Journal of Micromechanics and Microengineering

Article	Citations
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator	392
Study on the cause of pore defects processed by focused ion beam milling on high roughness surface	79
Wafer-level chip-scale packaging of MEMS environmental sensors by functionalized porous PowderMEMS® micro-filters	68
A triboelectric nanosensor based on ultra-thin MXene composite paper for heavy metal ion detection	67
Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application	64
Research on the influence of conical micro array chip parameters on fog water collection	51
Fabrication of P(100) silicon macro-pore and pillar array by wet electrochemical etching	43
Experimental and numerical study of gas flow through microchannel with 90° bends	33
Design and optimization of electrode-integrated microfluidic chips for enhanced electrochemical impedance spectroscopy assessments	33
Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics	28
Magnetically maneuverable micromixer using acoustically excited bubbles	28
Bistable liquid shutter operated by DEW actuation for multifunctional miniature cameras	27
Data-driven estimation of battery state-of-health with formation features	24
On overtravel and skate in cantilever-based probes for on-wafer measurements	23
Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitors	22
Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique	22
Development of a piezoelectric pump with unfixed valve	20
Surface micromachining of chip-edge silicon microcantilevers using xenon difluoride etching of silicon-on-insulator	19
Data-driven model-free adaptive sliding mode control for electromagnetic linear actuator	19
A non-invasive and high precision sensor for in-situ temperature monitoring of cells	18
Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile	16
Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel	16
A review of geometric and structural design for reliable flexible electronics	16
A long-stroke planar linear actuator equipped with magnetic guide	16
On the PZT/Si unimorph cantilever design for the signal-to-noise ratio enhancement of piezoelectric MEMS microphone	15

Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrors	15
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder	14
Miniature and tunable high voltage-driven soft electroactive biconvex lenses for optical visual identification	14
Development of droplet microfluidics capable of quantitative estimation of single-cell multiplex proteins	14
Picoliter liquid operations in nanofluidic channel utilizing an open/close valve with nanoscale curved structure mimicking glass deflection	14
Displacement of PAMAM-Au via acoustic streaming on an electrochemical immunosensing platform	14
Atmospheric micro-sized cold plasma jet created by a long and ultra-flexible generator with sputtered gold thin film electrode	14
Loss mechanisms of multi-frequency whispering gallery mode RF-MEMS resonators	13
Large-area patterning for broadband, quasi-omnidirectional low-reflectance glass	13
Single-side micromachined ultra-small thermopile IR detecting pixels for dense-array integration	13
Evaluation of the impact of abnormal grains on the performance of Sc0.15Al0.85N-based BAW resonators and filters	13
Extracting white blood cells from blood on microfluidics platform: a review of isolation techniques and working mechanisms	12
An SOI-based post-fabrication process for compliant MEMS devices	12
Imaging of simulated muscle based on single chip of AlN piezoelectric micromachined ultrasonic transducer	11
Fabrication of an X-shaped micro-copper structure containing a merging joint based on localized electrochemical deposition	11
Design and investigation of dielectric modulated triple metal gate-oxide-stack Z-shaped gate horizontal pocket TFET device as a label-free biosensor	11
Performance evaluation of a 3D split-and-recombination micromixer with asymmetric structures	11
Efficient system-level simulations of thermal wind sensors considering environmental factors	11
Noise analysis and modeling for a digital control architecture for Lissajous frequency-modulated MEMS gyroscope with amplitude-modulated readout	10
Measurement and control of stiction force in in-plane electrostatically actuated Si nanoelectromechanical cantilever relays with Pt contacts	10
Fabrication of large scale bi-layer microstructures through electrochemical nanoimprinting	10
An electromagnetically actuated ball and socket joint for applications in 3D metrology	10
Design and fabrication of non-resonant PZT MEMS micromirror with buried piezoresistors for closed loop position control	10
Wafer level hermetic bonding and packaging using recrystallized parylene	10
RF MEMS capacitive shunt switch for low loss applications	10
High density cleanroom-free microneedle arrays for pain-free drug delivery	10
Analytical modeling of a MEMS beam resonator with release-etch holes	10
Research on high temperature performance of pressure sensor	10
Sol–gel-derived nanoparticles coated liquid entities: liquid marbles, liquid plasticine, and flat interface	10
Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces	10
Splashing of droplet under the vibration effect of flexible membrane	9
Characteristics of an antistatic semiconductor bridge based on micro/nano processing techniques	9
Surface acoustic wave bound state in the continuum for 1200 °C high temperature sensing	9
Equivalent electrical circuits for electroacoustic MEMS design: a review	9
Investigating WBC margination in different microfluidic geometries: influence of RBC shape and size	9
Inkjet printing of pixel arrays: droplet formation and pattern uniformity of a non-aqueous ink with tunable viscosity	9
Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study	9
Design and performance analysis of an embedded amplified piezoelectric jetting dispensing valve	9
Fabrication of high-aspect-ratio metallic microstructures by microelectroforming using silver-coated polydimethylsiloxane molds with controllable wettability	9
Microfluidics in cardiac microphysiological systems: a review	9
Novel 3D printed single electrode-based portable and miniaturized electrochemiluminescence platform to detect lactate from human serum	9
An analytical model of three-hot-wire acoustic particle velocity sensors	9
Ultra-small high‐temperature pressure sensor chips fabricated in single‐layer (111) SOI wafers	9
Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining	9
One-to-two internal resonance in a micro-mechanical resonator with strong Duffing nonlinearity	9
Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures	9
Passive communication for low power distributed sensors using MEMS optical cavities	9
MXene (Ti3C2T x )/TMD (ReSe2) nanohybrid-based flexible electromechanical sensors for cervical collar strain and shoulder l	9
An on-chip test structure to measure the Seebeck coefficient of thermopile sensors	8
PDMS micro check valve with 3D valve disk for reducing fluid resistance	8

Irreversible, self-aligned microfluidic packaging for chronic implant applications	8
Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting ability	8
Closed-form solution of the deflection of a prestressed multilayer cantilever	8
Automatic calibration and nonlinearity optimization for scale factor of micro-electromechanical system gyroscopes under force rebalanced operation	8
On-chip micro pressure sensor for microfluidic pressure monitoring	8
Research on fabrication method for floating structures using general photolithography with high versatility	8
Three-dimensional carbon interdigitated ring array nanofibers for electrochemical detection of dopamine neurotransmitter	8
Modeling and characterization of AlN-Based piezoelectric micromachined ultrasonic transducers	8
Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements	8
Displacement-controlled coining of large arrays of gold stud bumps	8
Lithographically patternable SU-8/Graphene nanocomposite based strain sensors for soft-MEMS applications	8
Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire	8
Rapid fabrication of microfluidic mixer chip by non-isothermal molding method based on resistance heating principle and its application in pesticide residue detection	8
Acoustic matching strategy of piezoelectric micromachined ultrasound transducer towards medical imaging application	8
Hydrodynamic characteristics of an evaporation-based micro-synthetic jet for micro-propulsion	7
A review of assembly techniques for fabricating twisted bilayer graphene	7
High-density stretchable microelectrode array based on multilayer serpentine interconnections	7
Design and fabrication of a low-cost microfluidic cartridge with integrated pressure-driven check valve for molecular diagnostics platforms	7
Flexible pressure and temperature dual-modality sensor based on stretchable electrode for human–machine interaction	7
A comprehensive review on non-active micro-pumps for microfluidic platforms	7
An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators	7
Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate	7
Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop control	7
Derivation of analytical expressions for the stress/strain distributions, bending plane and curvature radius in multilayer thin-film composites	7
Fluid control with hydrophobic pillars in paper-based microfluidics	7
Ultra-low power signal conditioning system for effective biopotential signal recording	7
Induced flow inside a droplet by static electrical charge	7
Anisotropic wet etching of a novel micro-texture structure for an Al/n-Si/Al metal–semiconductor–metal photodetector fabrication	7
PDMS-polyimide transcutaneous blood gas collector with self-folding out-of-plane heater elements	7
Micromechanical resonant cantilever sensors actuated by fringing electrostatic fields	7
Bandwidth enhancement of piezoelectric MEMS microspeaker via central diaphragm actuation and filter integration	7
Photothermal liquid release from arrayed Au nanorod/hydrogel composites for chemical stimulation	7
MEMS audio speakers *	7
Numerical simulation of particle deposition patterns in evaporating droplets	7
Towards tilt-free in plasma etching	7
Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscope	7
First multiplexed electrochemical wax-on-plastic chip: PNA/GO interface integration for DNA detection	6
Advances in micro lithium-ion batteries for on-chip and wearable applications	6
Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores	6
SEM image-guided manipulation with a feedback assistance system for automated nanohandling of a 4 DOF micromanipulator	6
Near thermal-electric field controlled electrohydrodynamic 3D printing of high aspect ratio microstructures	6
2D FPCB micromirror for scanning LIDAR	6
Microscale surface texturing on nonplanar surface of diffusion lens for anti-glare LED light	6
A novel MEMS inertial switch with frictional electrode	6
Scotch-tape surface wrinkling based thin-film material properties extraction	6
Enhancing cardiomyocyte maturation through PEDOT:PSS-coated surfaces and mechanical stimulation with strain sensors	6
Influence of source electrode metal work function on polar gate prompted source hole plasma in arsenide/antimonide tunneling interfaced junctionless TFET	6
Enhancing the performance of dielectric elastomer actuators through the approach of distributed electrode array with fractal interconnects architecture	6
Study of notched MEMS specimen: elasto-plastic modeling and experimental testing	6
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization	6
Motion of generated dumbbell-shaped satellite droplets during liquid dielectrophoresis	6
Nanoscale directional etching features and mechanism of HF/HNO3etchant	6
Using sugar as a mask material (SAAMM) in micro-nano fabrication: a high-performance, green and simple method	6
High-performance transparent heater with Ag paste-based nanomesh electrodes	6
Micro/nano-transfer printing of gold thin films via atomic diffusion bonding: effects of air-exposure time and stamp modulus	6
Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex	6
Microfluidic carbon cloth-based enzymatic glucose biofuel cell for sustainably powering a microelectronic circuit *	6
Electromicrofluidic device with integrated PDMS microchannel and laser-induced graphene electrodes for electrochemical detection of cardiac biomarker in a point-of-care platform	6
Technology evolution from micro-scale energy harvesters to nanogenerators	6
Micromachined threshold inertial switches: a review	6
Field nonuniformity of limited-aperture planar SAWs and its implications for designing SSAW acoustofluidics	6
Distance sensor with a tunable aperture actuated by thermal expansion of silicon chevron beams	6
Additive manufactured cardiovascular scaffold integrated with SU-8 based wireless pressure sensor	6
Corrigendum: Adherable temperature sensor to a porous structure of fiber via reduced graphene oxide and poly(diallyldimethylammonium chloride) complex (2022 J. Micromech. Microeng. 32	6
Programmable intelligent liquid matter: material, science and technology	6
Etch the borosilicate glass to form a straight through-glass-via based on the FLACE technology	6
Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function	6
Recent advances in power supply strategies for untethered neural implants	6
Bioinspired drag reduction surfaces via triple lithography method based on three-layer hybrid masks	5
A simple way to predict the flip–chip gap	5
Effect of simultaneous electrical and mechanical stressing on porosity of Ti3C2T x MXene films	5
Liquid-immersion inclined-rotated exposure system for fabricating three-dimensional microstructures with large inclination angles	5
Study on soft hot embossing process for making microstructures in a cyclo-olefin polymeric (COP) film	5
A microfabricated semi-packed column coated with porous layer and ionic liquid for the separation of characteristic markers of non-alcoholic fatty liver disease	5
A preparation technology of micro-structure glass based on mixed micro and nano powders	5
Maximizing the rate sensitivity of resonating gyroscopes using nonlinear shape optimization	5
Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor	5
Evaluation of solvent releases from microfluidic devices made of cycloolefin polymer by temperature-desorption mass spectrometry	5
Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices	5
A novel piezoelectric RF-MEMS resonator with enhanced quality factor	5

Corrigendum: On overtravel and skate in cantilever-based probes for on-wafer measurements (2022 J. Micromech. Microeng. 32 057001)	5
A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design	5
Effects of die top system and trenches on large thin die mechanical robustness	5
A hollow microlattice based ultralight active thermal control device and its fabrication techniques and thermal performances	5
Micromechanics for energy generation	5
Systematic variation of design aspects for a significant increase in thermal fracture resistance of alumina microthrusters	5
Shape deviations of DLW microstructures in dependency of fabrication parameters	5
PDMS membrane-based flexible bi-layer microfluidic device for blood oxygenation	5
An A0 mode Lamb-wave AlN resonator on SOI substrate with vertically arranged double-electrodes	5
Fabrication of grooved LGS resonators based high temperature SAW sensors and analysis with FEM simulation	5
A standalone and portable imaging detection system with embedded computing for automated defect inspection of microfluidic devices	5