OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 1. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-04-01 to 2025-04-01.)

Article	Citations
Front Cover	75
The Dynamic Characteristics of a Mode-Localized Resonant Accelerometer	53
J. J. Ebers Award	46
Journal of Microelectromechanical Systems Publication Information	33
Fused Silica Micro Shell Resonators by a Wafer-Level Thermal Reflow Process	29
Member ad suite	29
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	29
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	29
Front Cover	26
Table of Contents	25
Journal of Microelectromechanical Systems	25
TechRxiv: Share Your Preprint Research with the World!	24
IEEE Access	24
Front Cover	24
Table of Contents	24
Journal of Microelectromechanical Systems	24
Table of Contents	23
TechRxiv: Share Your Preprint Research with the World!	23
Modeling and Analysis of a MEMS Vibrating Ring Gyroscope Subject to Imperfections	23
TechRxiv: Share Your Preprint Research with the World!	23
TechRxiv: Share Your Preprint Research with the World!	22
A 100 nm Thick, 32 kHz X-Cut Lithium Niobate Piezoelectric Nanoscale Ultrasound Transducer for Airborne Ultrasound Communication	22
Front Cover	22
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays	21
Directional Sound Sensor With Consistent Directivity and Sensitivity in the Audible Range	21

A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones	21
Rigorous Model-Based Mask Data Preparation Algorithm Applied to Grayscale Lithography for the Patterning at the Micrometer Scale	20
Feedforward Control Algorithms for MEMS Galvos and Scanners	20
Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors	19
Triple Mass Resonator for Electrostatic Quality Factor Tuning	19
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	19
Chipping Energy Threshold in MEMS Sensors	18
Development of Programmable UV-LED Microlithography System for 3D Microfabrication	18
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology	18
On-Chip Generation Method of Shock Load and Characterization of Microstructure Shock Process	17
Bistability in Coupled Opto-Thermal Micro-Oscillators	17
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	17
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	16
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	16
A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length	16
Thermal Flow Sensor With a Bidirectional Thermal Reference	15
Stability and Failure Analysis of a W-Based Microhotplate	15
A Biaxially Stretchable and Washable LED Display Enabled by a Wavy-Structured Metal Grid	15
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	14
Lab-on-PCB With Pre-Stored Reagents at Low Temperature and Automatic Microfluidic Handling	14
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	14
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	14
Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias	13
A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers	13
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	13
A Silicon MEMS Quatrefoil Suspension Gyroscope	13
Electrowetting Ionic Liquid Flow Controller	12
A Radiofrequency Threshold Temperature Sensor Using a Hf_0.5Zr_0.5O₂ Device and a Microacoustic Piezoelectric Resonant Sensor	12
Single-Wafer Combinatorial Optimization of Border Rings for Bulk Acoustic Wave Filters	12
A PZT Thin-Film Traveling-Wave Micro-Motor With Stator Teeth Based on MEMS Technology	12
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	12
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	12
High-Quality Light Field Microscope Imaging Based on Microlens Arrays	12
Erratum to “Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection” [Jun 19 390-400]	12
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	11
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	11
Journal of Microelectromechanical Systems Publication Information	11
Fabrication of 32 × 32 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on a Borosilicate Glass Substrate With Silicon-Through-Wafer Interconnects Using Sacrificial Release Process	11
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam	11
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	11
Fused Quartz Dual-Shell Resonator Gyroscope	11
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial	11
Multilayer Masking Technology for Fabricating Airborne CMUTs With Multi-Depth Fluidic Trenches	10
Fabrication of Bloch Long Range Surface Plasmon Waveguides Integrating Counter Electrodes and Microfluidic Channels for Multimodal Biosensing	10
18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO₂/Ta₂O₅ Bragg Reflector	10
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	10
Portable Dielectrophoresis Microfluidic Chip Integrated With Microscopic Platform for Water Blooms Monitoring	10
Perovskite Nickelate Actuators	10
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	10
Characterization and Optimization of PZT-Based PMUTs With Wide Range Frequency Tuning	10

Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	10
IEEE Access	9
TechRxiv: Share Your Preprint Research with the World!	9
TechRxiv: Share Your Preprint Research with the World!	9
TechRxiv: Share Your Preprint Research with the World!	9
TechRxiv: Share Your Preprint Research with the World!	9
Journal of Microelectromechanical Systems	9
TechRxiv: Share Your Preprint Research with the World!	9
Transducers 2023	9
Introducing IEEE Collabratec	9
IEEE EDS Lester F. Eastman Award	9
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	9
Journal of Microelectromechanical Systems	9
A MEMS Resonator Coupled With a Resistive Sensor for Improved Sensing and Actuation	9
Table of Contents	8
Determining the Nonlinear Motion of MEMS Gyroscopes Using the Harmonic Balancing Method	8
Exploration and Realization of Novel High-Q Bulk Modes Using Support Transducer Topology	8
Rapid Makerspace Microfabrication and Characterization of 3D Microelectrode Arrays (3D MEAs) for Organ-on-a-Chip Models	8
Transfer Learning for Test Time Reduction of Parameter Extraction in MEMS Accelerometers	8
Silicon Micro-Channel Definition via ICP-RIE Plasma Etching Process Using Different Aluminum Hardmasks	8
Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)	8
HF Under-Etching Prevention for Advanced THz Micromachined Waveguide Devices	8
Design, Modeling and Fabrication of TPoS MEMS Resonators With Improved Performance at 1 GHz	8
Resource Allocation in Vibration Energy Harvesters	8
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	7
Silicon-Based Stretchable Structure via Parylene Kirigami Interconnection	7
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators	7
On the Dynamic Range and Resolution of Thermal-Piezoresistive Resonant Mass Sensors	7
Crossover/Veering in V-Shaped MEMS Resonators	7
Modeling and Characterization of a Novel In-Plane Dual-Axis MEMS Accelerometer Based on Self-Support Piezoresistive Beam	7
Silicon MEMS Nanomechanical Membrane Flexure Sensor With Integrated High Gauge Factor ITO	7
Study of Thin Film LiNbO₃ Laterally Excited Bulk Acoustic Resonators	7
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	7
Fabrication of Polymer Membrane-Suspended Microstructures on Printed Circuit Boards	7
On Sampling Rate Limits in Bistable Microbeam Sensors	7
Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors	7
On-Chip Frequency Tuning of Fast Resonant MEMS Scanner	6
Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors	6
Piezoelectric Micromachined Ultrasonic Transducers With Superior Frequency Control	6
Atomization of High Viscous Liquids Using a MEMS Vibrating Mesh With Integrated Microheater	6
Optimization of Hemispherical Shell Resonator Structure Based on Thermoelastic Dissipation	6
Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition	6
Equidimensional Piezoelectric Micromachined Ultrasonic Transducer Array With Synchronously Improved Bandwidth and Sensitivity	6
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	6
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	6
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	6
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	6
A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film	6
CMOS-Compatible Hollow Nanoneedles With Fluidic Connection	6
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	6
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	6
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	6
Development of ScAlN PMUTs for Medical Applications	6
A Defect-Based MEMS Phononic Crystal Slab Waveguide in Electronic Circuits	6
A Microfabricated Nanobubble-Based Sensor for Physiological Pressure Monitoring	6
Infrared-Driven Rapid Quantification of Magnetophoretically Trapped Drug	6
Electrostatic MEMS Speakers With Embedded Vertical Actuation	6
Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer	5
Journal of Microelectromechanical Systems Publication Information	5
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	5
Parametric Amplification in Depletion Layer Transduced Microelectromechanical Resonator	5
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	5
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	5
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	5
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	5
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	5
Modeling Temperature Effects in a MEMS Ring Gyroscope: Toward Physics-Aware Drift Compensation	5
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	5
Etching Evolutions and Surface Morphologies of Sapphire Hemispheres Under Different Etchant Concentration Conditions	5
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	5
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	5
Pressure Sensor Embedded Inductive Coil Toward a Wireless Pressure Sensing Stent	5
Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution	5
Introducing IEEE Collabratec	5
CMOS-Compatible MEMS 2D Thermal Flow Sensor With High Sensitivity and Low Power Consumption	5
Study of Stiction Mitigation in Micromachine Structures via Naphthalene Sublimation	5
Front Cover	5
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	5
High-Stability Quartz Resonant Accelerometer With Micro-Leverages	4
Member ad suite	4

2022 Reviewers List	4
A Monolithic Micromachined Thermocouple Probe With Electroplating Nickel for Micro-LED Inspection	4
Parametric Resonators With a Floating Rotor: Sensing Strategy for Devices With an Increased Stiffness and Compact Design	4
TechRxiv: Share Your Preprint Research with the World!	4
Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures	4
A PMUT Integrated Microfluidic System for Fluid Density Sensing	4
Enhanced Performance in Energy of Low Frequency Triboelectric-Nanogenerator Systems	4
Modeling and Experimental Analysis of the Mass Loading Effect on Micro-Ionic Polymer Actuators Using Step Response Identification	4
2021 Index Journal of Microelectromechanical Systems Vol. 30	4
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	4
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	4
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	4
Nonlinear Dynamics of Lateral Electrostatic Gap Closing Actuators for Applications in Inchworm Motors	4
Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures	4
A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy	4
Member ad suite	4
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	4
Journal of Microelectromechanical Systems Publication Information	4
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	4
2022 Index IEEE Journal of Microelectromechanical Systems Vol. 31	4
An Approach to Near Zero Power Bi-Stable Driving With a Simple Pulse Signal for RF MEMS Switch	4
Table of Contents	4
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	4
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	4
Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance	4
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications	4
Front Cover	4
Front Cover	4
Table of contents	4
Front Cover	4
Optimization of MEMS Vibration Energy Harvester With Perforated Electrode	4
TechRxiv: Share Your Preprint Research with the World!	4
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	3
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	3
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	3
3D Flexible Wind Sensor With its Optimization and Environmental Effect	3
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	3
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	3
Impedance Sensing in CMOS-Embedded Microfluidics Using BEOL Electrodes	3
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching	3
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	3
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	3
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	3
Microscale Devices for Biomimetic Sound Source Localization: A Review	3
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	3
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	3
Multipurpose Acoustic Metamaterial Anchors for Aluminum Scandium Nitride Contour Mode Resonators	3
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	3
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	3
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	3
Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device	3
Frequency Tuning of In-Plane Comb Drive MEMS Resonators Due to VO₂ Phase Transition	3
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators	3
Influence of Parametric Nonlinearities on Closed-Loop Operated MEMS Gyroscopes	3
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	3
A Thin Film Porous Alumina Vacuum Package Utilizing a Pore Sealing Getter	3
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	3
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	3
High Sensitivity and Rapid Response Optomechanical Uncooled Infrared Detector From Self-Assembled Super-Aligned Carbon Nanotubes Film	3
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	3
Origami-Inspired Fabrication of High-Performance Wafer-Level Packaged Three-Dimensional Radio-Frequency Inductors	3
Employing Stencil-Assisted Laser Ablation to Simplify the Fabrication of Polymer Membrane-Suspended Microstructures on Printed Circuit Boards	3
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	3
TechRxiv: Share Your Preprint Research with the World!	2
Design and Experimental Validation of a Piezoelectric Resonant MEMS Phase Comparator	2
Table of Contents	2
2024 Index Journal of Microelectromechanical Systems Vol. 33	2
Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors	2
A Monolithic LTCC-MEMS Microfabrication Process	2
3D-Printing Enables Fabrication of Swirl Nozzles for Fast Aerosolization of Water-Based Drugs	2
On the Design and Modeling of a Full-Range Piezoelectric MEMS Loudspeaker for In-Ear Applications	2
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	2
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	2
Table of Contents	2
Front Cover	2
A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures	2
Ultra-Low Relative Frequency Split Piezoelectric Ring Resonator Designed for High-Performance Mode-Matching Gyroscope	2
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection	2
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	2
Ultra-Low Stress Die Attachment Based on a Stacked Multilayer Substrate	2
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	2
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	2
Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing	2
In Memoriam: Oliver Brand 1964–2023	2
Journal of Microelectromechanical Systems Publication Information	2
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	2
Highly-Conformal Sputtered Through-Silicon Vias With Sharp Superconducting Transition	2
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	2
Design and Fabrication of a Metal-Silicon Actuator With Low Voltage, Low Power Consumption and Large Displacement	2
1.3 mm² Nav-Grade NEMS-Based Gyroscope	2
A Hybrid MEMS Microphone Combining Piezoelectric and Capacitive Transduction Mechanisms	2
Design, Fabrication, and Characterization of High-Performance PMUT Arrays Based on Potassium Sodium Niobate	2
Study on Mechanical Cross-Axis Coupling for Non-Follow-Up Tip-Tilt Vertical Comb-Drive Micromirror	2
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	2
Table of contents	2