Microsystems & Nanoengineering

Article	Citations
A magnetically enabled simulation of microgravity represses the auxin response during early seed germination on a microfluidic platform	401
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	196
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	128
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	121
SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications	116
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	112
PEDOT:PSS-based bioelectronics for brain monitoring and modulation	108
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	96
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	95
Spatiotemporal dynamics of nanowire growth in a microfluidic reactor	94
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	90
Ultra-small millimeter-wave filter chips based on high-K single-crystal lithium niobate	88
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	85
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	83
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	83
Vertical serpentine interconnect-enabled stretchable and curved electronics	78
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	74
A programmable magnetic digital microfluidic platform integrated with electrochemical detection system	73
Ultra-resolution scalable microprinting	71
A robust lateral shift free (LSF) electrothermal micromirror with flexible multimorph beams	69
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	69
Nonlinear restructuring of patterned thin films by residual stress engineering into out-of-plane wavy-shaped electrostatic microactuators for high-performance radio-frequency switches	66
Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams	65
Microengineered platforms for characterizing the contractile function of in vitro cardiac models	65
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	63

Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators	63
Effects of nanopillars and surface coating on dynamic traction force	62
Modular micro-PCR system for the onsite rapid diagnosis of COVID-19	61
Critical aspects of droplet digital reverse transcription loop-mediated isothermal amplification (ddRT-LAMP) for viral pathogens detection	60
Stretchable and anti-impact iontronic pressure sensor with an ultrabroad linear range for biophysical monitoring and deep learning-aided knee rehabilitation	59
Highly integrated watch for noninvasive continual glucose monitoring	58
C-MEMS-derived glassy carbon electrochemical biosensors for rapid detection of SARS-CoV-2 spike protein	56
Experimental measurement and numerical modeling of deformation behavior of breast cancer cells passing through constricted microfluidic channels	56
Beyond fundamental resonance mode: high-order multi-band ALN PMUT for in vivo photoacoustic imaging	54
A new method of continuous blood pressure monitoring using multichannel sensing signals on the wrist	54
A tip-coupled, two-cantilever, non-resonant microsystem for direct measurement of liquid viscosity	53
Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method	52
Correction to: Low limit of detection of the AlGaN/GaN-based sensor by the Kelvin connection detection technique	52
A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors	52
Advanced tools and methods for single-cell surgery	51
High-performance flexible organic field effect transistors with print-based nanowires	51
6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes	51
Microfabrication of functional polyimide films and microstructures for flexible MEMS applications	50
Micro/nanofabrication of heat management materials for energy-efficient building facades	49
State-of-the-art micro- and nano-scale photonics research in Asia: devices, fabrication, manufacturing, and applications	48
Root-inspired, template-confined additive printing for fabricating high-robust conformal electronics	48
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration	47
Infectious disease diagnostic device using rapid and efficient qPCR assays on a multi-target chip: idream-qPCR	46
Freestanding region-responsive bilayer for functional packaging of ingestible devices	46
Removal of the rate table: MEMS gyrocompass with virtual maytagging	45
Microfluidic magnetic detection system combined with a DNA framework-mediated immune-sandwich assay for rapid and sensitive detection of tumor-derived exosomes	45
Self-template manufacturing of on-skin electrodes with 3D multi-channel structure for standard 3-limb-lead ECG suit	44
Nanoimprint-induced strain engineering of two-dimensional materials	43
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement	43
Simultaneous photocatalytic degradation and SERS detection of tetracycline with self-sustainable and recyclable ternary PI/TiO2/Ag flexible microfibers	41
Graphene MEMS and NEMS	41
Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates	41
3D printable and myoelectrically sensitive hydrogel for smart prosthetic hand control	40
Iontophoresis-driven microneedle patch for the active transdermal delivery of vaccine macromolecules	39
Nanofabricated high turn-density spiral coils for on-chip electromagneto-optical conversion	39
Patterning silver nanowire network via the Gibbs–Thomson effect	39
Low-cost optical sensors in electrified lab-on-a-disc platforms: liquid-phase boundary detection and automated diagnostics	39
Fully automated in vivo screening system for multi-organ imaging and pharmaceutical evaluation	38
Modeling gut neuro-epithelial connections in a novel microfluidic device	38
Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements	38
Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments	37
A C-shaped hinge for displacement magnification in MEMS rotational structures	37
Metamaterial-enhanced near-field readout platform for passive microsensor tags	37
Polymer interdigitated pillar electrostatic (PIPE) actuators	37
A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model	36
Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors	36
The development of microfabricated solenoids with magnetic cores for micromagnetic neural stimulation	36
Ultra-low-crosstalk silicon switches driven thermally and electrically	36
Nanoscale plasma-activated aerosol generation for in situ surface pathogen disinfection	36
An interconnect-free micro-electromechanical 7-bit arithmetic device for multi-operand programmable computing	35

Micro 3D printing of a functional MEMS accelerometer	35
Study on polishing mechanisms of BEOL metal interconnects based on chemical and mechanical synergy	35
A local de-insulation method and its application in neural microneedle array	34
Ionic liquid multistate resistive switching characteristics in two terminal soft and flexible discrete channels for neuromorphic computing	33
Integrated silicon photonic MEMS	32
Wireless, battery-free, and fully implantable electrical neurostimulation in freely moving rodents	32
Wearable multichannel pulse condition monitoring system based on flexible pressure sensor arrays	31
Thin-film PMUTs: a review of over 40 years of research	31
A piezoresistive-based 3-axial MEMS tactile sensor and integrated surgical forceps for gastrointestinal endoscopic minimally invasive surgery	31
Power-free plasma separation based on negative magnetophoresis for rapid biochemical analysis	30
Revolutionary self-powered transducing mechanism for long-lasting and stable glucose monitoring: achieving selective and sensitive bacterial endospore germination in microengineered paper-based platfo	30
Recent advances in microsystem approaches for mechanical characterization of soft biological tissues	30
Flexible wide-range multidimensional force sensors inspired by bones embedded in muscle	30
Highly conformable chip-in-foil implants for neural applications	29
Very-high-frequency probes for atomic force microscopy with silicon optomechanics	29
Integrated microdevice with a windmill-like hole array for the clog-free, efficient, and self-mixing enrichment of circulating tumor cells	29
Microfluidic QCM enables ultrahigh Q-factor: a new paradigm for in-liquid gravimetric sensing	28
Sustainability inspired fabrication of next generation neurostimulation and cardiac rhythm management electrodes via reactive hierarchical surface restructuring	28
Optofluidic paper-based analytical device for discriminative detection of organic substances via digital color coding	28
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator	28
Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity	28
Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator	28
Portable visual and electrochemical detection of hydrogen peroxide release from living cells based on dual-functional Pt-Ni hydrogels	27
Integration of multiple flexible electrodes for real-time detection of barrier formation with spatial resolution in a gut-on-chip system	27
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	27
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies	27
A stretchable frequency reconfigurable antenna controlled by compressive buckling for W-band applications	27
An ultrafast-response and flexible humidity sensor for human respiration monitoring and noncontact safety warning	27
Multimodal MEMS vibration energy harvester with cascaded flexible and silicon beams for ultralow frequency response	27
High-throughput and simultaneous inertial separation of tumor cells and clusters from malignant effusions using spiral-contraction-expansion channels	27
Length-based separation of Bacillus subtilis bacterial populations by viscoelastic microfluidics	27
On the design and fabrication of nanoliter-volume hanging drop networks	27
Fabrication of crystalline submicro-to-nano carbon wire for achieving high current density and ultrastable current	26
Nanojet visualization and dark-field imaging of optically trapped vaterite capsules with endoscopic illumination	25
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	25
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	25
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	25
Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	24
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	24
Optimization of the fused deposition modeling-based fabrication process for polylactic acid microneedles	24
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	24
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	24
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	24
Multi-sized microelectrode array coupled with micro-electroporation for effective recording of intracellular action potential	24
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	24
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	23
Four ribbons of double-layer graphene suspending masses for NEMS applications	23
Stretchable multifunctional wearable system for real-time and on-demand thermotherapy of arthritis	23
A skin-integrated device for neck posture monitoring and correction	23
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	23
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	23
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	23
Cellular shape micromachined actuator ribbons	23
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	22
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	22
Enhancing the rectification effect of hydrogel-based stretchable ionic diodes through incorporating cations with high valence	22
Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation	22
Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators	22
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	22
A double-layered liquid metal-based electrochemical sensing system on fabric as a wearable detector for glucose in sweat	22
Nanomaterials in PCR: exploring light-to-heat conversion mechanisms and microfluidic integration	22
A tip-tilt-piston electrothermal micromirror array with integrated position sensors	21
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	21
An implantable, wireless, battery-free system for tactile pressure sensing	21
Mechanical memory operations in piezotransistive GaN microcantilevers using Au nanoparticle-enhanced photoacoustic excitation	21
Internal flow in sessile droplets induced by substrate oscillation: towards enhanced mixing and mass transfer in microfluidic systems	21
Dynamic tuning of terahertz atomic lattice vibration via cross-scale mode coupling to nanomechanical resonance in WSe2 membranes	20
High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate	20
Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells	20
Fluid drawing printing 3D conductive structures for flexible circuit manufacturing	20
Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process	20
Elasto-inertial focusing and particle migration in high aspect ratio microchannels for high-throughput separation	20
Correction: Development of a highly controlled system for large-area, directional printing of quasi-1D nanomaterials	20
Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy	19
Single-cell sorting based on secreted products for functionally defined cell therapies	19
Microdissection tools to generate organoids for modeling the tumor immune microenvironment	19
Exceptional points enhance sensing in silicon micromechanical resonators	19
High-precision neural information detection of multiple brain regions in mice under different concentrations of isoflurane anesthesia based on microelectrode arrays	19
Wireless ultrasonic power transfer using a pre-charged CMUT structure with a built-in charge storage capacitor	19
Integrated microfluidic single-cell immunoblotting chip enables high-throughput isolation, enrichment and direct protein analysis of circulating tumor cells	19

A microsystem for in vivo wireless monitoring of plastic biliary stents using magnetoelastic sensors	19
piRT-IFC: Physics-informed real-time impedance flow cytometry for the characterization of cellular intrinsic electrical properties	19
A near-zero quiescent power breeze wake-up anemometer based on a rolling-bearing triboelectric nanogenerator	19
Self-sensing intelligent microrobots for noninvasive and wireless monitoring systems	19
Widely accessible method for 3D microflow mapping at high spatial and temporal resolutions	19
Designing magnetic microcapsules for cultivation and differentiation of stem cell spheroids	18
Recent advances in bio-microsystem integration and Lab-on-PCB technology	18
A nanonewton-scale biomimetic mechanosensor	18
Fabrication and modulation of flexible electromagnetic metamaterials	18
Laser-upgraded coal tar for smart pavements in road and bridge monitoring applications	18
MRI and CT compatible asymmetric bilayer hydrogel electrodes for EEG-based brain activity monitoring	18
Pico-washing: simultaneous liquid addition and removal for continuous-flow washing of microdroplets	18
Plasmonic–perovskite solar cells, light emitters, and sensors	18
Direct electrification of silicon microfluidics for electric field applications	17
A force measurement platform for a vitreoretinal surgical simulator using an artificial eye module integrated with a quartz crystal resonator	17
Twisted fiber microfluidics: a cutting-edge approach to 3D spiral devices	17
Ultra-compact dual-channel integrated CO2 infrared gas sensor	17
Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation	16
Deep learning for non-parameterized MEMS structural design	16
Hydrogel electrodes with conductive and substrate-adhesive layers for noninvasive long-term EEG acquisition	16
A handheld HIV detection platform using paper-based sample preparation and real-time isothermal amplification	16
Electrospun carbon nanofibre-assisted patterning of metal oxide nanostructures	16
Atomic Nb-doping of WS2 for high-performance synaptic transistors in neuromorphic computing	16
5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications	16
Dual-functional Cu2O/g-C3N4 heterojunctions: a high-performance SERS sensor and photocatalytic self-cleaning system for water pollution detection and remediation	15
Diffusion-free valve for preprogrammed immunoassay with capillary microfluidics	15
Triboelectric nanogenerator based on silane-coupled LTA/PDMS for physiological monitoring and biomechanical energy harvesting	15
A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors	15
Correction: Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration	15
Multimodal response characteristics of convective liquid metal sensitive layers in flexible pressure sensor	15
Toolkit for integrating millimeter-sized microfluidic biomedical devices with multiple membranes and electrodes	15
A microgripper based on electrothermal Al–SiO2 bimorphs	15
Aerosol jet printing of surface acoustic wave microfluidic devices	15
Dual-signal readout paper-based wearable biosensor with a 3D origami structure for multiplexed analyte detection in sweat	15
Tight focusing of fractional-order topological charge vector beams by cascading metamaterials and metalens	15
Mechanically robust and self-cleanable encapsulated metalens via spin-on-glass packaging	15
Component library creation and pixel array generation with micromilled droplet microfluidics	15
Thermal property evaluation of a 2.5D integration method with device level microchannel direct cooling for a high-power GaN HEMT device	15
Fast frequency relocking for synchronization enhanced resonant accelerometer	15
A bioinspired bubble removal method in microchannels based on angiosperm xylem embolism repair	15
Stable diffusion gradients in microfluidic conduits bounded by fluid walls	15
Sperm quality metrics were improved by a biomimetic microfluidic selection platform compared to swim-up methods	15
Chip-scale optical airflow sensor	15
A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator	15
0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection	14
Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators	14
An underwater vest containing an antioxidant MXene hydrogel for sensitive recognition of fish locomotion	14
Evaluating the efficacy and cardiotoxicity of EGFR-TKI AC0010 with a novel multifunctional biosensor	14
Switch mode capacitive pressure sensors	14
Unraveling the nature of sensing in electrostatic MEMS gas sensors	14
An in vitro demonstration of a passive, acoustic metamaterial as a temperature sensor with mK resolution for implantable applications	14
A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm	14
Uncooled, broadband terahertz bolometers using SOI MEMS beam resonators with piezoresistive readout	14
An enhanced-performance multisensing progressive cellular μGC: design advances and blind test results	14
Nonvolatile chirality switching in terahertz chalcogenide metasurfaces	13
A tactile and airflow motion sensor based on flexible double-layer magnetic cilia	13
Combining time domain modulation optofluidics and high dynamic range imaging for multiplexed, high throughput digital droplet assays	13
A one-step, tunable method of selective reactive sputter deposition as a wrinkling approach for silver/polydimethylsiloxane for electrically conductive pliable surfaces	13
Multiple virus sorting based on aptamer-modified microspheres in a TSAW device	13
A passive wireless surface acoustic wave (SAW) sensor system for detecting warfare agents based on fluoroalcohol polysiloxane film	13
Manipulation of single cells via a Stereo Acoustic Streaming Tunnel (SteAST)	13
An integrated microfluidic platform for nucleic acid testing	13
DropLab: an automated magnetic digital microfluidic platform for sample-to-answer point-of-care testing—development and application to quantitative immunodiagnostics	13
Recent advances and research progress on microsystems and bioeffects of terahertz neuromodulation	13
Monolithic integration of nanorod arrays on microfluidic chips for fast and sensitive one-step immunoassays	13
Direct extraction of respiratory information from pulse waves using a finger-inspired flexible pressure sensor system	13
Harnessing exceptional points for ultrahigh sensitive acoustic wave sensing	13
High-resolution two-photon polymerization: the most versatile technique for the fabrication of microneedle arrays	13
Engineering in vitro vascular microsystems	13
High-density, high-frequency and large-scale electrohydrodynamic drop-on-demand jetting via a protruding polymer-based printhead design	13
A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes	13
Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes	13
Scalable and automated CRISPR-based strain engineering using droplet microfluidics	13
A flexible protruding microelectrode array for neural interfacing in bioelectronic medicine	12
Portable dielectrophoresis for biology: ADEPT facilitates cell trapping, separation, and interactions	12
Visualizing hypoxic modulation of beta cell secretions via a sensor augmented oxygen gradient	12
Electrochemical protein biosensors for disease marker detection: progress and opportunities	12
Virtually coupled resonators with modal dominance for improved sensitivity and bandwidth	12
Double-antibody-based nano-biosensing system for the onsite monitoring of SARS-CoV-2 variants	12
3D-assembled microneedle ion sensor-based wearable system for the transdermal monitoring of physiological ion fluctuations	12
Electrostatic generator enhancements for powering IoT nodes via efficient energy management	12
A force-compensated compliant MEMS-amplifier with electrostatic anti-springs	12
Through-polymer, via technology-enabled, flexible, lightweight, and integrated devices for implantable neural probes	12
Monolithic integrated optoelectronic chip for vector force detection	12
A comparative review of artificial muscles for microsystem applications	12
Predicting flows through microfluidic circuits with fluid walls	12
Recent progress in three-terminal artificial synapses based on 2D materials: from mechanisms to applications	12
Ultra-sensitive micro thermoelectric device for energy harvesting and ultra-low airflow detection	12
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications	12
Accurate modulation of photoprinting under stiffness imaging feedback for engineering ECMs with high-fidelity mechanical properties	11
Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies	11
Thermo-optical tweezers based on photothermal waveguides	11
High-yield and rapid isolation of extracellular vesicles by flocculation via orbital acoustic trapping: FLOAT	11
Nanomechanical hydrodynamic force sensing using suspended microfluidic channels	11
Intelligent single-cell manipulation: LLMs- and object detection-enhanced active-matrix digital microfluidics	11