OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 1. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2022-01-01 to 2026-01-01.)

Article	Citations
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	110
TechRxiv: Share Your Preprint Research with the World!	72
Front Cover	46
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	42
Front Cover	42
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	40
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	39
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	38
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	36
Journal of Microelectromechanical Systems Publication Information	35
Front Cover	35
Table of Contents	33
Journal of Microelectromechanical Systems Publication Information	32
Transducers 2023	32
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	30
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	25
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	23
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	23
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	23
60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers	22
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	21
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	19
In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing	19
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	18
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	18

Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	18
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	17
2022 Reviewers List	17
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	17
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	17
TechRxiv: Share Your Preprint Research with the World!	17
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	16
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	16
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	16
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	16
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	16
TechRxiv: Share Your Preprint Research with the World!	15
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	15
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	15
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	14
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	14
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	14
Extending MEMS Resonator Performance Through Inductive Feedthrough Cancellation	14
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	14
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	13
Journal of Microelectromechanical Systems	13
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	13
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	13
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	13
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	13
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	13
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty	13
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	13
Mechanical Mode Coupled Piezo-on-Silicon Bulk Acoustic Wave MEMS Resonators in Tank Configuration for Q-Enhancement	13
Journal of Microelectromechanical Systems	13
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	13
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	12
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	12
Design of Spurious-Free Surface Acoustic Wave Resonators on LNOI Platform Using Machine Learning	12
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	11
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	11
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	11
Journal of Microelectromechanical Systems Publication Information	11
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	11
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	11
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	11
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	11
Anchor Fin Explored as an Important Design Parameter for Lamb Wave Resonators	11
Journal of Microelectromechanical Systems	11
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	11
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	10
Crosstalk Analysis to GHz Bulk-Acoustic-Wave Array for Addressable Micro/Nanoscale Particle Trapping	10
Table of Contents	10
High Performance MEMS Magnetic Actuator Based on FeGa and FeGaCr Thin Films	10
Front Cover	10

Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	9
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	9
Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror	9
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	9
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	9
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	8
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	8
A Quasi-Zero Stiffness MEMS Accelerometer With Wide Open-Loop Dynamic Range	8
Front Cover	8
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	8
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	8
A Review on MEMS Silicon Resonant Accelerometers	8
High-Dynamic-Range Bulk-Mode Piezoelectric MEMS Resonators via Crystal Orientation Tuning for Duffing Nonlinearity Suppression	8
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	7
TechRxiv: Share Your Preprint Research with the World!	7
Electrowetting Ionic Liquid Flow Controller	7
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	7
Temporal Dynamics of GHz Acoustic Waves in Chipscale Phononic Integrated Circuits	7
Table of Contents	7
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	7
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	7
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	7
Spurious Mode Suppression in LiNbO₃ A1 Resonators and Filters Beyond 6 GHz With Through-Holes	7
Member ad suite	7
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	7
Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes	7
A Silicon MEMS Quatrefoil Suspension Gyroscope	7
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	6
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	6
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	6
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	6
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	6
Transducers 2025	6
Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes	6
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	6
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	6
Table of Contents	6
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	6
Q-Factor Enhancement of Micro Hemispherical Resonators via Optimization of Film Distribution	6
Front Cover	5
37th Annual IEEE Conference on Micro Electro Mechanical Systems	5
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	5
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	5
Front Cover	5
TechRxiv: Share Your Preprint Research with the World!	5
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	5
Rapid and Precise Testing Techniques for MEMS Pressure Sensors Without Input Stabilization	5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation	5
Table of Contents	5
Front Cover	5
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	5
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	5
2024 Index Journal of Microelectromechanical Systems Vol. 33	5
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	5
Effects of Residual Stress on Vibrational Characteristics of Hemispherical Resonators	5
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	5
Phase-Flip Lattice Bulk Acoustic Wave Filter With Unbalanced Terminals Using Hybrid Heterogeneous Integration Technology	5
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	5
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	5
Temperature-Stable CMOS-MEMS Resonators via Arc-Beam-Induced Electrical Stiffness Tuning	5
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	5
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	5
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders	5
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation	5
500-750 GHz Contactless Rotating MEMS Single-Pole Double-Throw Waveguide Switch	4
Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches	4
Table of Contents	4
Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology Optimization	4
TechRxiv: Share Your Preprint Research With the World!	4
Journal of Microelectromechanical Systems Publication Information	4
Introducing IEEE Collabratec	4
Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators	4
2023 Reviewers List	4
High-Frequency Sezawa Mode Surface Acoustic Wave Resonators Using Boron-Doped AlScN on SiC and Sapphire Substrates	4
Journal of Microelectromechanical Systems Publication Information	4

Introducing IEEE Collabratec	4
Table of Contents	4
Journal of Microelectromechanical Systems Publication Information	4
Member ad suite	4
Front Cover	4
Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures	4
A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams	4
Rapid Prototyping of Tape-Based Microfluidic Chips With Versatile On-Chip Fluidic Functions	4
A Novel All-Fused Silica MEMS Gyroscope With an Aspect Ratio Exceeding 50:1	4
Passive and Wireless Anemometer Based on Inductor Bending Effect	4
A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss	4
Heat-Depolymerizable Tethers for Microelectromechanical System Assembly	4
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	4
Journal of Microelectromechanical Systems	4
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level	4
Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding	4
Elimination of Temperature Drift for MEMS Thermal Wind Sensor With On-Chip Surrounding Thermistor	4
A 27-nW Wake-Up Receiver With a Quartz Transformer Matching Network Achieving −71.9-dBm Sensitivity and −46-dB SIR at 0.8% Offset	4
Chipping Energy Threshold in MEMS Sensors	3
Table of Contents	3
Nonlinear Dynamics of Large-Angle Circular Scanning With an Aluminum Nitride Micro-Mirror	3
Electrofusion Device With High-Aspect-Ratio Electrodes for the Controlled Fusion of Lipid Vesicles	3
Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation	3
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	3
Multiphase Bipolar Electret Rotary Generator for Energy Harvesting and Rotation Monitoring	3
CMOS-MEMS Resoswitches—Design, Modeling, and Characterization	3
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	3
Q Enhancement and TCF Reduction for Piezoelectric MEMS Resonators via Mechanical Coupling	3
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	3
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	3
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology	3
Journal of Microelectromechanical Systems Publication Information	3
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	3
A High-Density Silicon-Based Microelectrode Array for Chronic In Vivo Neural Recording	3
An In-Situ Self-Test Method for Measuring Absorptivity of Film-Type Uncooled Infrared Detectors	3
Thermal Flow Sensor With a Bidirectional Thermal Reference	3
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	3
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	3
Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution	3
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	3
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	3
TechRxiv: Share Your Preprint Research with the World!	3
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride	3
Transmission Target for a MEMS X-Ray Source	3
Anchor Loss Suppression in Piezoelectric MEMS Resonator Through Wave Interference	3
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	3
Defect Excitation and Failure Analysis of MEMS Gas Sensors Based on FTA and RET Methods	3
Introducing IEEE Collabratec	3
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	3
Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer	3
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	3
TechRxiv: Share Your Preprint Research with the World!	3
Journal of Microelectromechanical Systems	2
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching	2
2022 Index IEEE Journal of Microelectromechanical Systems Vol. 31	2
Journal of Microelectromechanical Systems Publication Information	2
Reduction of Motional Resistance Using Piezoelectric on Silicon MEMS Disk Arrays for Ambient Air Applications	2
Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability	2
TechRxiv: Share Your Preprint Research with the World!	2
K-Band LiNbO ₃ A3 Lamb-Wave Resonators With Through-Holes	2
Polycrystalline LPCVD 3C-SiC Thin Films on SiO₂ Using Alternating Supply Deposition	2
Frequency Split Modulation in Micro Hemispherical Resonator Based on Rim Width	2
2023 Index Journal of Microelectromechanical Systems Vol. 31	2
Experimental and Modeling Based Investigations of Process Parameters on a Novel, 3D Printed and Self-Insulated 24-Well, High-Throughput 3D Microelectrode Array Device for Biological Applications	2
Member ad suite	2
Member ad suite	2
Member ad suite	2
Table of Contents	2
Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams	2
Front Cover	2
Root-Causes of Bias Instability Noise in Mode-Split MEMS Gyroscopes	2
Fabrication of LCE Microactuator Arrays Through Soft Lithography With Surface Alignment	2
On the Design of Low Voltage One-Dimensional Piezoelectric MEMS Scanning Micromirror	2
Characterization of a Wake-Up Nano-Gap Gas Sensor for Ultra Low Power Operation	2
Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR	2
Front Cover	2
Self-Actuating Isothermal Nanomechanical Test Platform for Tensile Creep Measurement of Freestanding Thin Films	2
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	2
Table of Contents	2
Front Cover	2
Evaluation of Polymer Materials for MEMS Microphones	2
A Compact Reconfigurable Resonator-Based Direct Current Sensing System	2
Journal of Microelectromechanical Systems	2
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor	2
Synchronous Enhancement of Sensitivity and Frequency of Piezoelectric Micromachined Ultrasonic Transducers Operating in the Second-Order Flexural Mode	2
Modeling and Characterization of Pulse-Width Modulation Driving of Electrostatic Actuators With Polar Dielectrics	2
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO₃/SiC Bonded Wafers	2
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure	2
Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall Profiles	1
Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications	1
Experimental Investigation of Moisture Induced Offset Drifts on Plastic Packaged MEMS Sensor Devices	1
A MEMS Frequency Comb Energy Harvester	1
Table of Contents	1
Heat Transfer and Actuation Performance of Multi-Array V-Shaped MEMS Electrothermal Actuators in Air	1
Journal of Microelectromechanical Systems	1