OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 1. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-06-01 to 2025-06-01.)

Article	Citations
A Micro-Force Measurement System Based on Lorentz Force Particle Analyzer for the Cleanliness Inspection of Metal Materials	81
Front Cover	57
TechRxiv: Share Your Preprint Research with the World!	46
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	35
Front Cover	35
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	32
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	32
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	30
Journal of Microelectromechanical Systems Publication Information	28
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	27
Perovskite Nickelate Actuators	27
Journal of Microelectromechanical Systems Publication Information	26
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	26
Transducers 2023	26
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	25
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	24
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	24
Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	24
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	23
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	22
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	22
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	21
Parametric Resonators With a Floating Rotor: Sensing Strategy for Devices With an Increased Stiffness and Compact Design	20
2021 Index Journal of Microelectromechanical Systems Vol. 30	20
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	20

Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	20
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	20
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	19
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	19
1.3 mm² Nav-Grade NEMS-Based Gyroscope	18
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	18
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	18
2022 Reviewers List	17
TechRxiv: Share Your Preprint Research with the World!	16
TechRxiv: Share Your Preprint Research with the World!	16
A Microfluidic Chip for Growth and Characterization of Adult Rat Hippocampal Progenitor Cell Neurospheroids	16
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	15
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	15
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	15
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	15
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	14
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	14
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	14
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	14
Journal of Microelectromechanical Systems	13
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	13
Critical Issues in MEMS Property Measurement and Variation Measured by Nanoindentation: Error Sources and Uncertainty	13
Journal of Microelectromechanical Systems	13
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	13
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	13
TechRxiv: Share Your Preprint Research with the World!	13
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	12
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	12
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	12
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	12
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	12
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	12
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	12
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	11
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	11
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	11
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	11
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications	11
Journal of Microelectromechanical Systems	11
The Influences of Non-Volatile Surface Compound Layer on the Dry Etching of Borosilicate Glass	11
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
Crosstalk Analysis to GHz Bulk-Acoustic-Wave Array for Addressable Micro/Nanoscale Particle Trapping	10
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	10
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	10
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM	10
Front Cover	10
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	10
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	10

Table of Contents	10
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	10
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes	10
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	10
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	9
A Review on MEMS Silicon Resonant Accelerometers	9
IEEE Access	9
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	9
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	9
Front Cover	9
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	9
TechRxiv: Share Your Preprint Research with the World!	9
Table of Contents	8
Electrowetting Ionic Liquid Flow Controller	8
Member ad suite	8
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	8
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	8
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	8
A Silicon MEMS Quatrefoil Suspension Gyroscope	8
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	8
TechRxiv: Share Your Preprint Research with the World!	7
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	7
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	7
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	7
Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory	7
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	7
IEEE EDS Lester F. Eastman Award	7
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	7
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	7
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	7
TechRxiv: Share Your Preprint Research with the World!	7
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	7
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts	7
Transducers 2025	7
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	7
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	7
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	6
IEEE Access	6
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	6
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	6
Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance	6
Front Cover	6
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	6
Table of Contents	6
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	6
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	6
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	6
A Monolithic Forward-View Optical Scanner by a Pair of Upright MEMS Mirrors on a SiOB for LiDAR Applications	6
2024 Index Journal of Microelectromechanical Systems Vol. 33	6
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	6
Front Cover	6
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	6
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	6
Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators	6
Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate	5
Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators	5
Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures	5
Journal of Microelectromechanical Systems	5
Journal of Microelectromechanical Systems	5
Introducing IEEE Collabratec	5
2023 Reviewers List	5
Front Cover	5
A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams	5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation	5
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders	5
Ejected Droplet-Directed Transportation and Self-Alignment of Microfibers to Micro Trenches	5
Journal of Microelectromechanical Systems Publication Information	5
Front Cover	5
37th Annual IEEE Conference on Micro Electro Mechanical Systems	5
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles	5
On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation	5
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level	5
Member ad suite	5
Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding	5
Front cover	5
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation	5
Table of Contents	4

Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation	4
Heat-Depolymerizable Tethers for Microelectromechanical System Assembly	4
Simulation and Experiments on a Valveless Micropump With Fluidic Diodes Based on Topology Optimization	4
TechRxiv: Share Your Preprint Research With the World!	4
Introducing IEEE Collabratec	4
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	4
JMEMS Letters Fabrication of Self-Sealed Circular Microfluidic Channels in Glass by Thermal Blowing Method	4
Journal of Microelectromechanical Systems Publication Information	4
Multiphase Bipolar Electret Rotary Generator for Energy Harvesting and Rotation Monitoring	4
A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss	4
Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches	4
Journal of Microelectromechanical Systems Publication Information	4
Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability	4
Nonlinear Dynamics of Large-Angle Circular Scanning With an Aluminum Nitride Micro-Mirror	4
Electrofusion Device With High-Aspect-Ratio Electrodes for the Controlled Fusion of Lipid Vesicles	4
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	4
Chipping Energy Threshold in MEMS Sensors	4
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride	4
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology	4
Transmission Target for a MEMS X-Ray Source	4
Table of Contents	4
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	4
500-750 GHz Contactless Rotating MEMS Single-Pole Double-Throw Waveguide Switch	4
Passive and Wireless Anemometer Based on Inductor Bending Effect	4
An In-Situ Self-Test Method for Measuring Absorptivity of Film-Type Uncooled Infrared Detectors	4
Thermal Flow Sensor With a Bidirectional Thermal Reference	4
TechRxiv: Share Your Preprint Research with the World!	4
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	4
Aluminum Nitride 4-Beam Piezoelectric Nanoscale Ultrasound Transducer (pNUT)	3
Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution	3
Journal of Microelectromechanical Systems	3
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	3
TechRxiv: Share Your Preprint Research with the World!	3
Introducing IEEE Collabratec	3
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching	3
2022 Index IEEE Journal of Microelectromechanical Systems Vol. 31	3
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	3
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	3
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	3
Resource Allocation in Vibration Energy Harvesters	3
TechRxiv: Share Your Preprint Research with the World!	3
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam	3
Table of Contents	3
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	3
Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures	3
Table of Contents	3
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	3
Member ad suite	3
Front Cover	3
Folded MEMS Platform Based on Polymeric Flexible Hinges for 3D Integration of Spatially-Distributed Sensors	3
Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer	3
Defect Excitation and Failure Analysis of MEMS Gas Sensors Based on FTA and RET Methods	3
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	3
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	3
Table of Contents	3
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO₃/SiC Bonded Wafers	3
Journal of Microelectromechanical Systems Publication Information	3
Member ad suite	3
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	3
Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams	2
Gold Nanorod-Embedded PDMS Micro-Pillar Array for Localized Photothermal Stimulation	2
JMEMS Letters.1pt Fabrication of LCE Microactuator Arrays Through Soft Lithography With Surface Alignment	2
Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope	2
Journal of Microelectromechanical Systems	2
Characterization of a Wake-Up Nano-Gap Gas Sensor for Ultra Low Power Operation	2
Journal of Microelectromechanical Systems	2
Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators	2
A Ring Gyroscope With On-Chip Capacitive Stress Compensation	2
Polycrystalline LPCVD 3C-SiC Thin Films on SiO₂ Using Alternating Supply Deposition	2
Vacuum-Sealed MEMS Resonators Based on Silicon Migration Sealing and Hydrogen Diffusion	2
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure	2
TechRxiv: Share Your Preprint Research with the World!	2
Experimental and Modeling Based Investigations of Process Parameters on a Novel, 3D Printed and Self-Insulated 24-Well, High-Throughput 3D Microelectrode Array Device for Biological Applications	2
A Compact Reconfigurable Resonator-Based Direct Current Sensing System	2
Root-Causes of Bias Instability Noise in Mode-Split MEMS Gyroscopes	2
Member ad suite	2
Evaluation of Polymer Materials for MEMS Microphones	2
Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability	2
Deep Wet Etching of a Z-Cut α-Quartz Wafer by Fluorine-Based Solutions: Experiment, Mechanism, and Application	2
Serial and Parallel Connections of Micromechanical Resonators for Sensing: Theories and Applications	2
Research on Parasitic Capacitance Reduction in All-Silicon High-Precision MEMS Accelerometers	2
Development of PMUT-Based High Sensitivity Gas Flow Sensor	2
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor	2
2021 EDS Education Award call for nominations	2
K-Band LiNbO₃ A3 Lamb-Wave Resonators With Through-Holes	2
2023 Index Journal of Microelectromechanical Systems Vol. 31	2
Front Cover	2
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection	2
Self-Actuating Isothermal Nanomechanical Test Platform for Tensile Creep Measurement of Freestanding Thin Films	2
Shock Destructive Reliability Analysis of Electromagnetic MEMS Micromirror for Automotive LiDAR	2
Fused Silica Gyroscope Resonator Manufactured With Femtosecond Laser Assisted Wet Etching	2
Thermomechanical Modeling and Optimization of Zero-Power Micromechanical Photoswitch	2
Suspended Silicon Nitride Platforms for Thermal Sensing Applications in the Limit of Minimized Membrane Thickness	2
Front Cover	2
Table of Contents	2