Journal of Vacuum Science & Technology B

Article	Citations
Evidence of improved power conversion efficiency in lead-free CsGeI3 based perovskite solar cell heterostructure via scaps simulation	80
Atomic force microscopy for nanoscale mechanical property characterization	22
Development of microfabricated planar slow-wave structures on dielectric substrates for miniaturized millimeter-band traveling-wave tubes	22
Temperature dependence of barrier height inhomogeneity in β-Ga2O3 Schottky barrier diodes	20
Stability of TiO2-coated ZnO photocatalytic thin films for photodegradation of methylene blue	18
Angular dependence of secondary electron yield from microporous gold surfaces	18
Optical realization of the pascal—Characterization of two gas modulated refractometers	16
Temperature effects on gated silicon field emission array performance	16
Comparison of macroscopic and microscopic emission characteristics of large area field emitters based on carbon nanotubes and graphene	15
Extending the metal-induced gap state model of Schottky barriers	15
Inkjet-printed MoS2-based field-effect transistors with graphene and hexagonal boron nitride inks	15
Procedure for robust assessment of cavity deformation in Fabry–Pérot based refractometers	15
Determining the field enhancement factors of various field electron emitters with high numerical accuracy	14
Ultraviolet light stimulated water desorption effect on emission performance of gated field emitter array	14
Characterization of cathode-electrolyte interface in all-solid-state batteries using TOF-SIMS, XPS, and UPS/LEIPS	13
Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks	13
Incorporating photoemission into the theoretical unification of electron emission and space-charge limited current	13
Sol-gel synthesized indium tin oxide as a transparent conducting oxide with solution-processed black phosphorus for its integration into solar-cells	13
Optical emission intensity overshoot and electron heating mechanisms during the re-ignition of pulsed capacitively coupled Ar plasmas	12
Fast SARS-CoV-2 virus detection using disposable cartridge strips and a semiconductor-based biosensor platform	12
Synthesis of TiN/N-doped TiO2 composite films as visible light active photocatalyst	12
Neuromorphic computing: From devices to integrated circuits	11
Dry etching strategy of spin-transfer-torque magnetic random access memory: A review	11
Effect of oxygen vacancy gradient on ion-irradiated Ca-doped YMnO3 thin films	10
Molecular dynamics study of silicon atomic layer etching by chlorine gas and argon ions	10

Molecular dynamics simulation for reactive ion etching of Si and SiO2 by SF5+ ions	9
Temperature dependence of the optical phonon reflection band in GaP	9
PHIDL: Python-based layout and geometry creation for nanolithography	9
All field emission models are wrong, … but are any of them useful?	9
Hybrid approach to modeling large area field emitters	9
Aluminum metallization of III–V semiconductors for the study of proximity superconductivity	9
nanolithography toolbox—Simplifying the design complexity of microfluidic chips	8
Novel physics-based tool-prototype for electromigration assessment in commercial-grade power delivery networks	8
Atomic spectroscopy and laser frequency stabilization with scalable micrometer and sub-micrometer vapor cells	8
Stabilization of cold-field-emission current from a CeB6 single-crystal emitter by using a faceted (100) plane	8
Effect of low frequency voltage waveform on plasma uniformity in a dual-frequency capacitively coupled plasma	8
Intrinsic excitation-dependent room-temperature internal quantum efficiency of AlGaN nanowires with varying Al contents	8
Oxygen-free transport of samples in silane-doped inert gas atmospheres for surface analysis	8
Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below	8
Self-powered ultraviolet photodiode based on lateral polarity structure GaN films	8
Outgassing rate comparison of seven geometrically similar vacuum chambers of different materials and heat treatments	8
One-dimensional simulation of Couette–Poiseuille flow with variable cross section for the full range of gas rarefaction	8
Characterization of nanoscale vertical-channel charge-trap memory thin film transistors using oxide semiconducting active and trap layers	7
Deterministic and stochastic modeling of rarefied gas flows in fusion particle exhaust systems	7
Optimization of a continuous hot embossing process for fabrication of micropyramid structures in thermoplastic sheets	7
Silicon field emitters fabricated by dicing-saw and wet-chemical-etching	7
Long term field emission current stability characterization of planar field emitter devices	7
Computational study of plasma dynamics and reactive chemistry in a low-pressure inductively coupled CF4/O2 plasma	7
Advances in secondary ion mass spectrometry for N-doped niobium	7
Controlled removal of hydrogen atoms from H-terminated silicon surfaces	7
Information extraction from Murphy–Good plots of tungsten field electron emitters	7
Quantum and transport lifetimes in optically induced GaN/AlGaN 2DEGs grown on bulk GaN	7
Boron liquid metal alloy ion sources for special focused ion beam applications	7
Planar figure-8 coils for ultra-focal and directional micromagnetic brain stimulation	7
Firing voltage reduction in thermally annealed Ge–As–Te thin film with ovonic threshold switching	7
Effective polymerization technique for plasma-treated multiwalled carbon nanotubes to maximize wear resistance of composite polyurethane	7
Hollow cathode enhanced capacitively coupled plasmas in Ar/N2/H2 mixtures and implications for plasma enhanced ALD	7
Virtual metrology modeling of reactive ion etching based on statistics-based and dynamics-inspired spectral features	7
Study of a linear surface wave plasma source for tin removal in an extreme ultraviolet source	7
Postdeposition annealing effect on the reliability of atomic-layer-deposited Al2O3 films on GaN	6
Preparation of clean MgO surface by oxygen plasma: Comparison with standard substrate cleaning procedures	6
Design of a large nonevaporable getter pump for the full size ITER beam source prototype	6
Electroforming and threshold switching characteristics of NbOx films with crystalline NbO2 phase	6
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source	6
Transitions between field emission and vacuum breakdown in nanoscale gaps	6
Thermal sensing capability and current–voltage–temperature characteristics in Pt/n-GaP/Al/Ti Schottky diodes	6
Subradiant resonances in Au and Ag bipartite lattices in the visible spectrum	6
Improving detection of plasma etching end point using light compensation on optical emission spectra	6
Strain engineering in III-V photonic components through structuration of SiNx films	6
Dependence of growth temperature on the electrical properties and microstructure of MBE-grown AlN/GaN resonant tunneling diodes on sapphire	6
100 keV vacuum sealed field emission gun for high resolution electron microscopy	6
Carbonization of 3D printed polymer structures for CMOS-compatible electrochemical sensors	6
Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate	6
Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias	5
Electromigrated nanogaps: A review on the fabrications and applications	5

Electromigration simulation and design considerations for integrated circuit power grids	5
Pyroelectric lithium niobate electron emission-based ion-pump	5
On the chemistry mechanism for low-pressure chlorine process plasmas	5
Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3 with neutron irradiation and forming gas anneals	5
Atomic-resolution lithography with an on-chip scanning tunneling microscope	5
Electrical characterization of Si-doped conductive AlInN films grown nearly lattice-matched to c-plane GaN on sapphire by metalorganic chemical vapor deposition	5
Comparative study on the molecular beam epitaxial growth and characterization of AlGaN nanowire structures on AlN buffer layer and on Si	5
Lithium source for focused ion beam implantation and analysis	5
Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint	5
Cr and CrOx etching using SF6 and O2 plasma	5
Au-free low-temperature ohmic contacts for AlGaN/AlN/GaN heterostructures	5
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining	5
Rare earth doped CaWO4 and CaMoO4 thin films for white light emission	5
Advanced modeling of field enhanced thermionic emission	5
Design of a remote plasma-enhanced chemical vapor deposition system for growth of tin containing group-IV alloys	5
Combined ultraviolet- and electron-beam lithography with Micro-Resist-Technology GmbH ma-N1400 resist	5
Demonstration of a silicon gated field emitter array based low frequency Colpitts oscillator at 400 °C	5
Gate offset and emitter design effects of triode cold cathode electron beams on focal spot sizes for x-ray imaging techniques	5
Thermal sensitivity and current-voltage-temperature characteristics in Pt/epitaxy n-Si/n+Si structures as a function of Schottky contact area	5
Plasma atomic layer etching for titanium nitride at low temperatures	4
Scanning anode field emission microscopy of a single Si emitter	4
Effects of arsenic implantation and rapid thermal annealing on ZnO nanorods for p-type doping	4
Strain-dependent luminescence and piezoelectricity in monolayer transition metal dichalcogenides	4
Improve photo-to-dark current ratio of p-Si/SiO2/n-Ga2O3 heterojunction solar-blind photodetector by inserting SiO2 barrier layer	4
Device feasibility and performance improvement methodologies for thin film transistors using In-Ga-Sn-O channels prepared by atomic-layer deposition	4
Thickness dependence of infrared lattice absorption and excitonic absorption in ZnO layers on Si and SiO2 grown by atomic layer deposition	4
Adsorption behavior of cobalt phthalocyanine submonolayer coverages on B-Si(111)-3×3R30°	4
Maintaining atomically smooth GaAs surfaces after high-temperature processing for precise interdiffusion analysis and materials engineering	4
Effect of room air exposure on the field emission performance of UV light irradiated Si-gated field emitter arrays	4
Experimental considerations in electron beam transport on a nanophotonic chip using alternating phase focusing	4
Stress reduction and wafer bow accommodation for the fabrication of thin film lithium niobate on oxidized silicon	4
Organotrialkoxysilane-mediated controlled synthesis of noble metal nanoparticles and their impact on selective fluorescence enhancement and quenching	4
Systematic study of the outgassing behavior of different ceramic materials	4
Characterization and optimization of bonding and interconnect technology for 3D stacking thin dies	4
Gamma radiation on gallium nitride high electron mobility transistors at ON, OFF, and prestressed conditions	4
Digital biosensor for human cerebrospinal fluid detection with single-use sensing strips	4
Low trap density of oxygen-rich HfO2/GaN interface for GaN MIS-HEMT applications	4
Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application	4
Electronic structure of InSb (001), (110), and (111)B surfaces	4
AlGaN nanowire deep ultraviolet LEDs with polarization enhanced tunnel junction and p-AlGaN layer by molecular beam epitaxy	4
On the brightness, transverse emittance, and transverse coherence of field emission beam	4
Multiple electron beam generation from InGaN photocathode	4
Long-term brain-on-chip: Multielectrode array recordings in 3D neural cell cultures	4
Fabrication of high aspect ratio and tilted nanostructures using extreme ultraviolet and soft x-ray interference lithography	4
Photoassisted chemical smoothing of AlGaN surface after laser lift-off	4
Selective volatile organic compound gas sensor based on carbon nanotubes functionalized with ZnO nanoparticles	4
Reliability and resistance projections for rhodium and iridium interconnects from first-principles	4
Superhydrophobic SnO2 nanowire/graphene heterostructure-based ultraviolet detectors	4
Sb2Se3 solar cells fabricated via close-space sublimation	4
Design and fabrication of a micro-opto-mechanical-systems accelerometer based on intensity modulation of light fabricated by a modified deep-reactive-ion-etching process using silicon-on-insulator waf	4
Interferometric in-situ III/V semiconductor dry-etch depth-control with ±0.8 nm best accuracy using a quadruple-Vernier-scale measurement	4
Magnetron co-sputtered μm-thick Mo–Cu films as structural material with low heat extension for key parts of high-power millimeter-band vacuum microelectronic devices	4
Synthesis and detailed characterizations of Ag nanoparticles coated In2O3 nanostructured devices: An analytical and experimental approach	4
Rapid SARS-CoV-2 diagnosis using disposable strips and a metal-oxide-semiconductor field-effect transistor platform	4
Simple O-ring sealed Brewster-angle window for ultrahigh vacuum applications	4
Analysis of LiCoO2 electrodes through principal component analysis of current–voltage datacubes measured using atomic force microscopy	4
All field emission experiments are noisy, … are any meaningful?	4
Field emission arrays from graphite fabricated by laser micromachining	4
Ionization probability of sputtered indium atoms under impact of slow highly charged ions	4
Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy	4
Improved quantitation of SIMS depth profile measurements of niobium via sample holder design improvements and characterization of grain orientation effects	4
Reaching homogeneous field emission current from clusters of emitters with nonuniform heights	4
Deposition and morphology of direct current plasma-polymerized aniline	4
Close-packed silicon field emitter arrays with integrated anode fabricated by electron-beam lithography	4
Mechanically reliable hybrid organosilicate glasses for advanced interconnects	3
Enhancement of thermionic emission and conversion characteristics using polarization- and band-engineered n-type AlGaN/GaN cathodes	3
High current silicon nanowire field emitter arrays	3
Si nanocone structure fabricated by a relatively high-pressure hydrogen plasma in the range of 3.3–27 kPa	3
Atomic precision imaging with an on-chip scanning tunneling microscope integrated into a commercial ultrahigh vacuum STM system	3
Direct molecular quantification of electronic disorder in N,N′-Di-[(1-naphthyl)-N,N′-diphenyl]-1,1′-biphenyl)-4,4′-diamine on Au(111)	3
Stochastic defect removal coating for high-performance extreme ultraviolet lithography	3
Minimizing filling time for ultraviolet nanoimprint lithography with templates with multiple structures	3
Modeling the effect of stochastic heating and surface chemistry in a pure CF4 inductively coupled plasma	3
Resistive switching of two-dimensional Ag2S nanowire networks for neuromorphic applications	3
Evaluation of electron currents from cesium-coated tungsten emitter arrays with inclusion of space charge effects, workfunction changes, and screening	3
Plasma kinetics of c-C4F8 inductively coupled plasma revisited	3
Interpreting the field emission equation for large area field emitters	3
Gate engineering in metal insulator semiconductor capacitors on native gallium nitride substrates for applications with high lifetime requirements	3
Multiple connected artificial synapses based on electromigrated Au nanogaps	3
Designing MoS2 channel properties for analog memory in neuromorphic applications	3

Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research	3
Individual arc-discharge synthesized multiwalled carbon nanotubes probed with multiple measurement techniques	3
Tensile-strained self-assembly of InGaAs on InAs(111)A	3
High signal-to-noise ratio differential conductance spectroscopy	3
On modeling the induced charge in density-functional calculations for field emitters	3
Scaling in large area field emitters and the emission dimension	3
Comparison of the effective parameters of single-tip tungsten emitter using Fowler–Nordheim and Murphy–Good plots	3
Observation of light and secondary ion emissions from surfaces irradiated with highly charged ions	3
Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit	3
Advanced methodology for assessing chip package interaction effects on chip performance and reliability after chip assembly and during chip operation	3
Fabrication of three-dimensional opal nanolattices using template-directed colloidal assembly	3
Growth mode and characterizations of electrodeposited Re thick films from aqueous solutions with additives on Cu (110) + (311) substrates	3
Fabrication of high quality X-ray source by gated vertically aligned carbon nanotube field emitters	3
Novel technique to control the focal spot size using carbon nanotube based cold cathode electron beam (C-beam) architecture	3
Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr	3
Investigation of the electrical behavior of AlGaN/GaN high electron mobility transistors grown with underlying GaN:Mg layer	3
Plasma processing and annealing for defect management at SiO2/Si interface	3
Role of electron and ion irradiation in a reliable lift-off process with electron beam evaporation and a bilayer PMMA resist system	3
Selective lateral photoelectrochemical wet etching of InGaN nanorods	3
Surface polarity dependence of thermionic emission and conversion characteristics of n-type GaN cathodes	3
Proposal that interpretation of field emission current–voltage characteristics should be treated as a specialized form of electrical engineering	3
Miniature touch mode capacitance vacuum gauge with circular diaphragm	3
Overlay control solution for high aspect ratio etch process induced overlay error	3
Synthesis and up-conversion properties of Er3+ doped ZnTiO3-Zn2TiO4 composite phosphor	3
Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas	3
Folated curcumin-gold nanoformulations: A nanotherapeutic strategy for breast cancer therapy	3
Field emission scanning probe lithography with GaN nanowires on active cantilevers	3
Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing	3
Direct imprinting of TiO2 patterns on highly curved substrates	3
Fabrication of topological insulator nanostructures	3
Improvement of extra low impact energy SIMS data reduction algorithm for process control	3
Calibration of matrix-dependent biases in isotope and trace element analyses of carbonate minerals	3
Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxide	3
Real-time monitoring of photocatalytic methanol decomposition over Cu2O-loaded TiO2 nanotube arrays in high vacuum	3
Theoretical model for fast calculations of the electrical resistivity of thin metallic films with rough surfaces	3
Influence of primary electron incident angle and electron bombardment on the secondary electron yield of laser-treated copper	3
Solar-thermal cold-wall chemical vapor deposition reactor design and characterization for graphene synthesis	3
Ultrafast method for scanning tunneling spectroscopy	3
Lithographically patterned stretchable metallic microwiring on electrospun nanofiber mats	3
Processing of experimental current-voltage characteristics of single tip emitters taking into account the functional dependence of the emission area on the applied voltage	3
Modeling basic tip forms and its effective field emission parameters	3
ZnO piezoelectric coatings used for the ultrasonic excitation of longitudinal-transverse waves and their application for smart bolts	3
Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?	3
Dielectric breakdown in epitaxial BaTiO3 thin films	3
Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions	3
Particle-in-cell simulation of an industrial magnetron with electron population analysis	3
Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy	3
Electrical and ion beam analyses of yttrium and yttrium-titanium getter thin films oxidation	3
3D-electrode integrated microsieve structure as a rapid and cost-effective single neuron detector	3