OOIR: Observatory of International Research

Papers

(The TQCC of Journal of Micromechanics and Microengineering is 6. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-09-01 to 2025-09-01.)

Article	Citations
A long-stroke planar linear actuator equipped with magnetic guide	88
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	81
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	54
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	42
Passive communication for low power distributed sensors using MEMS optical cavities	34
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	29
Magnetically maneuverable micromixer using acoustically excited bubbles	26
Recent advances in power supply strategies for untethered neural implants	25
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	25
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	24
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	21
RF MEMS capacitive shunt switch for low loss applications	21
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	20
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	19
Deep silicon etching technology and applications: a review	19
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	19
High density cleanroom-free microneedle arrays for pain-free drug delivery	19
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	18
Shape deviations of DLW microstructures in dependency of fabrication parameters	18
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	18
An SOI-based post-fabrication process for compliant MEMS devices	18
Enabling water-based EVA adhesives for solvent-free aerosol jet printing in microfabrication	18
Micromachined threshold inertial switches: a review	17
Microfluidic cells for the 1–10² MPa pressure range	17
Micromechanics for energy generation	16

PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	16
Development of microneedle based blood extraction device	16
Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage	16
A high-sensitivity MEMS fluxgate sensor with double-layer induction coils fabricated by micro-casting	16
Electric field sensing characteristics of ZnO/SiO₂/Si surface acoustic wave devices	15
Experimental study on acoustic-induced microbubbles fusion	15
Manufacturing and assembly of an all-glass OCT microendoscope	15
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	15
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	14
Sub-miniature rolling thrust micro-bearing	14
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	14
A preparation technology of micro-structure glass based on mixed micro and nano powders	14
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	14
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	13
Graphene resonant pressure sensor with ultrahigh responsivity-range product	13
A quantitative study of the dynamic response of compliant microfluidic chips in a microfluidics context	13
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	13
Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs	12
Three-dimensional AC electroosmotic micropump with high power density	12
Temperature and pressure effects on microchannels dimensions in hot embossing	12
High throughput microfluidic drug screening system for corneal epithelial wound healing	12
Numerical simulation of a nebulizer with multiple orifices	12
Efficient heat dissipation with hybrid composite-based microfluidic heat sinks in flexible electronics	12
Comparative analysis and tests for an improved frequency tuning area-varying electrode considering the influence of fringe capacitance	12
Corrigendum: Fabrication of FP-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process (2019 J. Micromech. Microeng. 29 025008)	12
Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures	12
Noninvasive measurement of temperature for simulated tissue based on piezoelectric micromachined ultrasonic transducers	11
Research on acoustic sensing device based on microfiber knot resonator	11
Reflective x-ray masks for x-ray lithography	11
Study of super flexible mixed phase piezoresistive pressure sensor	11
The multimodal motion along a solid–liquid interface of a soft microrobot driven by compound magnetic fields	11
The effect of quaternary ammonium salts with different chain lengths on copper filling behavior in blind holes of printed circuit board	11
Flexible pressure/temperature sensors with heterogeneous integration of ultra-thin silicon and polymer	11
In-situ measurement of anisotropic Young’s modulus in fused deposition modeling printed cantilevers	11
Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation	11
A review of research on RF MEMS for metaverse interactions	11
Support-Free Fabrication of Elastic Silicone Microstructures via Direct Ink Writing for Soft Robotic Applications	10
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability	10
A rapid method for fabricating and replicating microlens array structures	10
RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook	10
Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors	10
Variational-based data-driven model identification of micro resonator systems	10
Direct current triboelectric nanogenerators: a review	10
Low-voltage electrostatic manipulation of microparticles using a single carbon fiber probe	10
Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers	9
Fast analysis of MEMS micromirror based on multi-physical electro-mechanical-damping coupling method	9
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification	9
Efficient annular aperture array (AAA) filter for thermophotovoltaic by sidewall lithography	9
Unsealed piezoelectric MEMS speaker with rigid-flexible composite membrane	9
Performance of aluminum nitride-based piezoelectric micromachined ultrasonic transducers under different readout configurations	9

Producing micro impressions on Al6061 under alumina-mixed deionized water as dielectric during electric discharge machining	9
Characterization and compensation of thermal bias drift of a stiffness-tunable MEMS accelerometer	9
Semi-reflective visor-based compact head-worn light field display	9
Highly responsive screen-printed asymmetric pressure sensor based on laser-induced graphene	9
Flexible flow sensors-enabled intelligent life	9
Research on the measurement of wet etching rates and Level Set simulation of patterned sapphire substrates	9
Non-faradaic electrochemical impedance spectroscopy analysis of C-MEMS derived bio-modified glassy carbon electrode	9
Evaluation of Bosch processing and C₄F₈ plasma deposition at cryogenic temperatures	9
Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer	9
A penetration efficiency model for the optimization of solid conical microneedles’ geometry	9
Manufacturing of hydraulically steerable actuator using closed molding and core template for vascular intervention guidewires	8
Review of scaling effects on physical properties and practicalities of cantilever sensors	8
Microfluidic multicolor display by juxtapositional color mixing with a pattern of primary color pixels	8
Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application	8
Performance analysis of synthetic jet micropump based on double piezoelectric actuators	8
Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor	8
Knudsen force based double beam MEMS vacuum pressure sensor	8
Micromachining of nickel and nickel-based alloy surfaces using composite signal	8
Formation of silver wires embedded in hydrogels using femtosecond laser ablation and electroplating for strain sensing	8
Influence of process parameters on the characteristics of electrohydrodynamic-printed UV-curing conductive lines on the fabric	8
Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing	8
Nanofluidic gas/liquid switching utilizing a nanochannel open/close valve based on glass deformation	8
A highly accurate analytical method for determination of the vibrational frequency of N/MEMS with electrostatic and van der Waals interaction forces	8
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O₃-based monocrystalline thin film	8
Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition	8
Barium titanate piezoelectric-film-based beam-array airflow sensor for wearable breath-monitoring application	8
Design, development, and testing of active valve piezo-hydraulic pump	8
Hierarchical integration of nanopillars and nanochannels in a nanofluidic device for single-nanoparticle detection	8
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	7
Studies on drug delivery from dissolving microneedle and its uptake in tissue	7
Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously	7
Efficient strategy for frequency design and bandwidth extension of curved piezoelectric ultrasonic micromachined transducers	7
Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners	7
Damping of 3D-printed polymer microbeam resonators	7
PDMS micro check valve with 3D valve disk for reducing fluid resistance	7
Displacement-controlled coining of large arrays of gold stud bumps	7
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge	7
A MEMS frequency modulation electrometer based on pre-bias charge mechanism to enhance performance	7
Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers	7
Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring	7
Design and analysis of a dual-actuator force-balanced MEMS pressure sensor	7
Splashing of droplet under the vibration effect of flexible membrane	7
Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation	7
Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit	7
RF MEMS electrostatically actuated tunable capacitors and their applications: a review	7
Mixed particles separation based on a cylindrical microfluidic centrifuge	7
Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid	7
Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers	7
A Si-based suspended tunnel structure with trapezoidal section by two-step etching	7
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
A simple way to predict the flip–chip gap	6
A low-cost 3D-printing based rapid fabrication procedure for modular microfluidic platform	6
Design, analysis, and experimental performance of a novel micro-nozzle based liquid metal direct writing system	6
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces	6
Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	6
An analytical model of three-hot-wire acoustic particle velocity sensors	6
Effect of SiO₂ protective layer on LiNbO₃ structured SAW resonators and temperature characteristics study	6
Advances in micro lithium-ion batteries for on-chip and wearable applications	6
Fabrication and characterization of suspended La_0.7Sr_0.3MnO₃ nanofibers for high-sensitive and fast-responsive infrared bolometer	6
A novel electromagnetic microactuator with a stainless steel mas-spring structure	6
Self-calibration of micro-components based on manipulator guidance	6
RF MEMS filter based on dual liquid variations	6
A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch	6
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO₃/SiO₂/Si multilayer structure	6
A multi-scale E-jet 3D printing regulated by structured multi-physics field	6
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	6
Ultra-low power signal conditioning system for effective biopotential signal recording	6
Numerical simulation of wet etching for R angle of fine metal mask	6
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	6
High-performance transparent heater with Ag paste-based nanomesh electrodes	6
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation	6
Electrohydrodynamic jet printed templates for hot embossing of microfluidic devices	6
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system	6
The effect of DRIE notching on field emission enhanced breakdown in SOI based MEMS electrodes	6
Wafer level hermetic bonding and packaging using recrystallized parylene	6
CMOS microsensor packaging for use in aqueous media	6