Journal of Vacuum Science & Technology B

Papers
(The H4-Index of Journal of Vacuum Science & Technology B is 11. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-09-01 to 2025-09-01.)
ArticleCitations
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source55
Photoassisted electron emission from planar-type electron source based on graphene/oxide/silicon structure29
Heating samples to 2000 °C and above for scanning tunneling microscopy studies in ultrahigh vacuum24
Secondary ion mass spectrometry as a tool to analyze semiconductor opening switch diodes18
Thickness dependent field emission study of LaB6 coated Si nanowire arrays17
Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source16
Current–voltage characteristics of Ag/Nb:SrTiO3/Ag and Au/Nb:SrTiO3/Ag heterostructures15
In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires13
Numerical analysis of high vacuum packaging efficiency for narrow structured devices12
Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO3 films11
Influence of thermal contact resistance on the field emission characteristics of a carbon nanotube11
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining11
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