Journal of Micromechanics and Microengineering

Article	Citations
A long-stroke planar linear actuator equipped with magnetic guide	86
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	74
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	70
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	53
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	38
Passive communication for low power distributed sensors using MEMS optical cavities	34
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	29
Magnetically maneuverable micromixer using acoustically excited bubbles	26
Recent advances in power supply strategies for untethered neural implants	25
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	25
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	23
High density cleanroom-free microneedle arrays for pain-free drug delivery	21
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	20
An SOI-based post-fabrication process for compliant MEMS devices	20
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	19
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	19
RF MEMS capacitive shunt switch for low loss applications	19
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	18
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	18
Shape deviations of DLW microstructures in dependency of fabrication parameters	17
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	17
Micromechanics for energy generation	17
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage	17
Microfluidic cells for the 1–102 MPa pressure range	17
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	16

Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	16
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	16
Experimental study on acoustic-induced microbubbles fusion	15
Manufacturing and assembly of an all-glass OCT microendoscope	15
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	14
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	14
A preparation technology of micro-structure glass based on mixed micro and nano powders	14
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	14
Sub-miniature rolling thrust micro-bearing	14
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	14
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	13
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	13
Micromachined threshold inertial switches: a review	13
Development of microneedle based blood extraction device	12
Numerical simulation of a nebulizer with multiple orifices	12
Temperature and pressure effects on microchannels dimensions in hot embossing	12
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	12
Three-dimensional AC electroosmotic micropump with high power density	12
Graphene resonant pressure sensor with ultrahigh responsivity-range product	12
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	12
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng. 29 025008)	12
Research on acoustic sensing device based on microfiber knot resonator	11
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	11
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	11
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	11
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	11
Reflective x-ray masks for x-ray lithography	11
Study of super flexible mixed phase piezoresistive pressure sensor	11
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance	11
Direct current triboelectric nanogenerators: a review	11
Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	11
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	11
High throughput microfluidic drug screening system for corneal epithelial wound healing	11
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	11
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	11
A review of research on RF MEMS for metaverse interactions	10
Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe	10
A rapid method for fabricating and replicating microlens array structures	10
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook	10
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	10
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	10
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	9
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	9
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	9
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	9
Variational-based data-driven model identification of micro resonator systems	9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	9
Semi-reflective visor-based compact head-worn light field display	9
Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures	9
Flexible flow sensors-enabled intelligent life	9

Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	9
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations	9
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	9
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	8
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	8
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric	8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	8
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	8
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	8
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition	8
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O3-based monocrystalline thin film	8
Knudsen force based double beam MEMS vacuum pressure sensor	8
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	8
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels	8
Design, development, and testing of active valve piezo-hydraulic pump	8
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	8
Review of scaling effects on physical properties and practicalities of cantilever sensors	7
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	7
Studies on drug delivery from dissolving microneedle and its uptake in tissue	7
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	7
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	7
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	7
Micromachining of nickel and nickel-based alloy surfaces using composite signal	7
A Si-based suspended tunnel structure with trapezoidal section by two-step etching	7
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	7
Displacement-controlled coining of large arrays of gold stud bumps	7
Damping of 3D-printed polymer microbeam resonators	7
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	7
Mixed particles separation based on a cylindrical microfluidic centrifuge	7
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	7
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit	7
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	6
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	6
Advances in micro lithium-ion batteries for on-chip and wearable applications	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	6
A multi-scale E-jet 3D printing regulated by structured multi-physics field	6
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	6
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	6
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis	6
PDMS micro check valve with 3D valve disk for reducing fluid resistance	6
CMOS microsensor packaging for use in aqueous media	6
Numerical simulation of wet etching for R angle of fine metal mask	6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	6
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor	6
RF MEMS filter based on dual liquid variations	6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	6
High-performance transparent heater with Ag paste-based nanomesh electrodes	6
A simple way to predict the flip–chip gap	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
Ultra-low power signal conditioning system for effective biopotential signal recording	6
Splashing of droplet under the vibration effect of flexible membrane	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer	6
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure	6
Laser drilling of stainless steel foil with reduced sidelobe ablation using a spatially filtered Bessel–Gauss beam	5
On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications	5
Combination of anti-miR19a-3p polyplex plus doxorubicin for breast cancer in 2D culture and apoptosis assay in 3D spheroids in a microwell device	5
3D printing-based microfluidic devices in fabric	5
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	5
Active vibration reduction of tool holder in hole turning process using machine learning with the assistance of magnetic force	5
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	5
A 3D-printed spiral actuator for focus adjustment in circumferential scanning endomicroscopy	5
Fabrication of microneedles using wire electric discharge machining and improving surface quality by electrochemical polishing	5
A microchannel device for root hair isolation and behavior analysis	5
Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array	5

Ultra-high precision passive particle sorting chip coupling inertial microfluidics and single row micropillar arrays	5
Geometry effects on flow characteristics of micro-scale planar nozzles	5
3D simulation estimation and experimental validation of droplet generation in CFD-based flow-focusing microfluidic chips	5
Recent trends in structures and applications of valveless piezoelectric pump—a review	5
Development of an EGFET microsensor with 3D structure for high-specificity cardiac troponin I detection	5
Noncontact MEMS thermal flow sensors integrated in glass microfluidic chemical chip	5
Micromixing strategies for efficient mixing processes: a comprehensive review	5
Micromachined piezoelectric Lamb wave resonators: a review	5
Improvement on the uniformity of deep reactive ion etch for electrically isolated silicon-based substrates	5
Self-calibration of micro-components based on manipulator guidance	5
Integrated cooling system for microfluidic PDMS devices used in biological microscopy studies	5
A numerical modeling approach to estimate the piezoresistance of diffused resistors with experimental validation	5
Design and fabrication of lithium niobate asymmetrical mode resonators toward C-band and Ku-band	5
Nanosecond pulsed laser transmission welding of cyclic olefin copolymer	5
Design and testing of a novel multipath-actuation compliant manipulator	5
Flow-through microfluidic relative permittivity sensor using highly-doped silicon sidewall electrodes	5
Picoliter liquid handling at gas/liquid interface by surface and geometry control in a micro-nanofluidic device	5
Fabrication of micro-ultrasonic phased array electrode via electric field-driven printing method	5
Utilization of n-dodecane as coupling layer for reusable acoustofluidic microchips	5
Large stroke electromagnetic redundant actuated six degrees-of-freedom parallel compliant micropositioning stage	5
Design, analysis, and experimental performance of a novel micro-nozzle based liquid metal direct writing system	5
Fatigue fracture mechanics in gold-based MEMS notched specimens: experimental and numerical study	5
Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing	5
Sub-10 nm metal nanogaps with high SERS performance via a novel conformal coating process	5
Accurate holographic cytometry using three-dimensional hydrodynamic focusing	5
Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications	5
Fused silica microchannel fabrication with smooth surface and high etching selectivity	5
A resonant high-pressure sensor based on dual cavities	5
Transparent glass force plate with CrN strain gauges featuring a notch structure	5