Journal of Vacuum Science & Technology B

Papers
(The H4-Index of Journal of Vacuum Science & Technology B is 12. The table below lists those papers that are above that threshold based on CrossRef citation counts [max. 250 papers]. The publications cover those that have been published in the past four years, i.e., from 2021-04-01 to 2025-04-01.)
ArticleCitations
Electron emission performance analysis and application of carbon nanotube cold cathode prepared by cold pressing process25
Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing23
Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source21
Selective metal-carbides hardmask strip with chlorine and oxygen plasma18
Mechanism and solution of sharp defects in trench double-diffused metal-oxide semiconductor polysilicon recess etching17
Observing secondary-electron yield and charging in an insulating material by ultralow-voltage scanning electron microscope17
Carbon impurities in oxide thin films: The effect of annealing and laser irradiation17
Auto-ponderomotive beam guiding up to 9.5 keV16
Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents15
Effects of graphene doping and gas adsorption on the peak positions of graphene plasmon resonance and adsorbate infrared absorption15
MeV proton and neutron damage effects on deep-ultraviolet light-emitting diodes14
Computational study of plasma dynamics and reactive chemistry in a low-pressure inductively coupled CF4/O2 plasma12
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