fusion	14
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	13
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	13
Sub-miniature rolling thrust micro-bearing	13
Development of microneedle based blood extraction device	12
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	12
Shape deviations of DLW microstructures in dependency of fabrication parameters	12
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	12
Numerical simulation of a nebulizer with multiple orifices	11
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	11
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng. 29 025008)	11
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	11
Temperature and pressure effects on microchannels dimensions in hot embossing	11
High throughput microfluidic drug screening system for corneal epithelial wound healing	11
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	11
Three-dimensional AC electroosmotic micropump with high power density	11
Reflective x-ray masks for x-ray lithography	11
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance	10
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	10
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	10
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	10
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	10
Hermetic chip-scale packaging using Au:Sn eutectic bonding for implantable devices	10
A rapid method for fabricating and replicating microlens array structures	10
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	10
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	10
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	10
Direct current triboelectric nanogenerators: a review	10
Study of super flexible mixed phase piezoresistive pressure sensor	9
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	9
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	9
Semi-reflective visor-based compact head-worn light field display	9
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	9
Research on acoustic sensing device based on microfiber knot resonator	9
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook	9
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	9
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	9
A review of research on RF MEMS for metaverse interactions	9
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	9
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	9
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	9

Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	8
Flexible flow sensors-enabled intelligent life	8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	8
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric	8
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	8
Knudsen force based double beam MEMS vacuum pressure sensor	8
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	8
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition	8
Design, development, and testing of active valve piezo-hydraulic pump	8
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	8
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations	8
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	8
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels	8
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application	8
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously	7
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	7
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	7
Damping of 3D-printed polymer microbeam resonators	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	7
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film	7
Review of scaling effects on physical properties and practicalities of cantilever sensors	7
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	7
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	7
Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding	7
Studies on drug delivery from dissolving microneedle and its uptake in tissue	7
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	7
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	7
Micromachining of nickel and nickel-based alloy surfaces using composite signal	7
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	7
A Si-based suspended tunnel structure with trapezoidal section by two-step etching	7
Mixed particles separation based on a cylindrical microfluidic centrifuge	7
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
Nanoscale directional etching features and mechanism of HF/HNO3etchant	6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	6
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	6
A simple way to predict the flip–chip gap	6
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
Surface micromachining of chip-edge silicon microcantilevers using xenon difluoride etching of silicon-on-insulator	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Ultra-low power signal conditioning system for effective biopotential signal recording	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	6
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis	6
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
Splashing of droplet under the vibration effect of flexible membrane	6
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	6
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	6
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	6
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	6
A multi-scale E-jet 3D printing regulated by structured multi-physics field	6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
Displacement-controlled coining of large arrays of gold stud bumps	6
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	6
Advances in micro lithium-ion batteries for on-chip and wearable applications	6
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device	5
A novel micro-device for simultaneous separation-trapping and double-trapping of particles by using dielectrophoresis: numerical and experimental study	5
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	5
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection	5
3D printing-based microfluidic devices in fabric	5
Combination of anti-miR19a-3p polyplex plus doxorubicin for breast cancer in 2D culture and apoptosis assay in 3D spheroids in a microwell device	5
Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays	5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	5
Sub-10 nm metal nanogaps with high SERS performance via a novel conformal coating process	5
Integrated cooling system for microfluidic PDMS devices used in biological microscopy studies	5
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation	5
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band	5

3D simulation estimation and experimental validation of droplet generation in CFD-based flow-focusing microfluidic chips	5
Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples	5
Transparent glass force plate with CrN strain gauges featuring a notch structure	5
Recent trends in structures and applications of valveless piezoelectric pump—a review	5
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array	5
Micromachined piezoelectric Lamb wave resonators: a review	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5
High-performance transparent heater with Ag paste-based nanomesh electrodes	5
Design, analysis, and experimental performance of a novel micro-nozzle based liquid metal direct writing system	5
Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method	5
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	5
Accurate holographic cytometry using three-dimensional hydrodynamic focusing	5
Design and testing of a novel multipath-actuation compliant manipulator	5
Flow-through microfluidic relative permittivity sensor using highly-doped silicon sidewall electrodes	5
A novel electromagnetic micropump with PDMS membrane supported by a stainless-steel microstructure	5
Micromixing strategies for efficient mixing processes: a comprehensive review	5
Utilization of n-dodecane as coupling layer for reusable acoustofluidic microchips	5
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer	5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	5
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
Self-calibration of micro-components based on manipulator guidance	5
RF MEMS filter based on dual liquid variations	5
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy	5
Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates	5
On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications	5
A microchannel device for root hair isolation and behavior analysis	5
A resonant high-pressure sensor based on dual cavities	4
A grade 1 titanium capacitive microsensor for continuous pressure monitoring of intracorporal pressures	4
A non-invasive and high precision sensor for in-situ temperature monitoring of cells	4
Study on the cause of pore defects processed by focused ion beam milling on high roughness surface	4
A novel piezoelectric RF-MEMS resonator with enhanced quality factor	4
MEMS audio speakers *	4
Design and optimization of electrode-integrated microfluidic chips for enhanced electrochemical impedance spectroscopy assessments	4
Surface acoustic wave bound state in the continuum for 1200 °C high temperature sensing	4
Micro-gas sensor with a suspended micro-heater for ammonia gas detection	4
On overtravel and skate in cantilever-based probes for on-wafer measurements	4
Corrigendum: Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique (2024 J. Micromech. Microeng.	4
A two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers arrays with improved cross-correlation method	4
On the design of piezoelectric actuator for 1D MEMS scanning mirror applications	4
Geometry effects on flow characteristics of micro-scale planar nozzles	4
High-reliability circular-contact RF MEMS switches in silicon hermetic package	4
Characteristics of an antistatic semiconductor bridge based on micro/nano processing techniques	4
An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	4
Scotch-tape surface wrinkling based thin-film material properties extraction	4
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	4
Technology evolution from micro-scale energy harvesters to nanogenerators	4
A novel microfluidic viscometer for measuring viscosity of ultrasmall volumes of Newtonian and non-Newtonian liquids	4
Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel	4
Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment	4
Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique	4
Fully differential higher order transverse mode piezoelectric membrane resonators for enhanced liquid-phase quality factors	4
Study on the mechanism of glass-SiC-glass anodic bonding process	4
A programmable 3D printing method for magnetically driven micro soft robots based on surface tension	4
Research on dynamics of bouncing ball in triboelectric nanogenerator	4
A perspective of active microfluidic platforms as an enabling tool for applications in other fields	4
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder	4
SEM image-guided manipulation with a feedback assistance system for automated nanohandling of a 4 DOF micromanipulator	4
High-density stretchable microelectrode array based on multilayer serpentine interconnections	4
Field nonuniformity of limited-aperture planar SAWs and its implications for designing SSAW acoustofluidics	4
Microfluidics in cardiac microphysiological systems: a review	4
Innovating in-situ characterization: a comprehensive measurement system for measuring the ZT and the contact resistance of vertical thermolegs exploiting the vertical transfer length method	4
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces	4
Numerical study of enhanced Rayleigh streaming in resonant cylindrical shells	4
Micro electric discharge machining (μ-EDM) of polymer nanocomposites modified by graphene nanoplatelets/carbon using rotating electrode tool	4
Zinc film anodes for air microbatteries: fabrication, approaches, and utilization optimization	4
A piezoelectric micromachined ultrasonic transducer with mechanical grooves	3
DMD maskless digital lithography based on stepwise rotary stitching	3
Performance comparison of x-ray absorption gratings fabricated by free deposition and centrifugal filling methods	3
Physics-informed neural networks with data-driven in modeling and characterizing piezoelectric micro-bender	3
Micromechanical valve-operated needle-on-a-chip microinjection module for microfluidic large-scale integration	3
Advancements in mathematical modeling and design configurations of piezoelectric energy harvesters: a comprehensive review	3
Development of MEMS composite sensor with temperature compensation for tire pressure monitoring system	3
High-Q terahertz bandstop filter via cuboid frame structure	3
Quantifying and correcting tilt-related positioning errors in microcantilever-based microelectromechanical systems probes	3
A novel MEMS inertial switch with frictional electrode	3
Glass microprism matrix for fluorescence excitation in lab-on-a-chip platforms	3
Development of a bubble-based single cell picking system	3
Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking	3
Two-layered microwell-array device for preparation of single-neuron culture samples	3
A combined MEMS thermal vacuum sensor with a wide pressure range	3
Manufacturing and characterization of CMOS-MEMS magnetic field microsensors with isolated cavities	3
A sensing material-free and simple readout MEMS sensor for detecting helium	3
Corrigendum: Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex (2022 J. Micromech. Microeng. 32	3
Development of crystallized thick, highly doped a-Si:H layers for surface micromachining of MEMS inertial sensors	3
Accessible, large-area, uniform dose photolithography using a moving light source	3
Mechanical characteristics of laminated film vibrator using an ultra-thin MEMS actuator	3
A vision sensor for simultaneous imaging and distance sensing in real-time	3
Energy and cost efficient manufacturing of uniform periodic nanostructures enabled by an adaptable beam flattening device	3
Experimental investigation of micro-machining of borosilicate glass using an ultrasonic assisted rotary electrochemical discharge machining (UA-RECDM) process	3
Optimization of plotter printing for sub-terahertz metallic metasurfaces fabrication on ultra-thin substrate	3
MEMS piezoelectric resonant microphone array for lung sound classification	3
Development of microfluidic flow cytometry capable of characterization of single-cell intrinsic structural and electrical parameters	3
Programmable intelligent liquid matter: material, science and technology	3
Mechanical reliability of silicon microstructures	3
High-throughput particle focusing and separation in split-recombination channel	3