Plasma Sources Science & Technology

Article	Citations
Power dissipation during the ignition of pulse-modulated dual RF capacitively coupled argon plasmas at different pressures	113
Plasma–liquid interactions: an experiment and simulation study on plasma dynamic behaviors near the gas–liquid interfacial layer	111
Modeling the hundreds-of-nanoseconds-long irradiation of tin droplets with a 2 µm-wavelength laser for future EUV lithography	85
Formation and consumption of HO 2 radicals in ns pulse O 2 –He plasmas over a liquid water surface	69
A plasma loss to sidewall model for 1D PIC/MCC simulation for plasma transport estimation	59
Collisional-radiative model of a supersonic inductive plasma torch	56
On the determination of the vibrational temperature by optical emission spectroscopy	49
Mechanism of electron power absorption in radio frequency plasmas with inverse sheaths	44
Development of a flat cutoff probe covered with a dielectric layer for non-invasive plasma diagnostics	40
Energy-dependent implementation of secondary electron emission models in continuum kinetic sheath simulations	40
Tomographic characterization of electron properties in xenon Hall thruster plasmas using collisional–radiative optical emission spectroscopy	35
Polarization properties of E-FISH signals and optimization of simultaneous measurement of electric field vectors	35
Plasma acceleration in a magnetic arch	35
Time-resolved measurement of electron energy distribution function in secondary streamer in atmospheric-pressure air using Thomson scattering	33
Generation of high-density plasma via transparent electrode in capacitively coupled plasma	29
Characterization of a radiofrequency linear plasma device in uniform and convergent magnetic fields	29
Benchmarking and validation of a hybrid model for electropositive and electronegative capacitively coupled plasmas	29
The effects of catalyst conductivity and loading of dielectric surface structures on plasma dynamics in patterned dielectric barrier discharges	28
Azimuthal plasma inhomogeneity in planar Hall thrusters: spatiotemporal evolution and its impacts on performance	28
An updated set of electron-impact cross sections for CO2: untangling dissociation and application to CO2 with Ar and N2 admixtures	28
Dynamics of sputtered particles in multipulse HiPIMS discharge	27
Electropositive core in electronegative magnetized capacitive radio frequency plasmas	27
Numerical optimization of dielectric properties to achieve process uniformity in capacitively coupled plasma reactors	27
Homogeneous dielectric barrier discharge in CO2	26
Control of spoke movement in DCMS plasmas	26

Effective secondary electron yields for different surface materials in capacitively coupled plasmas	26
Barrier discharges in CO2 – optical emission spectra analysis and E/N determination from intensity ratio	26
Ion energy distributions from the impact of an atmospheric dielectric barrier discharge plasma jet on surfaces	25
Dynamics simulation of pulsed-DC helium plasma jet enhanced by an additional floating electrode	25
ThunderBoltz: an open-source direct simulation Monte Carlo Boltzmann solver for plasma transport, chemical kinetics, and 0D modeling	25
Plasma–liquid interactions on acoustically structured Faraday liquid interfaces	24
Generation and delivery of free hydroxyl radicals using a remote plasma	24
Insight into reactive oxygen plasma characteristics and reaction mechanism on SRF accelerator plasma cleaning	24
Analyzing atomic oxygen product evolution in micro cavity plasma arrays by a combination of a multi-PMT OES setup and a 0D chemical model	24
Investigation on transient process of dense hydrogen microdischarge by dual-wavelength laser interferometry	23
Impedance characteristics of magnetized radio-frequency capacitively coupled plasmas: a comprehensive study	23
Quantitative and selective study of the effect of O radicals on polypropylene surface treatment	23
Simultaneous ion and electron beam etching for charge-free and low-damage silicon processing	23
Repetitively nanosecond pulsed discharge along dielectric surfaces: discharge and surface charge dynamics and local streamer-to-filament transition	23
Foundations of magnetized radio-frequency discharges	22
Control of the chemistry of a humidified He RF atmospheric pressure plasma jet by pulse modulation	21
Probe temperature effect on the curling probe and its correction technique	21
Nonequilibrium plasma in water vapor	21
Correlation between temperature distribution and changes in self-organized luminous pattern in an atmospheric pressure DC glow discharge with sheath gas flow	20
Cavity ringdown studies of the E–H transition in an inductively coupled oxygen plasma: comparison of spectroscopic measurements and modelling	20
Validation of the Townsend criterion for ignition of volume gas discharges	20
Effects of the ground-electrode temperature on the plasma physicochemical processes and biological inactivation functions involved in surface dielectric barrier discharge	20
Electron inertial effects in the rarefied regime of a direct-current (DC) breakdown	20
2D spatial mapping of the electron temperature, electron number density, and argon molecular ion number density in a microwave argon plasma jet	20
Plasma thermal-chemical instability of low-temperature dimethyl ether oxidation in a nanosecond-pulsed dielectric barrier discharge	20
Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results	20
Spatio-temporal dynamics of electrons and helium metastables in uniform dielectric barrier discharges formed in He/N2	19
Electromagnetic particle-in-cell simulation on self-induced magnetic field by hollow cathode discharge	19
Plasma uniformity control in capacitive RF discharges by an individually RF driven sidewall electrode	19
Decomposition product formation mechanism of C5F10O-CO2 mixture in corona discharge by a chemical kinetic model	19
The effect of pre- and post-mixing N 2 on discharge characteristics and production of reactive species in a pulsed-DC Ar plasma jet	19
Individual quantification of ozone and reactive nitrogen species in mixtures by broadband UV–visible absorption spectra deconvolution	19
On the sputtered particle density and flux evolutions in multi-pulse HiPIMS processes	19
Ammonia synthesis by plasma catalysis in an atmospheric RF helium plasma	18
On working gas rarefaction in high power impulse magnetron sputtering	18
Numerical study of the magnetohydrodynamic properties of laser-produced tin plasma under external magnetic field	18
State-to-state modeling of NO production by nanosecond electrical discharge in a nitrogen–oxygen mixture at atmospheric pressure	18
Magnetic field deflection in a 100 W Hall thruster with permanent magnets	18
Time-resolved electron energy distribution functions at the substrate during a HiPIMS discharge with cathode voltage reversal	18
High-speed plasma diagnostics based on the floating harmonic method in inductively coupled plasma and pulsed plasma	18
Nonlocal electron dynamics in low pressure miniature inductively coupled radio frequency discharges	18
Stepwise development of atmospheric pressure plasma jet driven by bursts of high-voltage nanosecond pulses at multi-tens MHz	18
Experimental analysis of hyper power impulse magnetron discharge with long pulse operation	18
Analysis of a cusped helicon plasma thruster discharge	18
Evaporation behavior of liquid microdroplets in atmospheric-pressure nonequilibrium plasma	18
Electric field and higher harmonics of RF plasma slit jet measured by antennas and VI probes	18
Particle-in-cell simulation of a cylindrical plasma mass separator based on Penning discharge with thermionic cathodes	17
Asymmetrical ignition of radio frequency discharge in atmospheric pressure cascade glow discharges	17
Scanning drift tube measurements and kinetic studies of electron transport in CO	17
Burning voltage dynamics of cathodic arcs: theory and experiment	17

Evolution characteristics of argon-mercury gas discharge modes based on DBD pre-ionization	17
Simulations of E–H mode transition in inductively coupled plasmas via 2D particle-in-cell/Monte Carlo collision method	16
Interaction of atmospheric pressure helium plasma jet with non-planar substrates: path selectivity of surface ionization wave	16
Non-equilibrium plasma kinetics of CO 2 in glow discharges: a comparison with existing modeling and experimental results	16
HFO-1234ze(E): electron-scattering cross section set through an iterative deep learning procedure	16
Positive streamer discharge simulations in humid air: uncertainty in input data and sensitivity analysis	16
Physics-informed selection of non-Maxwellian EEDF models for reliable OES-based plasma diagnostics	16
Characterisation of CH4 nanosecond pulsed plasma across a wide pressure range (0.5–2.0 bar)	16
A new 2D fluid-MC hybrid approach for simulating nonequilibrium atmospheric pressure plasmas: density distribution of atomic oxygen in radio-frequency plasma jets in He/O2 mixtures	16
Analysis of non-local heat flux in capacitively coupled plasmas	16
Modeling the gas breakdown for helium in the planar magnetron discharge	16
CO2 conversion in a microwave plasma torch: 2D vs 1D approaches	16
Effect of ion collision on separation between light and heavy ions in multi-component vacuum arc	16
Observation and characterization of discharge mode transition in a three-electrode atmospheric pressure RF plasma system	15
Spatially resolved TALIF investigation of atomic oxygen in the effluent of a CO2 microwave discharge	15
Modelling of dcMS and HiPIMS process with hydrocarbon gas admixture	15
Analysis of electron series resonance via plasma circuit model simulations with sheath resistance in hybrid plasma reactors	15
Oscillations in capacitively coupled plasmas induced by nonlinear coupling between the plasma and its external circuit	15
Anisotropic quasi-atomic layer etching of InGaZnO 4 using unbiased CH 4 and continuous/pulsed bias	15
Plasma parameters profiles from Langmuir probe measurements in low-density, low-temperature plasmas in an axial magnetic field	15
A diagnostic study of a dual frequency–driven atomic oxygen plasma source in the context of contactless cleaning	15
On the space-charge effects in the beam extraction process of ion thrusters: the roles of compensating electrons and changing beam radius	15
Determining sheath edge electric field around cylindrical pins of a DC-biased hairpin resonator probe	15
The kinetic theory of cathode plasma expansion in a spatially non-uniform geometric configuration of a vacuum diode	15
Effect of the cation-to-anion mass ratio of ionic liquid on plume neutralization characteristics for novel electrospray thruster	15
Modelling in vitro liquid treatment with a plasma jet	15
On the interactions between three fireballs in low-temperature plasma*	15
The propagation of negative pulsed discharges facilitated by artificially injected gas bubble in water	15
Changing pattern of N2 dissociation in N2–Ar RF plasma during E–H mode transition	14
Atomic layer etching of sputter-deposited AlN thin films in radiofrequency Cl 2 –Ar plasmas	14
A multi-ratio method for determination of the electric field from 2p states in transient argon discharges at atmospheric pressure	14
Validation of non-equilibrium kinetics in CO2–N2plasmas	14
Mechanisms of anomalous N	14
Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge	14
The E–H mode transition affected by RF bias in inductively coupled Cl 2 plasma	14
On the Ar I 419.8 nm/751.5 nm (3p5/2p5) line intensity ratio for electric field measurement in dielectric barrier discharge in argon at atmospheric pressure	14
High-resolution mapping of the radial electric field in RF plasma sheath using a single optically trapped particle	14
Numerical investigation of stability of low-current needle-to-plane negative corona discharges in air	14
The spatial density distribution of H2O2 in the effluent of the COST-Jet and the kINPen-sci operated with a humidified helium feed gas	14
Formation of standing helicon wave in helicon discharge process	14
High power impulse magnetron sputtering of tungsten: a comparison of experimental and modelling results	14
A unified fluid model for nonthermal plasmas and reacting flows	14
Dust-cloud spatial distribution and striated discharge structure in complex plasmas driven by dual-frequency discharges	14
Precision spectroscopy of non-thermal molecular plasmas using mid-infrared optical frequency comb Fourier transform spectroscopy	14
On electric field measurements based on intensity ratio of 1 − and 2	14
Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code	14
Magnetically induced formation and disruption of striations in capacitively coupled radio-frequency CF 4 plasmas	14
A sheath correction method for electron density measurements with the microwave resonant curling probe	13
Verification methods for drift–diffusion reaction models for plasma simulations	13
Emissive cathode immersed in a plasma: plasma–cathode interactions, operation and stability	13
Measurements of N2 + ions in an inductively coupled plasma using saturated cavity ringdown spectroscopy	13
Adjustment of high-energy ion flux in BP-HiPIMS via pulsed coil magnetic field: plasma dynamics and film deposition	13
A 3D kinetic Monte Carlo study of streamer discharges in CO2	13
Radial and axial electric field measurements in self-triggered multiperiodic AC plasma jets	13
Assessing apparent secondary electron yield from current–voltage characteristics of abnormal DC glow discharges	13
Nanosecond plasma discharge dynamics on a levitated water droplet	13
Foundations of machine learning for low-temperature plasmas: methods and case studies	13
Three-dimensional analysis of RF-biased ion optics with misalignments of apertures	13
Expanding the operating space for pulsed ICP plasmas through matchless power delivery	13
Observation of currentless redox reactions on surface of water jet immersed in low-pressure plasma	13
Three-body electron attachment in humid air	13
Effects of ‘step-like’ amplitude-modulation on a pulsed capacitively coupled RF discharge: an experimental investigation	13
Stark broadening and shift of hydrogenic and non-hydrogenic lines for the electron density determination in pulsing discharges in contact with liquids	13
Oblique streaming waves observed in multipactor-induced plasma discharge above a dielectric surface	13
Azimuthal ion movement in HiPIMS plasmas—part I: velocity distribution function	13
Insight in NO synthesis in a gliding arc plasma via gas temperature and density mapping by laser-induced fluorescence	13
Numerical simulation of gas breakdown characteristics in porous dielectric and theoretical analysis based on the capillary network model	13
Extended reaction kinetics model for non-thermal argon plasmas and its test against experimental data	13
Terahertz absorption spectroscopy for measuring atomic oxygen densities in plasmas	13
Properties and characteristics of the nanosecond discharge developing at the water–air interface: tracking evolution from a diffused streamer to a spark filament	13
Assessment of multi-temperature relaxation models for carbon dioxide vibrational kinetics	12
A comparative study of fibre Bragg grating for spatially and temporally resolved gas temperature measurements in cold atmospheric pressure plasma jets	12
A coupled plasma-thermal model for hollow cathode power decomposition and parametric analysis	12
Depopulation mechanisms of atomic hydrogen in the n = 3 level following two-photon excitation by a picosecond laser	12
Experimental investigation of high velocity neutral flow interaction with a magnetized plasma	12
On pulse-to-pulse coupling in low-temperature filamentary plasma-assisted ignition in methane-air flows	12
Theoretical investigation of iodine plasma through detailed electron impact excitation cross-section calculations and collisional-radiative model analysis	12
Foundations of plasma enhanced chemical vapor deposition of functional coatings	12
Effect of the magnetic field on the electron kinetics under AC/DC electric fields: benchmark calculations and electron cyclotron resonance	12
The principle of minimal power	12

I–V analysis for nuclear-excited low-temperature plasmas in porous metals	12
A transient site balance model for atomic layer etching	12
Investigation of small-fraction molecular impurities in high-pressure helium plasmas using optical plasma diagnostic methods	12
Atmospheric pressure plasma jet interacting with a droplet on dielectric surface	12
The role of recombination in constriction of a positive column of a glow discharge in inert gases	12
Erratum: N 2 vibrational excitation in atmospheric pressure ns pulse and RF plasma jets (2022 Plasma Sources Sci. Technol.	12
Analysis of electron power absorption and loss mechanisms in the discharge chamber of air-breathing radio-frequency ion thruster	12
Oil–water interface dynamics and electrical breakdown in pulsed electric field	11
Numerical investigation on plume characteristics and propulsive performance of ionic liquid electrospray thruster based on mixed ion model	11
Enhancing He 2 3S1 state production in the burst regime of a nanosecond discharge	11
Is it possible to dynamical monitoring the products of silane conversion in plasma with non-local characteristics using probe diagnostics?	11
Study on the plume self-neutralization of ionic liquid electrospray thruster based on median potential	11
Floating potential method using a thermionic emissive probe including an ionizing and collisional presheath	11
Study of atoms and multiply charged ions features in the nanosecond laser produced Mo plasma in vacuum using optical emission spectroscopy and time-of-flight electrostatic energy analyzer	11
PIC-MCC simulation of single pulse DBD discharge evolution process	11
Ammonia generation in Ns pulse and Ns pulse/RF discharges over a catalytic surface	11
Reduced-order particle-in-cell simulations of a high-power magnetically shielded Hall thruster	11
Validation of critical electron temperature for ionization instability in ampere-level hollow cathode plume	11
Characterisation of surface charge density and net electric field during parallel-plate dielectric barrier discharge generated in atmospheric-pressure air	11
Theoretical mechanism behind the higher efficiency of O than OH radicals in polypropylene surface modification: a molecular dynamics study	11
The transition from ion to electron sheath near a floating plate aligned parallel to magnetic field	11
Impact of overvoltage on the mode transition of the spark gap switch: from edge breakdown to stochastic breakdown	11
Self-consistent treatment of gas heating in modeling of a coaxial DBD in atmospheric pressure CO2	11
Parametric analysis on multi-process effects of hypersonic plasma under electromagnetic fields	11
Investigation of ignition of positive corona discharge in air using a time dependent fluid model	11
Insights into the copper HiPIMS discharge: deposition rate and ionised flux fraction	11
Decay of excited levels in argon pulsed capacitively-coupled plasma afterglows	11
Ion current density on the substrate during short-pulse HiPIMS	11
Collective dynamics of a dense streamer front	11
Numerical investigation on the discharge formation in micrometer pores in structured catalyst irradiated by a helium atmospheric pressure plasma jet	11
Verification of an aspect-ratio scaling law for radio-frequency capacitively coupled plasmas	11
Foundations of plasmas as ion sources	11
Effect of target material on electrical properties of a two-electrode dielectric barrier helium plasma jet	11
Temporal evolution and breakdown mechanisms of synthetic air gap under lightning impulse	11
Numerical simulation and experimental diagnostics of fast electron kinetics and plasma parameters in a microhollow cathode discharges in helium	11
Computational investigations of impedance matching for pulsed capacitively coupled plasmas	11
Numerical study of surface charge dynamics and its feedback on the interaction between atmospheric pressure plasma jet and dielectric target	11
Electron collisions with ArH + molecular ions: highly excited vibrational states and dissociative excitation	11
Experimental characterization of TIAGO torch discharges: surface wave discharge behavior and (post-)discharge kinetics	11
Effects of cavity resonance and antenna resonance on mode transitions in helicon plasma	11
Self-organized patterns at the plasma–liquid anode interface in a helium glow discharge: temporal development and mechanisms	10
Formations of anode double layer and ion beam in bipolar-pulse HiPIMS (BP-HiPIMS)	10
Tomographic optical emission spectroscopy of an atmospheric pressure plasma jet and surface ionization waves on planar and structured surfaces	10
Vibrational deactivation in O( 3 P) + N 2 collisions: from an old problem towards its solution	10
Oscillations of convective flow around a continuous optical discharge in high-pressure xenon	10
The role of volume recombination and resonance radiation transport in constriction of a: DC discharge in argon	10
Plasma dynamics of individual HiPIMS pulses: imaging study using high-frame-rate camera	10
Numerical and experimental study of ion energy distribution function in a dual-frequency capacitively coupled oxygen discharge	10
Performance characterization of intake-collectors for atmosphere-breathing electric propulsion systems	10
Experimental investigation into efficiency loss in rotating magnetic field thrusters	10
Streamer-to-spark transitions in deionized water: unsymmetrical structure and two-stage model	10
On CO2 conversion in discharges in CO2–N2 mixtures	10
Magnetised and unmagnetized axisymmetric particle-in-cell simulations of ion energy distributions in cathodic vacuum arcs	10
The electrical asymmetry effect in electronegative CF4 capacitive RF plasmas operated in the striation mode	10
Inferring gas temperature from N2 emission via rotational distribution of the N2 B3Πg and C3Πu states	10
Investigation of multi-periodic self-trigger plasma in an AC-driven atmospheric pressure plasma jet	10
Effect of oxygen on the discharge characteristics of argon doped ethanol plasma jet and its application in surface modification of polyimide films	10
Effects of magnetic nozzle strength and orientation on radio-frequency plasma expansion	10
Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges	10
Ultra-fast development of Ar 2p	10
Non-equilibrium vibrational level distribution of the N 2 gas molecules in microwave electric field	10
Simulation of a pulsed CO2 plasma based on a six-temperature energy approach	10
Electric field mapping of atmospheric positive glow corona using E-FISH tomography	10
Relativistic calculation of electron impact excitation of tin: cross sections of importance in plasma modeling	10
Self-regulating electron temperature in high-power impulse magnetron sputtering discharges and its effect on the metal ion escape	10
Effect of the cathode surface temperature on the cathode fall layer parameters: experiment and simulation	10
Determination of organic impurities by plasma electron spectroscopy in nonlocal plasma at intermediate and high pressures	10
Characterization of OH species in kHz He/H 2 O atmospheric pressure dielectric barrier discharges	9
Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges	9
Electron impact studies on the imidogen (NH + ) molecular ion	9
Electronic-specific modeling of a nonequilibrium recombining N 2 /Ar plasma and comparison with experiments	9
Absolute atomic nitrogen density spatial mapping in three MHCD configurations	9
Temperature and density measurements in a recombining CO 2 plasma	9
Introduction and verification of FEDM, an open-source FEniCS-based discharge modelling code	9
Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source	9
Energy selectivity in electron absorptive heating methods: does the angular momentum trap matter? An experimental investigation	9
Electron impact excitation of allowed and forbidden transitions between fine-structure levels in Ti III	9
Influence of magnetic field gradient on the capacitive argon discharge at 8 MHz and 40 MHz	9
Repetitively pulsed streamer discharge with laser-induced surface trapped electron desorption to exploit residual charges in situ	9
Plasma characterization for the reactive HiPIMS process regulation of vanadium oxides	9
Plasma–flow coupling and metastable evolution in a cold argon plasma jet: a computational fluid dynamics study	9
On constriction and striation of a diffuse DBD in large gap filled with moderate pressure helium diluted by the air and easily ionized impurity	9
Extinction simulation of capacitively coupled plasma under different afterglow voltage	9
High density atomic oxygen microwave plasma source characterized by quantitative optical emission spectroscopy and two photon laser absorption induced fluorescence	9
Direct measurement of ion and electron flux ratio at their respective sheath-edges and absence of the electron Bohm criterion effects	9
Standing wave instability in large area capacitive discharges operated within or near the gamma mode	9
Anticathode effect on electron kinetics in electron beam generated E × B plasma	9
A pointwise separation algorithm to separate plasma density and thickness in two-beam interferometry	9
Numerical study of self-organized filaments affected by flow field in dielectric barrier discharges	9
Plasma sputtering of biased electrodes in an oblique magnetic field	9
Quantification of plasma produced OH and electron fluxes at the liquid anode and their role in plasma driven solution electrochemistry	9
Control of photoresist etch rate via a gradient magnetic field in biased inductively coupled plasma	9
The breakdown characteristic of porous dielectric discharge based on percolation structure	9
RF antenna helicity dependent particle heating in a helicon source	9
Physics of thermionic orificed hollow cathodes: II. Scaling laws and design rules	9