Journal of Vacuum Science & Technology B

Article	Citations
Simplifying in vacuo optical measurements of CVD processes using vacuum-compatible optical fibers	88
Stacked hydrogel-based brain-on-chips utilizing capillary force flow pinning	33
Thickness dependent field emission study of LaB6 coated Si nanowire arrays	25
Heating samples to 2000 °C and above for scanning tunneling microscopy studies in ultrahigh vacuum	23
Secondary ion mass spectrometry as a tool to analyze semiconductor opening switch diodes	19
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source	18
Current–voltage characteristics of Ag/Nb:SrTiO3/Ag and Au/Nb:SrTiO3/Ag heterostructures	15
Photoassisted electron emission from planar-type electron source based on graphene/oxide/silicon structure	14
In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires	14
Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO3 films	14
Numerical analysis of high vacuum packaging efficiency for narrow structured devices	14
Angular emission evolution of the ZrO/W(100) Schottky emitter	12
Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source	12
Numerical simulations of heterojunction GaN nanopillar light emitting diodes	12
Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition	11
Exploring oxide-nitride-oxide scalloping behavior with small gap structure and chemical analysis after fluorocarbon or hydrofluorocarbon plasma processing	11
Broadband optical enhancement of suspended Ge-on-Si infrared absorbers by using backside etching holes and a metallic reflector	11
Influence of thermal contact resistance on the field emission characteristics of a carbon nanotube	11
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining	11
Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies	10
Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes	10
Understanding 3D anisotropic reactive ion etching of oxide-metal stacks	10
Novel excitation structure to improve the performance of a miniature radio frequency ion thruster	10
Effect of inductively coupled plasma etch on the interface barrier behavior of (001) β-Ga2O3 Schottky barrier diode	9
Overlay control solution for high aspect ratio etch process induced overlay error	9

Investigation on the heat transfer characteristics of flexible vacuum glass based on cross-laminated microcavities	9
Effect of glow cleaning bias voltage on microstructure and properties of ion nitriding/multiarc ion plating CrTiAlN composite coatings	9
Accelerating multiple patterning lithography layout decomposition with a stochastic analog Boolean satisfiability solver	9
Effect of ultraviolet light on field emission performance and lifetime of lateral field emitter devices	9
Correction model for photoresist shrinkage in critical dimension scanning electron microscopy based on improved spider wasp optimizer—Optimized support vector regression	9
Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs	9
Investigation into the effect of a PECVD-deposited SiOx chamber coating on the selective, radical-based NF3 etching of TaN with respect to BEOL low-k	9
Fluorescent flow analysis of in situ material exchange in two-photon 3D printing	8
Piezoelectric effect of crystal nanodomains on the friction force	8
Effect of the TiN-coating-layer properties on the electron emission of volcano-structured silicon field emitter arrays	8
Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films	8
Electron emission properties of titanium nitride coated volcano-structured silicon emitters	8
Study of zinc doped In0.53Ga0.47As/InP/InAlAs/InP heterostructures by time-of-flight; magnetic secondary ion spectrometry and high-energy x-ray photoelectron spectroscopy	8
Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence	8
Effects of athermal carrier injection on Co-60 gamma-ray damage in SiC merged-PiN Schottky diodes	8
Deep cryogenic silicon etching for 3D integrated capacitors: A numerical perspective	8
Resistive switching of two-dimensional Ag2S nanowire networks for neuromorphic applications	8
Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform	8
Heat transfer mechanism of electrostatic chuck surface and wafer backside to improve wafer temperature uniformity	8
Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2	8
Computational study of mechanical stresses in a cell interacting with micromechanical cues and microfabrication of such cues in Nervous system-on-Chips	8
Practical guide for in-house solid-state nanopore fabrication and characterization	8
In-depth feasibility study of extreme ultraviolet damascene extension: Patterning, dielectric etch, and metallization	7
All field emission models are wrong, … but are any of them useful?	7
Numerical simulation study of the flow and diffusion characteristics of trace gas in a gas mixture based on the ellipsoidal statistical Bhatnagar–Gross–Krook model	7
Nanofabricating neural networks: Strategies, advances, and challenges	7
Electrical characteristics of tungsten-doped InZnSnO thin film transistors by RF magnetron sputtering	7
Novel wet transfer technology of manufacturing flexible suspended two-dimensional material devices	7
Silicon etching by chlorine plasma: Validation of surface reactions mechanism	7
Dry etching characteristics of titanium dioxide grown by different physical vapor deposition processes	7
Outgassing rate testbed for in-operation analysis of powered and heated assemblies	7
Chaos-enhanced self-adaptive particle swarm optimization with simulated annealing for digital lithography mask optimization	7
Through-chip porous layer fabrication by plasma etching with protective film deposition	7
Effect of water vapor pressure on positive and negative tone electron-beam patterning of poly(methyl methacrylate)	7
Investigation of polymer template removal techniques in three-dimensional thin-shell nanolattices	7
Selective growth of graphene films on gallium-focused ion beam irradiated domains	7
Digital biosensor for human cerebrospinal fluid detection with single-use sensing strips	7
High-precision CD extraction for silver-layered photoresists using Monte Carlo simulation	7
Fabrication of sub-micrometer 3D structures for terahertz oscillators by electron beam gray-tone lithography	7
Microsphere photolithography using reusable microsphere array mask for low-cost infrared metasurface fabrication	7
Absolute measurement of vacuum ultraviolet photon flux in an inductively coupled plasma using a Au thin film	7
Micromirror fabrication for co-packaged optics using 3D nanoimprint technology	6
Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning	6
Effect of atomic-scale microstructures on TiZrV non-evaporable getter film activation	6
Preface to the Special Topic Collection Celebrating the Achievements and Life of Paul H. Holloway	6
Nondestructive x-ray reflectivity analysis of Al distributions of ultraviolet-cured spin-coated resist films hybridized with trimethylaluminum	6
Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist	6
Enhancement in neuromorphic NbO2 threshold switching at cryogenic temperatures	6
Analysis for roughness-generation mechanism in Ru etching using Cl2/O2-based plasma for advanced interconnect	6
Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas	6

Scanning anode field emission microscopy of a single Si emitter	6
Influence of O content on exothermic and self-propagating characteristics of Ti/SiOx multilayer films	6
Enhancement of electrical properties of a-IGZO thin film transistor by low temperature (150 °C) microwave annealing for flexible electronics	6
Effect of low-pressure postannealing on the electrical properties of VO2 thin films	6
Characterization of TaxO5−y thin films grown by HiPIMS reactive sputtering for temperature sensing applications	6
Tailoring of structual, optical, and electrical properties of Cu films by sputtering power and deposition atmosphere	6
Dysprosium liquid metal alloy ion source for magnetic nanostructures	6
Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection	6
Maximizing the performance of a field emission device by profiling the emitter’s height distribution	6
Suppressing oxygen vacancy formation in ZrO2 to improve electrical properties by employing MoO2 bottom electrode	6
Study of the structural and electronic properties of Zn1−x−yMgxTiyO structures	6
Numerical analysis of Gaussian potential patches model depending on the substrate doping in inhomogeneous Schottky barrier diodes over a wide temperature range	6
Realizing GaN-based blue laser diode with 7.5 W output power via electron blocking layer thickness adjustment	6
New approach of local critical dimension uniformity improvement for via/contact hole etch with direct current superposition	6
Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities	6
Electrochemical pipette-based analysis on anisotropy in rutile TiO2 for photoelectrochemical hydrogen revolution	6
Spectro-ellipsometric probing of wetting, nucleation, and dot/island formation during photo-excited chemical vapor deposition of Ge on SiO2 substrate	6
Predicting the effects of plasma-induced damage on p–n junction leakage and its application in the characterization of defect distribution	6
Effects of high-temperature annealing on vacancy complexes and luminescence properties in multilayer periodic structures with elastically strained GeSiSn layers	6
Interfacial reactivity in the Co/CuO samples as investigated by x-ray photoelectron spectroscopy	6
TiN and TaN cointegration for 300 mm superconducting back end of line	6
Novel inspection technology for detecting via open using parallel e-beam scanning and graphic design system	5
Improvement of electrical characteristics of flexible AZO/Ag/Cu/AZO transparent conductive films by Cu deposition	5
Experimental current-voltage-temperature and thermal sensitivity behaviors of an ideal Schottky barrier diode over a wide temperature range	5
Yellow luminescence band defect related photocurrent instability of GaN p-i-n ultraviolet photodetectors	5
Characterization of pulsed laser deposited La2O2S:Eu3+ thin films and effect of coating with graphene oxide layers	5
Structural, surface, and upconversion luminescence properties of pulsed laser-deposited Y2O3:Ho3+,Yb3+ thin films	5
Retraction: “Fabry–Perot-cavity-based refractometry without influence of mirror penetration depth” [J. Vac. Sci. Technol. B 39, 065001 (2021)]	5
Novel approach for KrF chemically amplified resist optimization assisted by deep learning	5
Impact of interparticle contact on discharge capacity in all-solid-state batteries: A 3D simulation approach	5
Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments	5
Plasma confinement by an optoelectronic system	5
Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa	5
Spatial variation of the elemental components of thin films from BiSrCaCuO target deposited using low energy femtosecond pulsed laser deposition in high background gas pressure	5
Transition from the regime of thermionic emission to the space-charge limited current regime under strong Shottky effects	5
AC thin-film electroluminescence: A historical overview with a look ahead	5
Multiplicity features of carbon nanotube emitters	5
High off-state voltage (4266 V) diamond metal oxide semiconductor field effect transistors	5
Evolution of lithography-to-etch bias in multi-patterning processes	5
All field emission experiments are noisy, … are any meaningful?	5
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications	5
Metal-pattern preparation based on selective deposition using soft organofluorine surfaces	5
Improved optical and electrical response by glancing angle synthesized Al2O3 nanorod array device	5
Study of simulations of double graded InGaN solar cell structures	5
Investigation of Rb+ milling rates using an ultracold focused ion beam	5
Measuring and understanding the nanomechanical properties of halide perovskites and their correlation to structure—A perspective	5
Membrane-electrode junction properties for optimum potentiometric hydrogen sensor response	5
Effect of quality improvement in active region on temperature characteristics of GaN-based ultraviolet laser diode	5
Thank you to our 2024 reviewers!	5
SiMiC: Context-aware silicon microstructure characterization using attention-based convolutional neural networks for field-emission tip analysis	5
High-precision thermal characterization technique with dual-laser Raman thermometry	5
Effect of substrate rotation speed on AlGaN nanowire deep ultraviolet light-emitting diodes by molecular beam epitaxy	5
Thermal evaporation of thin Li films	5
Novel surface wave technique for moderate-pressure plasma measurements	5
Method for monitoring high aspect ratio contact dry etching process using calibration and normalization method for optical emission spectroscopy	5
Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing	5
Electrochemical imaging correlated to hydrogen evolution reaction on transition metal dichalcogenide, WS2	5
Improved impedance matching speed with gradient descent for advanced RF plasma system	5
Design of plasma strip chamber for uniform gas supply with fluid flow simulation	5
Investigation of tilted etching of Si3N4 using CF4/O2 plasma: Process development and mechanism study	5
Integrated silicon electron source for high vacuum microelectromechanical system devices	4
Thermal sensitivity and current-voltage-temperature characteristics in Pt/epitaxy n-Si/n+Si structures as a function of Schottky contact area	4
Surface deposition of nanometer scale carbon structures on Bi2Sr2CaCu2O8 + δ using a low-cost scanning electron microscope	4
Effects of gases on the field emission performance of silicon gated field emitter array	4
Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films	4
Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)	4
Experimental study of flake graphite large-area explosion electron emission cathode performance based on particle size discrepancy	4
Role of tin clustering in band structure and thermodynamic stability of GeSn by atomistic modeling	4
Bilayer metal etch mask strategy for deep diamond etching	4
Si content in methacrylamide-containing A- b -(B- r -C) block copolymers and its impact on reactive ion et	4
Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy	4
4H-SiC layer with multiple trenches in lateral double-diffused metal-oxide-semiconductor transistors for high temperature and high voltage applications	4
Selectively patterned Mg-doped GaN by SiNx-driven hydrogen injection	4
Enhancing plasma uniformity in SiH4/NH3 capacitively coupled plasmas via dielectric structure adjustment positioning adjacent to the power electrode	4
Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect	4
MeV proton and neutron damage effects on deep-ultraviolet light-emitting diodes	4
Characterization of iron-based alloy catalysts for atmospheric pressure chemical vapor deposition of carbon nanofibers via in situ transmission electron microscopy	4
Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C60	4
In situ mass spectrometric investigation to probe GeSn growth dynamics and mechanisms in the chemical vapor deposition processes	4
Fabrication of ultrahigh aspect ratio Si nanopillar and nanocone arrays	4

Optimization of silicon etch rate in a CF4/Ar/O2 inductively coupled plasma	4
Physics based model of an AlGaN/GaN vacuum field effect transistor	4
Grain growth of Cu wires during Joule heat welding	4
Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness	4
Magnetized, radiofrequency-driven hollow cathode chemical-vapor deposition of ultrathick hydrogenated amorphous carbon	4
Heating of Cs2Te photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown	4
Selective wet etching of atomic layer deposited ferroelectric hafnium zirconium oxide and hafnium oxide thin films	4
Dynamic switching operation of diamond MOSFETs with NO2 p-type doping and Al2O3 gate insulation and passivation	4
Magneto-transport study on Sn-rich Sn1−xGex thin films enabled by CdTe buffer layer	3
Comparison of surface morphology and roughness of silicon surfaces etched using pulsed and continuous flow XeF	3
Shape tuning of large area silicon nanotip arrays through reactive ion etching	3
Future of plasma etching for microelectronics: Challenges and opportunities	3
Scalable fabrication of vertically arranged Bi2Se3 crossbar arrays for memristive device applications	3
Depth-resolved characterization of mechanically weakened surface layers in vacuum ultraviolet-irradiated cycloolefin polymer films using micro slurry-jet erosion test and ToF-SIMS analysis	3
Role of the oxidation conditions on the orientation of TiNxOy grown by atomic layer deposition: Impact on the optical and electrical properties	3
Upgrading of the modified Knudsen equation and its verification for calculating the gas flow rate through cylindrical tubes	3
Influence of electron beam irradiation on nanoscale adhesion during colloidal probe experiments inside the scanning electron microscope	3
Cryomicroscopy of low melting point metals	3
Miniature plasma source for in situ extreme ultraviolet lithographic scanner cleaning	3
Epitaxial SiGeSn grown on Si by ion implantation	3
Effects of iCVD organic passivation in oxide thin-film transistors under repetitive bending stress for electrical and mechanical stability	3
Secondary ion mass spectrometry analysis of metal oxides using 70 keV argon, carbon dioxide, and water gas cluster ion beams	3
Resistivity improvement of flexible transparent conductive films with Cu inserted intermediate layer	3
3D structure of box-and-grid electron multiplier with higher electron collection efficiency	3
Tracing degradation mechanisms of epitaxially grown GaAsSb on InP by InSb formation at elevated temperatures	3
Negative differential resistance in photoassisted field emission from Si nanowires	3
Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions	3
Cost-effective fabrication of RF AlGaN/GaN HEMTs on surface activated bonding-bonded SiC-SiC substrate	3
Effects of ion implantation with arsenic and boron in germanium-tin layers	3
Study on the etching mechanism of quartz using dual-frequency (60 MHz/400 KHz) capacitively coupled C4F8/Ar/O2 plasma	3
Direct writing immersion laser lithography on graphene monolayers using two-photon absorption	3
Atmospheric pressure plasma treatment of chitosan-acrylic acid blends	3
Plasma enhanced activation of ion implanted dopants	3
Fabrication of hierarchical nanostructures using binary colloidal nanosphere assembly	3
Real-time determination of sputtered TiC film composition using optical emission spectroscopy	3
Electronic structure of InSb (001), (110), and (111)B surfaces	3
On the brightness, transverse emittance, and transverse coherence of field emission beam	3
Zernike model for overlay control and tool monitor for lithography and etch process	3
Vacuum control system for the Space Plasma Environment Research Facility	3
Extreme contact shrink for back end of line connectivity	3
Growth of CdS heterojunctions on Cd0.9Zn0.1Te single crystals with H2S	3
Multiple connected artificial synapses based on electromigrated Au nanogaps	3
Hybrid sputtering approach for reliable TOF-SIMS depth profiling of inorganic–organic multilayer films	3
Plasmon resonance-based study of the peroxidaselike catalytic effect of gold nanoparticles	3
Thermal sensing capability and current–voltage–temperature characteristics in Pt/n-GaP/Al/Ti Schottky diodes	3
Self-alignment of whole wafers using patterning for capillary forces	3
High sensitivity CIP2A detection for oral cancer using a rapid transistor-based biosensor module	3
Identification of dust particles on a periodic nanostructured substrate using scanning electron microscope imaging	3
Desorption model of volatile Ru species induced by partial chlorination on Ru(0001) under an O2/Cl2-based plasma process	3
Structure optimization of Spindt-type emitter fabricated by triode high power pulsed magnetron sputtering	3
Physical modeling of side wall deposition by inclined electron beam evaporation	3
Molecular beam epitaxy growth and characterization of GePb alloys	3
Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?	3
High current silicon nanowire field emitter arrays	3
Controlling the etch selectivity of silicon using low-RF power HBr reactive ion etching	3
Modeling of water outgassing from polymers incorporating surface adsorption and desorption	3
Machine learning aided optimization of drag pump performance	3
Electron transport mechanisms in amorphous zinc oxysulfide thin films	3
Solar-thermal cold-wall chemical vapor deposition reactor design and characterization for graphene synthesis	3
Fabrication and characteristics of double-gate zinc oxide nanowire field emitter arrays	3
Permeation of oxygen and water into a plasma-enhanced chemical vapor deposited silicon nitride film as function of deposition pressure	3
Systematic study of InP/InGaAsP heated plasma etching and roughness improvement for integrated optical devices	3
Phase-shifted counterpropagating atmospheric pressure plasma jets: Characterization and interaction with materials	3
Honeycomb-shaped vertically aligned carbon nanotubes decorated with molybdenum trioxide as an electrochemical sensor for glucose	3
Nanoimprint lithography guiding templates for advanced magnetic media fabrication	3
Cluster-induced desorption/ionization mass spectrometry of Ir(ppy)3	3
Random graphene adlayer morphologies grown on microfaceted Cu surfaces for physical unclonable functions	3
Development for high-aspect-ratio hole etching with hydrogen fluoride gas based cryogenic process	3
Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography	3
Mitigation of electronic crosstalk interference in graphene transistor biosensors	3
Ferroelectricity in amorphous aluminum oxynitride films synthesized by inductively coupled plasma assisted atomic layer deposition	3
Effect of sputter power on red-shifted optoelectronic properties in magnetron sputtered Ag/ZnO thin films	3
Synthesis and characterization of electron beam irradiation-induced damage in polycrystalline metal thin films	3
Role of dose optimization in Ru atomic layer deposition for low resistivity films	2
Study of process parameters and characteristics properties of W coatings deposited by rf plasma sputtering	2
Resistive switching characteristics of TiO2 films prepared by DC magnetron sputtering: Effects of nitrogen composition and phase structure	2
Co-optimizing of H-curing, stress, and thermal annealing—A more effective way for realizing FEOL-BEOL compatible eMRAM chip	2
On the origins of the m/z = 19 signals in residual gas analysis	2
Interpreting the field emission equation for large area field emitters	2
Low-temperature AlxGa1−xN growth by combined electron cyclotron resonance sputtering and magnetron sputtering	2
Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator waf	2
On the chemistry mechanism for low-pressure chlorine process plasmas	2
Measurement of field emission array current distributions by metal-coated CMOS image sensors	2
Effect of praseodymium coating on electron emission from a nanoscale gold field emitter array	2
Effect of varying threading dislocation densities on the optical properties of InGaN/GaN quantum wells with intentionally created V-shaped pits	2
Design and large-scale nanofabrication of plasmonic solar light absorbers	2
Facile fabrication of nanoporous structure on β titanium alloy to eliminate stress shielding for bone implant	2
Impurity analysis of synthetic diamond for electronics and quantum physics	2
Evolution of hard carbon layers on Ti-45Al-2Nb-2Mn-1B by plasma enhanced chemical vapor deposition of hydrocarbons and hydrogen	2
Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage	2
Close-packed silicon field emitter arrays with integrated anode fabricated by electron-beam lithography	2
Carbon nanotube collimator as an vacuum ultraviolet window	2
Radiation damage in GaN/AlGaN and SiC electronic and photonic devices	2
Development of “GaSb-on-silicon” metamorphic substrates for optoelectronic device growth	2
Fabrication of hollow silicon microneedles using grayscale lithography and deep reactive ion etching	2