Microsystems & Nanoengineering

Article	Citations
Controllable tip exposure of ultramicroelectrodes coated by diamond-like carbon via direct microplasma jet for enhanced stability and fidelity in single-cell recording	319
Ultra-sensitive fluorescence-activated droplet single-cell sorting based on Tetramer-HCR-EvaGreen amplification	175
Transparent, flexible graphene–ITO-based neural microelectrodes for simultaneous electrophysiology recording and calcium imaging of intracortical neural activity in freely moving mice	165
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications	148
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity	115
Paper battery powered iontophoresis microneedles patch for hypertrophic scar treatment	106
Mechanically resilient, alumina-reinforced carbon nanotube arrays for in-plane shock absorption in micromechanical devices	100
Smart mid-infrared metasurface microspectrometer gas sensing system	98
Visualizing hypoxic modulation of beta cell secretions via a sensor augmented oxygen gradient	92
Gas-assisted microfluidic step-emulsification for generating micron- and submicron-sized droplets	85
Dynamic response of the cell traction force to osmotic shock	78
Enhancing single-cell encapsulation in droplet microfluidics with fine-tunable on-chip sample enrichment	76
A skin-integrated device for neck posture monitoring and correction	71
Monolithic integrated optoelectronic chip for vector force detection	70
An acoustofluidic device for the automated separation of platelet-reduced plasma from whole blood	68
High temperature heat flux sensor with ITO/In2O3 thermopile for extreme environment sensing	65
Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT	62
Numerical investigation of the dynamics of a rigid spherical particle in a vortical cross-slot flow at moderate inertia	57
A Drosophila-inspired intelligent olfactory biomimetic sensing system for gas recognition in complex environments	57
Electromechanically reconfigurable plasmonic photodetector with a distinct shift in resonant wavelength	56
Fiber optics-based surface enhanced Raman Spectroscopy sensors for rapid multiplex detection of foodborne pathogens in raw poultry	56
Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches	56
Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator	55
Fully tunable Fabry-Pérot cavity based on MEMS Sagnac loop reflector with ultra-low static power consumption	55
Multiple virus sorting based on aptamer-modified microspheres in a TSAW device	54

On the design and fabrication of nanoliter-volume hanging drop networks	54
Artificial-intelligence-assisted mass fabrication of nanocantilevers from randomly positioned single carbon nanotubes	54
Correction: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones	52
MEMS reservoir computing system with stiffness modulation for multi-scene data processing at the edge	52
Magnetically actuated glaucoma drainage device for regulating intraocular pressure after implantation	51
MXene-based all-solid flexible electrochromic microsupercapacitor	51
Constructing origami power generator from one piece of electret thin film and application in AI-enabled transmission line vibration monitoring	51
Avoiding transduction-induced heating in suspended microchannel resonators using piezoelectricity	48
Overcoming thermo-optical dynamics in broadband nanophotonic sensing	48
On-demand zero-drag hydrodynamic cloaks resolve D'Alembert paradox in viscous potential flows	48
A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite material	47
Nonlinear coupling of closely spaced modes in atomically thin MoS2 nanoelectromechanical resonators	47
Optically levitated micro gyroscopes with an MHz rotational vaterite rotor	46
Correction: A spiral microfluidic device for rapid sorting, trapping, and long-term live imaging of Caenorhabditis elegans embryos	45
Hydrodynamic function and spring constant calibration of FluidFM micropipette cantilevers	44
Correction of thermal airflow distortion in warpage measurements of microelectronic packaging structures via deep learning-based digital image correlation	43
A 14 μHz/√Hz resolution and 32 μHz bias instability MEMS quartz resonant accelerometer with a low-noise oscillating readout circuit	43
Portable dielectrophoresis for biology: ADEPT facilitates cell trapping, separation, and interactions	43
Monolithic integration of nanorod arrays on microfluidic chips for fast and sensitive one-step immunoassays	42
Zero-power infrared switch with two-phase microfluidic flow and a 2D material thermal isolation layer	42
Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications	42
Exploiting rotational asymmetry for sub-50 nm mechanical nanocalligraphy	41
Soft and flexible: core-shell ionic liquid resistive memory for electronic synapses	41
Spatiotemporal dynamics of nanowire growth in a microfluidic reactor	41
A magnetically enabled simulation of microgravity represses the auxin response during early seed germination on a microfluidic platform	40
Development of single-cell-level microfluidic technology for long-term growth visualization of living cultures of Mycobacterium smegmatis	39
Hydrodynamic metasurface for programming electromagnetic beam scanning on the Azimuth and elevation planes	39
A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes	39
Magnetic force microscopy of an operational spin nano-oscillator	38
A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels	38
Measurement of oxygen consumption rates of human renal proximal tubule cells in an array of organ-on-chip devices to monitor drug-induced metabolic shifts	37
Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices	37
MyCTC chip: microfluidic-based drug screen with patient-derived tumour cells from liquid biopsies	35
A customizable, low-power, wireless, embedded sensing platform for resistive nanoscale sensors	34
A flexible protruding microelectrode array for neural interfacing in bioelectronic medicine	34
Recent advances and research progress on microsystems and bioeffects of terahertz neuromodulation	34
Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids	34
A monolithically integrated microcantilever biosensor based on partially depleted SOI CMOS technology	33
DNA tetrahedron-mediated immune-sandwich assay for rapid and sensitive detection of PSA through a microfluidic electrochemical detection system	33
Ultra-sensitive nitrate-ion detection via transconductance-enhanced graphene ion-sensitive field-effect transistors	33
Small-size temperature/high-pressure integrated sensor via flip-chip method	33
Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis	33
A biosensing system employing nanowell microelectrode arrays to record the intracellular potential of a single cardiomyocyte	33
High-density, high-frequency and large-scale electrohydrodynamic drop-on-demand jetting via a protruding polymer-based printhead design	33
Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration	31
MEMS development focusing on collaboration using common facilities: a retrospective view and future directions	30
A two-stage amplified PZT sensor for monitoring lung and heart sounds in discharged pneumonia patients	30
Wearable multichannel-active pressurized pulse sensing platform	30
Fabrication of crystalline submicro-to-nano carbon wire for achieving high current density and ultrastable current	28
High-performance broadband flexible photodetector based on Gd3Fe5O12-assisted double van der Waals heterojunctions	28

Digital light processing 3D printing of flexible devices: actuators, sensors and energy devices	28
Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties	28
Self-synchronization of reinjected droplets for high-efficiency droplet pairing and merging	27
Computer vision meets microfluidics: a label-free method for high-throughput cell analysis	27
UV-LED projection photolithography for high-resolution functional photonic components	27
Double-antibody-based nano-biosensing system for the onsite monitoring of SARS-CoV-2 variants	26
Molecularly imprinted fluorescence sensor chip for lactate measurement	26
Electrostatic generator enhancements for powering IoT nodes via efficient energy management	26
A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications	26
A wearable, rapidly manufacturable, stability-enhancing microneedle patch for closed-loop diabetes management	26
A one-step, tunable method of selective reactive sputter deposition as a wrinkling approach for silver/polydimethylsiloxane for electrically conductive pliable surfaces	26
Shape-position perceptive fusion electronic skin with autonomous learning for gesture interaction	25
Scalable batch fabrication of ultrathin flexible neural probes using a bioresorbable silk layer	25
Multiplexed detection of respiratory pathogens with a portable analyzer in a “raw-sample-in and answer-out” manner	25
Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements	25
U-IMPACT: a universal 3D microfluidic cell culture platform	25
Acoustofluidics for simultaneous nanoparticle-based drug loading and exosome encapsulation	24
3D-assembled microneedle ion sensor-based wearable system for the transdermal monitoring of physiological ion fluctuations	24
Vertical serpentine interconnect-enabled stretchable and curved electronics	24
Predicting flows through microfluidic circuits with fluid walls	24
Gut-on-a-chip for exploring the transport mechanism of Hg(II)	24
Raindrop energy-powered autonomous wireless hyetometer based on liquid–solid contact electrification	24
Progress of shrink polymer micro- and nanomanufacturing	24
Assembly of multicomponent structures from hundreds of micron-scale building blocks using optical tweezers	23
Multifocal skull-compensated transcranial focused ultrasound system for neuromodulation applications based on acoustic holography	23
Artificial intelligence-enabled multipurpose smart detection in active-matrix electrowetting-on-dielectric digital microfluidics	23
Noninvasive fluid bubble detection based on capacitive micromachined ultrasonic transducers	23
Flux focusing with a superconducting nanoneedle for scanning SQUID susceptometry	22
A laser-engraved wearable gait recognition sensor system for exoskeleton robots	22
3D printed energy devices: generation, conversion, and storage	22
Electrochemical protein biosensors for disease marker detection: progress and opportunities	22
Optimization of the fused deposition modeling-based fabrication process for polylactic acid microneedles	22
Thermally-curable nanocomposite printing for the scalable manufacturing of dielectric metasurfaces	22
Four ribbons of double-layer graphene suspending masses for NEMS applications	21
Recent progress in three-terminal artificial synapses based on 2D materials: from mechanisms to applications	21
Boron nitride-enabled printing of a highly sensitive and flexible iontronic pressure sensing system for spatial mapping	21
Bone-inspired (GNEC/HAPAAm) hydrogel with fatigue-resistance for use in underwater robots and highly piezoresistive sensors	21
A comparative review of artificial muscles for microsystem applications	21
Moisture-resistant, stretchable NOx gas sensors based on laser-induced graphene for environmental monitoring and breath analysis	21
3D designed battery-free wireless origami pressure sensor	20
Highly efficient passive Tesla valves for microfluidic applications	20
Effects of nanopillars and surface coating on dynamic traction force	20
Micro-3D sculptured metastructures with deep trenches for sub-10 μm resolution	20
Cellular shape micromachined actuator ribbons	20
A new strategy for the fabrication of a flexible and highly sensitive capacitive pressure sensor	20
A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach	20
Geometric structure design of passive label-free microfluidic systems for biological micro-object separation	20
Automated and collision-free navigation of multiple micro-objects in obstacle-dense microenvironments using optoelectronic tweezers	20
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging	20
Snapshot Mueller spectropolarimeter imager	20
Alignment error modeling and control of a double-sided microlens array during precision glass molding	19
Multichannel microneedle dry electrode patches for minimally invasive transdermal recording of electrophysiological signals	19
Nanoplasmonic SERS on fidget spinner for digital bacterial identification	19
Universal droplet propulsion by dynamic surface-charge wetting	19
Highly sensitive piezoresistive and thermally responsive fibrous networks from the in situ growth of PEDOT on MWCNT-decorated electrospun PU fibers for pressure and temperature sensing	19
Comparative analysis of nanomechanical resonators: sensitivity, response time, and practical considerations in photothermal sensing	19
An ultra-deep TSV technique enabled by the dual catalysis-based electroless plating of combined barrier and seed layers	19
Analysis of the acoustoelectric response of SAW gas sensors using a COM model	19
Sensing-actuating integrated asymmetric multilayer hydrogel muscle for soft robotics	19
A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions	18
Sensitivity enhancement of nonlinear micromechanical sensors using parametric symmetry breaking	18
Nondestructive monitoring of annealing and chemical–mechanical planarization behavior using ellipsometry and deep learning	18
Strain sensor on a chip for quantifying the magnitudes of tensile stress on cells	18
Highly stable integration of graphene Hall sensors on a microfluidic platform for magnetic sensing in whole blood	18
Through-polymer, via technology-enabled, flexible, lightweight, and integrated devices for implantable neural probes	18
Low-temperature processing of screen-printed piezoelectric KNbO3 with integration onto biodegradable paper substrates	17
Surface-modified elastomeric nanofluidic devices for single nanoparticle trapping	17
Putting piezoelectric sensors into Fano resonances	17
A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope	17
4D-printed intelligent reflecting surface with improved beam resolution via both phase modulation and space modulation	17
Solution-processable electrode-material embedding in dynamically inscribed nanopatterns (SPEEDIN) for continuous fabrication of durable flexible devices	17
Achieving consistency of flexible surface acoustic wave sensors with artificial intelligence	17
All-inorganic ultrathin high-sensitivity transparent temperature sensor based on a Mn-Co-Ni-O nanofilm	17
Size-selective microfluidics delineate the effects of combinatorial immunotherapy on T-cell response dynamics at the single-cell level	17
Metasurface-integrated elliptically polarized laser-pumped SERF magnetometers	17
Correction: Integrated silicon photonic MEMS	17
Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor	16
Periodically poled aluminum scandium nitride bulk acoustic wave resonators and filters for communications in the 6G era	16
A batch microfabrication of a self-cleaning, ultradurable electrochemical sensor employing a BDD film for the online monitoring of free chlorine in tap water	16
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers	16

3D free-assembly modular microfluidics inspired by movable type printing	16
An acoustofluidic scanning nanoscope using enhanced image stacking and processing	16
Large-scale high uniform optoelectronic synapses array for artificial visual neural network	16