Journal of Vacuum Science & Technology B

Article	Citations
Electron emission performance analysis and application of carbon nanotube cold cathode prepared by cold pressing process	25
Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing	23
Tungsten oxide nanowires prepared by thermal oxidation for application in cold cathode flat panel x-ray source	21
Selective metal-carbides hardmask strip with chlorine and oxygen plasma	18
Observing secondary-electron yield and charging in an insulating material by ultralow-voltage scanning electron microscope	17
Carbon impurities in oxide thin films: The effect of annealing and laser irradiation	17
Mechanism and solution of sharp defects in trench double-diffused metal-oxide semiconductor polysilicon recess etching	17
Auto-ponderomotive beam guiding up to 9.5 keV	16
Effects of graphene doping and gas adsorption on the peak positions of graphene plasmon resonance and adsorbate infrared absorption	15
Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents	15
MeV proton and neutron damage effects on deep-ultraviolet light-emitting diodes	14
Computational study of plasma dynamics and reactive chemistry in a low-pressure inductively coupled CF4/O2 plasma	12
Highly selective GaAs/AlGaAs dry etching using HBr/SF6/He	11
Characterization of GeO2 films formed on Ge substrate using high pressure oxidation	11
Accuracy requirements of the microarrayed Einzel lens	10
Topological impact of a simple self-replication geometric structure with great application potential in vacuum pumping and photovoltaic industry	10
Research on the improvement of the adhesion strength of the Cu films deposited on the Al2O3 films	9
Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness	9
Fabrication of black GaAs by maskless inductively coupled plasma etching in Cl2/BCl3/O2/Ar chemistry	9
Current–voltage characteristics of Ag/Nb:SrTiO3/Ag and Au/Nb:SrTiO3/Ag heterostructures	9
Multi-step plasma etching of high aspect ratio silicon nanostructures for metalens fabrication	9
Roughness-generation mechanism of Ru etching using Cl2/O2-based plasma for advanced interconnect	9
Numerical analysis of high vacuum packaging efficiency for narrow structured devices	9
Rubbing-induced site-selective deposition of 2D material patterns on nanomembranes	9
Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon	8

Optical metasurface fabricated using 3D nanoimprint lithography	8
Numerical investigation of flow and particles contamination in reticle mini environment for extreme ultraviolet lithography	8
Comparison of GeSn alloy films prepared by ion implantation and remote plasma-enhanced chemical vapor deposition methods	8
Engineering of ZrO2-based RRAM devices for low power in-memory computing	8
Photoassisted electron emission from planar-type electron source based on graphene/oxide/silicon structure	8
Graphene-based capacitive monolithic microphone with optimized air gap thickness and damping	8
Cryogenic etching of positively tapered silicon pillars with controllable profiles	8
Nanofabrication of high transition temperature superconductive electronics with focused helium ion irradiation	8
Optical and electronic properties of Ge1−xSnx/Si alloys grown by remote plasma-enhanced chemical vapor deposition	8
Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions	8
Numerical simulations of heterojunction GaN nanopillar light emitting diodes	7
In situ determination of sputtered Ni–Cu film composition from emission intensities	7
Plasma-assisted thermal-cyclic atomic-layer etching of tungsten and control of its selectivity to titanium nitride	7
Temperature dependence of the infrared dielectric function and the direct bandgap of InSb from 80 to 725 K	7
Stacked hydrogel-based brain-on-chips utilizing capillary force flow pinning	7
Comparative studies of metamorphic and strained InGaAs p-type semiconductor - intrinsic absorption layer - n-type semiconductor photodetector for low-temperature CH4 detection	7
Field emission arrays from graphite fabricated by laser micromachining	7
ZnO/Ag/graphene transparent conductive oxide film with ultrathin Ag layer	7
X-ray photoelectron spectroscopy surface oxidation study of remote plasma-enhanced chemical vapor deposition-grown Ge1−xSnx/Si alloys	7
Experimental study of flake graphite large-area explosion electron emission cathode performance based on particle size discrepancy	7
Chemical and electrical modifications of few-layer graphene films via sub-10 keV electron beam irradiation	7
Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas	7
GaAs/GeSn/Ge n–i–p diodes and light emitting diodes formed via grafting	7
High quality factor silicon nitride nanomechanical resonators fabricated by maskless femtosecond laser micromachining	6
Trilayer process for T-gate and Γ-gate lithography using ternary developer and proximity effect correction superposition	6
Vacuum technique of nanodiamond dispersing on a substrate from an aqueous suspension	6
In situ metrology of direct-write laser ablation using optical emission spectroscopy	6
Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit	6
Impact of photovoltaic effect on performance enhancement of triboelectric nanogenerator for energy harvesting applications	6
Comment on “Restoration of the original depth distribution from the SIMS profile using the depth resolution function in framework of RMR model” [J. Vac. Sci. Technol. B 41, 024003 (2023)]	6
Fabrication of pyramid-shaped gold tip for adiabatic nanofocusing of surface plasmon polaritons	6
Thickness dependent field emission study of LaB6 coated Si nanowire arrays	6
Strain-tuned optical properties of bilayer silicon at midinfrared wavelengths	6
Erratum: “Electronic structure of InSb (001), (110), and (111)B surfaces” [J. Vac. Sci. Technol. B 41, 032808 (2023)]	6
Influence of thermal contact resistance on the field emission characteristics of a carbon nanotube	6
Behavior of the field enhancement due to mutual depolarization on a pair of triangular emitters at short and large separations	6
Top electrode dependence of the write-once-read-many-times resistance switching in BiFeO3 films	6
Physical vapor deposition simulator by graphical processor unit ray casting	6
Fluorescence alignment simulation for atomic-scale position adjustment in ultraviolet nanoimprint lithography	6
Exploring electromechanical utility of GaAs interdigitated transducers; using finite-element-method-based parametric analysis and experimental comparison	5
Modification of discharge sequences to control the random dispersion of flake particles during wafer etching	5
Electron transport in macroscopic borosilicate capillaries with bending angles of 90° and 360°	5
Rapid detection of radiation susceptible regions in electronics	5
Atomic-resolution lithography with an on-chip scanning tunneling microscope	5
Comparison of temperature, current density, and light intensity distributions of nano-resistor patterns for an improved solid state incandescent light emitting device simulation model	5
Degradation of GaN field emitter arrays induced by O2 exposure	5
Si-capping-induced surface roughening on the strip structures of Ge selectively grown on an Si substrate	5
Morphology of Ge thin films crystallized by Au-induced layer exchange at low temperature (220 °C)	5
Field electron emission and field ion microscope images of layered material MoS2	5
Response to “Comment on ‘Restoration of the original depth distribution from the SIMS profile using the depth resolution function in framework of RMR model’” [J. Vac. Sci. Technol. B 41, 024003 (20	5

Impact of electrical aging on x-ray image quality and dose rate with vertically aligned carbon nanotube based cold cathode electron beam (C-beam)	5
Vacuum system of the Space Plasma Environment Research Facility	5
Ion-beam-assisted growth of cesium-antimonide photocathodes	5
Nonevaporable getter-MEMS for generating UHV conditions in small volumina	5
Time response measurement of pulsed electron beam from InGaN photocathode	5
Low-macroscopic field emission structure: Using the shape of the conductor to identify a local difference in electric potential	5
Evolution of lithography-to-etch bias in multi-patterning processes	5
Experimental research on airflow efficiency of dynamic gas lock for extreme ultraviolet lithography	5
High-temperature characteristics of GaN/InGaN multiple-quantum-well UV photodetectors fabricated on sapphire substrate: Analysis of photovoltaic and carrier transit time properties	5
E-mode AlGaN/GaN HEMTs using p-NiO gates	5
In situ electron-beam-induced mechanical loading and fracture of suspended strained silicon nanowires	5
Effect of the kinetic energy on particle ejection process from carbon nanotubes bombarded by kilo-electron-volt C60	5
Sensitivity of thermal conductivity vacuum gauges for constant current and constant temperature operation	5
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source	5
A novel design of a retarding field electron energy analyzer with a cavity electrode providing extremely high energy resolution	5
Comparing the properties and growth of graphene on electrolytic and rolled Cu foils by chemical vapor deposition	5
Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light	5
Simplified CVD route to near-zero thickness silicon nitride films	5
Fabrication of microstructures on curved hydrogel substrates	5
Near zero-field magnetoresistance and defects in gallium nitride pn junctions	4
Thermal analysis with high accuracy of multi-beam mask fabrication	4
Infrared optical properties of SiGeSn and GeSn layers grown by molecular beam epitaxy	4
Compositional dependence of direct transition energies in SixGe1−x−ySny alloys lattice-matched to Ge/GaAs	4
Diffusive separation in rarefied plume interaction	4
Nanometer-scale capillary-driven flow and molecular weight govern polymer nanostructure deposition from a heated tip	4
Strain engineering in III-V photonic components through structuration of SiNx films	4
Atomic layer deposition of YSZ electrolytes for solid-state battery development: Beyond lithium	4
Integrated interferometry for in-process monitoring of critical dimension in vertical NAND flash memory dry etch	4
Seesaw-type modulation of secondary electron emission characteristics of polytetrafluoroethylene-MgO composite coating	4
Using block-copolymer nanolithography as a tool to sensitively evaluate variation in chemical dry etching rates of semiconductor materials with sub-5 nm resolution	4
Comparative research on the secondary electron yields and photon-stimulated desorption of Ti and Pd/Ti bilayer thin films	4
Determining the oxygen detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)	4
Exploring oxide-nitride-oxide scalloping behavior with small gap structure and chemical analysis after fluorocarbon or hydrofluorocarbon plasma processing	4
Retraction: “Dependence of structural and optical properties of In0.23Ga0.77As/GaAs quantum wells on misfit dislocations: Different critical thickness for dislocation generation and degradation of opt	4
Dynamic switching operation of diamond MOSFETs with NO2 p-type doping and Al2O3 gate insulation and passivation	4
Electrochemically fabricated ultrafine nickel masks for the fabrication of MoS2-based devices	4
Thermally stable radio frequency power and noise behaviors of AlGaN/GaN high electron mobility transistor without voltage-blocking buffer layer design	4
Noise reduction and peak detection in x-ray diffraction data by linear and nonlinear methods	4
Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors	4
Controlled preparation of tungsten diselenide thin films via chemical vapor deposition	4
Tapered quantum cascade lasers with isolated channel emitting at 9 μm	4
Synthesis of silver-decorated titanium dioxide nanostructured films for enhanced visible light photocatalysis	4
Physical vapor deposition of Yb-doped Cs2AgSbBr6 films	4
Synthesis of NiS2 nanomaterial as wide range pressure sensor	4
Temperature dependence of the optical phonon reflection band in GaP	4
Scanning electron microscope imaging by selective e-beaming using photoelectron beams from semiconductor photocathodes	4
Heating samples to 2000 °C and above for scanning tunneling microscopy studies in ultrahigh vacuum	4
Heat-transfer modeling of the gas gap under a wafer	4
Thin films residual stress profile evaluation using test microstructures: Illustrated on an example of AlN film	4
Fundamental study on the selective etching of SiGe and Si in ClF3 gas for nanosheet gate-all-around transistor manufacturing: A first principle study	4
Fabrication of silicon W and G center embedded light-emitting diodes for electroluminescence	4
Surface wetting on micromilled and laser-etched aluminum with ion-beam postprocessing	4
Thank you to our 2024 reviewers!	4
Organotrialkoxysilane-mediated synthesis of Ni–Pd nanocatalysts at lower concentrations of noble metal: Catalysts for faster hydrogen evolution kinetics	4
Strong-field electron emission from gold needle tips	4
Oxygen-free transport of samples in silane-doped inert gas atmospheres for surface analysis	4
Gradient-composition upper-waveguide and electron-blocking layers for enhanced performance in near-ultraviolet laser diodes	4
Comparative study of thermal desorption and pumping performance for TiZrV-, Pd-, or Pd/TiZrV-coated copper tubes	4
Rapid preparation of amorphous Al2O3 on graphene surface by plasma electrolysis technology	4
Does the blue luminescence of Eu-doped β-NaYF4 originate from Eu2+ ions?	4
Multiple electron beam generation from InGaN photocathode	4
Enzymatic degradation of cellulosic fabrics modified with atomic layer deposited aluminum oxide thin films	4
Focusing electrode effect on the EUV lighting technology based on C-beam irradiation technique	4
Multipurpose active scanning probe cantilevers for near-field spectroscopy, scanning tunnel imaging, and atomic-resolution lithography	3
Fabrication of ultrathin suspended membranes from atomic layer deposition films	3
Optimization of silicon etch rate in a CF4/Ar/O2 inductively coupled plasma	3
Hybrid cross correlation and line-scan alignment strategy for CMOS chips electron-beam lithography processing	3
Preface for the Special Topic Collection Honoring Dr. Gary McGuire’s Research and Leadership as Editor of the Journal of Vacuum Science & Technology for Three Decades	3
Optoelectronic performance characterization of MoS2 photodetectors for low frequency sensing applications	3
High current field emission from Si nanowires on pillar structures	3
Postdeposition annealing effect on atomic-layer-deposited Al2O3 gate insulator on (001) β-Ga2O3	3
Evaluation of dry stored disposable sensor strip on rapid SARS-CoV-2 detection platform	3
On the charge density and potential near the surface of a field emitter	3
Design, modeling, and fabrication of high frequency Oersted lines for electron spin manipulation in silicon based quantum devices	3
Monitoring of rapid thermal anneal with secondary ion mass spectrometry	3
Novel excitation structure to improve the performance of a miniature radio frequency ion thruster	3
Role of tin clustering in band structure and thermodynamic stability of GeSn by atomistic modeling	3
Coaxial ion source: Pressure dependence of gas flow and field ion emission	3
Low power silicon evaporation source—Construction, performances, and applications	3
Acquisition of field ion microscope image using deflector during atom probe analysis	3

Effects of H+ ion bombardment on GaAs photocathode surface with Cs-O and Cs-F activation layers	3
Measurements of He-Ar, He-N2, and He-air thermal creep slip and accommodation coefficients at high temperatures	3
Analytic study of exposure contrast over feature edge in electron-beam lithography	3
Investigating the pattern transfer fidelity of Norland Optical Adhesive 81 for nanogrooves by microtransfer molding	3
Endoscope-assisted manipulator for precooling and deposition in low-temperature scanning tunneling microscope systems	3
Leakage rate detection of ConFlat seals in aluminum and stainless steel flanges under mechanical loads for quantum optical experiments in space	3
Modeling and algorithm of three-dimensional metrology with critical dimension scanning electron microscope	3
Rapid SARS-CoV-2 diagnosis using disposable strips and a metal-oxide-semiconductor field-effect transistor platform	3
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications	3
Microstructure, creep properties, and electrical resistivity of magnetron sputtering deposited SAC305 thin films	3
Hardmask engineering by mask encapsulation for enabling next generation reactive ion etch scaling	3
Investigating pathways for deep-UV photolithography of large-area nanopost-based metasurfaces with high feature-size contrast	3
Development of GeSn epitaxial films with strong direct bandgap luminescence in the mid-wave infrared region using a commercial chemical vapor deposition reactor	3
Gate offset and emitter design effects of triode cold cathode electron beams on focal spot sizes for x-ray imaging techniques	3
In situ mass spectrometric investigation to probe GeSn growth dynamics and mechanisms in the chemical vapor deposition processes	3
Morphologic and electronic changes induced by thermally supported hydrogen cleaning of GaAs(110) facets	3
Effect of ultraviolet light on field emission performance and lifetime of lateral field emitter devices	3
Multiple material stack grayscale patterning using electron-beam lithography and a single plasma etching step	3
Understanding 3D anisotropic reactive ion etching of oxide-metal stacks	3
Self-aligned fabrication of vertical, fin-based structures	3
Simulation analyses of carrier dynamics in npn-type GaN-heterojunction bipolar transistors with different hole-concentration p-base layers	3
Physics based model of an AlGaN/GaN vacuum field effect transistor	3
Overlay control solution for high aspect ratio etch process induced overlay error	3
Thermal-field emission from cones and wires	3
Electron emission properties of titanium nitride coated volcano-structured silicon emitters	3
Photoinduced carrier transport mechanism in pn- and nn-GaN/GaON heterojunctions	3
Defect formation in InGaAs/AlSb/InAs memory devices	3
Diagnostics of target-cavity confined plasmas produced by nanosecond pulsed laser ablation of graphite	3
Selectively patterned Mg-doped GaN by SiNx-driven hydrogen injection	3
Bilayer metal etch mask strategy for deep diamond etching	3
Effect of inductively coupled plasma etch on the interface barrier behavior of (001) β-Ga2O3 Schottky barrier diode	3
Ordered silicon nanocone fabrication by using pseudo-Bosch process and maskless etching	3
Investigation into the effect of a PECVD-deposited SiOx chamber coating on the selective, radical-based NF3 etching of TaN with respect to BEOL low-k	3
Wet and dry etching of ultrawide bandgap LiGa5O8 and LiGaO2	3
Radiation damage in GaN/AlGaN and SiC electronic and photonic devices	3
Roll-to-roll reactive ion etching of large-area nanostructure arrays in Si: Process development, characterization, and optimization	3
Secondary ion mass spectrometry quantification: Do you remember when a factor of 2 was good enough?	3
Grain growth of Cu wires during Joule heat welding	3
Reduction of exposing time in massively-parallel E-beam systems	3