Microsystems & Nanoengineering

Article	Citations
A programmable magnetic digital microfluidic platform integrated with electrochemical detection system	477
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	141
PEDOT:PSS-based bioelectronics for brain monitoring and modulation	134
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	128
Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate	125
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	120
A magnetically enabled simulation of microgravity represses the auxin response during early seed germination on a microfluidic platform	109
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	106
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	106
Review for optical metalens based on metasurfaces: fabrication and applications	105
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	94
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	92
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	91
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	90
Vertical serpentine interconnect-enabled stretchable and curved electronics	90
SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications	89
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	87
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	85
Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators	81
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	74
Critical aspects of droplet digital reverse transcription loop-mediated isothermal amplification (ddRT-LAMP) for viral pathogens detection	72
Stable manipulating objects with unknown surface morphology via integration of magnetic artificial muscle and adhesive structures	70
Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	69
C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	68
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	67

Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	66
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	65
Ultra-resolution scalable microprinting	64
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	64
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	62
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	60
Stretchable and anti-impact iontronic pressure sensor with an ultrabroad linear range for biophysical monitoring and deep learning-aided knee rehabilitation	59
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	59
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	57
Effects of nanopillars and surface coating on dynamic traction force	56
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	56
Highly integrated watch for noninvasive continual glucose monitoring	56
Microengineered platforms for characterizing the contractile function of in vitro cardiac models	56
Infectious disease diagnostic device using rapid and efficient qPCR assays on a multi-target chip: idream-qPCR	55
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method	55
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	54
An ultra-stable MEMS resonator with ±14 ppb frequency stability realized by nonlinearity-mediated drift suppression	53
Freestanding region-responsive bilayer for functional packaging of ingestible devices	53
High-performance flexible organic field effect transistors with print-based nanowires	51
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	51
Removal of the rate table: MEMS gyrocompass with virtual maytagging	49
Micro/nanofabrication of heat management materials for energy-efficient building facades	48
6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes	48
Simultaneous photocatalytic degradation and SERS detection of tetracycline with self-sustainable and recyclable ternary PI/TiO2/Ag flexible microfibers	47
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	46
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	45
Self-template manufacturing of on-skin electrodes with 3D multi-channel structure for standard 3-limb-lead ECG suit	45
Graphene MEMS and NEMS	45
Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes	44
Advanced tools and methods for single-cell surgery	44
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	44
A contamination-free and low-leakage-current Cu-TSV technology enabled by engineered double-sided processing	44
Nanoimprint-induced strain engineering of two-dimensional materials	43
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	43
Nucleic acid amplification tests in digital microfluidics: the promise of next-generation point-of-care diagnostics	42
0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method	41
3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control	41
3D nanoprinting of embryo microinjection needles with anti-clogging features	41
Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion	40
Modeling gut neuro-epithelial connections in a novel microfluidic device	40
Low-cost optical sensors in electrified lab-on-a-disc platforms: liquid-phase boundary detection and automated diagnostics	40
Patterning silver nanowire network via the Gibbs–Thomson effect	39
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	39
Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements	39
A C-shaped hinge for displacement magnification in MEMS rotational structures	38
Metamaterial-enhanced near-field readout platform for passive microsensor tags	38
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	37
Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors	37
Fully automated in vivo screening system for multi-organ imaging and pharmaceutical evaluation	37
An interconnect-free micro-electromechanical 7-bit arithmetic device for multi-operand programmable computing	36

Micro 3D printing of a functional MEMS accelerometer	36
A local de-insulation method and its application in neural microneedle array	35
Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle	35
A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery	35
Integrated silicon photonic MEMS	35
Polymer interdigitated pillar electrostatic (PIPE) actuators	35
Thin-film PMUTs: a review of over 40 years of research	35
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	33
Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy	33
Ultra-low-crosstalk silicon switches driven thermally and electrically	32
Wearable multichannel pulse condition monitoring system based on flexible pressure sensor arrays	31
Nanoscale plasma-activated aerosol generation for in situ surface pathogen disinfection	31
Ionic liquid multistate resistive switching characteristics in two terminal soft and flexible discrete channels for neuromorphic computing	31
The development of microfabricated solenoids with magnetic cores for micromagnetic neural stimulation	31
SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators	31
Recent advances in microsystem approaches for mechanical characterization of soft biological tissues	31
Highly conformable chip-in-foil implants for neural applications	30
An ultrafast-response and flexible humidity sensor for human respiration monitoring and noncontact safety warning	30
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	30
Very-high-frequency probes for atomic force microscopy with silicon optomechanics	30
Power-free plasma separation based on negative magnetophoresis for rapid biochemical analysis	30
Sustainability inspired fabrication of next generation neurostimulation and cardiac rhythm management electrodes via reactive hierarchical surface restructuring	30
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator	30
Microfluidic QCM enables ultrahigh Q-factor: a new paradigm for in-liquid gravimetric sensing	30
Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity	30
Portable visual and electrochemical detection of hydrogen peroxide release from living cells based on dual-functional Pt-Ni hydrogels	29
Optimizing MEMS inertial switches for efficient event-based environmental interaction: motivation, approaches, and purposes	29
High-throughput and simultaneous inertial separation of tumor cells and clusters from malignant effusions using spiral-contraction-expansion channels	29
Length-based separation of Bacillus subtilis bacterial populations by viscoelastic microfluidics	28
Integrated microdevice with a windmill-like hole array for the clog-free, efficient, and self-mixing enrichment of circulating tumor cells	28
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator	28
Optofluidic paper-based analytical device for discriminative detection of organic substances via digital color coding	28
Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system	28
The FTR dual-loop architecture based on SID–NLMS can achieve a threshold of 0.0001°/s and an ARW of 0.006°/√h for MEMS QMG	28
Revolutionary self-powered transducing mechanism for long-lasting and stable glucose monitoring: achieving selective and sensitive bacterial endospore germination in microengineered paper-based platfo	28
A stretchable frequency reconfigurable antenna controlled by compressive buckling for W-band applications	28
High-precision transdermal drug delivery enabled by a dual-pump parallel valveless piezoelectric micropump integrated with hollow microneedles	28
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	27
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	27
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	27
On the design and fabrication of nanoliter-volume hanging drop networks	27
Fabrication of crystalline submicro-to-nano carbon wire for achieving high current density and ultrastable current	27
Nanojet visualization and dark-field imaging of optically trapped vaterite capsules with endoscopic illumination	26
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	26
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	26
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	26
A high selectivity and low detection limit carbon monoxide sensor based on Au-GO/Co-ZnO composite material	26
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	25
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	25
Multi-sized microelectrode array coupled with micro-electroporation for effective recording of intracellular action potential	25
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	25
Four ribbons of double-layer graphene suspending masses for NEMS applications	24
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	24
Cellular shape micromachined actuator ribbons	24
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	24
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	24
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	24
A skin-integrated device for neck posture monitoring and correction	24
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	24
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	23
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	23
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	23
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	23
Vapor-induced porosity in graphene/PDMS: a scalable route to high-performance pressure sensors	23
Stretchable multifunctional wearable system for real-time and on-demand thermotherapy of arthritis	23
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	23
An implantable, wireless, battery-free system for tactile pressure sensing	22
Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging	22
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	22
III-Nitride MEMS drum resonators on flexible metal substrates	22
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	22
Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process	21
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	21
Enhancing the rectification effect of hydrogel-based stretchable ionic diodes through incorporating cations with high valence	21
Mechanical memory operations in piezotransistive GaN microcantilevers using Au nanoparticle-enhanced photoacoustic excitation	21
Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration	21
Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy	20
A tip-tilt-piston electrothermal micromirror array with integrated position sensors	20
Nanocomposite biosensor tracks honokiol-induced oxidative stress dynamics in 3D hydrogel-cultured lung cancer cells	20
Correction: Development of a highly controlled system for large-area, directional printing of quasi-1D nanomaterials	20

Microdissection tools to generate organoids for modeling the tumor immune microenvironment	20
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	20
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	20
Elasto-inertial focusing and particle migration in high aspect ratio microchannels for high-throughput separation	20
A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator	19
High-precision neural information detection of multiple brain regions in mice under different concentrations of isoflurane anesthesia based on microelectrode arrays	19
Exceptional points enhance sensing in silicon micromechanical resonators	19
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor	19
Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes	19
Integrated microfluidic single-cell immunoblotting chip enables high-throughput isolation, enrichment and direct protein analysis of circulating tumor cells	19
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	19
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	19
Single-cell sorting based on secreted products for functionally defined cell therapies	19
Fluid drawing printing 3D conductive structures for flexible circuit manufacturing	19
A force measurement platform for a vitreoretinal surgical simulator using an artificial eye module integrated with a quartz crystal resonator	18
Deep learning for non-parameterized MEMS structural design	18
A handheld HIV detection platform using paper-based sample preparation and real-time isothermal amplification	18
Pico-washing: simultaneous liquid addition and removal for continuous-flow washing of microdroplets	18
A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors	18
Laser-upgraded coal tar for smart pavements in road and bridge monitoring applications	18
Designing magnetic microcapsules for cultivation and differentiation of stem cell spheroids	18
A nanonewton-scale biomimetic mechanosensor	18
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	17
Plasmonic–perovskite solar cells, light emitters, and sensors	17
MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring	17
Recent advances in bio-microsystem integration and Lab-on-PCB technology	17
Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation	17
Direct electrification of silicon microfluidics for electric field applications	17
Ultra-compact dual-channel integrated CO2 infrared gas sensor	17
Fabrication and modulation of flexible electromagnetic metamaterials	17
Electrospun carbon nanofibre-assisted patterning of metal oxide nanostructures	17
Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices	17
5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications	17
Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing	17
A bioinspired bubble removal method in microchannels based on angiosperm xylem embolism repair	16
Mechanically robust and self-cleanable encapsulated metalens via spin-on-glass packaging	16
Toolkit for integrating millimeter-sized microfluidic biomedical devices with multiple membranes and electrodes	16
Aerosol jet printing of surface acoustic wave microfluidic devices	16
Correction: Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration	16
Fast frequency relocking for synchronization enhanced resonant accelerometer	16
Dual-signal readout paper-based wearable biosensor with a 3D origami structure for multiplexed analyte detection in sweat	16
Component library creation and pixel array generation with micromilled droplet microfluidics	16
Widely accessible method for 3D microflow mapping at high spatial and temporal resolutions	16
A microgripper based on electrothermal Al–SiO2 bimorphs	16
Diffusion-free valve for preprogrammed immunoassay with capillary microfluidics	16
Triboelectric nanogenerator based on silane-coupled LTA/PDMS for physiological monitoring and biomechanical energy harvesting	16
Dual-functional Cu2O/g-C3N4 heterojunctions: a high-performance SERS sensor and photocatalytic self-cleaning system for water pollution detection and remediation	16
Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor	16
Thermal property evaluation of a 2.5D integration method with device level microchannel direct cooling for a high-power GaN HEMT device	15
Stable diffusion gradients in microfluidic conduits bounded by fluid walls	15
Scalable and automated CRISPR-based strain engineering using droplet microfluidics	15
A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm	15
One-step generation of luminescent core-shell microspheres for cell encapsulation via pulsed operation in centrifugal microfluidics	15
An integrated microfluidic platform for nucleic acid testing	15
Sperm quality metrics were improved by a biomimetic microfluidic selection platform compared to swim-up methods	15
A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors	15
A nonlinear stiffness softening mechanism for low-bias, high-sensitivity MEMS accelerometers with extended dynamic range	15
Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators	15
Nonvolatile chirality switching in terahertz chalcogenide metasurfaces	15
A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator	15
Chip-scale optical airflow sensor	15
An enhanced-performance multisensing progressive cellular μGC: design advances and blind test results	15
An in vitro demonstration of a passive, acoustic metamaterial as a temperature sensor with mK resolution for implantable applications	15
Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout	15
A passive wireless surface acoustic wave (SAW) sensor system for detecting warfare agents based on fluoroalcohol polysiloxane film	15
Unraveling the nature of sensing in electrostatic MEMS gas sensors	14
Harnessing exceptional points for ultrahigh sensitive acoustic wave sensing	14
A tactile and airflow motion sensor based on flexible double-layer magnetic cilia	14
Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping	14
An underwater vest containing an antioxidant MXene hydrogel for sensitive recognition of fish locomotion	14
Engineering in vitro vascular microsystems	14
Evaluating the efficacy and cardiotoxicity of EGFR-TKI AC0010 with a novel multifunctional biosensor	14
Switch mode capacitive pressure sensors	14
Manipulation of single cells via a Stereo Acoustic Streaming Tunnel (SteAST)	14
Tight focusing of fractional-order topological charge vector beams by cascading metamaterials and metalens	14
DropLab: an automated magnetic digital microfluidic platform for sample-to-answer point-of-care testing—development and application to quantitative immunodiagnostics	14
Combining time domain modulation optofluidics and high dynamic range imaging for multiplexed, high throughput digital droplet assays	14
Predicting flows through microfluidic circuits with fluid walls	13
A flexible protruding microelectrode array for neural interfacing in bioelectronic medicine	13
Double-antibody-based nano-biosensing system for the onsite monitoring of SARS-CoV-2 variants	13
A comparative review of artificial muscles for microsystem applications	13
Monolithic integrated optoelectronic chip for vector force detection	13
A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes	13
Portable dielectrophoresis for biology: ADEPT facilitates cell trapping, separation, and interactions	13
High-density, high-frequency and large-scale electrohydrodynamic drop-on-demand jetting via a protruding polymer-based printhead design	13
Recent advances and research progress on microsystems and bioeffects of terahertz neuromodulation	13
Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes	13
Visualizing hypoxic modulation of beta cell secretions via a sensor augmented oxygen gradient	13
Electrostatic generator enhancements for powering IoT nodes via efficient energy management	13
3D-assembled microneedle ion sensor-based wearable system for the transdermal monitoring of physiological ion fluctuations	13
A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach	12
Application of pulse width modulation control in EHD waveform to optimize printing performance	12
A force-compensated compliant MEMS-amplifier with electrostatic anti-springs	12
Virtually coupled resonators with modal dominance for improved sensitivity and bandwidth	12
Origami-inspired reprogrammable microactuator system	12