OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 1. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-11-01 to 2025-11-01.)

Article	Citations
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	106
TechRxiv: Share Your Preprint Research with the World!	70
Front Cover	44
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	40
Front Cover	40
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	37
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	35
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	35
Journal of Microelectromechanical Systems Publication Information	32
Front Cover	32
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	32
Table of Contents	31
Transducers 2023	30
Journal of Microelectromechanical Systems Publication Information	30
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	29
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	24
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	23
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	22
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	22
60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers	21
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	21
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	20
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	19
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	19
In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing	19

Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	17
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	17
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	17
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	17
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	16
2021 Index Journal of Microelectromechanical Systems Vol. 30	16
TechRxiv: Share Your Preprint Research with the World!	16
2022 Reviewers List	16
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	15
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	15
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	15
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	15
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	14
TechRxiv: Share Your Preprint Research with the World!	14
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	14
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	14
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	14
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	13
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	13
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	13
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	13
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	13
Design of Spurious-Free Surface Acoustic Wave Resonators on LNOI Platform Using Machine Learning	12
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	12
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	12
Journal of Microelectromechanical Systems	12
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	12
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	12
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	12
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	12
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	12
Journal of Microelectromechanical Systems	12
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	11
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty	11
Journal of Microelectromechanical Systems	11
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	11
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	11
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
Crosstalk Analysis to GHz Bulk-Acoustic-Wave Array for Addressable Micro/Nanoscale Particle Trapping	11
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	11
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	10
Front Cover	10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	10
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	10
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	10
Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror	10
Table of Contents	10
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	10

A Review on MEMS Silicon Resonant Accelerometers	9
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	9
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	9
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	9
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	9
TechRxiv: Share Your Preprint Research with the World!	8
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	8
Front Cover	8
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	8
Table of Contents	8
IEEE Access	8
A Quasi-Zero Stiffness MEMS Accelerometer With Wide Open-Loop Dynamic Range	8
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	7
Electrowetting Ionic Liquid Flow Controller	7
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes	7
Member ad suite	7
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	7
Spurious Mode Suppression in LiNbO₃ A1 Resonators and Filters Beyond 6 GHz With Through-Holes	7
Temporal Dynamics of GHz Acoustic Waves in Chipscale Phononic Integrated Circuits	7
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	7
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	7
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	7
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	7
A Silicon MEMS Quatrefoil Suspension Gyroscope	7
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	6
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	6
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	6
TechRxiv: Share Your Preprint Research with the World!	6
Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes	6
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	6
Front Cover	6
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	6
Transducers 2025	6
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	6
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	6
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
TechRxiv: Share Your Preprint Research with the World!	6
Q-Factor Enhancement of Micro Hemispherical Resonators via Optimization of Film Distribution	6
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	6
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	6
Table of Contents	6
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	6
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	6
2024 Index Journal of Microelectromechanical Systems Vol. 33	5
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	5
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	5
37th Annual IEEE Conference on Micro Electro Mechanical Systems	5
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders	5
Phase-Flip Lattice Bulk Acoustic Wave Filter With Unbalanced Terminals Using Hybrid Heterogeneous Integration Technology	5
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	5
Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance	5
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	5
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	5
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level	5
Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators	5
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	5
Front Cover	5
Temperature-Stable CMOS-MEMS Resonators via Arc-Beam-Induced Electrical Stiffness Tuning	5
Front Cover	5
Table of Contents	5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation	5
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	5
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	5
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	5
Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding	4
Effects of Residual Stress on Vibrational Characteristics of Hemispherical Resonators	4
Front cover	4
2023 Reviewers List	4
A 27-nW Wake-Up Receiver With a Quartz Transformer Matching Network Achieving −71.9-dBm Sensitivity and −46-dB SIR at 0.8% Offset	4
A Novel All-Fused Silica MEMS Gyroscope With an Aspect Ratio Exceeding 50:1	4
500-750 GHz Contactless Rotating MEMS Single-Pole Double-Throw Waveguide Switch	4
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride	4
Introducing IEEE Collabratec	4
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	4
Table of Contents	4
Journal of Microelectromechanical Systems	4
Rapid and Precise Testing Techniques for MEMS Pressure Sensors Without Input Stabilization	4
Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures	4

Heat-Depolymerizable Tethers for Microelectromechanical System Assembly	4
Rapid Prototyping of Tape-Based Microfluidic Chips With Versatile On-Chip Fluidic Functions	4
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	4
Electrofusion Device With High-Aspect-Ratio Electrodes for the Controlled Fusion of Lipid Vesicles	4
Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation	4
Transmission Target for a MEMS X-Ray Source	4
Journal of Microelectromechanical Systems Publication Information	4
TechRxiv: Share Your Preprint Research With the World!	4
Passive and Wireless Anemometer Based on Inductor Bending Effect	4
Journal of Microelectromechanical Systems Publication Information	4
Introducing IEEE Collabratec	4
A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams	4
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation	4
Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology Optimization	4
Journal of Microelectromechanical Systems Publication Information	4
An In-Situ Self-Test Method for Measuring Absorptivity of Film-Type Uncooled Infrared Detectors	4
Nonlinear Dynamics of Large-Angle Circular Scanning With an Aluminum Nitride Micro-Mirror	4
Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches	4
Elimination of Temperature Drift for MEMS Thermal Wind Sensor With On-Chip Surrounding Thermistor	4
Table of Contents	4
Member ad suite	4
Front Cover	4
Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors	3
Introducing IEEE Collabratec	3
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	3
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	3
A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss	3
Journal of Microelectromechanical Systems Publication Information	3
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	3
Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution	3
Member ad suite	3
Table of Contents	3
Journal of Microelectromechanical Systems Publication Information	3
Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer	3
Defect Excitation and Failure Analysis of MEMS Gas Sensors Based on FTA and RET Methods	3
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	3
CMOS-MEMS Resoswitches—Design, Modeling, and Characterization	3
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	3
TechRxiv: Share Your Preprint Research with the World!	3
Multiphase Bipolar Electret Rotary Generator for Energy Harvesting and Rotation Monitoring	3
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology	3
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	3
Member ad suite	3
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	3
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	3
Q Enhancement and TCF Reduction for Piezoelectric MEMS Resonators via Mechanical Coupling	3
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	3
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	3
Thermal Flow Sensor With a Bidirectional Thermal Reference	3
Chipping Energy Threshold in MEMS Sensors	3
Table of Contents	3
A High-Density Silicon-Based Microelectrode Array for Chronic In Vivo Neural Recording	3
TechRxiv: Share Your Preprint Research with the World!	3
2022 Index IEEE Journal of Microelectromechanical Systems Vol. 31	3
Front Cover	3
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	3
Modeling and Characterization of Pulse-Width Modulation Driving of Electrostatic Actuators With Polar Dielectrics	2
2023 Index Journal of Microelectromechanical Systems Vol. 31	2
On the Design of Low Voltage One-Dimensional Piezoelectric MEMS Scanning Micromirror	2
Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams	2
Front Cover	2
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	2
Table of Contents	2
A Compact Reconfigurable Resonator-Based Direct Current Sensing System	2
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure	2
Table of Contents	2
TechRxiv: Share Your Preprint Research with the World!	2
Root-Causes of Bias Instability Noise in Mode-Split MEMS Gyroscopes	2
K-Band LiNbO₃ A3 Lamb-Wave Resonators With Through-Holes	2
Front Cover	2
Evaluation of Polymer Materials for MEMS Microphones	2
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching	2
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO₃/SiC Bonded Wafers	2
Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability	2
Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR	2
51.3 GHz Overmoded Bulk Acoustic Resonator Using 35% Scandium Doped Aluminum Nitride	2
Gold Nanorod-Embedded PDMS Micro-Pillar Array for Localized Photothermal Stimulation	2
Self-Actuating Isothermal Nanomechanical Test Platform for Tensile Creep Measurement of Freestanding Thin Films	2
Frequency Split Modulation in Micro Hemispherical Resonator Based on Rim Width	2
Fabrication of LCE Microactuator Arrays Through Soft Lithography With Surface Alignment	2
Experimental and Modeling Based Investigations of Process Parameters on a Novel, 3D Printed and Self-Insulated 24-Well, High-Throughput 3D Microelectrode Array Device for Biological Applications	2
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor	2
Characterization of a Wake-Up Nano-Gap Gas Sensor for Ultra Low Power Operation	2
Member ad suite	2
Reduction of Motional Resistance Using Piezoelectric on Silicon MEMS Disk Arrays for Ambient Air Applications	2
Journal of Microelectromechanical Systems	2
Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope	2
Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch	2
Journal of Microelectromechanical Systems	2
Polycrystalline LPCVD 3C-SiC Thin Films on SiO₂ Using Alternating Supply Deposition	2
Regulation of Three Different Nonlinear States in Micromechanical Resonators	1
Multilayer Masking Technology for Fabricating Airborne CMUTs With Multi-Depth Fluidic Trenches	1
Journal of Microelectromechanical Systems	1
Development of Programmable UV-LED Microlithography System for 3D Microfabrication	1
Table of Contents	1