Journal of Micromechanics and Microengineering

Article	Citations
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	31
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	31
RF MEMS capacitive shunt switch for low loss applications	27
Enabling water-based EVA adhesives for solvent-free aerosol jet printing in microfabrication	27
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	24
A long-stroke planar linear actuator equipped with magnetic guide	24
Magnetically maneuverable micromixer using acoustically excited bubbles	23
Co 3 O 4 nanoparticle decorated ZnO nanorods for high-sensitivity acetone detection	23
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	23
Acoustic lens–based actuators for precise and contactless microparticle manipulation	22
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	21
Fabrication of freestanding metallic microcomponents via microelectroforming using a composite photopolymer/Ag@Cu conductive mold	21
An SOI-based post-fabrication process for compliant MEMS devices	19
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	19
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	18
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	18
High density cleanroom-free microneedle arrays for pain-free drug delivery	17
Deep silicon etching technology and applications: a review	16
ALD alumina (Al 2 O 3 )-enabled wafer-level anodic bonding of LTCC and SOI for MEMS integration	16
Thermo-optical Fresnel zone plates with polymer-coated patterned chromium for coma aberration correction	16
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	16
Passive communication for low power distributed sensors using MEMS optical cavities	16
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	15
Microfluidic cells for the 1–102 MPa pressure range	15
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	15

Sub-miniature rolling thrust micro-bearing	15
Development of an original compact multigas detection system based on MEMS components	15
Experimental study on acoustic-induced microbubbles fusion	15
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	15
Advances in microfluidic technologies for efficient blood cell separation	14
Research on femtosecond laser direct writing-based thermally induced shrinkage process	14
Controllable fabrication of microstructure arrays on electrospun fibers via mold-assisted self-assembly of beaded fibers	14
Graphene resonant pressure sensor with ultrahigh responsivity-range product	14
Development of microneedle based blood extraction device	14
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	14
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	13
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	13
A self-tuning resonance-locking method for polymer MEMS microscanners	13
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	13
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	13
Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates	13
Optical polymer aligner fabricated by 2pp for connecting angled fiber to an optical chip	13
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	13
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng.	12
Research on acoustic sensing device based on microfiber knot resonator	12
Variational-based data-driven model identification of micro resonator systems	12
Temperature and pressure effects on microchannels dimensions in hot embossing	12
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	12
Reflective x-ray masks for x-ray lithography	12
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	12
Support-free fabrication of elastic silicone microstructures via direct ink writing for soft robotic applications	12
Ultra-high sensitive SAW pressure sensor based on anisotropic LiNbO 3 film	11
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	11
Study of super flexible mixed phase piezoresistive pressure sensor	11
High throughput microfluidic drug screening system for corneal epithelial wound healing	11
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	11
Three-dimensional AC electroosmotic micropump with high power density	11
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	11
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	11
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	11
Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe	10
Numerical simulation of a nebulizer with multiple orifices	10
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	10
Acoustically driven MEMS mirror enhanced by a parallel Helmholtz resonator array	10
A rapid method for fabricating and replicating microlens array structures	10
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	10
Direct current triboelectric nanogenerators: a review	10
Flexible flow sensors-enabled intelligent life	9
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	9
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	9
Topology optimization of compact micromixers driven by localized velocity objectives	9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	9
A review of research on RF MEMS for metaverse interactions	9
Additive biofabrication of silicone scaffolds for tissue engineering: from mold casting to direct ink writing	9

Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	9
Dual-diaphragm structural design and validation for overload protection in MEMS piezoresistive absolute pressure sensors	9
Semi-reflective visor-based compact head-worn light field display	9
Position-insensitive mass estimation in cantilever MEMS via Fejér-weighted mode averaging	9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	9
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	8
Knudsen force based double beam MEMS vacuum pressure sensor	8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	8
Micro- and nanoscale patterning of fluorescent materials via coaxial electrohydrodynamic jet printing	8
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	8
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	8
Design, development, and testing of active valve piezo-hydraulic pump	8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	8
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	8
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	7
Design and performance evaluation of a single piezoelectric stacked drive jet dispensing valve	7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	7
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	7
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Wet spinning manufacturing and mechanical-electrical properties investigation for thermoplastic polyurethane-carbon black flexible fibers	6
Studies on drug delivery from dissolving microneedle and its uptake in tissue	6
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	6
Damping of 3D-printed polymer microbeam resonators	6
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor	6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	6
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
Review of scaling effects on physical properties and practicalities of cantilever sensors	6
Displacement-controlled coining of large arrays of gold stud bumps	6
Design, fabrication and test of electrothermal microgripper based on 304 stainless steel	6
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	6
Mixed particles separation based on a cylindrical microfluidic centrifuge	6
Low-cost and sensitive thermal microflow sensor with replaceable capillary tube for microfluidic application	6
Near-zero stiffness MEMS accelerometer utilizing electrothermal buckling in a closed loop configuration	6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	6
CMOS microsensor packaging for use in aqueous media	6
Printable cobalt–nickel vanadate-based ozone gas sensors, operating at low temperatures	6
Nested 4-/8- spokes architecture for mode matching in (100) silicon disk resonator	6
Numerical simulation and structural optimization of serpentine curved micromixer	6
Numerical simulation of wet etching for R angle of fine metal mask	6
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	6
Micromachining of nickel and nickel-based alloy surfaces using composite signal	6
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	6
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	6
Splashing of droplet under the vibration effect of flexible membrane	6
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	5
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	5
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	5
Diamond ICP-DRIE etching technology with PECVD SiO 2 as mask	5
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
Determining frequency-dependent moduli and residual stresses in parylene-C thin films using a microcantilever array	5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	5
Self-calibration of micro-components based on manipulator guidance	5
A simple way to predict the flip–chip gap	5
A novel electromagnetic microactuator with a stainless steel mas-spring structure	5
Flow behaviors and transmission characteristics of Knudsen pump with blocked microchannels	5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	5
Surface reaction between immobilized magnetic microbead-tagged antibodies and electroosmotic flow-driven antigens in a microfluidic device for a realistic higher Damkohler number – a numerical approac	5
Micromachined piezoelectric Lamb wave resonators: a review	5
Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications	5
Microfabricated electrochemical oxygen sensors with hydrogel electrolytes for in vivo applications	5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	5
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	5
CMUT modeling—extension to soft boundaries and thick plates	5
A high-quality dual-port surface acoustic wave intermediate frequency filter	5
Active vibration reduction of tool holder in hole turning process using machine learning with the assistance of magnetic force	5

Fused silica microchannel fabrication with smooth surface and high etching selectivity	5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	5
High-frequency and low-loss SAW devices based on LiTaO3/Sapphire hetero-structure	5