OOIR: Observatory of International Research

Papers

(The median citation count of Journal of Microelectromechanical Systems is 1. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2022-05-01 to 2026-05-01.)

Article	Citations
TechRxiv: Share Your Preprint Research with the World!	133
Front Cover	57
Front Cover	51
Optimization of MEMS Matching Network for the Sensitivity of GHz Low-Power Wake-Up Receivers	50
Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation	49
Design and Characterization of Micro-Oven-Controlled MEMS Resonators With Two-Dimensional Honeycomb-Lattice Phononic Crystals for Anchor Loss Suppression	46
Vacuum-Packaged 30%-Doped ScAlN Resonators With AlN Absorbers for IR Spectroscopy	44
Front Cover	41
Journal of Microelectromechanical Systems Publication Information	40
Table of Contents	39
MEMS Pitch Gyroscope Based on (250-nm)² Gauges Achieving 0.12 °/hr Over 1000 dps Full-Scale	38
Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry	34
Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes	30
Transducers 2023	28
Journal of Microelectromechanical Systems Publication Information	27
Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles	26
A Novel Parametric System-Level Modeling Method for MEMS Devices Combining Artificial Neural Networks and Behavior Description	25
Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors	23
60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers	21
A Reusable Pseudo-Liquid-to-Solid Inertial Switch Based on Hetero-Coated Galinstan Droplets	21
Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe	21
Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lamé Resonators	20
MEMS Switching Voltage Regulator Using a Normally-On Electret Relay	20
A Novel Inline Near-Zero Thermopile RF MEMS Power Sensor	20
Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy	19

Design and Implementation of Robust Resonant Controller for Piezoelectrically Driven Micro-Lens Actuator	19
In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing	19
2022 Reviewers List	18
A Suspended Metamaterial Mirror for Hyperspectral Shortwave Infrared Fabry-Perot Filters	18
Investigation of Vapor HF Sacrificial Etching Characteristics Through Submicron Release Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration Seal	17
Mechanical Mode Coupled Piezo-on-Silicon Bulk Acoustic Wave MEMS Resonators in Tank Configuration for Q-Enhancement	17
Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization	17
Extending MEMS Resonator Performance Through Inductive Feedthrough Cancellation	17
TechRxiv: Share Your Preprint Research with the World!	17
In-Plane Orientational Control of Electronic Components Using Pattern Complementarity in a Self-Assembling System	17
Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application	16
TechRxiv: Share Your Preprint Research with the World!	16
Optical Characterization of Dynamic CMUTs Using Zygo Optical Profilometers: An Alternative to Laser Doppler Vibrometers	16
A Piezoelectric Micro Machined Ultrasonic Transducer Based Hybrid-Morph AlScN Film	16
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation	16
Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression	15
Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters	15
TC f Manipulation in AlScN Nanomechanical Resonators Using Dual-Mode Parametric Excitation	14
Two-Axis Electromagnetic Scanner Using an Asymmetric Frame on a One-Axis Lateral Magnetic Field	14
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor	14
A Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer Operating in Thickness-Field-Excitation ModeWith Enhanced Acoustic Emission	13
Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney	13
Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent	13
A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application	13
Journal of Microelectromechanical Systems	13
Low-Energy Consumption Actuation for Microelectrothermal Actuators via Capacitive Discharge Excitation	13
Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process	13
Design of Spurious-Free Surface Acoustic Wave Resonators on LNOI Platform Using Machine Learning	13
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	12
A Weakly Coupled Tuning Fork MEMS Electric Field Sensor With High Resolution and Wide Measurement Range	11
A Rapid Circuit Phase Error Identification and Compensation Method for MEMS QMG Achieving 99.7% Reduction in ZRO Drift	11
Wafer-Level Fabrication of FAIMS Chips Based on TGV Technology	11
Design and Fabrication Method of a Large-Size Electromagnetic MEMS Two-Dimensional Scanning Micromirror	11
Anchor Fin Explored as an Important Design Parameter for Lamb Wave Resonators	11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation	11
Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer	11
Journal of Microelectromechanical Systems	10
Turnover Temperature Point Adjustment in Mechanically Coupled Single-Crystal Silicon MEMS Resonators	10
Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping	10
Performance Enhancement of the DMS Filter on SiC Substrate Using Intermediate Reflecting Grating	10
Fabrication of 32×32 2 D CMUT Arrays on a Borosilicate Glass Substrate With Silicon- Through-Wafer Interconnects Using Non- Aligned and Aligned Anodic Bonding	10
Platform Development for CMOS-MEMS Multi-Gap Capacitive Transducers	10
Journal of Microelectromechanical Systems Publication Information	10
Vertically-Excited High-Order Guided Shear Vertical Surface Acoustic Wave Resonators for 5G and Beyond	10
Sub-30 nm Silicon Nanopatterning: Toward Reduced Reflectance and Enhanced Sensitivity in CMOS Image Sensors	9
Response Speed Characterization of a Thermally Actuated Programmable Metamaterial	9
Front Cover	9
High Performance MEMS Magnetic Actuator Based on FeGa and FeGaCr Thin Films	9
Table of Contents	9

Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror	9
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation	9
A Silicon Migration Model Incorporating Anisotropic Surface Energy and Non-Uniform Diffusivity	9
A Quasi-Zero Stiffness MEMS Accelerometer With Wide Open-Loop Dynamic Range	9
Front Cover	9
Bidirectional Thermo-Acoustic Modulator Based on LiNbO₃ Thin Film	8
Real-Time Phase Compensation for Scale Factor Nonlinearity Improvement Over Temperature Variations for MEMS Gyroscope	8
Electronic Stethoscope Based on Triangular Cantilever Piezoelectric Bimorph MEMS Transducers	8
Front Cover	8
Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events	8
Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow	8
A Center-Bound Type Piezoelectric MEMS Speaker With Flexible Supporting Layer	8
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	8
High-Dynamic-Range Bulk-Mode Piezoelectric MEMS Resonators via Crystal Orientation Tuning for Duffing Nonlinearity Suppression	8
Phononic Integrated Circuit Component Design and Analysis for Surface Acoustic Waves in ScAlN on Silicon Carbide	8
A Review on MEMS Silicon Resonant Accelerometers	8
Table of Contents	7
Whisker Sensor With Extended Measurement Range Through Jamming Effects Using 3D-Printed Tetrapod Particles	7
Temporal Dynamics of GHz Acoustic Waves in Chipscale Phononic Integrated Circuits	7
Phononic Frequency Combs in Atomically Thin Nanoelectromechanical Resonators Via 1:1 and 2:1 Internal Resonances	7
Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes	7
A Silicon MEMS Quatrefoil Suspension Gyroscope	7
Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography	7
Member ad suite	7
Activation Model of Nano Getter for MEMS Devices Based on Sandwich Structures of Au-Porous Ti-Dense Ti Film	7
Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction	7
Compact, High-Performance Positive Magnetophoresis Chip With Integrated Patterned Magnet for Efficient Particle Trapping	7
Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications	7
TechRxiv: Share Your Preprint Research with the World!	7
Electrowetting Ionic Liquid Flow Controller	7
Bistability in Coupled Opto-Thermal Micro-Oscillators	7
Spurious Mode Suppression in LiNbO₃ A1 Resonators and Filters Beyond 6 GHz With Through-Holes	7
Uniform Whole Wafer Anisotropic Etching of Structural Ta Thin Films	7
An Air-Coupled Electrostatic Ultrasound Transducer Using a MEMS Microphone Architecture	7
Exploring Ru Compatibility With Al-Ge Eutectic Wafer Bonding	6
TechRxiv: Share Your Preprint Research with the World!	6
Incorporating 3-D-Printed Polymer Scaffolds Onto MEMS Resonant Chemical Sensors for Enhanced Performance	6
Transducers 2025	6
High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror	6
Continuous and Non-Invasive Monitoring of Blood Pressure Based on Wearable Piezoelectric Micromachined Ultrasonic Transducers Array	6
High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays	6
Front Cover	6
Disposable Piezoresistive MEMS Airflow Sensor for Chronic Respiratory Disease Detection	6
Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes	6
Synchronized Opto-Electro-Mechanical Measurements for Estimation of Energy Dissipation in Thin-Film-Piezoelectricon-Substrate MEMS/NEMS Devices	6
C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz	6
2024 Index Journal of Microelectromechanical Systems Vol. 33	6
Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays	6
Q-Factor Enhancement of Micro Hemispherical Resonators via Optimization of Film Distribution	6
High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance	6
Table of Contents	6
Analysis of Brittle Fracture Characteristics Under Static/Dynamic Loads in Silicon-Based MEMS Cantilevers	6
Synchronization Dynamics of MEMS Oscillators With Sub-Harmonic Injection Locking (SHIL) for Emulating Artificial Ising Spins	6
Front Cover	6
Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors	5
Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators	5
Prestressing-Based Thermal Budget Study of MEMS Cantilever and Its Application in Package Processes	5
Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures	5
Rapid and Precise Testing Techniques for MEMS Pressure Sensors Without Input Stabilization	5
Front Cover	5
A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment	5
Phase-Flip Lattice Bulk Acoustic Wave Filter With Unbalanced Terminals Using Hybrid Heterogeneous Integration Technology	5
Lock-In Amplified Fluorescence Spectroscopy in a Digital Microfluidic Configuration for Antibiotic Detection of Ciprofloxacin in Milk	5
37th Annual IEEE Conference on Micro Electro Mechanical Systems	5
Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators	5
MEMS-Oriented Single-Crystalline-Silicon Through-Silicon-Via Based on Filling and Oxidation of Silicon Powders	5
Temperature-Stable CMOS-MEMS Resonators via Arc-Beam-Induced Electrical Stiffness Tuning	5
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid	5
Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching	5
Table of Contents	5
Fabrication of a Novel GaAs Thermopile Sensor for RF Amplitude Demodulation	5
Effects of Residual Stress on Vibrational Characteristics of Hemispherical Resonators	5
Accurate Identification of the Evolution of MEMS Resonant Accelerometer Residual Stresses at the Wafer-Die-Chip Level	5
Compact, Scan-Pattern-Switchable 2-D Piezoelectric MEMS Mirror With 1-D Addressable Scanning	5
Journal of Microelectromechanical Systems Publication Information	4
Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation	4
The Research of a Miniaturized Ammunition With Built-In MEMS Safety-and-Arming Device for Micro Drones	4
TechRxiv: Share Your Preprint Research With the World!	4
Highly-Sensitive Thermally-Stabilized Palladium Cantilever Nanogap H ₂ Sensor	4
Exploring the Tunability of a Memristor-Like Device Based on MEMS Resonators	4

Table of Contents	4
Elimination of Temperature Drift for MEMS Thermal Wind Sensor With On-Chip Surrounding Thermistor	4
A Tunable Two-Stage Bandpass Filter Incorporating Two Electromagnetically Coupled Curved Beams	4
Front Cover	4
Fabrication of Capacitive Micromachined Ultrasonic Transducers With High-k Insulation Layer Using Silicon Fusion Bonding	4
Member ad suite	4
Heat-Depolymerizable Tethers for Microelectromechanical System Assembly	4
A 27-nW Wake-Up Receiver With a Quartz Transformer Matching Network Achieving −71.9-dBm Sensitivity and −46-dB SIR at 0.8% Offset	4
Rapid Prototyping of Tape-Based Microfluidic Chips With Versatile On-Chip Fluidic Functions	4
Journal of Microelectromechanical Systems Publication Information	4
Journal of Microelectromechanical Systems	4
2023 Reviewers List	4
A Novel Optimization and Yield Analysis Method for MEMS Devices Combining Bi-Fidelity Deep Neural Network and Active Subspace	4
Introducing IEEE Collabratec	4
A Novel All-Fused Silica MEMS Gyroscope With an Aspect Ratio Exceeding 50:1	4
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	4
High-Frequency Sezawa Mode Surface Acoustic Wave Resonators Using Boron-Doped AlScN on SiC and Sapphire Substrates	4
Introducing IEEE Collabratec	4
A High-Density Silicon-Based Microelectrode Array for Chronic In Vivo Neural Recording	3
Introducing IEEE Collabratec	3
CMOS-MEMS Resoswitches—Design, Modeling, and Characterization	3
A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network	3
Investigation of Thermal Creep in Metal-Based MEMS Cantilevers	3
Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution	3
Nonlinear Micro-Resonator-Based Comparator With Linear Hysteresis Tuning	3
Thermal Flow Sensor With a Bidirectional Thermal Reference	3
Table of Contents	3
Design and Performance Comparison of Single-Electrode and Vertical Contact-Separation Triboelectric Nanogenerators for Energy-Harvesting Applications	3
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	3
Characterization of a Wafer-Level Packaged Au−Ru/AlCu Contact for Micro-Switches	3
Journal of Microelectromechanical Systems Publication Information	3
Defect Excitation and Failure Analysis of MEMS Gas Sensors Based on FTA and RET Methods	3
Chipping Energy Threshold in MEMS Sensors	3
Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps	3
Lateral-Field-Excited PMUTs Based on Bilayer X-Cut Lithium Niobate	3
Soft Contact Lens With Embedded Moiré Patterns-Based Intraocular Pressure Sensors	3
Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer	3
TechRxiv: Share Your Preprint Research with the World!	3
TechRxiv: Share Your Preprint Research with the World!	3
Nonlinear Dynamics of Large-Angle Circular Scanning With an Aluminum Nitride Micro-Mirror	3
Electrofusion Device With High-Aspect-Ratio Electrodes for the Controlled Fusion of Lipid Vesicles	3
Multiphase Bipolar Electret Rotary Generator for Energy Harvesting and Rotation Monitoring	3
Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation	3
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	3
500-750 GHz Contactless Rotating MEMS Single-Pole Double-Throw Waveguide Switch	3
Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization	3
Q Enhancement and TCF Reduction for Piezoelectric MEMS Resonators via Mechanical Coupling	3
Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error	3
Continuous Mode-Reversal FM Accelerometer With 60-g FSR, 10-μg/K Drift, and VRE Rejection	3
MEMS Microheater With Fast Electrothermal Response for Self-Destructing Chip Applications	3
Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride	3
Journal of Microelectromechanical Systems Publication Information	3
A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss	3
Transmission Target for a MEMS X-Ray Source	3
Anchor Loss Suppression in Piezoelectric MEMS Resonator Through Wave Interference	3
Modeling and Characterization of Pulse-Width Modulation Driving of Electrostatic Actuators With Polar Dielectrics	2
Polycrystalline LPCVD 3C-SiC Thin Films on SiO₂ Using Alternating Supply Deposition	2
Synchronous Enhancement of Sensitivity and Frequency of Piezoelectric Micromachined Ultrasonic Transducers Operating in the Second-Order Flexural Mode	2
Evaluation of Polymer Materials for MEMS Microphones	2
MEMS Microbreaker With Electrostatically Actuated Closure and Tunable Electrothermal Reset	2
Characterization of a Wake-Up Nano-Gap Gas Sensor for Ultra Low Power Operation	2
K-Band LiNbO ₃ A3 Lamb-Wave Resonators With Through-Holes	2
Front Cover	2
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	2
2022 Index IEEE Journal of Microelectromechanical Systems Vol. 31	2
Journal of Microelectromechanical Systems Publication Information	2
Table of Contents	2
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure	2
TechRxiv: Share Your Preprint Research with the World!	2
A Compact Reconfigurable Resonator-Based Direct Current Sensing System	2
Root-Causes of Bias Instability Noise in Mode-Split MEMS Gyroscopes	2
Frequency Split Modulation in Micro Hemispherical Resonator Based on Rim Width	2
High-Performance, Low-Cost On-Chip Fabry-Perot Interferometer With Microfluidic Channel Using Single Anisotropic Wet Etching	2
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor	2
Journal of Microelectromechanical Systems	2
Reduction of Motional Resistance Using Piezoelectric on Silicon MEMS Disk Arrays for Ambient Air Applications	2
Member ad suite	2
Table of Contents	2
Front Cover	2
Tiny-Gap Titanium-Nitride-Composite MEMS Resonator Designs With High Power Handling Capability	2
On the Design of Low Voltage One-Dimensional Piezoelectric MEMS Scanning Micromirror	2
Experimental and Modeling Based Investigations of Process Parameters on a Novel, 3D Printed and Self-Insulated 24-Well, High-Throughput 3D Microelectrode Array Device for Biological Applications	2
Fabrication of LCE Microactuator Arrays Through Soft Lithography With Surface Alignment	2
Lithography-Free Stress-Engineering of MEMS Structures Using Two-Photon Polymerization Masking	2
2023 Index Journal of Microelectromechanical Systems Vol. 31	2
Ring-Shaped MEMS Shutter Array With Subfield Addressing for Interference Microscopy	2
Member ad suite	2
Front Cover	2
Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams	2
Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications	1
Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter	1
Two-Dimensional Modeling for Parametric Optimization and Crosstalk Analysis of Dual-Axis Micro Thermal Convective Tilt Sensors	1
System-Level Optimization of MEMS Thermal Wind Sensor Based on the Co-Simulation of Macromodel and Board-Level Interface Circuits	1
Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon	1
Phononic Graded Meta-MEMS for Elastic Wave Amplification and Filtering	1