Journal of Vacuum Science & Technology B

Article	Citations
Electron emission performance analysis and application of carbon nanotube cold cathode prepared by cold pressing process	25
Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing	23
Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source	21
Selective metal-carbides hardmask strip with chlorine and oxygen plasma	18
Mechanism and solution of sharp defects in trench double-diffused metal-oxide semiconductor polysilicon recess etching	17
Observing secondary-electron yield and charging in an insulating material by ultralow-voltage scanning electron microscope	17
Carbon impurities in oxide thin films: The effect of annealing and laser irradiation	17
Auto-ponderomotive beam guiding up to 9.5 keV	16
Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents	15
Effects of graphene doping and gas adsorption on the peak positions of graphene plasmon resonance and adsorbate infrared absorption	15
MeV proton and neutron damage effects on deep-ultraviolet light-emitting diodes	14
Computational study of plasma dynamics and reactive chemistry in a low-pressure inductively coupled CF4/O2 plasma	12
Characterization of GeO2 films formed on Ge substrate using high pressure oxidation	11
Highly selective GaAs/AlGaAs dry etching using HBr/SF6/He	11
Topological impact of a simple self-replication geometric structure with great application potential in vacuum pumping and photovoltaic industry	10
Accuracy requirements of the microarrayed Einzel lens	10
Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl2/BCl3/O2/Ar chemistry	9
Current–voltage characteristics of Ag/Nb:SrTiO3/Ag and Au/Nb:SrTiO3/Ag heterostructures	9
Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication	9
Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect	9
Numerical analysis of high vacuum packaging efficiency for narrow structured devices	9
Rubbing-induced site-selective deposition of 2D material patterns on nanomembranes	9
Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films	9
Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness	9
Engineering of ZrO2-based RRAM devices for low power in-memory computing	8

Photoassisted electron emission from planar-type electron source based on graphene/oxide/silicon structure	8
Graphene-based capacitive monolithic microphone with optimized air gap thickness and damping	8
Cryogenic etching of positively tapered silicon pillars with controllable profiles	8
Nanofabrication of high transition temperature superconductive electronics with focused helium ion irradiation	8
Optical and electronic properties of Ge1−xSnx/Si alloys grown by remote plasma-enhanced chemical vapor deposition	8
Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions	8
Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon	8
Optical metasurface fabricated using 3D nanoimprint lithography	8
Numerical investigation of flow and particles contamination in reticle mini environment for extreme ultraviolet lithography	8
Comparison of GeSn alloy films prepared by ion implantation and remote plasma-enhanced chemical vapor deposition methods	8
X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys	7
Experimental study of flake graphite large-area explosion electron emission cathode performance based on particle size discrepancy	7
Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation	7
Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas	7
GaAs/GeSn/Ge n–i–p diodes and light emitting diodes formed via grafting	7
Numerical simulations of heterojunction GaN nanopillar light emitting diodes	7
In situ determination of sputtered Ni–Cu film composition from emission intensities	7
Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride	7
Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K	7
Stacked hydrogel-based brain-on-chips utilizing capillary force flow pinning	7
Comparative studies of metamorphic and strained InGaAs p-type semiconductor - intrinsic absorption layer - n-type semiconductor photodetector for low-temperature CH4 detection	7
Field emission arrays from graphite fabricated by laser micromachining	7
ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer	7
Impact of photovoltaic effect on performance enhancement of triboelectric nanogenerator for energy harvesting applications	6
Comment on “Restoration of the original depth distribution from the SIMS profile using the depth resolution function in framework of RMR model” [J. Vac. Sci. Technol. B 41, 024003 (2023)]	6
Fabrication of pyramid-shaped gold tip for adiabatic nanofocusing of surface plasmon polaritons	6
Thickness dependent field emission study of LaB6 coated Si nanowire arrays	6
Strain-tuned optical properties of bilayer silicon at midinfrared wavelengths	6
Erratum: “Electronic structure of InSb (001), (110), and (111)B surfaces” [J. Vac. Sci. Technol. B 41, 032808 (2023)]	6
Influence of thermal contact resistance on the field emission characteristics of a carbon nanotube	6
Behavior of the field enhancement due to mutual depolarization on a pair of triangular emitters at short and large separations	6
Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO3 films	6
Physical vapor deposition simulator by graphical processor unit ray casting	6
Fluorescence alignment simulation for atomic-scale position adjustment in ultraviolet nanoimprint lithography	6
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining	6
Trilayer process for T-gate and Γ-gate lithography using ternary developer and proximity effect correction superposition	6
Vacuum technique of nanodiamond dispersing on a substrate from an aqueous suspension	6
In situ metrology of direct-write laser ablation using optical emission spectroscopy	6
Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit	6
Evolution of lithography-to-etch bias in multi-patterning processes	5
Ion-beam-assisted growth of cesium-antimonide photocathodes	5
Nonevaporable getter-MEMS for generating UHV conditions in small volumina	5
Low-macroscopic field emission structure: Using the shape of the conductor to identify a local difference in electric potential	5
Experimental research on airflow efficiency of dynamic gas lock for extreme ultraviolet lithography	5
High-temperature characteristics of GaN/InGaN multiple-quantum-well UV photodetectors fabricated on sapphire substrate: Analysis of photovoltaic and carrier transit time properties	5
E-mode AlGaN/GaN HEMTs using p-NiO gates	5
In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires	5
Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C60	5
A novel design of a retarding field electron energy analyzer with a cavity electrode providing extremely high energy resolution	5
Sensitivity of thermal conductivity vacuum gauges for constant current and constant temperature operation	5

Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light	5
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source	5
Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition	5
Simplified CVD route to near-zero thickness silicon nitride films	5
Fabrication of microstructures on curved hydrogel substrates	5
Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison	5
Modification of discharge sequences to control the random dispersion of flake particles during wafer etching	5
Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°	5
Comparison of temperature, current density, and light intensity distributions of nano-resistor patterns for an improved solid state incandescent light emitting device simulation model	5
Rapid detection of radiation susceptible regions in electronics	5
Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate	5
Atomic-resolution lithography with an on-chip scanning tunneling microscope	5
Degradation of GaN field emitter arrays induced by O2 exposure	5
Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)	5
Field electron emission and field ion microscope images of layered material MoS2	5
Response to “Comment on ‘Restoration of the original depth distribution from the SIMS profile using the depth resolution function in framework of RMR model’” [J. Vac. Sci. Technol. B 41, 024003 (20	5
Impact of electrical aging on x-ray image quality and dose rate with vertically aligned carbon nanotube based cold cathode electron beam (C-beam)	5
Time response measurement of pulsed electron beam from InGaN photocathode	5
Vacuum system of the Space Plasma Environment Research Facility	5
Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes	4
Heating samples to 2000 °C and above for scanning tunneling microscopy studies in ultrahigh vacuum	4
Heat-transfer modeling of the gas gap under a wafer	4
Thin films residual stress profile evaluation using test microstructures: Illustrated on an example of AlN film	4
Fundamental study on the selective etching of SiGe and Si in ClF3 gas for nanosheet gate-all-around transistor manufacturing: A first principle study	4
Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence	4
Thank you to our 2024 reviewers!	4
Surface wetting on micromilled and laser-etched aluminum with ion-beam postprocessing	4
Strong-field electron emission from gold needle tips	4
Organotrialkoxysilane-mediated synthesis of Ni–Pd nanocatalysts at lower concentrations of noble metal: Catalysts for faster hydrogen evolution kinetics	4
Gradient-composition upper-waveguide and electron-blocking layers for enhanced performance in near-ultraviolet laser diodes	4
Oxygen-free transport of samples in silane-doped inert gas atmospheres for surface analysis	4
Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes	4
Rapid preparation of amorphous Al2O3 on graphene surface by plasma electrolysis technology	4
Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?	4
Multiple electron beam generation from InGaN photocathode	4
Enzymatic degradation of cellulosic fabrics modified with atomic layer deposited aluminum oxide thin films	4
Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique	4
Near zero-field magnetoresistance and defects in gallium nitride pn junctions	4
Thermal analysis with high accuracy of multi-beam mask fabrication	4
Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy	4
Diffusive separation in rarefied plume interaction	4
Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs	4
Strain engineering in III-V photonic components through structuration of SiNx films	4
Nanometer-scale capillary-driven flow and molecular weight govern polymer nanostructure deposition from a heated tip	4
Atomic layer deposition of YSZ electrolytes for solid-state battery development: Beyond lithium	4
Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch	4
Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution	4
Seesaw-type modulation of secondary electron emission characteristics of polytetrafluoroethylene-MgO composite coating	4
Comparative research on the secondary electron yields and photon-stimulated desorption of Ti and Pd/Ti bilayer thin films	4
Determining the oxygen detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)	4
Exploring oxide-nitride-oxide scalloping behavior with small gap structure and chemical analysis after fluorocarbon or hydrofluorocarbon plasma processing	4
Retraction: “Dependence of structural and optical properties of In0.23Ga0.77As/GaAs quantum wells on misfit dislocations: Different critical thickness for dislocation generation and degradation of opt	4
Dynamic switching operation of diamond MOSFETs with NO2 p-type doping and Al2O3 gate insulation and passivation	4
Electrochemically fabricated ultrafine nickel masks for the fabrication of MoS2-based devices	4
Noise reduction and peak detection in x-ray diffraction data by linear and nonlinear methods	4
Thermally stable radio frequency power and noise behaviors of AlGaN/GaN high electron mobility transistor without voltage-blocking buffer layer design	4
Controlled preparation of tungsten diselenide thin films via chemical vapor deposition	4
Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors	4
Synthesis of silver-decorated titanium dioxide nanostructured films for enhanced visible light photocatalysis	4
Tapered quantum cascade lasers with isolated channel emitting at 9 μm	4
Physical vapor deposition of Yb-doped Cs2AgSbBr6 films	4
Synthesis of NiS2 nanomaterial as wide range pressure sensor	4
Temperature dependence of the optical phonon reflection band in GaP	4
In situ mass spectrometric investigation to probe GeSn growth dynamics and mechanisms in the chemical vapor deposition processes	3
Effect of ultraviolet light on field emission performance and lifetime of lateral field emitter devices	3
Understanding 3D anisotropic reactive ion etching of oxide-metal stacks	3
Simulation analyses of carrier dynamics in npn-type GaN-heterojunction bipolar transistors with different hole-concentration p-base layers	3
Thermal-field emission from cones and wires	3
Electron emission properties of titanium nitride coated volcano-structured silicon emitters	3
Investigation into the effect of a PECVD-deposited SiOx chamber coating on the selective, radical-based NF3 etching of TaN with respect to BEOL low-k	3
Defect formation in InGaAs/AlSb/InAs memory devices	3
Radiation damage in GaN/AlGaN and SiC electronic and photonic devices	3
Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions	3
Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?	3
Diagnostics of target-cavity confined plasmas produced by nanosecond pulsed laser ablation of graphite	3
Reduction of exposing time in massively-parallel E-beam systems	3
Selectively patterned Mg-doped GaN by SiNx-driven hydrogen injection	3
Fabrication of ultrathin suspended membranes from atomic layer deposition films	3
Bilayer metal etch mask strategy for deep diamond etching	3
Optimization of silicon etch rate in a CF4/Ar/O2 inductively coupled plasma	3

Effect of inductively coupled plasma etch on the interface barrier behavior of (001) β-Ga2O3 Schottky barrier diode	3
Ordered silicon nanocone fabrication by using pseudo-Bosch process and maskless etching	3
Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2	3
Roll-to-roll reactive ion etching of large-area nanostructure arrays in Si: Process development, characterization, and optimization	3
Grain growth of Cu wires during Joule heat welding	3
Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography	3
Hybrid cross correlation and line-scan alignment strategy for CMOS chips electron-beam lithography processing	3
Preface for the Special Topic Collection Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades	3
Novel excitation structure to improve the performance of a miniature radio frequency ion thruster	3
High current field emission from Si nanowires on pillar structures	3
Coaxial ion source: Pressure dependence of gas flow and field ion emission	3
Optoelectronic performance characterization of MoS2 photodetectors for low frequency sensing applications	3
Acquisition of field ion microscope image using deflector during atom probe analysis	3
Postdeposition annealing effect on atomic-layer-deposited Al2O3 gate insulator on (001) β-Ga2O3	3
Measurements of He-Ar, He-N2, and He-air thermal creep slip and accommodation coefficients at high temperatures	3
Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform	3
Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding	3
On the charge density and potential near the surface of a field emitter	3
Rapid SARS-CoV-2 diagnosis using disposable strips and a metal-oxide-semiconductor field-effect transistor platform	3
Design, modeling, and fabrication of high frequency Oersted lines for electron spin manipulation in silicon based quantum devices	3
Monitoring of rapid thermal anneal with secondary ion mass spectrometry	3
Role of tin clustering in band structure and thermodynamic stability of GeSn by atomistic modeling	3
Low power silicon evaporation source—Construction, performances, and applications	3
Effects of H+ ion bombardment on GaAs photocathode surface with Cs-O and Cs-F activation layers	3
Endoscope-assisted manipulator for precooling and deposition in low-temperature scanning tunneling microscope systems	3
Analytic study of exposure contrast over feature edge in electron-beam lithography	3
Gate offset and emitter design effects of triode cold cathode electron beams on focal spot sizes for x-ray imaging techniques	3
Modeling and algorithm of three-dimensional metrology with critical dimension scanning electron microscope	3
Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets	3
Leakage rate detection of ConFlat seals in aluminum and stainless steel flanges under mechanical loads for quantum optical experiments in space	3
Multiple material stack grayscale patterning using electron-beam lithography and a single plasma etching step	3
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications	3
Self-aligned fabrication of vertical, fin-based structures	3
Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films	3
Physics based model of an AlGaN/GaN vacuum field effect transistor	3
Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling	3
Overlay control solution for high aspect ratio etch process induced overlay error	3
Investigating pathways for deep-UV photolithography of large-area nanopost-based metasurfaces with high feature-size contrast	3
Development of GeSn epitaxial films with strong direct bandgap luminescence in the mid-wave infrared region using a commercial chemical vapor deposition reactor	3
Review on remote phonon scattering in transistors with metal-oxide-semiconductor structures adopting high-k gate dielectrics	2
Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3 with neutron irradiation and forming gas anneals	2
Fabrication of blazed gratings by tilted reactive ion beam etching with the side mask for augmented reality applications	2
Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices	2
Generalized performance optimization for massively-parallel electron-beam systems	2
Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator waf	2
Computational study of mechanical stresses in a cell interacting with micromechanical cues and microfabrication of such cues in Nervous system-on-Chips	2
Measurement of field emission array current distributions by metal-coated CMOS image sensors	2
Role of dose optimization in Ru atomic layer deposition for low resistivity films	2
Nanofabricating neural networks: Strategies, advances, and challenges	2
Structure optimization of Spindt-type emitter fabricated by triode high power pulsed magnetron sputtering	2
Optical metrology of characterizing wetting states	2
Influence of the Cl2 etching on the Al2O3/GaN metal–oxide–semiconductor interface	2
Threshold switching stabilization of NbO2 films via nanoscale devices	2
High-performance normally off AlGaN/GaN high electron mobility transistor with p-type h-BN cap layer	2
Long term field emission current stability characterization of planar field emitter devices	2
Joule heating of an emitter on the cathode surface by field electron emission current with an account of the nonisolation of the apex	2
Calibrated in-vacuum quantum efficiency system for metallic and III-V thin-film photocathodes	2
Film characteristics of atmospheric pressure plasma-treated chitosan solution	2
Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities	2
Large-area fabrication of nanometer-scale features on GaN using e-beam lithography	2
Hafnium oxide films grown on silicon substrates by electron beam-induced deposition	2
Rate-controlled cycle etching of GaN by cycle exposure to BCl3 and F2-added Ar plasma at a substrate temperature of 400 °C	2
Operational experiences and upgrade of China Spallation Neutron Source Linac vacuum system	2
Facile fabrication of nanoporous structure on β titanium alloy to eliminate stress shielding for bone implant	2
Volatile vapor knife of immersion lithography hood using solutal Marangoni effect	2
Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas	2
Design and large-scale nanofabrication of plasmonic solar light absorbers	2
A novel thermionic crystal electron emission effect similar to Kikuchi lines	2
Enhanced optoelectronic properties of magnetron sputtered ITO/Ag/ITO multilayers by electro-annealing	2
Thermal sensitivity and current-voltage-temperature characteristics in Pt/epitaxy n-Si/n+Si structures as a function of Schottky contact area	2
Proposal that interpretation of field emission current–voltage characteristics should be treated as a specialized form of electrical engineering	2
Rapid prototyping of etch test structures for hard mask development using electron beam lithography	2
Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals	2
Practical guide for in-house solid-state nanopore fabrication and characterization	2
Effects of gases on the field emission performance of silicon gated field emitter array	2
Rubidium focused ion beam induced platinum deposition	2
Integrated silicon electron source for high vacuum microelectromechanical system devices	2
Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma	2
In situ plasma pin-up clean process for backside bevel polymer removal, defect reduction, and queue time relaxation	2
Field emission: Applying the “magic emitter” validity test to a recent paper, and related research-literature integrity issues	2
Quantum efficiency characteristics of low-threading-dislocation-density InGaN photocathode grown on GaN substrate	2
In situ monitoring of sapphire nanostructure etching using optical emission spectroscopy	2
On the origins of the m/z = 19 signals in residual gas analysis	2
Zr-Al 16 wt. % and Na2CrO4 composite particles used for Na dispenser and its reaction kinetic	2
Supercapacitor characteristics of MoS2 and MoOx coated onto honeycomb-shaped carbon nanotubes	2
Model for the current plateau observed on the (310) plane of a room temperature W field electron source	2
On the origin and evolution of hotspots in multipatterning processes	2
Piezoelectric effect of crystal nanodomains on the friction force	2
Inelastic cotunneling in the Coulomb-blockade transport of donor-atom transistors	2
Heat transfer mechanism of electrostatic chuck surface and wafer backside to improve wafer temperature uniformity	2
Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices	2
Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies	2
Close-packed silicon field emitter arrays with integrated anode fabricated by electron-beam lithography	2
4H-SiC layer with multiple trenches in lateral double-diffused metal-oxide-semiconductor transistors for high temperature and high voltage applications	2
Surface treatment of carbon fiber reinforced polymer for adhesive bonding with pioneer epoxy using atmospheric pressure plasma jet	2