Journal of Microelectromechanical Systems

Article	Citations
A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%	93
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films	89
MEMS Resonators for Frequency Reference and Timing Applications	68
Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators	65
CMOS-Integrated Aluminum Nitride MEMS: A Review	45
Enabling Higher Order Lamb Wave Acoustic Devices With Complementarily Oriented Piezoelectric Thin Films	42
Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection	42
A Parylene Neural Probe Array for Multi-Region Deep Brain Recordings	42
Study of Thin Film LiNbO3 Laterally Excited Bulk Acoustic Resonators	39
1.3 mm2 Nav-Grade NEMS-Based Gyroscope	34
X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications	34
Microfabricated Neuroaccelerometer: Integrating Sensing and Reservoir Computing in MEMS	30
A Miniaturized EHT Platform for Accurate Measurements of Tissue Contractile Properties	27
Nonlinear Response of PZT-Actuated Resonant Micromirrors	26
A Paper-Based Flexible Tactile Sensor Array for Low-Cost Wearable Human Health Monitoring	23
Additive Assembly for PolyJet-Based Multi-Material 3D Printed Microfluidics	23
DLP 3D Printed “Intelligent” Microneedle Array (iμNA) for Stimuli Responsive Release of Drugs and Its in Vitro and ex Vivo Characterization	23
Geometric Imperfection Characterization and Precise Assembly of Micro Shell Resonators	23
A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging	23
Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study	22
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator	22
A Two-Step Fabrication Method for 3D Printed Microactuators: Characterization and Actuated Mechanisms	22
Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism	21
A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation	21
Piezoelectric Micromachined Ultrasonic Transducers With Pinned Boundary Structure	21

A 512-Channel Multi-Layer Polymer-Based Neural Probe Array	21
Fabrication of Injectable Micro-Scale Opto- Electronically Transduced Electrodes (MOTEs) for Physiological Monitoring	20
Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications	20
High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators	19
Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters	19
Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon	19
Monolithic Multiband MEMS RF Front-End Module for 5G Mobile	19
Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch	18
Fabrication of 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on Insulating Substrates With Through-Wafer Interconnects Using Sacrificial Release Process	18
Considerations for an 8-inch Wafer-Level CMOS Compatible AlN Pyroelectric 5–14 μm Wavelength IR Detector Towards Miniature Integrated Photonics Gas Sensors	18
Design, Fabrication and Experimental Validation of a Metaplate for Vibration Isolation in MEMS	18
Micromechanical Switch-Based Zero-Power Chemical Detectors for Plant Health Monitoring	18
Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing	18
Tunable Terahertz Free Spectra Range Using Electric Split-Ring Metamaterial	17
ScAlN/AlN Film-Based Lamé Mode Resonator With High Effective Electromechanical Coupling Coefficient	17
Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism	17
Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope	17
Numerical Modelling of Non-Linearities in MEMS Resonators	16
Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging	16
Miniaturized Electronic Circuit Design Challenges for Ingestible Devices	16
Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger	16
A Novel Low-g MEMS Bistable Inertial Switch With Self-Locking and Reverse-Unlocking Functions	16
Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection	16
A PMUT Integrated Microfluidic System for Fluid Density Sensing	16
Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators	15
Piezoelectric RF MEMS Switches on Si-on-Sapphire Substrates	15
A Self-Powered MEMS Inertial Switch for Potential Zero Power-Consumption Wake-Up Application	15
A Low-Noise High-Order Mode-Localized MEMS Accelerometer	15
Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope	15
Flow Velocity Gradient Sensing Using a Single Curved Bistable Microbeam	15
Sub-GHz X-Cut Lithium Niobate S₀ Mode MEMS Resonators	15
Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation	14
Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic Cantilevers	14
Optimization of MEMS Vibration Energy Harvester With Perforated Electrode	14
Engineering Efficient Acoustic Power Transfer in HBARs and Other Composite Resonators	14
Ultra-High-Q Gallium Nitride SAW Resonators for Applications With Extreme Temperature Swings	14
Miniaturized PMUT-Based Receiver for Underwater Acoustic Networking	14
Non-Contact Ultrasonic Flow Measurement for Small Pipes Based on AlN Piezoelectric Micromachined Ultrasonic Transducer Arrays	14
Design and Development of the MEMS-Based High-g Acceleration Threshold Switch	14
High-Stability Quartz Resonant Accelerometer With Micro-Leverages	14
Quad Mass Resonator With Frequency Mismatch of 3 ppm Trimmed by Focused Ion Beam	14
Polysilicon Grating Switches for LiDAR	13
Dynamics of V-Shaped Electrothermal MEMS-Based Resonators	13
Fused Quartz Dual-Shell Resonator Gyroscope	13
Optimization of Inactive Regions of Lithium Niobate Shear Mode Resonator for Quality Factor Enhancement	13
Low Loss Acoustic Delay Lines Based on Solidly Mounted Lithium Niobate Thin Film	13
A Novel MEMS Speaker With Peripheral Electrostatic Actuation	13
Reconfigurable Multiband Terahertz Metamaterial Using Triple-Cantilevers Resonator Array	13
SAW Filters With Excellent Temperature Stability and High Power Handling Using LiTaO3/SiC Bonded Wafers	13
De-Icing Device With Self-Adjusting Power Consumption and Ice Sensing Capabilities	13

A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate	13
Modeling of Beam Electrothermal Actuators	12
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography	12
Highly Selective Guiding Springs for Large Displacements in Surface MEMS	12
On the Effect of Water-Induced Degradation of Thin-Film Piezoelectric Microelectromechanical Systems	12
Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication	12
Bendable Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays Based on Silicon-On-Insulator (SOI) Technology	12
Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring	12
Specific Sensing Mechanism Investigation of Surface Acoustic Wave Humidity Sensors Coated With Uniform Graphene Oxide Membrane	12
Thickness-Lamé Thin-Film Piezoelectric-on-Silicon Resonators	12
A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor	12
A Pulsed Wave Doppler Ultrasound Blood Flowmeter by PMUTs	11
Ultrahigh-Sensitivity Piezoelectric AlN MEMS Speakers Enabled by Analytical Expressions	11
Nanostructured Spacers for Thermionic and Thermophotovoltaic Energy Converters	11
A Novel Thermistor-Based RF Power Sensor With Wheatstone Bridge Fabricating on MEMS Membrane	11
Directional Sound Sensor With Consistent Directivity and Sensitivity in the Audible Range	11
A Low Power Micro-Electromechanical Resonator-Based Digital to Analog Converter	11
Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study	11
On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation	11
Bi-Stable Aluminum Nitride-Based Piezoelectric Micromachined Ultrasonic Transducer (PMUT)	11
A Monolithic Forward-View MEMS Laser Scanner With Decoupled Raster Scanning and Enlarged Scanning Angle for Micro LiDAR Applications	11
Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators	10
Design and Fabrication of a MEMS Capacitance Vacuum Sensor Based on Silicon Buffer Block	10
Systematic Characterization of Hydrophilized Polydimethylsiloxane	10
Analytical Study and Thermal Compensation for Capacitive MEMS Accelerometer With Anti-Spring Structure	10
Eye-Tracking Monitoring Based on PMUT Arrays	10
A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator With a kt2 of 23.9%	10
Dynamic Performance Improvement of Piezoelectrically Driven Micro-Lens Actuators	10
1-Port Piezoelectric Resonators With > 100 V/V Gain	10
Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability	10
A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion	9
Direct Phase Measurement and Compensation to Enhance MEMS Gyroscopes ZRO Stability	9
Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators	9
Piezoelectric Disk Gyroscope Fabricated With Single-Crystal Lithium Niobate	9
The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism	9
FPCB Masked One-Step Etching Large Aperture Mirror for LiDAR	9
High-Intensity Airborne CMUT Transmitter Array With Beam Steering	9
Direct Laser Writing for Deterministic Lateral Displacement of Submicron Particles	9
Design and Fabrication of a MEMS-Based Break Junction Device for Mechanical Strain-Correlated Optical Characterization of a Single-Molecule	9
3D Nanoprinted Liquid-Core-Shell Microparticles	9
A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure	9
An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer	9
Crossover/Veering in V-Shaped MEMS Resonators	9
Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With ±16 ppm Temperature Stability Over Industrial Temperature Ranges	9
Fabrication of Bloch Long Range Surface Plasmon Waveguides Integrating Counter Electrodes and Microfluidic Channels for Multimodal Biosensing	9
Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface	9
Electronic Immunoaffinity Assay for Differential Leukocyte Counts	9
A Ring Gyroscope With On-Chip Capacitive Stress Compensation	9
Tactile Sensing With Scalable Capacitive Sensor Arrays on Flexible Substrates	9
Hierarchical Integration of Thin-Film NiTi Actuators Using Additive Manufacturing for Microrobotics	9
High-Temperature Acoustic and Electric Characterization of Ferroelectric Al₀.₇Sc₀.₃N Films	9
Polymer/Ceramic MEMS: A Nanomechanical Sensor Platform With Low Temperature High Gauge Factor ITO for Electromechanical Transduction	9
Low Offset and Noise in High Biased GaN 2DEG Hall-Effect Plates Investigated With Infrared Microscopy	9
A Non-Linear Lumped Model for the Electro-Mechanical Coupling in Capacitive MEMS Microphones	8
Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving	8
A Scalable, Hierarchical Rib Design for Larger-Area, Higher-Porosity Nanoporous Membranes for the Implantable Bio-Artificial Kidney	8
Miniature Electrodynamic Wireless Power Transmission Receiver Using a Micromachined Silicon Suspension	8
Ultra-Low Relative Frequency Split Piezoelectric Ring Resonator Designed for High-Performance Mode-Matching Gyroscope	8
Sidewall Metallization on CMOS MEMS by Platinum ALD Patterning	8
Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW	8
Multi-Layer Micro-Nanofluidic Device for Isolation and Capture of Extracellular Vesicles Derived From Liposarcoma Cell Conditioned Media	8
Sub-Deg-per-Hour Edge-Anchored Bulk Acoustic Wave Micromachined Disk Gyroscope	8
Modeling and Characterization of a Novel In-Plane Dual-Axis MEMS Accelerometer Based on Self-Support Piezoresistive Beam	8
A SiN Microcalorimeter and a Non-Contact Precision Method of Temperature Calibration	8
Thermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 °C Up to 325 °C	8
Wafer-Level Low-Temperature Solid-Liquid Inter-Diffusion Bonding With Thin Au-Sn Layers for MEMS Encapsulation	8
Vibration Mode Suppression in Micromechanical Resonators Using Embedded Anti- Resonating Structures	8
Active Noise Cancellation With MEMS Resonant Microphone Array	8
Multidegree-of-Freedom State-Space Modeling of Nonlinear Pull-in Dynamics of an Electrostatic MEMS Microphone	7
A Self-Powered, Biodegradable Dissolved Oxygen Microsensor	7
Anchor Design Affects Dominant Energy Loss Mechanism in a Lamé Mode MEM Resonator	7
Inkjet-Printed Hydrogen Peroxide Sensor With Sensitivity Enhanced by Plasma Activated Inorganic Metal Salt Inks	7
Microscale Devices for Biomimetic Sound Source Localization: A Review	7
Characterization and Clinical Serum Test of a Molecular Imprinted Polymer (MIP)-Based Cardiac Troponin T Sensing Electrode for Patient Monitoring Applications	7
Hybrid and Passive Tissue-Anchoring Mechanism for Ingestible Resident Devices	7
AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging	7
Effect of Metallization on Quality Factor and Noise Characteristics in Fused Silica Dual-Shell Gyroscopes	7
A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes	7
Electromechanical Equivalent Circuit Model for Axisymmetric PMUTs With Elastic Boundary Conditions	7
Design and Fabrication of Reliable Power Efficient Bistable MEMS Switch Using Single Mask Process	7

Vibrating Mesh Atomizer for Spin-Spray Deposition	7
Fast Selective Sensing of Nitrogen-Based Gases Utilizing δ-MnO2-Epitaxial Graphene-Silicon Carbide Heterostructures for Room Temperature Gas Sensing	7
Radially Pleated Disk Resonator for Gyroscopic Application	7
On Sampling Rate Limits in Bistable Microbeam Sensors	7
An 8-Bit Digitally Operated Micromachined Accelerometer	7
A MEMS Inertial Switch With Large Scale Bi-Directional Adjustable Threshold Function	7
Modified Coefficient of Equivalent Mass to Explain Decreased Relative Sensitivity of Piezoelectric Cantilever Humidity Sensor in High Mode	7
A Continuous, Impedimetric Parylene Flow Sensor	7
A Microtissue Platform to Simultaneously Actuate and Detect Mechanical Forces via Non-Contact Magnetic Approach	7
Design, Modeling and Characterization of High-Performance Bulk-Mode Piezoelectric MEMS Resonators	7
Printed Electroceutical Dressings for the Inhibition of Biofilms and Treatment of Chronic Wounds	7
Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness	7
A Sub-nL Chip Calorimeter and Its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles	7
The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure	7
Negative Nonlinear Dissipation in Microelectromechanical Beams	7
Fully Additive Fabrication of Electrically Anisotropic Multilayer Materials Based on Sequential Electrodeposition	7
An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum	7
A Resonant Lorentz-Force Magnetometer Featuring Slotted Double-Ended Tuning Fork Capable of Operating in a Bias Magnetic Field	7
Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter	7
Accurate Analytic Model of a Parametrically Driven Resonant MEMS Mirror With a Fourier Series-Based Torque Approximation	7
Implementation of Dual-Nonlinearity Mechanism for Bandwidth Extension of MEMS Multi-Modal Energy Harvester	7
Fused Silica Gyroscope Resonator Manufactured With Femtosecond Laser Assisted Wet Etching	7