OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 1. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-08-01 to 2025-08-01.)

Article	Citations
Front Cover	91
TechRxiv: Share Your Preprint Research with the World!	59
Front Cover	49
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	41
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	36
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	34
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	34
Journal of Microelectromechanical Systems Publication Information	31
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	31
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	30
Front Cover	30
60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers	29
Transducers 2023	29
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	28
In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing	27
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	26
Journal of Microelectromechanical Systems Publication Information	26
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	26
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	25
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	23
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	22
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	22
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	22
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	21
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	20

2021 Index Journal of Microelectromechanical Systems Vol. 30	20
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	20
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	20
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	20
2022 Reviewers List	19
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	19
TechRxiv: Share Your Preprint Research with the World!	18
TechRxiv: Share Your Preprint Research with the World!	18
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	17
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	17
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	17
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	16
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	16
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	16
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	15
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	15
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	14
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	14
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	14
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	14
Journal of Microelectromechanical Systems	13
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	13
Journal of Microelectromechanical Systems	13
1.3 mm² Nav-Grade NEMS-Based Gyroscope	13
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	12
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	12
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	12
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	12
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	12
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	12
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty	12
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	12
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	12
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	11
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	11
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications	11
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	10
The Influences of Non-Volatile Surface Compound Layer on the Dry Etching of Borosilicate Glass	10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes	10
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM	10
Journal of Microelectromechanical Systems	10
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	10
Table of Contents	10
Crosstalk Analysis to GHz Bulk-Acoustic-Wave Array for Addressable Micro/Nanoscale Particle Trapping	10
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	10
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	10
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	10

Front Cover	10
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	9
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	9
A Review on MEMS Silicon Resonant Accelerometers	9
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	9
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	9
Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror	9
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	9
Table of Contents	9
TechRxiv: Share Your Preprint Research with the World!	9
Front Cover	9
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	9
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	9
IEEE Access	9
Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes	8
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	8
Spurious Mode Suppression in LiNbO₃ A1 Resonators and Filters Beyond 6 GHz With Through-Holes	8
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	8
Member ad suite	8
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	8
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	8
A Silicon MEMS Quatrefoil Suspension Gyroscope	8
Electrowetting Ionic Liquid Flow Controller	8
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	8
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	8
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	7
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	7
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	7
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	7
TechRxiv: Share Your Preprint Research with the World!	7
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	7
Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes	7
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
Transducers 2025	7
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	7
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	7
Front Cover	6
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	6
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	6
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	6
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	6
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	6
Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance	6
Front Cover	6
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	6
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	6
TechRxiv: Share Your Preprint Research with the World!	6
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	6
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications	6
2024 Index Journal of Microelectromechanical Systems Vol. 33	6
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	6
Table of Contents	6
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	6
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	5
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles	5
37th Annual IEEE Conference on Micro Electro Mechanical Systems	5
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders	5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation	5
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	5
IEEE Access	5
Front Cover	5
Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators	5
On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation	5
Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures	5
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	5
Table of Contents	5
A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams	5
Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding	5
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level	5
An In-Situ Self-Test Method for Measuring Absorptivity of Film-Type Uncooled Infrared Detectors	4
Transmission Target for a MEMS X-Ray Source	4
Table of Contents	4
Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation	4
Rapid Prototyping of Tape-Based Microfluidic Chips With Versatile On-Chip Fluidic Functions	4
Member ad suite	4
2023 Reviewers List	4
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation	4

Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	4
Nonlinear Dynamics of Large-Angle Circular Scanning With an Aluminum Nitride Micro-Mirror	4
Passive and Wireless Anemometer Based on Inductor Bending Effect	4
Introducing IEEE Collabratec	4
Journal of Microelectromechanical Systems Publication Information	4
TechRxiv: Share Your Preprint Research With the World!	4
Journal of Microelectromechanical Systems	4
Front Cover	4
Heat-Depolymerizable Tethers for Microelectromechanical System Assembly	4
Table of Contents	4
Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology Optimization	4
A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss	4
Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches	4
Elimination of Temperature Drift for MEMS Thermal Wind Sensor With On-Chip Surrounding Thermistor	4
Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability	4
Ejected Droplet-Directed Transportation and Self-Alignment of Microfibers to Micro Trenches	4
Introducing IEEE Collabratec	4
Front cover	4
Journal of Microelectromechanical Systems Publication Information	4
A Novel All-Fused Silica MEMS Gyroscope With an Aspect Ratio Exceeding 50:1	4
Front Cover	3
Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer	3
Introducing IEEE Collabratec	3
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	3
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	3
TechRxiv: Share Your Preprint Research with the World!	3
Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)	3
Thermal Flow Sensor With a Bidirectional Thermal Reference	3
Journal of Microelectromechanical Systems Publication Information	3
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	3
Journal of Microelectromechanical Systems	3
Member ad suite	3
Table of Contents	3
Member ad suite	3
Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution	3
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	3
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	3
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	3
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	3
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	3
Chipping Energy Threshold in MEMS Sensors	3
Electrofusion Device With High-Aspect-Ratio Electrodes for the Controlled Fusion of Lipid Vesicles	3
500-750 GHz Contactless Rotating MEMS Single-Pole Double-Throw Waveguide Switch	3
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology	3
Resource Allocation in Vibration Energy Harvesters	3
2022 Index IEEE Journal of Microelectromechanical Systems Vol. 31	3
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	3
Journal of Microelectromechanical Systems Publication Information	3
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	3
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	3
Table of Contents	3
Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors	3
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	3
Multiphase Bipolar Electret Rotary Generator for Energy Harvesting and Rotation Monitoring	3
Defect Excitation and Failure Analysis of MEMS Gas Sensors Based on FTA and RET Methods	3
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride	3
TechRxiv: Share Your Preprint Research with the World!	3
TechRxiv: Share Your Preprint Research with the World!	3
Development of PMUT-Based High Sensitivity Gas Flow Sensor	2
Experimental and Modeling Based Investigations of Process Parameters on a Novel, 3D Printed and Self-Insulated 24-Well, High-Throughput 3D Microelectrode Array Device for Biological Applications	2
On the Design of Low Voltage One-Dimensional Piezoelectric MEMS Scanning Micromirror	2
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure	2
Front Cover	2
Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope	2
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO₃/SiC Bonded Wafers	2
Reduction of Motional Resistance Using Piezoelectric on Silicon MEMS Disk Arrays for Ambient Air Applications	2
Table of Contents	2
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor	2
Root-Causes of Bias Instability Noise in Mode-Split MEMS Gyroscopes	2
Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch	2
Journal of Microelectromechanical Systems	2
Frequency Split Modulation in Micro Hemispherical Resonator Based on Rim Width	2
2023 Index Journal of Microelectromechanical Systems Vol. 31	2
Fabrication of LCE Microactuator Arrays Through Soft Lithography With Surface Alignment	2
A Compact Reconfigurable Resonator-Based Direct Current Sensing System	2
Modeling and Characterization of Pulse-Width Modulation Driving of Electrostatic Actuators With Polar Dielectrics	2
Front Cover	2
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	2
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection	2
Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams	2
Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability	2
Serial and Parallel Connections of Micromechanical Resonators for Sensing: Theories and Applications	2
Polycrystalline LPCVD 3C-SiC Thin Films on SiO₂ Using Alternating Supply Deposition	2
TechRxiv: Share Your Preprint Research with the World!	2
Self-Actuating Isothermal Nanomechanical Test Platform for Tensile Creep Measurement of Freestanding Thin Films	2
K-Band LiNbO₃ A3 Lamb-Wave Resonators With Through-Holes	2
Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR	2
Evaluation of Polymer Materials for MEMS Microphones	2
Journal of Microelectromechanical Systems	2
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching	2
Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures	2
Member ad suite	2
Characterization of a Wake-Up Nano-Gap Gas Sensor for Ultra Low Power Operation	2
Feedthrough Engineering to Enable Resonant Sensors Working in Conductive Medium for Bio Applications	2
Table of Contents	2